EN ISO 14644-10:2022
(Main)Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.
NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.
NOTE 2 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.
Reinräume und zugehörige Reinraumbereiche - Teil 10: Bewertung der chemischen Oberflächenreinheit (ISO 14644‑10:2022)
Dieses Dokument legt geeignete Prüfverfahren zur Bestimmung der Oberflächenreinheit in Reinräumen hinsichtlich vorhandener chemischer Verbindungen oder Elemente (einschließlich Molekülen, Ionen, Atomen und Partikeln) fest. Dieses Dokument ist auf alle festen Oberflächen in Reinräumen und zugehörigen Reinraumbereichen anwendbar, wie z. B. Wände, Decken, Fußböden, Arbeitsflächen, Werkzeuge, Ausrüstungsgegenstände und Geräte.
ANMERKUNG 1 Für die Anwendung dieses Dokuments werden nur die chemischen Eigenschaften eines Partikels in Betracht gezogen. Die physikalischen Eigenschaften des Partikels werden nicht berücksichtigt, und dieses Dokument behandelt nicht die Wechselwirkung zwischen der Kontamination und der Oberfläche.
ANMERKUNG 2 Dieses Dokument behandelt weder den Entstehungsprozess der Kontamination noch zeitabhängige Einflüsse (z. B. Ablagerung, Sedimentation, Alterung) oder prozessabhängige Tätigkeiten wie z. B. Transport und Handhabung. Auch enthält es keine Leitlinien zu statistischen Qualitätskontrollverfahren zur Sicherstellung der Übereinstimmung.
Salles propres et environnements maîtrisés apparentés - Partie 10: Évaluation de la propreté chimique des surfaces (ISO 14644-10:2022)
Le présent document définit les procédés d’essai appropriés afin de déterminer la propreté des surfaces dans les salles propres en fonction de la présence de composés ou éléments chimiques (molécules, ions, atomes et particules). Il s’applique à toute surface solide dans une salle propre ou un environnement maîtrisé apparenté, telle que les murs, plafonds, sols, surfaces de travail, outils, équipements et dispositifs.
NOTE 1 Il n’est tenu compte que des caractéristiques chimiques des particules aux fins du présent document. Leurs propriétés physiques sont ignorées et le présent document ne traite pas non plus les interactions entre la contamination et la surface.
NOTE 2 Le présent document n’inclut pas la génération de contamination ni aucune influence dépendant du temps (dépôt, sédimentation, vieillissement, etc.) ni aucune activité dépendant des procédés telle que le transport et la manipulation. Il ne comporte pas non plus de recommandations relatives aux techniques statistiques de maîtrise de la qualité permettant d’assurer la conformité.
Čiste sobe in podobna nadzorovana okolja - 10. del: Ocenjevanje čistosti površine na osnovi koncentracije onesnaževal (ISO 14644-10:2022)
Ta dokument določa ustrezne preskusne postopke za določanje čistosti površin v čistih sobah glede na prisotnost kemičnih spojin ali elementov (vključno z molekulami, ioni, atomi in delci). Ta dokument se uporablja za vse trdne površine v čistih sobah in podobnih nadzorovanih okoljih, kot so zidovi, stropi, tla, delovne površine, orodja, oprema in naprave. OPOMBA 1: V tem dokumentu so obravnavane le kemijske lastnosti delcev. Fizikalne lastnosti delcev niso upoštevane in ta dokument ne zajema medsebojnega vpliva med onesnaženostjo in površino. OPOMBA 2: Ta dokument ne vključuje postopka nastajanja onesnaženosti in morebitnih časovno odvisnih vplivov (nalaganje, usedanje, staranje) ali od postopkov odvisnih dejavnosti, kot sta prevoz in ravnanje. Prav tako ne vključuje smernic glede statističnih tehnik nadzora kakovosti za zagotavljanje skladnosti.
