ASTM F50-07
(Practice)Standard Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Controlled Areas and Clean Rooms Using Instruments Capable of Detecting Single Sub-Micrometre and Larger Particles
Standard Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Controlled Areas and Clean Rooms Using Instruments Capable of Detecting Single Sub-Micrometre and Larger Particles
SCOPE
1.1 This practice covers the determination of the particle concentration, by number, and the size distribution of airborne particles in dust-controlled areas and clean rooms, for particles in the size range of approximately 0.01 to 5.0 m. Particle concentrations not exceeding 3.5 106 particles/m3 (100 000/ft 3) are covered for all particles equal to and larger than the minimum size measured.
1.2 This practice uses an airborne single particle counting device (SPC) whose operation is based on measuring the signal produced by an individual particle passing through the sensing zone. The signal must be directly or indirectly related to particle size. Note 1The SPC type is not specified here. The SPC can be a conventional optical particle counter (OPC), an aerodynamic particle sizer, a condensation nucleus counter (CNC) operating in conjunction with a diffusion battery or differential mobility analyzer, or any other device capable of counting and sizing single particles in the size range of concern and of sampling in a cleanroom environment.
1.3 Individuals performing tests in accordance with this practice shall be trained in use of the SPC and shall understand its operation.
1.4 Since the concentration and the particle size distribution of airborne particles are subject to continuous variations, the choice of sampling probe configuration, locations and sampling times will affect sampling results. Further, the differences in the physical measurement, electronic and sample handling systems between the various SPCs and the differences in physical properties of the various particles being measured can contribute to variations in the test results. These differences should be recognized and minimized by using a standard method of primary calibration and by minimizing variability of sample acquisition procedures.
1.5 Sample acquisition procedures and equipment may be selected for specific applications based on varying cleanroom class levels. Firm requirements for these selections are beyond the scope of this practice; however, sampling practices shall be stated that take into account potential spatial and statistical variations of suspended particles in clean rooms. General references to cleanroom classifications follow Federal Standard 209E, latest revision. Where airborne particles are to be characterized in dust-controlled areas that do not meet these classifications, the latest revision of the pertinent specification for these areas shall be used.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazards statements, see Section 8.
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Designation: F50 – 07
Standard Practice for
Continuous Sizing and Counting of Airborne Particles in
Dust-Controlled Areas and Clean Rooms Using Instruments
Capable of Detecting Single Sub-Micrometre and Larger
1
Particles
This standard is issued under the fixed designation F50; the number immediately following the designation indicates the year of original
adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.Asuperscript
epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 1.5 Sample acquisition procedures and equipment may be
selected for specific applications based on varying cleanroom
1.1 This practice covers the determination of the particle
class levels. Firm requirements for these selections are beyond
concentration, by number, and the size distribution of airborne
the scope of this practice; however, sampling practices shall be
particles in dust-controlled areas and clean rooms, for particles
stated that take into account potential spatial and statistical
in the size range of approximately 0.01 to 5.0 µm. Particle
6 3
variations of suspended particles in clean rooms.
concentrations not exceeding 3.5 3 10 particles/m (100 000/
3
ft ) are covered for all particles equal to and larger than the
NOTE 2—General references to cleanroom classifications follow Fed-
minimum size measured.
eral Standard 209E, latest revision. Where airborne particles are to be
characterized in dust-controlled areas that do not meet these classifica-
1.2 This practice uses an airborne single particle counting
tions, the latest revision of the pertinent specification for these areas shall
device(SPC)whoseoperationisbasedonmeasuringthesignal
be used.
produced by an individual particle passing through the sensing
zone. The signal must be directly or indirectly related to 1.6 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the
particle size.
responsibility of the user of this standard to establish appro-
NOTE 1—The SPC type is not specified here. The SPC can be a
priate safety and health practices and determine the applica-
conventional optical particle counter (OPC), an aerodynamic particle
bility of regulatory limitations prior to use.Forspecifichazards
sizer,acondensationnucleuscounter(CNC)operatinginconjunctionwith
statements, see Section 8.
a diffusion battery or differential mobility analyzer, or any other device
capable of counting and sizing single particles in the size range of concern
2. Referenced Documents
and of sampling in a cleanroom environment.
2
2.1 ASTM Standards:
1.3 Individuals performing tests in accordance with this
D1356 Terminology Relating to Sampling and Analysis of
practice shall be trained in use of the SPC and shall understand
Atmospheres
its operation.
