EN ISO 14644-10:2022
(Main)Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.
NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.
NOTE 2 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.
Reinräume und zugehörige Reinraumbereiche - Teil 10: Bewertung der chemischen Oberflächenreinheit (ISO 14644‑10:2022)
Dieses Dokument legt geeignete Prüfverfahren zur Bestimmung der Oberflächenreinheit in Reinräumen hinsichtlich vorhandener chemischer Verbindungen oder Elemente (einschließlich Molekülen, Ionen, Atomen und Partikeln) fest. Dieses Dokument ist auf alle festen Oberflächen in Reinräumen und zugehörigen Reinraumbereichen anwendbar, wie z. B. Wände, Decken, Fußböden, Arbeitsflächen, Werkzeuge, Ausrüstungsgegenstände und Geräte.
ANMERKUNG 1 Für die Anwendung dieses Dokuments werden nur die chemischen Eigenschaften eines Partikels in Betracht gezogen. Die physikalischen Eigenschaften des Partikels werden nicht berücksichtigt, und dieses Dokument behandelt nicht die Wechselwirkung zwischen der Kontamination und der Oberfläche.
ANMERKUNG 2 Dieses Dokument behandelt weder den Entstehungsprozess der Kontamination noch zeitabhängige Einflüsse (z. B. Ablagerung, Sedimentation, Alterung) oder prozessabhängige Tätigkeiten wie z. B. Transport und Handhabung. Auch enthält es keine Leitlinien zu statistischen Qualitätskontrollverfahren zur Sicherstellung der Übereinstimmung.
Salles propres et environnements maîtrisés apparentés - Partie 10: Évaluation de la propreté chimique des surfaces (ISO 14644-10:2022)
Le présent document définit les procédés d’essai appropriés afin de déterminer la propreté des surfaces dans les salles propres en fonction de la présence de composés ou éléments chimiques (molécules, ions, atomes et particules). Il s’applique à toute surface solide dans une salle propre ou un environnement maîtrisé apparenté, telle que les murs, plafonds, sols, surfaces de travail, outils, équipements et dispositifs.
NOTE 1 Il n’est tenu compte que des caractéristiques chimiques des particules aux fins du présent document. Leurs propriétés physiques sont ignorées et le présent document ne traite pas non plus les interactions entre la contamination et la surface.
NOTE 2 Le présent document n’inclut pas la génération de contamination ni aucune influence dépendant du temps (dépôt, sédimentation, vieillissement, etc.) ni aucune activité dépendant des procédés telle que le transport et la manipulation. Il ne comporte pas non plus de recommandations relatives aux techniques statistiques de maîtrise de la qualité permettant d’assurer la conformité.
Čiste sobe in podobna nadzorovana okolja - 10. del: Ocenjevanje čistosti površine na osnovi koncentracije onesnaževal (ISO 14644-10:2022)
Ta dokument določa ustrezne preskusne postopke za določanje čistosti površin v čistih sobah glede na prisotnost kemičnih spojin ali elementov (vključno z molekulami, ioni, atomi in delci). Ta dokument se uporablja za vse trdne površine v čistih sobah in podobnih nadzorovanih okoljih, kot so zidovi, stropi, tla, delovne površine, orodja, oprema in naprave. OPOMBA 1: V tem dokumentu so obravnavane le kemijske lastnosti delcev. Fizikalne lastnosti delcev niso upoštevane in ta dokument ne zajema medsebojnega vpliva med onesnaženostjo in površino. OPOMBA 2: Ta dokument ne vključuje postopka nastajanja onesnaženosti in morebitnih časovno odvisnih vplivov (nalaganje, usedanje, staranje) ali od postopkov odvisnih dejavnosti, kot sta prevoz in ravnanje. Prav tako ne vključuje smernic glede statističnih tehnik nadzora kakovosti za zagotavljanje skladnosti.
General Information
Relations
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 14644-10:2022
01-julij-2022
Nadomešča:
SIST EN ISO 14644-10:2013
Čiste sobe in podobna nadzorovana okolja - 10. del: Ocenjevanje čistosti površine
na osnovi koncentracije onesnaževal (ISO 14644-10:2022)
Cleanrooms and associated controlled environments - Part 10: Assessment of surface
cleanliness for chemical contamination (ISO 14644-10:2022)
Reinräume und zugehörige Reinraumbereiche - Teil 10: Bewertung der chemischen
Oberflächenreinheit (ISO 14644‑10:2022)
Salles propres et environnements maîtrisés apparentés - Partie 10: Évaluation de la
propreté chimique des surfaces (ISO 14644-10:2022)
Ta slovenski standard je istoveten z: EN ISO 14644-10:2022
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
SIST EN ISO 14644-10:2022 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
---------------------- Page: 1 ----------------------
SIST EN ISO 14644-10:2022
---------------------- Page: 2 ----------------------
SIST EN ISO 14644-10:2022
EN ISO 14644-10
EUROPEAN STANDARD
NORME EUROPÉENNE
May 2022
EUROPÄISCHE NORM
ICS 13.040.35 Supersedes EN ISO 14644-10:2013
English Version
Cleanrooms and associated controlled environments - Part
10: Assessment of surface cleanliness for chemical
contamination (ISO 14644-10:2022)
Salles propres et environnements maîtrisés apparentés Reinräume und zugehörige Reinraumbereiche - Teil
- Partie 10: Évaluation de la propreté chimique des 10: Bewertung der chemischen Oberflächenreinheit
surfaces (ISO 14644-10:2022) (ISO 14644-10:2022)
This European Standard was approved by CEN on 1 May 2022.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2022 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-10:2022 E
worldwide for CEN national Members.
---------------------- Page: 3 ----------------------
SIST EN ISO 14644-10:2022
EN ISO 14644-10:2022 (E)
Contents Page
European foreword . 3
2
---------------------- Page: 4 ----------------------
SIST EN ISO 14644-10:2022
EN ISO 14644-10:2022 (E)
European foreword
This document (EN ISO 14644-10:2022) has been prepared by Technical Committee ISO/TC 209
"Cleanrooms and associated controlled environments" in collaboration with Technical Committee
CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by November 2022, and conflicting national standards
shall be withdrawn at the latest by November 2022.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
This document supersedes EN ISO 14644-10:2013.
Any feedback and questions on this document should be directed to the users’ national standards
body/national committee. A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slov
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.