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ASTM D7980-15(2023)

(Guide)

Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry

Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry

SIGNIFICANCE AND USE
4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, and (2) ensuring that anion levels are low enough to allow the water to be used for the manufacture of semiconductor devices.  
4.2 To ensure that the anions are indeed at low-ppt levels, it is recommended to check the conductivity of a subsample before proceeding with Section 5 of this guide. This check does not need to be exact; its purpose is simply to let the analyst know if the conductivity is higher than that of the highest-level standard solution being tested. Any high reading signifies that the sample, if analyzed, might contaminate the instrument.
SCOPE
1.1 This guide applies to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate). To minimize carry-over problems between analyses, it is best to limit the concentration of any one contaminant to approximately 200 ppt (although this limit is only an approximation and may vary, depending on the user’s application).  
1.2 This guide is intended to help analysts avoid contamination of ultrapure-water samples, since contamination control is the primary challenge when quantifying ppt-level anions in grab samples.  
1.3 This guide does not include recommendations for collecting samples from the water source.  
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

General Information

Status
Published
Publication Date
31-Mar-2023
ICS
71.060.01 - Inorganic chemicals in general
Technical Committee
D19 - Water
Drafting Committee
D19.05 - Inorganic Constituents in Water
Current Stage
Ref Project

Relations

Refers
ASTM D1129-13(2020)e2 - Standard Terminology Relating to Water
Effective Date
01-May-2020
Refers
ASTM D5127-13(2018) - Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
Effective Date
15-Oct-2018
Refers
ASTM D5127-12 - Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
Effective Date
15-Jun-2012
Refers
ASTM D1129-10 - Standard Terminology Relating to Water
Effective Date
01-Mar-2010
Refers
ASTM D5127-07 - Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
Effective Date
15-Apr-2007
Refers
ASTM D1129-06ae1 - Standard Terminology Relating to Water
Effective Date
01-Sep-2006
Refers
ASTM D1129-06a - Standard Terminology Relating to Water
Effective Date
01-Sep-2006
Refers
ASTM D1129-06 - Standard Terminology Relating to Water
Effective Date
15-Feb-2006
Refers
ASTM D1129-04 - Standard Terminology Relating to Water
Effective Date
01-Mar-2004
Refers
ASTM D1129-04e1 - Standard Terminology Relating to Water
Effective Date
01-Mar-2004
Refers
ASTM D1129-03a - Standard Terminology Relating to Water
Effective Date
10-Aug-2003
Refers
ASTM D1129-03 - Standard Terminology Relating to Water
Effective Date
10-Mar-2003
Refers
ASTM D1129-02a - Standard Terminology Relating to Water
Effective Date
10-Jul-2002
Refers
ASTM D1129-01 - Standard Terminology Relating to Water
Effective Date
10-Jul-2002
Refers
ASTM D1129-02 - Standard Terminology Relating to Water
Effective Date
10-Feb-2002

