ASTM D7980-15(2023)
(Guide)Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
SIGNIFICANCE AND USE
4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, and (2) ensuring that anion levels are low enough to allow the water to be used for the manufacture of semiconductor devices.
4.2 To ensure that the anions are indeed at low-ppt levels, it is recommended to check the conductivity of a subsample before proceeding with Section 5 of this guide. This check does not need to be exact; its purpose is simply to let the analyst know if the conductivity is higher than that of the highest-level standard solution being tested. Any high reading signifies that the sample, if analyzed, might contaminate the instrument.
SCOPE
1.1 This guide applies to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate). To minimize carry-over problems between analyses, it is best to limit the concentration of any one contaminant to approximately 200 ppt (although this limit is only an approximation and may vary, depending on the user’s application).
1.2 This guide is intended to help analysts avoid contamination of ultrapure-water samples, since contamination control is the primary challenge when quantifying ppt-level anions in grab samples.
1.3 This guide does not include recommendations for collecting samples from the water source.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
General Information
- Status
- Published
- Publication Date
- 31-Mar-2023
- Technical Committee
- D19 - Water
- Drafting Committee
- D19.05 - Inorganic Constituents in Water
Relations
- Effective Date
- 01-May-2020
- Effective Date
- 15-Oct-2018
- Effective Date
- 15-Jun-2012
- Effective Date
- 01-Mar-2010
- Effective Date
- 15-Apr-2007
- Effective Date
- 01-Sep-2006
- Effective Date
- 01-Sep-2006
- Effective Date
- 15-Feb-2006
- Effective Date
- 01-Mar-2004
- Effective Date
- 01-Mar-2004
- Effective Date
- 10-Aug-2003
- Effective Date
- 10-Mar-2003
- Effective Date
- 10-Jul-2002
- Effective Date
- 10-Jul-2002
- Effective Date
- 10-Feb-2002
Overview
ASTM D7980-15(2023): Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry provides essential guidance for accurately analyzing low parts-per-trillion (ppt) concentrations of anionic contaminants in ultrapure water. This standard, developed by ASTM, is critical for ensuring that UPW meets the stringent purity requirements of semiconductor manufacturing and electronics applications, where even trace amounts of contaminants can impact product quality and process reliability.
Key Topics
Target Anions
Focuses on detecting bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate at extremely low concentration levels (ppt).Contamination Control
Emphasizes strict contamination prevention during sample handling, analysis, and preparation. This includes using only fresh, running UPW, wearing appropriate gloves, and utilizing thoroughly cleaned or new laboratory containers.Instrument Selection and Preparation
Discusses best practices for using ion chromatographs (IC) at trace analysis levels, including thorough instrument cleaning, replacement of tubing, and ensuring minimum dead-volume for maximum sensitivity and minimal carry-over.Sample and Standard Preparation
Details meticulous procedures for preparing standards and grab samples, use of certified-clean containers, dedicated bottles for different concentrations, and daily preparation of low-level standards.Analytical Sensitivity and Blank Controls
Recommends use of blanks and conductivity checks to ensure samples meet low-anion level thresholds before instrument analysis, protecting both accuracy and equipment integrity.
Applications
Semiconductor Industry:
This standard is vital for facility analysts, quality managers, and laboratory technicians involved in ultrapure water system monitoring. Ion-chromatographic analysis as described by ASTM D7980-15 is commonly used to:
- Ensure UPW is suitable for manufacturing high-quality semiconductor devices by keeping anion levels at or below required thresholds.
- Monitor and manage the operational status of water purification equipment, such as ion-exchange resin beds, by tracking anion breakthrough and predicting regeneration needs.
- Validate the design and performance of ultrapure water production and distribution systems, which are integral to reliable semiconductor fabrication.
Other High-Purity Water Applications:
This guidance is also broadly useful wherever extremely low levels of anionic contaminants in water must be monitored and controlled, such as in advanced electronics, photovoltaic manufacturing, and specialized laboratory environments.
Related Standards
ASTM D1129: Terminology Relating to Water
Provides terminology referenced throughout this guide to ensure consistent understanding.ASTM D5127: Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
Outlines general requirements and purity specifications for UPW systems.International Guidelines:
Developed in compliance with the World Trade Organization Technical Barriers to Trade (TBT) Committee's internationally recognized standards principles, ensuring global relevance and harmonization.
