Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method

SIGNIFICANCE AND USE
5.1 These test methods provide a field technique for the bacteriological analysis of electronic process waters. The sampling of these waters and subsequent bacteriological analysis may be critical to electronic product yields. Bacteria can be the prime source of harmful contamination which can significantly reduce the yield of satisfactory microelectronic device production.  
5.2 The test methods described here may be used both to monitor the bacteriological quality of water used in microelectronic product processing, and to locate the source of bacterial contamination in a water purification system.  
5.3 These test methods are simple field methods, combining sampling and bacteriological analysis techniques that do not require bacteriological laboratory facilities.  
5.4 The test methods described employ culture techniques for bacteriological analysis. The user should be aware that such techniques cannot provide a complete count of the total viable bacteria present, since clumps and clusters of bacteria will appear as one single colony when cultured, and since some viable bacteria will not grow under the test conditions used. However, a meaningful comparative bacteria count will be achieved by this method if the culturing of the sample is always done at the same temperature, and for the same period of time. The temperature of incubation should always be at 28 ± 2°C, and the period of incubation should be 48 h (or 72 h if time permits). The period of incubation and temperature should be the same for all comparative studies.
SCOPE
1.1 These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.  
1.2 Three methods are described as follows:    
Sections  
Test Method A—Sample Tap—Direct Filtration  
6 to 8  
Test Method B—Presterilized Plastic Bag Technique  
9 to 12  
Test Method B2 —Dip Strip Technique2/Presterilized Plastic Bag  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use 2.

