ASTM E1504-11

Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)

SIGNIFICANCE AND USE
This practice is intended for use in reporting the experimental and data reduction procedures described in other publications.
SCOPE
1.1 This practice provides the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting secondary ion mass spectrometry (SIMS) mass spectral data.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 31-Oct-2011
• ICS: 71.040.50 - Physicochemical methods of analysis
• Technical Committee: E42 - Surface Analysis
• Drafting Committee: E42.06 - SIMS

Relations

• Replaces: ASTM E1504-06 - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
• Effective Date: 01-Nov-2011
• Replaced By: ASTM E1504-11(2019) - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
• Effective Date: 01-Nov-2019
• Referred By: ASTM E1635-06(2019) - Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)
• Effective Date: 01-Nov-2011
• Referred By: ASTM F2847-17 - Standard Practice for Reporting and Assessment of Residues on Single-Use Implants and Single-Use Sterile Instruments
• Effective Date: 01-Nov-2011

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E1504 − 11
Standard Practice for
Reporting Mass Spectral Data in Secondary Ion Mass
1
Spectrometry (SIMS)
This standard is issued under the fixed designation E1504; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 6. Information to be Reported
1.1 This practice provides the minimum information neces-
6.1 Instrumentation:
sary to describe the instrumental, experimental, and data
6.1.1 If a standard commercial SIMS instrument is used,
reduction procedures used in acquiring and reporting second-
specify the manufacturer, model number, and type of analyzer
ary ion mass spectrometry (SIMS) mass spectral data.
used. Specify the manufacturer and model number of any
1.2 The values stated in SI units are to be regarded as
accessory or auxiliary equipment that would affect the data
standard. No other units of measurement are included in this contained within the mass spectrum (for example, additional
standard.
vacuum pumping attachments, primary ion mass filter, primary
ion sources, electron flood guns, etc.). If any nonstandard
1.3 This standard does not purport to address all of the
modification has been made to the instrumentation, describe
safety concerns, if any, associated with its use. It is the
the modification in detail.
responsibility of the user of this standard to establish appro-
6.1.2 If a noncommercial SIMS system is used, specify the
priate safety and health practices and determine the applica-
bility of regulatory limitations prior to use. components composing the system (for example, ion gun,
pumping system, vacuum chamber, and mass filter). Specify
2. Referenced Documents
the manufacturer and model number if the components are of
2
2.1 ASTM Standards:
commercial origin. If the components are home-built, specify
E673 Terminology Relating to SurfaceAnalysis (Withdrawn
them in such detail that their potential effect on the obtained
3
2012)
mass spectrum may be deduced by an individual experienced
in SIMS and vacuum technology.
3. Terminology
6.2 Specimen—Describe the specimen in as much detail as
3.1 Definitions—For definitions of terms used in this
possible. Such factors would include, but are not limited to,
practice, refer to Terminology E673.
sample preparation and handling, sample history, bulk and
4. Summary of Practice
trace composition, physical dimensions, sample homogeneity,
4.1 Experimental conditions and reporting procedures that crystallinity, and any preanalysis cleaning procedure used.
affect SIMS mass spectral data are presented in order to Describe in detail the method of sample mounting. Describe
standardize the reporting of such data to facilitate comparisons any conductive coating or grids placed on the sample for
with other laboratories and analytical techniques. charge compensation. If a substrate is used, include substrate
composition, purity, and any methods of cleaning.
5. Significance and Use
6.3 Experimental Conditions:
5.1 This practice is intended for use in reporting the
6.3.1 Primary Ion Source and Ion Optical Column—If a
experimental and data reduction procedures described in other
commercial ion source is being used, then the manufacturer
publications.
and model number should be specified. If the ion source is a
1 custom design, then it should be described in detail and
This practice is under the jurisdiction of ASTM Committee E42 on Surface
Analysis and is the direct responsibility of Subcommittee E42.06 on SIMS.
appropriate literature references given, if applicable. The
Current edition approved Nov. 1, 2011. Published November 2011. Originally
species extracted from the ion source must be specified. If the
