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ASTM E2734/E2734M-10

(Specification)

Standard Specification for Dimensions of Knife-Edge Flanges

Standard Specification for Dimensions of Knife-Edge Flanges

SCOPE
1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.
1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status
Historical
Publication Date
31-Dec-2009
ICS
23.160 - Vacuum technology
Technical Committee
E42 - Surface Analysis
Drafting Committee
E42.13 - Vacuum Technology
Current Stage
Ref Project

Relations

Replaced By
ASTM E2734/E2734M-10(2018) - Standard Specification for Dimensions of Knife-Edge Flanges
Effective Date
01-Jun-2018

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ASTM E2734/E2734M-10 - Standard Specification for Dimensions of Knife-Edge FlangesASTM E2734/E2734M-10 - Standard Specification for Dimensions of Knife-Edge Flanges
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ASTM E2734/E2734M-10 - Standard Specification for Dimensions of Knife-Edge Flanges
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:E2734/E2734M −10
Standard Specification for
Dimensions of Knife-Edge Flanges
ThisstandardisissuedunderthefixeddesignationE2734/E2734M;thenumberimmediatelyfollowingthedesignationindicatestheyear
of original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 3. Terminology
3.1 Definitions— For definitions used in this specification,
1.1 This standard specifies the dimensions of knife-edge
see Terminology E673.
style flanges and their associated gaskets used in vacuum
5 -11
3.2 Definitions of Terms Specific to This Standard:
systems for pressures ranging from 10 Pa to 10 Pa. Such
3.2.1 knife-edge flange, n—Vacuum flanges seal with a
flanges are widely used throughout vacuum technology appli-
metal gasket; two mating surfaces with identical circular
cations in semiconductor processing tools, surface analysis
(triangular profile) knife-edges are bolted together; a deform-
systems, space simulation systems, and general research re-
able metal gasket, captured between the knife-edges provides a
quiring vacuum.
leak-free seal.
1.2 The values stated in either SI units or inch-pound units
3.2.1.1 Discussion—Vacuum flanges that seal with a metal
are to be regarded separately as standard. The values stated in
gasket were originally developed as Conflat flanges (trade-
each system may not be exact equivalents; therefore, each
mark) by the Varian Corporation.
system shall be used independently of the other. Combining
3.2.2 type, n—Knife-edge flanges come in a variety of sizes;
values from the two systems may result in non-conformance
historically, the flange sizes were identified in North America
with the standard.
astheflange’soutsidediameter(ininches)andinEuropeasthe
maximum nominal bore of the tube (in millimetres) that might
1.3 This standard does not purport to address all of the
be welded to the flange; for this specification, the flange
safety concerns, if any, associated with its use. It is the
identification “type” is used where the type is approximately
responsibility of the user of this standard to establish appro-
equal to the flange’s outside diameter in inches.
priate safety and health practices and determine the applica-
bility of regulatory limitations prior to use.
4. Materials and Manufacture
4.1 Flange—Flanges must be manufactured from a suffi-
2. Referenced Documents
cientlyhardorhard-coatedmaterialtoresistdeformationofthe
2.1 ASTM Standards:
knife-edge profile despite repeatedly forming a vacuum seal
E673 Terminology Relating to SurfaceAnalysis (Withdrawn
with metal gaskets.
2012)
4.2 Gasket—Gasket must be manufactured from a soft,
2.2 Other Standards:
annealed, or partially-tempered metal such that the mating
ISO 4288:1996 Geometrical Product Specifications (GPS)—
flanges’ knife-edges cause sufficient (initial) plastic deforma-
Surface Texture: Profile Method—Rules and Procedures
tion that a vacuum seal is accomplished.
for the Assessment of Surface Texture
5. Dimensions, Mass, and Permissible Variations
5.1 Figs. 1-3 and Tables 1 and 2 contain the required
ThisspecificationisunderthejurisdictionofASTMCommitteeE42onSurface
dimensions and tolerances for rotatable and non-rotatable
Analysis and is the direct responsibility of Subcommittee E42.13 on Vacuum
knife-edge vacuum flanges.
Technology.
Current edition approved Jan. 1, 2010. Published May 2010. DOI: 10.1520/
6. Workmanship, Finish, and Appearance
E2734_E2734M-10.
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
6.1 Knife-edge vacuum flanges are typically used in appli-
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
cations which require: (1) a high degree of leak integrity, and
Standards volume information, refer to the standard’s Document Summary page on
(2) the lowest possible contamination from outgassing. To
the ASTM website.
The last approved version of this historical standard is referenced on
achieve both characteristics, the finish of the flanges’ knife-
www.astm.org.
edges and gaskets must be free of visible cracks, pits,
Available from International Organization for Standardization (ISO), 1, ch. de
inclusions, scratches, and foreign materials. The knife-edge
la Voie-Creuse, Case postale 56, CH-1211, Geneva 20, Switzerland, http://
www.iso.ch.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
E2734/E2734M−10
E2734/E2734M−10
FIG. 1Flange Dimensions: (a) Non-Rotatable Flange (b) Rotatable Flange
FIG. 2Knife-Edge Detail
FIG. 3Knife-Edge Gasket Dimensions
E2734/E2734M−10
TABLE 1 Knife-Edge Flange Dimension
AB C D E F G H I
Setback
Nominal Seal Knife
Num- Position Flange Depth of
Outside Recess Edge
Max ber Bolt Tolerance Face to Receiver Flange
Nominal Diameter Bolt Bolt Diameter Diameter
Type Tube of Hole of Tube Seat Seat for Thickness
Bore Tolerance Thread Circle Tolerance Tolerance
Diameter Bolt Diameter Bolt Tolerance Insert (Min)
±0.030 in. ±0.004 in. ±0.004 in.
Holes Holes ±0.005 in. (Max)
(±0.75 mm) (±0.10 mm) (±0.10 mm)
(±0.12 mm)
Min, Max, Min, Max,
mm in. mm in. mm in. mm in. mm in. mm in. mm in. mm in. mm in. mm in.
mm mm in. in.
1 in. OD 10CF 25.40 1.000 12.0 0.472 6 3.3 3.5 0.130 0.138 m3–05 n/a 17.5 0.689 0.1 0.004 13.49 0.531 10.49 0.413 3.00 0.118 n/a n/a 6.0 0.236
1 ⁄3 in. OD 16CF 33.86 1.333 19.3 0.760 6 4.3 4.6 0.171 0.180 m4–07 #8–32 27.0 1.062 0.2 0.009 21.39 0.842 18.29 0.720 4.57 0.180 6.50 0.256 6.6 0.260
1 1
2 ⁄8 in. OD 25CF 53.98 2.125 25.7 1.010 4 6.7 6.9 0
...

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