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Publication Date
30-Jun-2012
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ASTM F1094-87(2012) - Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1094 − 87 (Reapproved 2012)
Standard Test Methods for
Microbiological Monitoring of Water Used for Processing
Electron and Microelectronic Devices by Direct Pressure
Tap Sampling Valve and by the Presterilized Plastic Bag
Method
This standard is issued under the fixed designation F1094; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope Electron and Microelectronic Devices (Withdrawn 1991)
F488Test Method for On-Site Screening of Heterotrophic
1.1 These test methods cover sampling and analysis of high
Bacteria in Water (Withdrawn 2005)
purity water from water purification systems and water trans-
missionsystemsbythedirectsamplingtapandfiltrationofthe
3. Terminology
sample collected in the bag.These test methods cover both the
3.1 Definitions:
sampling of water lines and the subsequent microbiological
3.1.1 total bacteria count—number of viable heterotrophic
analysis of the sample by the culture technique. The microor-
bacteria capable of growing under test conditions specified.
ganisms recovered from the water samples and counted on the
3.1.1.1 Discussion—Total bacteria count is the general term
filters include both aerobes and facultative anaerobes.
for heterotrophic plate count, now commonly used. Hetero-
1.2 Three methods are described as follows:
trophic bacteria are those microorganisms that cannot use CO
Sections for food. They require more complex organic compounds for
Test Method A—Sample Tap—Direct Filtration 6 to 8
use as growth nutrients. The majority of bacteria fall into this
Test Method B—Presterilized Plastic Bag Technique 9 to 12
2 major grouping.
Test Method B2 —Dip Strip Technique /Presterilized Plastic
Bag
3.1.2 For definition of other terms used in this test method,
1.3 This standard does not purport to address all of the
refer to Terminology D1129.
safety concerns, if any, associated with its use. It is the
3.2 Definitions of Terms Specific to This Standard:
responsibility of the user of this standard to establish appro-
3.2.1 presterilized plastic bag—a commercial presterilized
priate safety and health practices and determine the applica-
plastic bag of 200-mL capacity (or as appropriate to larger
bility of regulatory limitations prior to use .
sample sizes) to hold sample water. The bag should have
integral fold over tabs to allow for resealing.
2. Referenced Documents
3.2.2 bacteriological monitor—a commercial presterilized
2.1 ASTM Standards:
plastic filter holder containing a 0.45-µm membrane filter. (No
D1129Terminology Relating to Water
other filter pore size should be used.)
D1193Specification for Reagent Water
NOTE1—Ifalargerporesizefilterisused,organismsmaypassthrough
F60Test Method for Detection and Enumeration of Micro-
the filter; a smaller pore size filter does not wick up sufficient growth
biological Contaminants in Water Used for Processing
media, hence the level of recovery will be less than that of the 0.45-µm
filter.
These test methods are under the jurisdiction of ASTM Committee F01 on 3.2.3 total count tester—a paddle shaped plastic filter as-
Electronics and are the direct responsibility of Subcommittee F01.10 on Contami-
sembly containing a 0.45-µm membrane filter and dehydrated
nation Control.
nutrient pad.
Current edition approved July 1, 2012. Published August 2012. Originally
approvedin1987.Lastpreviouseditionapprovedin2005asF1094–87(2005).DOI:
4. Summary of Test Method
10.1520/F1094-87R12.
The dip strip (Total Count Tester or SPC Sampler) method is permissible for
4.1 Test MethodA—Sample Tap—Direct Filtration—Asam-
waters containing >10 microorganisms per millilitre.
pling valve as or similar to that shown in Fig. 1 is installed in
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on The last approved version of this historical standard is referenced on
the ASTM website. www.astm.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1094 − 87 (2012)
FIG. 1 Sampling Valve in Wall of Pressurized Line
a pressurized line. The valve illustrated has a self closure and 5.4 The test methods described employ culture techniques
a male luer outlet fitting. This valve design minimized the forbacteriologicalanalysis.Theusershouldbeawarethatsuch
chance of extraneous contamination. Any valve used for techniques cannot provide a complete count of the total viable
sampling should be constructed in a manner to reduce or bacteria present, since clumps and clusters of bacteria will
prevent the retention of bacteria within its internal surfaces, appear as one single colony when cultured, and since some
and should be easily sanitized. The bacterial monitor is viable bacteria will not grow under the test conditions used.
connected to either the luer outlet of the illustrated sampling However, a meaningful comparative bacteria count will be
valve,orinasuitablemannertoanequivalentvalve.Thewater achievedbythismethodiftheculturingofthesampleisalways
sample is passed directly through the monitor, and the effluent done at the same temperature, and for the same period of time.
volume is measured after this filtration. Test Methods F60 are The temperature of incubation should always be at 28 6 2°C,
then employed for bacteriological examination of the sample. and the period of incubation should be 48 h (or 72 h if time
permits). The period of incubation and temperature should be
4.2 Test Method B—Presterilized Plastic Bag—The sam-
the same for all comparative studies.
pling valve is installed as inTest MethodA, then flushed clean
priortotakingthesamples.Thewatersampleisdirectlyflowed
TEST METHOD A—DIRECT SAMPLE TAP
into a presterilized, precalibrated plastic disposable bag.After
6. Apparatus
sampling, the plastic bag is sealed and stored briefly prior to
bacteriological analysis of the sample. The sample may be
6.1 Sampling Tap, see Fig. 1.
storedatroomtemperatureifanalyzedwithin2h,otherwise,it
6.2 Bacteriological Monitor with0.45-µmmembranefilter.
should be stored from 4 to to 10°C and analyzed within 6 h.
6.3 Sanitarians Kit, consisting of metal syringe, special
4.2.1 Sample analysis is conducted by either Test Methods
two way valve, and stainless steel graduated cup.
F60 or Test Method F488 for bacterial content of the water.
6.4 Forceps with blunt stainless, unserrated tips.
5. Significance and Use
6.5 Incubator ,capableofholdingtemperaturewithin 61°C
5.1 These test methods provide a field technique for the
in a range from 27 to 40°C.
bacteriological analysis of electronic process waters. The
6.6 Illuminator, 15 to 30-W incandescent or 8 to 10-W
samplingofthesewatersandsubsequentbacteriologicalanaly-
fluorescent are generally acceptable. If incandescent light is
sis may be critical to electronic product yields. Bacteria can be
concentrated through or by a magnifying lens, a lower wattage
the prime source of harmful contamination which can signifi-
may suffice.
cantly reduce the yield of satisfactory microelectronic device
production.
The sole source of supply of valves, YY2004000, and YY20E4010 (catalogue
5.2 The test methods described here may be used both to
number), known to the committee at this time is Millipore Corp., Bedford, MA. If
you are aware of alternative suppliers, please provide this information to ASTM
monitor the bacteriological quality of water used in microelec-
Headquarters.Your comments will receive careful consideration at a meeting of the
tronic product processing, and to locate the source of bacterial
responsible technical committee, which you may attend.
contamination in a water purification system. 6
Thesolesourceofsupplyoftheseproductsknowntothecommitteeatthistime
is Millipore Corp., Bedford, MA. If you are aware of alternative suppliers, please
5.3 Thesetestmethodsaresimplefieldmethods,combining
provide this information to ASTM Headquarters. Your comments will receive
sampling and bacteriological analysis techniques that do not
careful consideration at a meeting of the responsible technical committee, which
require bacteriological laboratory facilities. you may attend.
F1094 − 87 (2012)
6.7 Magnifier, 5 to 15×for counting colonies.An illumina- 8.1.7 Open sampling valve, by turning counter-clockwise
tor hand magnifier or a stereoscopic (dissection-type) micro- the knurled outlet body, and allow 100 mL(Note 2) of sample
scope are satisfactory. to pass through the monitor into a volumetric container. Close
the valve.
6.8 Hypodermic Needle, No. 18, 2-in. blunt nose with
plastic syringe.
NOTE 2—To compensate for the natural bacterial growth variability in
different water samples, the size of sample tested should be chosen in
relation to the expected count level of organisms for that particular
7. Reagents and Materials
sample. Therefore, a sample size of at least 100 mL or greater should be
7.1 Isopropyl alcohol,70to90%,or3to6%semi-standard
collectedfor“polished”’highpuritywatercontaininglowbact
...

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