EN 1071-4:2006

Advanced technical ceramics - Methods of test for ceramic coatings - Part 4: Determination of chemical composition by electron probe microanalysis (EPMA)

This European Standard describes methods for chemical analysis of ceramic coatings by means of electron probe microanalysis (EPMA) using a scanning electron microscope (SEM) or an electron probe microanalyser.
The methods described are limited to the examination of single layer coatings when the analysis is carried out normal to the sample surface, but graded and multilayer coatings may also be analysed in cross-section if the thickness of the individual layers or gradations are greater than the maximum width of the volume of material within which characteristic or fluorescent X-rays are generated.
NOTE   This method can also be used for the analysis of bulk materials.

Hochleistungskeramik - Verfahren zur Prüfung keramischer Schichten - Teil 4: Bestimmung der chemischen Zusammensetzung durch Elektronenstrahl-Mikrobereichsanalyse (ESMA)

Diese Europäische Norm legt Verfahren zur Analyse der chemischen Zusammensetzung keramischer Schichten mittels Elektronenstrahl-Mikrobereichs-Analyse (ESMA) unter Verwendung eines Rasterelektronen-mikroskopes (REM) oder einer Elektronenstrahlmikrosonde fest.
Die festgelegten Verfahren sind anwendbar auf die Untersuchung von Monolagenschichten, wenn die Analyse senkrecht zur Oberfläche der Probe durchgeführt wird, gelten jedoch auch für die Analyse von gradierten und Mehrlagenschichten im Querschliff, sobald die Dickenmaße der einzelnen Lagen oder deren Gradie-rungsdistanzen größer sind als die größte räumliche Ausdehnung des zur charakteristischen und/oder Fluoreszenzröntgenstrahlung angeregten Stoffvolumens.
ANMERKUNG   Dieses Verfahren kann auch zur Analyse von Rohstoffen angewendet werden.

Céramiques techniques avancées - Méthodes d'essais pour revêtements céramiques - Partie 4 : Détermination de la composition chimique avec analyse par microsonde électronique (EPMA)

Sodobna tehnična keramika – Metode za preskušanje keramičnih prevlek – 4. del: Ugotavljanje kemične sestave z elektronsko mikroanalizo (EPMA)

General Information

• Status: Published
• Publication Date: 14-Feb-2006
• Withdrawal Date: 30-Aug-2006
• ICS: 81.060.30 - Advanced ceramics
• Technical Committee: CEN/TC 184 - Advanced technical ceramics
• Drafting Committee: CEN/TC 184/WG 5 - Ceramic coatings
• Current Stage: 9020 - Submission to 2 Year Review Enquiry - Review Enquiry
• Start Date: 15-Jul-2024
• Completion Date: 15-Jul-2024
• Mandate: M/BC/CEN/90/4 - Request concerning the realisation of a standardization programme in the field of advanced technical ceramics
• Ref Project: SIST EN 1071-4:2006 - Advanced technical ceramics - Methods of test for ceramic coatings - Part 4: Determination of chemical composition by electron probe microanalysis (EPMA)

Relations

• Replaces: ENV 1071-4:1995 - Advanced technical ceramics - Methods of test for ceramic coatings - Part 4: Determination of chemical composition
• Effective Date: 22-Dec-2008

Standards Content (Sample)

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.Hochleistungskeramik - Verfahren zur Prüfung keramischer Schichten - Teil 4: Bestimmung der chemischen Zusammensetzung durch Elektronenstrahl-Mikrobereichsanalyse (ESMA)Céramiques techniques avancées - Méthodes d'essais pour revetements céramiques - Partie 4 : Détermination de la composition chimique avec analyse par microsonde électronique (EPMA)Advanced technical ceramics - Methods of test for ceramic coatings - Part 4: Determination of chemical composition by electron probe microanalysis (EPMA)81.060.30Sodobna keramikaAdvanced ceramics25.220.99Druge obdelave in prevlekeOther treatments and coatingsICS:Ta slovenski standard je istoveten z:EN 1071-4:2006SIST EN 1071-4:2006en,de01-september-2006SIST EN 1071-4:2006SLOVENSKI
STANDARDSIST ENV 1071-4:20001DGRPHãþD