General Information
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Standards Content (Sample)
SLOVENSKI STANDARD
01-julij-2022
Nadomešča:
SIST EN ISO 14644-10:2013
Čiste sobe in podobna nadzorovana okolja - 10. del: Ocenjevanje čistosti površine
na osnovi koncentracije onesnaževal (ISO 14644-10:2022)
Cleanrooms and associated controlled environments - Part 10: Assessment of surface
cleanliness for chemical contamination (ISO 14644-10:2022)
Reinräume und zugehörige Reinraumbereiche - Teil 10: Bewertung der chemischen
Oberflächenreinheit (ISO 14644‑10:2022)
Salles propres et environnements maîtrisés apparentés - Partie 10: Évaluation de la
propreté chimique des surfaces (ISO 14644-10:2022)
Ta slovenski standard je istoveten z: EN ISO 14644-10:2022
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
EN ISO 14644-10
EUROPEAN STANDARD
NORME EUROPÉENNE
May 2022
EUROPÄISCHE NORM
ICS 13.040.35 Supersedes EN ISO 14644-10:2013
English Version
Cleanrooms and associated controlled environments - Part
10: Assessment of surface cleanliness for chemical
contamination (ISO 14644-10:2022)
Salles propres et environnements maîtrisés apparentés Reinräume und zugehörige Reinraumbereiche - Teil
- Partie 10: Évaluation de la propreté chimique des 10: Bewertung der chemischen Oberflächenreinheit
surfaces (ISO 14644-10:2022) (ISO 14644-10:2022)
This European Standard was approved by CEN on 1 May 2022.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2022 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-10:2022 E
worldwide for CEN national Members.
Contents Page
European foreword . 3
European foreword
This document (EN ISO 14644-10:2022) has been prepared by Technical Committee ISO/TC 209
"Cleanrooms and associated controlled environments" in collaboration with Technical Committee
CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by November 2022, and conflicting national standards
shall be withdrawn at the latest by November 2022.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
This document supersedes EN ISO 14644-10:2013.
Any feedback and questions on this document should be directed to the users’ national standards
body/national committee. A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the
United Kingdom.
Endorsement notice
The text of ISO 14644-10:2022 has been approved by CEN as EN ISO 14644-10:2022 without any
modification.
INTERNATIONAL ISO
STANDARD 14644-10
Second edition
2022-05
Cleanrooms and associated controlled
environments —
Part 10:
Assessment of surface cleanliness for
chemical contamination
Salles propres et environnements maîtrisés apparentés —
Partie 10: Évaluation de la propreté chimique des surfaces
Reference number
ISO 14644-10:2022(E)
ISO 14644-10:2022(E)
© ISO 2022
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii
ISO 14644-10:2022(E)
Contents Page
Foreword .iv
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Testing and grading surface chemical levels . 2
4.1 Principles for testing the surface chemical contamination levels of clean surfaces
in cleanrooms and controlled environments . 2
4.2 ISO SCC descriptor format . 2
4.3 ISO-SCC grade level . 4
4.4 Converter for substances into surface atomic concentration . 4
5 Measuring the cleanliness of surfaces for chemical contamination and
demonstration of grade level compliance . 5
5.1 Criteria for good cleanliness assessment . 5
5.2 Documentation and reporting . 6
5.2.1 Principle . 6
5.2.2 Testing . 6
5.2.3 Test report . 6
Annex A (informative) Conversion between different unit expressions of surface
concentration for chemical substances . 8
Annex B (informative) Parameters influencing testing and interpretation of results .15
Annex C (informative) Essential considerations for a good cleanliness assessment.16
Annex D (informative) Methods for testing surface cleanliness for chemical concentration .17
Annex E (informative) Test record documentation .29
Bibliography .30
iii
ISO 14644-10:2022(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to
the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see
www.iso.org/iso/foreword.html.
This document was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled
environments, in collaboration with the European Committee for Standardization (CEN) Technical
Committee CEN/TC 243, Cleanroom technology, in accordance with the Agreement on technical
cooperation between ISO and CEN (Vienna Agreement).
This second edition cancels and replaces the first edition (ISO 14644-10:2013), of which it constitutes a
minor revision. The changes are as follows:
— the term class (classification, classified) changed to grade or assessment where appropriate;
— ISO 14644-1 moved from Clause 2 to the Bibliography and ISO 14644-6 removed (document
withdrawn);
— minor editorial changes.
A list of all parts in the ISO 14644 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www.iso.org/members.html.
iv
INTERNATIONAL STANDARD ISO 14644-10:2022(E)
Cleanrooms and associated controlled environments —
Part 10:
Assessment of surface cleanliness for chemical
contamination
1 Scope
This document establishes appropriate testing processes to determine the cleanliness of surfaces in
cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions,
atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated
controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.
NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of
a particle. The physical properties of the particle are not considered and this document does not cover the
interaction between the contamination and the surface.
NOTE 2 This document does not include the contamination generation process or any time-dependent
influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and
handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.
2 Normative references
There are no normative references in this
...
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