ASTM E2088-06
(Practice)Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments
Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments
SIGNIFICANCE AND USE
This practice provides a standard approach to measuring particle deposition, or fallout, in cleanrooms and other controlled environments. It is based on the use of a witness surface to collect particles that deposit from the surrounding environment and subsequently sizing and counting the particles by conventional methods. Several options are introduced, with limitations and guidelines for selecting the best choice for the intended application.
This practice is applicable across numerous industries including aerospace, microelectronics, and pharmaceuticals.
SCOPE
1.1 This practice is intended to assist in the selection, preparation, exposure, and analysis of witness surfaces for the purpose of characterizing particle deposition rates in cleanrooms and associated controlled environments, particularly for aerospace applications.
1.2 Requirements may be defined in terms of particle size distribution and count, percent area coverage, or product performance criteria such as optical transmission or scatter. Several choices for witness surfaces are provided.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
1.3 The values stated in SI units are to be regarded as the standard.
General Information
Relations
Standards Content (Sample)
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:E2088–06
Standard Practice for
Selecting, Preparing, Exposing, and Analyzing Witness
Surfaces for Measuring Particle Deposition in Cleanrooms
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and Associated Controlled Environments
This standard is issued under the fixed designation E2088; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope Fed-Std-209 Airborne Particulate Cleanliness Classes in
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Cleanrooms and Clean Zones
1.1 This practice is intended to assist in the selection,
IEST-STD-CC1246 Product Cleanliness Levels and Con-
preparation, exposure, and analysis of witness surfaces for the
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tamination Control Program
purpose of characterizing particle deposition rates in clean-
rooms and associated controlled environments, particularly for
NOTE 1—The Institute of Environmental Sciences and Technology has
aerospace applications.
several Recommended Practices which may also be useful.
1.2 Requirements may be defined in terms of particle size
3. Terminology
distribution and count, percent area coverage, or product
3.1 Definitions:
performance criteria such as optical transmission or scatter.
Several choices for witness surfaces are provided. 3.1.1 bidirectional reflectance distribution function
(BRDF)—the scattering properties of light reflected off sur-
1.3 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the faces, expressed as the ratio of differential outputs of radiance
divided by differential inputs of radiance. Surface contami-
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica- nants scatter the incident radiation in all directions and with
variable intensities. The BRDF is a method to quantify the
bility of regulatory limitations prior to use.
1.4 The values stated in SI units are to be regarded as the spatial distribution of the scattered energy.
3.1.2 cleanliness level—an established maximum allowable
standard.
amount of contamination in a given area or volume, or on a
2. Referenced Documents (Note 1)
component.
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2.1 ASTM Standards: 3.1.3 cleanroom—an environmentally conditioned area in
E1216 Practice for Sampling for Particulate Contamination which temperature, humidity, and airborne contaminants are
by Tape Lift controlled by design and operation. High-efficiency particulate
F24 Test Method for Measuring and Counting Particulate air (HEPA) filters or better are usually required to achieve the
Contamination on Surfaces air cleanliness level. Air particulate cleanliness is classified in
F312 Test Methods for Microscopical Sizing and Counting accordance with or .
Particles from Aerospace Fluids on Membrane Filters 3.1.4 contaminant—unwanted molecular and particulate
2.2 ISO Standard: matter that could affect or degrade the performance of the
ISO 14644-1 Cleanrooms and Associated Controlled components upon which they reside.
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Environments—Part 1: Classification of Air Cleanliness 3.1.5 contamination—a process of contaminating.
2.3 Government Standards: 3.1.6 contamination control—organized action to control
the level of contamination.
3.1.7 controlled area—an environmentally controlled area,
operated as a cleanroom, but without the final stage of HEPA
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This practice is under the jurisdiction of ASTM Committee E21 on Space
(or better) filters used in cleanrooms.
Simulation and Applications of Space Technology and is direct responsibility of
Subcommittee E21.05 on Contamination. 3.1.8 critical surface—any surface of an item or product
Current edition approved April 1, 2006. Published April 2006. Originally
which is required to meet established cleanliness level require-
approved in 2000. Last previous edition approved in 2000 as E2088 – 00. DOI:
ments.
10.1520/E2088-06.
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For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
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Standards volume information, refer to the standard’s Document Summary page on Although Fed-Std-209 has been cancelled, it still may be used and designations
the ASTM website. in Fed-Std-209 may be used in addition to the ISO designations.
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E2088–06
3.1.9 demonstrated equivalence—
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