EUROPEAN STANDARDNORME EUROPÉENNEEUROPÄISCHE NORMEN 1071-4February 2006ICS 81.060.30Supersedes ENV 1071-4:1995
English VersionAdvanced technical ceramics - Methods of test for ceramiccoatings - Part 4: Determination of chemical composition byelectron probe microanalysis (EPMA)Céramiques techniques avancées - Méthodes d'essaispour revêtements céramiques - Partie 4 : Détermination dela composition chimique avec analyse par microsondeélectronique (EPMA)Hochleistungskeramik - Verfahren zur Prüfung keramischerSchichten - Teil 4: Bestimmung der chemischenZusammensetzung durch Elektronenstrahl-Mikrobereichsanalyse (ESMA)This European Standard was approved by CEN on 30 December 2005.CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this EuropeanStandard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such nationalstandards may be obtained on application to the Central Secretariat or to any CEN member.This European Standard exists in three official versions (English, French, German). A version in any other language made by translationunder the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the officialversions.CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France,Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania,Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.EUROPEAN COMMITTEE FOR STANDARDIZATIONCOMITÉ EUROPÉEN DE NORMALISATIONEUROPÄISCHES KOMITEE FÜR NORMUNGManagement Centre: rue de Stassart, 36
B-1050 Brussels© 2006 CENAll rights of exploitation in any form and by any means reservedworldwide for CEN national Members.Ref. No. EN 1071-4:2006: ESIST EN 1071-4:2006

Determination of coating thickness by contact probe profilometer Part 2:
Determination of coating thickness by the crater grinding method Part 3:
Determination of adhesion and other mechanical failure modes by a scratch test Part 4:
Determination of chemical composition by electron probe microanalysis (EPMA) Part 5:
Determination of porosity Part 6:
Determination of the abrasion resistance of coatings by a micro-abrasion wear test Part 7:
Determination of hardness and Young's modulus by instrumented indentation testing Part 8:
Rockwell indentation test for evaluation of adhesion Part 9: Determination of fracture strain Part 10:
Determination of coating thickness by cross sectioning Part 11: Determination of internal stress by the Stoney formula
Parts 7 to 11 are Technical Specifications. This European Standard supersedes ENV 1071-4:1995. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. SIST EN 1071-4:2006

Reference works on electron probe microanalysis are listed in the Bibliography [1, 2]. SIST EN 1071-4:2006

Determination of surface roughness EN ISO/IEC 17025, General requirements for the competence of testing and calibration laboratories (ISO/IEC 17025:2005) ISO 14594, Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy ISO 15632, Microbeam analysis — Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors
3 Terms and definitions For the purposes of this European Standard, the following terms and definitions apply. NOTE Definitions of further terms are given in ISO 23833 and the International Vocabulary of basic and general terms in Metrology. [3] 3.1 General 3.1.1 thick coating coating with a thickness > 20 µm 3.1.2 thin coating coating with a thickness < 20 µm SIST EN 1071-4:2006

3.2.13 overvoltage U ratio of the incident beam energy to the critical excitation energy for a particular shell NOTE This factor should be greater than unity for characteristic X-ray production to occur from that atomic shell. 3.2.14 -(z) matrix correction method of quantitative electron probe X-ray microanalysis in which correction factors are calculated from empirical equations developed from fits to experimental data of X-ray production as a function of depth {the so-called φ(ρz) function} 3.2.15 peak overlap merging of peaks of nearly the same energy which cannot be resolved by the detector 3.2.16 secondary electron electron of the specimen emitted as a result of inelastic scattering of the primary beam electron with loosely bound valence-level electrons of the specimen NOTE They are of a low energy (< 50 eV) and provide information about surface topography. 3.2.17 take off angle ψψψψ angle, in degrees, between the specimen surface and the line of sight to the centre of the detector 3.2.18 wavelength dispersive X-ray spectrometry (WDS) device for determining X-ray intensity as a function of the wavelength of the radiation, where separation is based upon Bragg's law, nλ = 2dsin θ, where λ is the X-ray wavelength, d is the spacing of the atom planes of the crystal or the repeated layers of the synthetic diffractor, and θ is the angle at which constructive interference takes place NOTE X-rays diffracted at a particular angle are directed to a ga
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