Keywords: ultrapure water, ion-chromatographic analysis, anion monitoring, semiconductor industry, contamination control, ppt-level analysis, ASTM D7980, high purity water, trace analysis
Adhering to ASTM D7980-15(2023) ensures accurate, repeatable measurement of trace anions in UPW, supporting robust contamination control and maintaining the highest standards in semiconductor and electronics manufacturing.
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Frequently Asked Questions
ASTM D7980-15(2023) is a guide published by ASTM International. Its full title is "Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry". This standard covers: SIGNIFICANCE AND USE 4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, and (2) ensuring that anion levels are low enough to allow the water to be used for the manufacture of semiconductor devices. 4.2 To ensure that the anions are indeed at low-ppt levels, it is recommended to check the conductivity of a subsample before proceeding with Section 5 of this guide. This check does not need to be exact; its purpose is simply to let the analyst know if the conductivity is higher than that of the highest-level standard solution being tested. Any high reading signifies that the sample, if analyzed, might contaminate the instrument. SCOPE 1.1 This guide applies to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate). To minimize carry-over problems between analyses, it is best to limit the concentration of any one contaminant to approximately 200 ppt (although this limit is only an approximation and may vary, depending on the user’s application). 1.2 This guide is intended to help analysts avoid contamination of ultrapure-water samples, since contamination control is the primary challenge when quantifying ppt-level anions in grab samples. 1.3 This guide does not include recommendations for collecting samples from the water source. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
SIGNIFICANCE AND USE 4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, and (2) ensuring that anion levels are low enough to allow the water to be used for the manufacture of semiconductor devices. 4.2 To ensure that the anions are indeed at low-ppt levels, it is recommended to check the conductivity of a subsample before proceeding with Section 5 of this guide. This check does not need to be exact; its purpose is simply to let the analyst know if the conductivity is higher than that of the highest-level standard solution being tested. Any high reading signifies that the sample, if analyzed, might contaminate the instrument. SCOPE 1.1 This guide applies to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate). To minimize carry-over problems between analyses, it is best to limit the concentration of any one contaminant to approximately 200 ppt (although this limit is only an approximation and may vary, depending on the user’s application). 1.2 This guide is intended to help analysts avoid contamination of ultrapure-water samples, since contamination control is the primary challenge when quantifying ppt-level anions in grab samples. 1.3 This guide does not include recommendations for collecting samples from the water source. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
ASTM D7980-15(2023) is classified under the following ICS (International Classification for Standards) categories: 71.060.01 - Inorganic chemicals in general. The ICS classification helps identify the subject area and facilitates finding related standards.
ASTM D7980-15(2023) has the following relationships with other standards: It is inter standard links to ASTM D1129-13(2020)e2, ASTM D5127-13(2018), ASTM D5127-12, ASTM D1129-10, ASTM D5127-07, ASTM D1129-06ae1, ASTM D1129-06a, ASTM D1129-06, ASTM D1129-04e1, ASTM D1129-04, ASTM D1129-03a, ASTM D1129-03, ASTM D1129-02a, ASTM D1129-01, ASTM D1129-02. Understanding these relationships helps ensure you are using the most current and applicable version of the standard.
ASTM D7980-15(2023) is available in PDF format for immediate download after purchase. The document can be added to your cart and obtained through the secure checkout process. Digital delivery ensures instant access to the complete standard document.
Standards Content (Sample)
This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: D7980 − 15 (Reapproved 2023)
Standard Guide for
Ion-Chromatographic Analysis of Anions in Grab Samples
of Ultrapure Water (UPW) in the Semiconductor Industry
This standard is issued under the fixed designation D7980; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 3. Terminology
1.1 This guide applies to ultrapure water that is thought to 3.1 Definitions:
contain low ppt (parts-per-trillion, weight/weight) levels of
3.1.1 For definitions of terms used in this standard, refer to
anionic contaminants (for example, bromide, chloride, fluoride,
Terminology D1129.
nitrate, nitrite, phosphate, and sulfate). To minimize carry-over
3.2 Acronyms:
problems between analyses, it is best to limit the concentration
3.2.1 HDPE, n—high-density polyethylene
of any one contaminant to approximately 200 ppt (although
3.2.2 IC, n—ion chromatograph
this limit is only an approximation and may vary, depending on
3.2.3 PEEK, n—polyether ether ketone
the user’s application).
