Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Reinräume und zugehörige Reinraumbereiche - Teil 10: Klassifizierung der chemischen Oberflächenreinheit (ISO 14644-10:2013)

Dieser Teil der Reihe ISO 14644 legt das Klassifizierungssystem für die Oberflächenreinheit in Reinräumen hinsichtlich vorhandener chemischer Verbindungen oder Elemente (einschließlich Molekülen, Ionen, Atomen und Partikeln) fest. Dieser Teil der Reihe ISO 14644 gilt für alle festen Oberflächen in Reinräumen und zugehörigen Reinraum¬bereichen, wie z. B. Wände, Decken, Fußböden, Arbeitsbereiche, Werkzeuge, Ausrüstungsgegenstände und Geräte.
ANMERKUNG 1   Für die Anwendung dieses Teils der Reihe ISO 14644 werden nur die chemischen Eigenschaften eines Partikels in Betracht gezogen. Die physikalischen Eigenschaften des Partikels werden nicht berücksichtigt und dieser Teil der Reihe ISO 14644 behandelt nicht die Wechselwirkung zwischen der Kontamination und der Oberfläche.
ANMERKUNG 2   Dieser Teil der Reihe ISO 14644 enthält nicht den Entstehungsprozess der Kontamination und zeitabhängige Einflüsse (Ablagerung, Sedimentation, Alterung usw.) oder prozessabhängige Tätigkeiten wie z. B. Transport und Handhabung. Auch enthält sie keine Leitlinie zu statistischen Qualitätskontrollverfahren zur Sicherstellung der Übereinstimmung.

Salles propres et environnements maîtrisés apparentés - Partie 10: Classification de la propreté chimique des surfaces (ISO 14644-10:2013)

L'ISO 14644-10:2013 définit le système de classification de la propreté des surfaces dans les salles propres en fonction de la présence de composés ou éléments chimiques (molécules, ions, atomes et particules). Elle s'applique à toute surface solide dans une salle propre ou un environnement maîtrisé, telle que murs, plafonds, sols, plans de travail, outils, équipements et dispositifs.

Čiste sobe in podobna nadzorovana okolja - 10. del: Klasifikacija čistosti površine na osnovi koncentracije onesnaževal (ISO 14644-10:2013)

Ta del standarda ISO 14644 določa sistem klasifikacije čistosti površine v čistih sobah glede na prisotnost kemičnih spojin ali elementov (vključno z molekulami, ioni, atomi in delci). Ta del standarda ISO 14644 se uporablja za vse trdne površine v čistih sobah in podobnih nadzorovanih okoljih, kot so zidovi, stropi, tla, delovno okolje, orodja, oprema in naprave. OPOMBA 1 V tem delu standarda ISO 14644 so obravnavane le kemične značilnosti delcev. Fizikalne lastnosti delca niso upoštevane in ta del standarda ISO 14644 ne zajema medsebojnih vplivov onesnaženosti in površine. OPOMBA 2 Ta del standarda ISO 14644 ne vključuje postopka nastajanja onesnaženosti in kakršnih koli časovno odvisnih vplivov (nalaganje, usedanje, staranje itd.) ali od postopkov odvisnih dejavnosti, kot sta prevoz in ravnanje. Prav tako ne vključuje navodil za metode kontrole statistične kakovosti, da se zagotovi ustreznost.

General Information

Status
Withdrawn
Publication Date
05-Mar-2013
Current Stage
9960 - Withdrawal effective - Withdrawal
Completion Date
18-May-2022

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SLOVENSKI STANDARD
SIST EN ISO 14644-10:2013
01-maj-2013

ýLVWHVREHLQSRGREQDQDG]RURYDQDRNROMDGHO.ODVLILNDFLMDþLVWRVWLSRYUãLQH

QDRVQRYLNRQFHQWUDFLMHRQHVQDåHYDO ,62

Cleanrooms and associated controlled environments - Part 10: Classification of surface

cleanliness by chemical concentration (ISO 14644-10:2013)

Reinräume und zugehörige Reinraumbereiche - Teil 10: Klassifizierung der chemischen

Oberflächenreinheit (ISO 14644-10:2013)

Salles propres et environnements maîtrisés apparentés - Partie 10: Classification de la

propreté chimique des surfaces (ISO 14644-10:2013)
Ta slovenski standard je istoveten z: EN ISO 14644-10:2013
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
SIST EN ISO 14644-10:2013 en,fr

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 14644-10:2013
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SIST EN ISO 14644-10:2013
EUROPEAN STANDARD
EN ISO 14644-10
NORME EUROPÉENNE
EUROPÄISCHE NORM
March 2013
ICS 13.040.35
English Version
Cleanrooms and associated controlled environments - Part 10:
Classification of surface cleanliness by chemical concentration
(ISO 14644-10:2013)

Salles propres et environnements maîtrisés apparentés - Reinräume und zugehörige Reinraumbereiche - Teil 10:

