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ASTM E827-08

(Practice)

Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy (Withdrawn 2017)

Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy (Withdrawn 2017)

SIGNIFICANCE AND USE
Auger analysis is used to determine the elemental composition of the first several atomic layers, typically 1 to 5 nm thick, of a specimen surface. In conjunction with inert gas ion sputtering, it is used to determine the sputter depth profile to a depth of a few micrometres.
The specimen is normally a solid conductor, semiconductor, or insulator. For insulators, provisions may be required for control of charge accumulation at the surface (see Guide E 1523). Typical applications include the analysis of surface contaminants, thin film deposits or segregated overlayers on metallic or alloy substrates. The specimen topography may vary from a smooth, polished specimen to a rough fracture surface.
Auger analysis of specimens with volatile species that evaporate in the ultra-high vacuum environment of the Auger chamber and substances which are susceptible to electron or X-ray beam damage, such as organic compounds, may require special techniques not covered herein. (See Guide E 983.)
SCOPE
1.1 This practice outlines the necessary steps for the identification of elements in a given Auger spectrum obtained using conventional electron spectrometers. Spectra displayed as either the electron energy distribution (direct spectrum) or the first derivative of the electron energy distribution are considered.
1.2 This practice applies to Auger spectra generated by electron or X-ray bombardment of the specimen surface and can be extended to spectra generated by other methods such as ion bombardment.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
WITHDRAWN RATIONALE
This practice outlines the necessary steps for the identification of elements in a given Auger spectrum obtained using conventional electron spectrometers. Spectra displayed as either the electron energy distribution (direct spectrum) or the first derivative of the electron energy distribution are considered.
Formerly under the jurisdiction of Committee E42 on Surface Analysis, this practice was withdrawn in July 2017 in accordance with Section 10.6.3 of the Regulations Governing ASTM Technical Committees, which requires that standards shall be updated by the end of the eighth year since the last approval date.

General Information

Status
Withdrawn
Publication Date
30-Sep-2008
Withdrawal Date
12-Jul-2017
ICS
71.040.50 - Physicochemical methods of analysis
Technical Committee
E42 - Surface Analysis
Drafting Committee
E42.03 - Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy
Current Stage
Ref Project

Relations

Replaces
ASTM E827-07 - Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy
Effective Date
01-Oct-2008
Referred By
ASTM E984-12(2020) - Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
Effective Date
01-Oct-2008
Referred By
ASTM E1127-08(2015) - Standard Guide for Depth Profiling in Auger Electron Spectroscopy
Effective Date
01-Oct-2008

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ASTM E827-08 - Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy (Withdrawn 2017)ASTM E827-08 - Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy (Withdrawn 2017)
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ASTM E827-08 - Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy (Withdrawn 2017)
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E827 − 08
Standard Practice for
Identifying Elements by the Peaks in Auger Electron
1
Spectroscopy
This standard is issued under the fixed designation E827; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
4
1. Scope 2.2 ISO Standards:
ISO 17973: 2002 Surface Chemical Analysis—Medium-
1.1 This practice outlines the necessary steps for the iden-
ResolutionAuger Electron Spectrometers—Calibration of
tificationofelementsinagivenAugerspectrumobtainedusing
Energy Scales for Elemental Analysis
conventional electron spectrometers. Spectra displayed as ei-
ISO 17974: 2002 Surface Chemical Analysis—High-
ther the electron energy distribution (direct spectrum) or the
ResolutionAuger Electron Spectrometers—Calibration of
first derivative of the electron energy distribution are consid-
Energy Scales for Elemental and Chemical-StateAnalysis
ered.
1.2 This practice applies to Auger spectra generated by
3. Terminology
electron or X-ray bombardment of the specimen surface and
3.1 Definitions:
can be extended to spectra generated by other methods such as
3.1.1 TermsusedinAugerelectronspectroscopyaredefined
ion bombardment.
in Terminology E673.
1.3 The values stated in SI units are to be regarded as
standard. No other units of measurement are included in this
4. Summary of Practice
standard.
4.1 TheAugerspectrumisobtainedwithappropriateinstru-
1.4 This standard does not purport to address all of the
mental parameters from a low kinetic energy limit of approxi-
safety concerns, if any, associated with its use. It is the
mately30eVtoanupperkineticenergylimitofapproximately
responsibility of the user of this standard to establish appro-
2000 to 3000 eV or higher to include all the principal Auger
priate safety and health practices and determine the applica-
electron energies of all elements (except hydrogen and helium
bility of regulatory limitations prior to use.
which do not have Auger transitions).
2. Referenced Documents
4.2 This practice assumes the existence of appropriate
2
2.1 ASTM Standards:
reference spectra from pure element or stoichiometric com-
E673TerminologyRelatingtoSurfaceAnalysis(Withdrawn
pound standards, or both, with which an unknown spectrum
3
2012) 5
can be compared (1, 2). It may be useful to note that although
E983Guide for Minimizing Unwanted Electron Beam Ef-
Auger energies in some data bases are referenced to the Fermi
fects in Auger Electron Spectroscopy
level, other data collections have been referenced to the
E984Guide for Identifying Chemical Effects and Matrix
vacuum level. Auger kinetic energies referenced to the Fermi
Effects in Auger Electron Spectroscopy
level would be approximately 5 eV larger than values refer-
E1523Guide to Charge Control and Charge Referencing
enced to the vacuum level.
Techniques in X-Ray Photoelectron Spectroscopy
4.3 An element in an Auger spectrum is considered posi-
tively identified if the peak shapes, the peak energies, and the
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface
relative signal strengths of peaks from the unknown coincide
AnalysisandisthedirectresponsibilityofSubcommitteeE42.03onAugerElectron
with those from a standard reference spectrum of the element
Spectroscopy and X-Ray Photoelectron Spectroscopy.
or compound.
Current edition approved Oct. 1, 2008. Published November 2008. Originally
approved in 1981. Last previous edition approved in 2007 as E827–07. DOI:
10.1520/E0827-08.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
4
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM Available from International Organization for Standardization (ISO), 1, ch. de
Standards volume information, refer to the standard’s Document Summary page on la Voie-Creuse, Case postale 56, CH-1211, Geneva 20, Switzerland, http://
the ASTM website. www.iso.ch.
3 5
The last approved version of this historical standard is referenced on Theboldfacenumbersinparenthesesrefertothelistofreferencesattheendof
www.astm.org. this standard.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
E827 − 08
5. Significance and Use available (1, 2). Compare the shape of the peaks as well. If a
goodmatchisfound,labelalllinesfromthestandardspectrum
5.1 Auger analysis is used to determine the elemental
that are visible in the specimen spectrum. If a match is not
composition of the first several atomic layers, typically 1 to 5
found, eliminate that element from further consideration and
nm
...

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5.1 This practice is to be used for reporting the experimental and data reduction procedures to be described with the publication of the data.
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5.1 Electron multipliers are commonly used in pulse-counting mode to detect ions from magnetic sector mass spectrometers. The electronics used to amplify, detect and count pulses from the electron multipliers always have a characteristic time interval after the detection of a pulse, during which no other pulses can be counted. This characteristic time interval is known as the “dead time.” The dead time has the effect of reducing the measured count rate compared with the “true” count rate.  
5.2 In order to measure count rates accurately over the entire dynamic range of a pulse counting detector, such as an electron multiplier, the dead time of the entire pulse counting system must be well known. Accurate count rate measurement forms the basis of isotopic ratio measurements as well as elemental abundance determinations.  
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1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
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