1.2 This guide is intended to help analysts avoid contami- 3.2.4 ppb, n—parts-per-billion (weight/weight)
nation of ultrapure-water samples, since contamination control
3.2.5 ppt, n—parts-per-trillion (weight/weight)
is the primary challenge when quantifying ppt-level anions in
3.2.6 UPW, n—ultrapure water
grab samples.
1.3 This guide does not include recommendations for col-
4. Significance and Use
lecting samples from the water source.
4.1 This guide is intended to help analysts in the semicon-
1.4 This standard does not purport to address all of the
ductor industry. Examples of the usefulness of anion monitor-
safety concerns, if any, associated with its use. It is the
ing include: (1) determining when ion-exchange resin beds (in
responsibility of the user of this standard to establish appro-
water-purification systems) need to be regenerated, and (2)
priate safety, health, and environmental practices and deter-
ensuring that anion levels are low enough to allow the water to
mine the applicability of regulatory limitations prior to use.
be used for the manufacture of semiconductor devices.
1.5 This international standard was developed in accor-
dance with internationally recognized principles on standard- 4.2 To ensure that the anions are indeed at low-ppt levels, it
ization established in the Decision on Principles for the
is recommended to check the conductivity of a subsample
Development of International Standards, Guides and Recom- before proceeding with Section 5 of this guide. This check does
mendations issued by the World Trade Organization Technical
not need to be exact; its purpose is simply to let the analyst
Barriers to Trade (TBT) Committee. know if the conductivity is higher than that of the highest-level
standard solution being tested. Any high reading signifies that
2. Referenced Documents
the sample, if analyzed, might contaminate the instrument.
2.1 ASTM Standards:
5. Guidelines
D1129 Terminology Relating to Water
D5127 Guide for Ultra-Pure Water Used in the Electronics
5.1 General Considerations:
and Semiconductor Industries
5.1.1 In working with grab samples of ultrapure water,
concentrate on controlling contamination, which is the over-
This guide is under the jurisdiction of ASTM Committee D19 on Water and is
riding challenge when analyzing for anions in UPW. Precau-
the direct responsibility of Subcommittee D19.05 on Inorganic Constituents in
tions must be taken, including the following. Wear gloves (for
Water.
example, nitrile) that do not shed anions. Do not touch
Current edition approved April 1, 2023. Published April 2023. Originally
anything that might contact the samples. Minimize anionic
approved in 2015. Last previous edition approved in 2015 as D7980 – 15. DOI:
10.1520/D7980-15R23.
contamination in the laboratory air; for example, do not work
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
in the same lab where concentrated mineral acids are being
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
used or where acid fumes might be brought in by means of the
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website. ventilation system.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
D7980 − 15 (2023)
5.1.2 Use only fresh, running-from-the-tap UPW whenever 5.3.6 After each use, immediately rinse bottles with UPW
water is needed. For guidelines regarding maximum contami- by emptying and then refilling at least 3 to 4 times. Once the
nation levels allowed in this water, consult Guide D5127; cycles have been completed, fill the bottle to the brim with
recommendations are based on the type of semiconductor UPW and cap for storage. Rinse the cap, too; while rinsing the
device that ultimately is involved. To ensure highest purity and bottle, leave the cap filled with UPW. Before capping the bottle
minimize the build-up of contamination, keep the water stream for storage, rinse the cap once more with UPW. In all of these
flowing at all times (a slow rate is acceptable when the water rinsing procedures, use only UPW that has been obtained fresh
stream is not in use). and running from the tap.
NOTE 1—Early-eluting organic acids (for example, acetate, formate)
5.2 Ion Chromatograph (IC):
will be the most difficult species to eliminate from the background.
5.2.1 Use caution in selecting the IC that will be used for
5.4 Preparation of Standards:
these anal
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