Partie 10: Classification de la propreté chimique des Klassifizierung der chemischen Oberflächenreinheit (ISO

surfaces (ISO 14644-10:2013) 14644-10:2013)
This European Standard was approved by CEN on 2 February 2013.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European

Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national

standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation

under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same

status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,

Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,

Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United

Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre: Avenue Marnix 17, B-1000 Brussels

© 2013 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-10:2013: E

worldwide for CEN national Members.
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SIST EN ISO 14644-10:2013
EN ISO 14644-10:2013 (E)
Contents Page

Foreword ....................................................................................................................................................... 3

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SIST EN ISO 14644-10:2013
EN ISO 14644-10:2013 (E)
Foreword

This document (EN ISO 14644-10:2013) has been prepared by Technical Committee ISO/TC 209

"Cleanrooms and associated controlled environments" in collaboration with Technical Committee CEN/TC 243

“Cleanroom technology” the secretariat of which is held by BSI.

This European Standard shall be given the status of a national standard, either by publication of an identical

text or by endorsement, at the latest by September 2013, and conflicting national standards shall be

withdrawn at the latest by September 2013.

Attention is drawn to the possibility that some of the elements of this document may be the subject of patent

rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following

countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech

Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,

Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,

Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.

Endorsement notice

The text of ISO 14644-10:2013 has been approved by CEN as EN ISO 14644-10:2013 without any

modification.
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SIST EN ISO 14644-10:2013
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SIST EN ISO 14644-10:2013
INTERNATIONAL ISO
STANDARD 14644-10
First edition
2013-03-01
Cleanrooms and associated controlled
environments —
Part 10:
Classification of surface cleanliness by
chemical concentration
Salles propres et environnements maîtrisés apparentés —
Partie 10: Classification de la propreté chimique des surfaces
Reference number
ISO 14644-10:2013(E)
ISO 2013
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2013

All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form

or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior

written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of

the requester.
ISO copyright office
Case postale 56 • CH-1211 Geneva 20
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
Web www.iso.org
Published in Switzerland
ii © ISO 2013 – All rights reserved
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ...................................................................................................................................................................................... 1

3 Terms and definitions ..................................................................................................................................................................................... 1

4 Classification ............................................................................................................................................................................................................ 2

4.1 Principles for establishing classification of clean surfaces in cleanrooms and

controlled environments ................................................................................................................................................................ 2

4.2 Classification for surface cleanliness by chemical concentration ............................................................... 2

4.3 ISO-SCC designation ........................................................................................................................................................................... 4

4.4 Converter for substances into surface atomic concentration ......................................................................... 4

5 Measuring and monitoring the cleanliness of surfaces for chemical contamination and

demonstration of compliance ................................................................................................................................................................. 5

5.1 Criteria for good cleanliness assessment ......................................................................................................................... 5

5.2 Documentation and reporting ................................................................................................................................................... 6

Annex A (informative) Conversion between different unit expressions of surface concentration for

chemical substances ......................................................................................................................................................................................... 8

Annex B (informative) Parameters influencing testing and interpretation of results ..................................15

Annex C (informative) Essential considerations for a good cleanliness assessment ......................................16

Annex D (informative) Methods for testing surface cleanliness by chemical concentration .................17

Annex E (informative) Test record documentation ............................................................................................................................28

Bibliography .............................................................................................................................................................................................................................29

© ISO 2013 – All rights reserved iii
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.

The main task of technical committees is to prepare International Standards. Draft International

Standards adopted by the technical committees are circulated to the member bodies for voting.

Publication as an International Standard requires approval by at least 75 % of the member bodies

casting a vote.

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights.

ISO 14644-10 was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled

environments.

ISO 14644 consists of the following parts, under the general title Cleanrooms and associated controlled

environments:
— Part 1: Classification of air cleanliness by particle concentration

— Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1

— Part 3: Test methods
— Part 4: Design, construction and start-up
— Part 5: Operations
— Part 6: Vocabulary

— Part 7: Separative devices (clean air hoods, glove boxes, isolators, mini-environments)

— Part 8: Classification of air cleanliness by chemical concentration (ACC)
— Part 9: Classification of surface cleanliness by particle concentration
— Part 10: Classification of surface cleanliness by chemical concentration
The following part is under preparation:
— Part 12: Classification of air cleanliness by nanoscale particle concentration

Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications

will form the subject of a future Part 13.
iv © ISO 2013 – All rights reserved
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SIST EN ISO 14644-10:2013
INTERNATIONAL STANDARD ISO 14644-10:2013(E)
Cleanrooms and associated controlled environments —
Part 10:
Classification of surface cleanliness by chemical
concentration
1 Scope

This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with

regard to the presence of chemical compounds or elements (including molecules, ions, atoms and

particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled

environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

NOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of

a particle. The physical properties of the particle are not considered and this part of ISO 14644 does not cover the

interaction between the contamination and the surface.

NOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent

influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and

handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.

2 Normative references

The following referenced documents are recommended for the application of this document. For dated

references, only the edition cited applies. For undated references, the latest edition of the referenced

document (including any amendments) applies.