approved in 1992. Last previous edition approved in 2006 as E1504 – 06. DOI:
primary ion column provides mass filtering, then the selected
10.1520/E1504-11.
2
mass-filtered species must be specified. If there is no mass-
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
filtering, then the purity of the material used for ion production
Standards volume information, refer to the standard’s Document Summary page on
must be specified. State the ion energy and the impact energy
the ASTM website.
3 of the primary beam. State the angle of incidence of the
The last approved version of this historical standard is referenced on
www.astm.org. primary ion beam with respect to the surface normal of the
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
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This document is not an ASTM standard and is intended only to provide the user of an ASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation:E1504–06 Designation: E1504 – 11
Standard Practice for
Reporting Mass Spectral Data in Secondary Ion Mass
1
Spectrometry (SIMS)
This standard is issued under the fixed designation E1504; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1 This practice provides the minimum information necessary to describe the instrumental, experimental, and data reduction
procedures used in acquiring and reporting secondary ion mass spectrometry (SIMS) mass spectral data.
1.2
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
2
2.1 ASTM Standards:
E673 Terminology Relating to Surface Analysis
3. Terminology
3.1 Definitions—For definitions of terms used in this practice, refer to Terminology E673.
4. Summary of Practice
4.1 Experimental conditions and reporting procedures that affect SIMS mass spectral data are presented in order to standardize
the reporting of such data to facilitate comparisons with other laboratories and analytical techniques.
5. Significance and Use
5.1 This practice is intended for use in reporting the experimental and data reduction procedures described in other publications.
6. Information to be Reported
6.1 Instrumentation:
6.1.1 If a standard commercial SIMS instrument is used, specify the manufacturer, model number, and type of analyzer used.
Specify the manufacturer and model number of any accessory or auxiliary equipment that would affect the data contained within
the mass spectrum (for example, additional vacuum pumping attachments, primary ion mass filter, primary ion sources, electron
flood guns, etc.). If any nonstandard modification has been made to the instrumentation, describe the modification in detail.
6.1.2 If a noncommercial SIMS system is used, specify the components composing the system (for example, ion gun, pumping
system, vacuum chamber, and mass filter). Specify the manufacturer and model number if the components are of commercial
origin. If the components are home-built, specify them in such detail that their potential effect on the obtained mass spectrum may
be deduced by an individual experienced in SIMS and vacuum technology.
6.2 Specimen—Describe the specimen in as much detail as possible. Such factors would include, but are not limited to, sample
preparation and handling, sample history, bulk and trace composition, physical dimensions, sample homogeneity, crystallinity, and
any preanalysis cleaning procedure used. Describe in detail the method of sample mounting. Describe any conductive coating or
grids placed on the sample for charge compensation. If a substrate is used, include substrate composition, purity, and any methods
of cleaning.
6.3 Experimental Conditions:
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface Analysis and is the direct responsibility of Subcommittee E42.06 on SIMS.
Current edition approved Nov. 1, 2006.2011. Published November 2006.2011. Originally approved in 1992. Last previous edition approved in 20012006 as
E1504–92(2001).E1504 – 06. DOI: 10.1520/E1504-06. 10.1520/E1504-11.
2
For referencedASTM standards, visit theASTM website, www.astm.org, or contactASTM Customer Service at [e-mail]. For Annual Book of ASTM Standards
volume information, refer to the standard’s Document Summary page on the ASTM website.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1

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E1504 – 11
6.3.1 Primary Ion Source and Ion Optical Column—If a commercial ion source is being used, then the manufacturer and model
number should be specified. If the ion source is a custom design, then it should be described in detail and appropriate literature
references given, if applicable. The species extracted from the ion source must be specified. If the Primary Ion Columnprimary
ion column provides mass filtering, then the selected mass-filtered species must be
...