F328 Practice for Calibration of an Airborne Particle
1.4 Since the concentration and the particle size distribution
3
Counter Using Monodisperse Spherical Particles
of airborne particles are subject to continuous variations, the
F649 Practice for Secondary Calibration of Airborne Par-
choice of sampling probe configuration, locations and sam-
3
ticle Counter Using Comparison Procedures
pling times will affect sampling results. Further, the differences
F658 Practice for Calibration of a Liquid-Borne Particle
in the physical measurement, electronic and sample handling
Counter Using an Optical System Based Upon Light
systems between the various SPCs and the differences in
3
Extinction
physical properties of the various particles being measured can
2.2 U.S. Federal Standard:
contribute to variations in the test results. These differences
should be recognized and minimized by using a standard
method of primary calibration and by minimizing variability of
sample acquisition procedures.
1 2
This practice is under the jurisdiction of ASTM Committee E21 on Space For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Simulation andApplications of Space Technology and is the direct responsibility of contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Subcommittee E21.05 on Contamination. Standards volume information, refer to the standard’s Document Summary page on
Current edition approved Nov. 1, 2007. Published November 2007. Originally the ASTM website.
´1 3
approved in 1965. Last previous edition approved in 2001 as F50 – 92 (2001) Withdrawn. The last approved version of this historical standard is referenced
DOI: 10.1520/F0050-07. on www.astm.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
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NOTICE: This standard has either been superseded and replaced by a new ve
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This document is not anASTM standard and is intended only to provide the user of anASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
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Designation:F50–92(Reapproved 2001) Designation: F 50 – 07
Standard Practice for
Continuous Sizing and Counting of Airborne Particles in
Dust-Controlled Areas and Clean Rooms Using Instruments
Capable of Detecting Single Sub-Micrometre and Larger
1
Particles
ThisstandardisissuedunderthefixeddesignationF 50;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginal
adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.Asuperscript
epsilon (e) indicates an editorial change since the last revision or reapproval.
1
e NOTE—Keywords were added editorially in July 2001.
1. Scope
1.1 Thispracticecoversthedeterminationoftheparticleconcentration,bynumber,andthesizedistributionofairborneparticles
in dust-controlled areas and clean rooms, for particles in the size range of approximately 0.01 to 5.0 µm. Particle concentrations
6 3 3
not exceeding 3.5 3 10 particles/m (100 000/ft ) are covered for all particles equal to and larger than the minimum size
measured.
1.2 This practice uses an airborne single particle counting device (SPC) whose operation is based on measuring the signal
produced by an individual particle passing through the sensing zone. The signal must be directly or indirectly related to particle
size.
NOTE 1—The SPC type is not specified here. The SPC can be a conventional optical particle counter (OPC), an aerodynamic particle sizer, a
condensation nucleus counter (CNC) operating in conjunction with a diffusion battery or differential mobility analyzer, or any other device capableof
counting and sizing single particles in the size range of concern and of sampling in a cleanroom environment.
1.3 Individuals performing tests in accordance with this practice shall be trained in use of the SPC and shall understand its
operation.
1.4 Sincetheconcentrationandtheparticlesizedistributionofairborneparticlesaresubjecttocontinuousvariations,thechoice
of sampling probe configuration, locations and sampling times will affect sampling results. Further, the differences in the physical
measurement, electronic and sample handling systems between the various SPCs and the differences in physical properties of the
various particles being measured can contribute to variations in the test results. These differences should be recognized and
minimized by using a standard method of primary calibration and by minimizing variability of sample acquisition procedures.
1.5 Sample acquisition procedures and equipment may be selected for specific applications based on varying cleanroom class
levels. Firm requirements for these selections are beyond the scope of this practice; however, sampling practices shall be stated
that take into account potential spatial and statistical variations of suspended particles in clean rooms.
NOTE 2—GeneralreferencestocleanroomclassificationsfollowFederalStandard 209E,latestrevision.Whereairborneparticlesaretobecharacterized
in dust-controlled areas that do not meet these classifications, the latest revision of the pertinent specification for these areas shall be used.
1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use. For specific hazards statements, see Section 8.
2. Referenced Documents
2
2.1 ASTM Standards:
D 1356 Terminology Relating to Sampling and Analysis of Atmospheres
F 328 Practice for Calibration of an Airborne Particle Counter usingUsing Monodisperse Spherical Particles
F 649 Practice for Secondary Calibration of Airborne Particle Counter usingUsing Comparison Procedures
F 658 Practice for Calibration of a Liquid-Borne Particle Counter usingUsing an Optical System Based Upon Light Extinction
1
This practice is under the jurisdiction of ASTM Committee E21 on Space Simulation and Applications of Space Technology and is the direct responsibility of
Subcommittee E21.05 on Contamination.
Current edition approved May 15, 1992. Published July 1992. Originally published as F50–65T. Last previous edition F50–83(1989)
e1
Current edition approved Nov. 1, 2007. Published November 2007. Originally approved in 1965. Last previous edition approved in 2001 as F 50 – 92 (2001)
2
For referencedASTM standards, visit theASTM website, www.astm.org, or contactASTM Customer Service at service@astm.org. For Annual Book of ASTM Standards
, Vol 11.03.volume information, refer to t
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