Standard Test Method for Hermeticity of Hybrid Microcircuit Packages Prior to Lidding (Withdrawn 2009)

SIGNIFICANCE AND USE
Hermeticity test methods, for example, Test Methods F 134, deal with sealed packages only and do not apply directly to unsealed packages. This test method is most applicable for determining the hermeticity of a package before it has been sealed with a lid or a cover. Packages that are intended for hermetic seal use are manufactured so as to prevent leakage of helium at a rate in excess of 1 × 10 −8 atm cc/s under a pressure differential of 1 atm when tested on a helium mass spectrometer leak detector. This test should be conducted in a clean work area such as would be provided by a laminar flow clean bench as specified in Fed. Std. No. 209. This test method is not recommended for use in commerce until the precision has been determined.
Acceptance and rejection criteria for this test method shall be agreed upon by the purchaser and the supplier as part of the purchase contract.
Note 1—Packages that are not capable of meeting a maximum leak rate of 1 × 10 −8 atm cc/s of helium at a pressure differential of 1 atm are customarily rejected on the basis that good quality assurance is achieved with this performance level.
SCOPE
1.1 The hermetic integrity of hybrid microcircuit packages is an important material or parts acceptance requirement. Determination of this parameter should be made before the hybrid circuit is assembled and sealed inside the package.  
1.2 This test method covers a test for leaks in a package that is intended to be hermetically sealed after hybrid circuit assembly. Various types of hybrid packages may be tested by this test method. The test method is nondestructive and therefore suitable for 100% inspection.  
1.3 This standard may involve hazardous materials, operations, and equipment. This standard does not purport to address all of the safety problems associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
WITHDRAWN RATIONALE
The hermetic integrity of hybrid microcircuit packages is an important material or parts acceptance requirement. Determination of this parameter should be made before the hybrid circuit is assembled and sealed inside the package.
Formerly under the jurisdiction of Committee F01 on Electronics and Subcommittee F01.03 on Metallic Materials, this test method was withdrawn in May 2009 with no replacement because the committee is not aware of the need to maintain the standard. Reference to the standard will remain available, but at this time, the committee does not wish to actively maintain the standard.

General Information

Status
Withdrawn
Publication Date
09-May-1998
Withdrawal Date
30-Apr-2009
Current Stage
Ref Project

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ASTM F979-86(2003) - Standard Test Method for Hermeticity of Hybrid Microcircuit Packages Prior to Lidding (Withdrawn 2009)
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:F 979 – 86(Reapproved2003)
Standard Test Method for
Hermeticity of Hybrid Microcircuit Packages Prior to
1
Lidding
This standard is issued under the fixed designation F 979; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope mass spectrometer is sensitive, is flooded over the outside of
the package. Indication of a leak is detected by suitable
1.1 The hermetic integrity of hybrid microcircuit packages
instrumentation on the mass spectrometer.
is an important material or parts acceptance requirement.
Determination of this parameter should be made before the
4. Significance and Use
hybrid circuit is assembled and sealed inside the package.
4.1 Hermeticity test methods, for example, Test Methods
1.2 Thistestmethodcoversatestforleaksinapackagethat
F134,dealwithsealedpackagesonlyanddonotapplydirectly
is intended to be hermetically sealed after hybrid circuit
to unsealed packages. This test method is most applicable for
assembly. Various types of hybrid packages may be tested by
determining the hermeticity of a package before it has been
this test method. The test method is nondestructive and
sealed with a lid or a cover. Packages that are intended for
therefore suitable for 100% inspection.
hermetic seal use are manufactured so as to prevent leakage of
1.3 This standard does not purport to address the safety
−8
helium at a rate in excess of 1 310 atm cc/s under a
concerns, if any, associated with its use. It is the responsibility
pressure differential of 1 atm when tested on a helium mass
of the user of this standard to establish appropriate safety and
spectrometer leak detector. This test should be conducted in a
health practices and determine the applicability of regulatory
clean work area such as would be provided by a laminar flow
limitations prior to use.
cleanbenchasspecifiedinFed.Std.No.209.Thistestmethod
2. Referenced Documents is not recommended for use in commerce until the precision
2
has been determined.
2.1 ASTM Standards:
4.2 Acceptance and rejection criteria for this test method
F78 TestMethodforCalibrationofHeliumLeakDetectors
shall be agreed upon by the purchaser and the supplier as part
by Use of Secondary Standards
of the purchase contract.
F 134 Test Methods for Determining Hermeticity of Elec-
tron Devices with a Helium Mass Spectrometer Leak
NOTE 1—Packages that are not capable of meeting a maximum leak
3
−8
Detector rate of 1 310 atm cc/s of helium at a pressure differential of 1 atm are
customarily rejected on the basis that good quality assurance is achieved
2.2 Federal Standard:
with this performance level.
Fed. Std. No. 209 Clean Room and Work Station Require-
4
ments, Controlled Environment
5. Apparatus
3. Summary of Method 5.1 Fixtures and Fittings, suitable for vacuum apparatus
applications that will properly fit to the input plumbing on the
3.1 Thespecimenpackageisplacedonanelastomersurface
massspectrometerandholdthepackagestyleofinterestonthe
with the inside cavity of the package facing an orifice in the
seal gasket (see Fig. 1).
elastomer. This orifice is an opening to the vacuum section of
5.2 SurgicalRubberGasket,orequivalentthathasasurface
a mass spectrometer leak detector. Helium gas, to which the
dimension matching that of the seal ring on the package
specimen.
1
5
This test method is under the jurisdiction of ASTM Committee F01 on
5.3 Vacuum Grease.
Electronics and is the direct responsibility of Subcommittee F01.03 on Metallic
5.4 Helium Mass Spectrometer Leak Detector,withadetec-
Materials.
tion sensitivity of one part of helium in ten million parts of air
Current edition approved March 27, 1986. Published June 1986.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
5
Standards volume information, refer to the standard’s Document Summary page on The sole source of supply of vacuum grease,Apiezon Type M or N known to
the ASTM website. the committee at this time is Miconite Ltd., P. O. Box 136 Manchester, M601AN,
3
Discontinued; see l996 Annual Book of ASTM Standards, Vol 10.04. England, U.K. If you are aware of alternative supppliers, please provide this
4
AvailablefromStandardizationDocumentsOrderDesk,Bldg.4SectionD,700 information toASTM Headquarters. Your comments will receive careful consider-
1
Robbins Ave., Philadelphia, PA 19111-5094, Attn: NPODS. ation at a meeting of the responsible technical committee, which you may attend.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
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