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ASTM D7980-15(2023) - Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor IndustryASTM D7980-15(2023) - Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
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ASTM D7980-15(2023) - Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
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This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: D7980 − 15 (Reapproved 2023)
Standard Guide for
Ion-Chromatographic Analysis of Anions in Grab Samples
of Ultrapure Water (UPW) in the Semiconductor Industry
This standard is issued under the fixed designation D7980; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 3. Terminology
1.1 This guide applies to ultrapure water that is thought to 3.1 Definitions:
contain low ppt (parts-per-trillion, weight/weight) levels of
3.1.1 For definitions of terms used in this standard, refer to
anionic contaminants (for example, bromide, chloride, fluoride,
Terminology D1129.
nitrate, nitrite, phosphate, and sulfate). To minimize carry-over
3.2 Acronyms:
problems between analyses, it is best to limit the concentration
3.2.1 HDPE, n—high-density polyethylene
of any one contaminant to approximately 200 ppt (although
3.2.2 IC, n—ion chromatograph
this limit is only an approximation and may vary, depending on
3.2.3 PEEK, n—polyether ether ketone
the user’s application).
1.2 This guide is intended to help analysts avoid contami- 3.2.4 ppb, n—parts-per-billion (weight/weight)
nation of ultrapure-water samples, since contamination control
3.2.5 ppt, n—parts-per-trillion (weight/weight)
is the primary challenge when quantifying ppt-level anions in
3.2.6 UPW, n—ultrapure water
grab samples.
1.3 This guide does not include recommendations for col-
4. Significance and Use
lecting samples from the water source.
4.1 This guide is intended to help analysts in the semicon-
1.4 This standard does not purport to address all of the
ductor industry. Examples of the usefulness of anion monitor-
safety concerns, if any, associated with its use. It is the
ing include: (1) determining when ion-exchange resin beds (in
responsibility of the user of this standard to establish appro-
water-purification systems) need to be regenerated, and (2)
priate safety, health, and environmental practices and deter-
ensuring that anion levels are low enough to allow the water to
mine the applicability of regulatory limitations prior to use.
be used for the manufacture of semiconductor devices.
1.5 This international standard was developed in accor-
dance with internationally recognized principles on standard- 4.2 To ensure that the anions are indeed at low-ppt levels, it
ization established in the Decision on Principles for the
is recommended to check the conductivity of a subsample
Development of International Standards, Guides and Recom- before proceeding with Section 5 of this guide. This check does
mendations issued by the World Trade Organization Technical
not need to be exact; its purpose is simply to let the analyst
Barriers to Trade (TBT) Committee. know if the conductivity is higher than that of the highest-level
standard solution being tested. Any high reading signifies that
2. Referenced Documents
the sample, if analyzed, might contaminate the instrument.
2.1 ASTM Standards:
5. Guidelines
D1129 Terminology Relating to Water
D5127 Guide for Ultra-Pure Water Used in the Electronics
5.1 General Considerations:
and Semiconductor Industries
5.1.1 In working with grab samples of ultrapure water,
concentrate on controlling contamination, which is the over-
This guide is under the jurisdiction of ASTM Committee D19 on Water and is
riding challenge when analyzing for anions in UPW. Precau-
the direct responsibility of Subcommittee D19.05 on Inorganic Constituents in
tions must be taken, including the following. Wear gloves (for
Water.
example, nitrile) that do not shed anions. Do not touch
Current edition approved April 1, 2023. Published April 2023. Originally
anything that might contact the samples. Minimize anionic
approved in 2015. Last previous edition approved in 2015 as D7980 – 15. DOI:
10.1520/D7980-15R23.
contamination in the laboratory air; for example, do not work
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
in the same lab where concentrated mineral acids are being
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
used or where acid fumes might be brought in by means of the
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website. ventilation system.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
D7980 − 15 (2023)
5.1.2 Use only fresh, running-from-the-tap UPW whenever 5.3.6 After each use, immediately rinse bottles with UPW
water is needed. For guidelines regarding maximum contami- by emptying and then refilling at least 3 to 4 times. Once the
nation levels allowed in this water, consult Guide D5127; cycles have been completed, fill the bottle to the brim with
recommendations are based on the type of semiconductor UPW and cap for storage. Rinse the cap, too; while rinsing the
device that ultimately is involved. To ensure highest purity and bottle, leave the cap filled with UPW. Before capping the bottle
minimize the build-up of contamination, keep the water stream for storage, rinse the cap once more with UPW. In all of these
flowing at all times (a slow rate is acceptable when the water rinsing procedures, use only UPW that has been obtained fresh
stream is not in use). and running from the tap.
NOTE 1—Early-eluting organic acids (for example, acetate, formate)
5.2 Ion Chromatograph (IC):
will be the most difficult species to eliminate from the background.
5.2.1 Use caution in selecting the IC that will be used for
5.4 Preparation of Standards:
these anal
...

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1.4.1 Non-SI units are provided in Table 1 and Table 2 and in 7.1.2.1/7.1.2.2 because these are common units used in the industry.
Note 3: The generation and dissipation of static electricity can create problems in the handling of distillate burner fuel oils. For more information on the subject, see Guide D4865.  
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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ASTM
ASTM D8165-24(Test Method)
Standard Test Method for Evaluation of Load-Carrying Capacity of Lubricants Used in Hypoid Final-Drive Axles Operated under Low-Speed and High-Torque Conditions

SIGNIFICANCE AND USE
5.1 This test method measures a lubricant's ability to protect hypoid final drive axles from abrasive wear, adhesive wear, plastic deformation, and surface fatigue when subjected to low-speed, high-torque conditions. Lack of protection can lead to premature gear or bearing failure, or both.  
5.2 This test method is used, or referred to, in specifications and classifications of rear-axle gear lubricants such as:  
5.2.1 Specification D7450.  
5.2.2 American Petroleum Institute (API) Publication 1560.  
5.2.3 SAE J308.  
5.2.4 SAE J2360.
SCOPE
1.1 This test method, commonly referred to as the L-37-1 test, describes a test procedure for evaluating the load-carrying capacity, wear performance, and extreme pressure properties of a gear lubricant in a hypoid axle under conditions of low-speed, high-torque operation.3  
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.2.1 Exceptions—Where there is no direct SI equivalent such as National Pipe threads/diameters, tubing size, or where there is a sole source supply equipment specification.
1.2.1.1 The drawing in Annex A6 is in inch-pound units.  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific warning statements are provided in 7.2 and 10.1.  
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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