ISO 14644-1:— , Cleanrooms and associated controlled environments — Part 1: Classification of air

cleanliness by particle concentration

ISO 14644-6, Cleanrooms and associated controlled environments — Part 6: Vocabulary

3 Terms and definitions

For the purposes of this document, the terms and definitions given in ISO 14644-6 and the following apply.

3.1
air cleanliness by chemical concentration
ACC

level, expressed as an ISO Class N, which represents the maximum allowable concentration of a given

chemical species or group of chemical species, expressed in grams per cubic metre (g/m )

Note 1 to entry: This definition does not include macromolecules of biological origin, which are judged to be particles.

3.2
contaminant category

common name for a group of compounds with a specific and similar deleterious effect when deposited

on the surface of interest
1) To be published. (Revision of ISO 14644-1:1999.)
© ISO 2013 – All rights reserved 1
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)
3.3
chemical contamination

chemical (non-particulate) substances that can have a deleterious effect on the product, process or equipment

3.4
solid surface
boundary between the solid phase and a second phase
3.5
surface
boundary between two phases

Note 1 to entry: One of the phases is normally a solid phase and the other a gas, a liquid or another solid.

3.6
surface cleanliness by chemical concentration
SCC
condition of a surface with respect to its chemical concentration
3.7
surface cleanliness by chemical concentration class
SCC

common logarithm (to the base of 10) of the chemical concentration on a surface in grams per square

metre (g/m )
4 Classification

4.1 Principles for establishing classification of clean surfaces in cleanrooms and con-

trolled environments

Classification shall be specified by use of a classification descriptor. This descriptor is designated

“ISO-SCC” and specifies the maximum total chemical concentration permitted on a surface for an

individual chemical substance or group of substances. The classification of SCC is based upon the

concentration of chemicals on a surface as calculated using Formula (1) (given in 4.2) and expressed in

2 2

g/m . For calculation of the class, all other units shall be converted to g/m . In specific cases where low

concentrations need to be specified, the maximum allowable concentration of chemicals on a surface

may be expressed in atoms per square centimetre, ISO-SCC , using Formula (2) in 4.4.

_atomic
4.2 Classification for surface cleanliness by chemical concentration

The SCC class shall be designated by a classification number, N , where N is the common logarithm

SCC SCC

index of concentration C , expressed in g/m . The SCC class statement shall always be connected with

SCC

a chemical substance or group of substances to which it is related. Intermediate concentrations may be

specified, with 0,1 being the smallest permitted increment of N . C is determined from Formula (1),

SCC SCC
in terms of N :
SCC
SCC
C =10
SCC
(1)
NC=log
SCCS10 CC
Therefore, .

C , the maximum allowable concentration of the specified chemical substance or group of substances,

SCC

is expressed in g/m . The measured chemical concentration on a surface shall not exceed the maximum

allowable concentration of SCC, C to satisfy the predetermined SCC that is agreed between the

SCC
customer and supplier.
2 © ISO 2013 – All rights reserved
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)
In all cases, N class numbers shall include the negative sign.
SCC

NOTE 1 An SCC class number is only valid in connection with a descriptor (see 4.3).

NOTE 2 For converting from gravimetric concentration (g/m ) to numeric concentration (number of atoms,

molecules or ions per unit area), see 4.4.

Table 1 and Figure 1 further illustrate the ISO-SCC classification as a function of chemical concentration

on a surface.
Note also the parameters listed in Annex B that influence classification.
Table 1 — ISO-SCC classes
ISO-SCC class Concentration Concentration Concentration
2 2 2
(g/m ) (μg/cm ) (ng/cm )
0 6 9
0 10 10 10
−1 5 8
−1 10 10 10
−2 4 7
−2 10 10 10
−3 3 6
−3 10 10 10
−4 2 5
−4 10 10 10
−5 1 4
−5 10 10 10
−6 0 3
−6 10 10 10
−7 −1 2
−7 10 10 10
−8 −2 1
−8 10 10 10
−9 −3 0
−9 10 10 10
−10 −4 −1
−10 10 10 10
−11 −5 −2
−11 10 10 10
−12 −6 −3
−12 10 10 10
© ISO 2013 – All rights reserved 3
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)
Key
X surface mass concentration (g/m )
X surface mass concentration (μg/cm )
X surface mass concentration (ng/cm )
Y ISO-SCC class
Figure 1 — ISO-SCC classes as a function of concentration
4.3 ISO-SCC designation

An SCC class number is only valid in connection with a descriptor that includes the chemical substance

or group of substances for which this class number is valid. The ISO-SCC descriptor is expressed in the

format ISO-SCC Class N (X), where X is a chemical substance or group of chemical substances.

EXAMPLE 1 With an N-Methyl-2-pyrrolidone (NMP) sample, the measured value of chemical contamination

2 2

on a surface was 9,8E-7 g/m . This is within the class limit of 1E-6 g/m for Class −6. The designation would be:

“ISO-SCC Class −6 (NMP).”

EXAMPLE 2 With an organic compound sample, the measured value was 6E-5 g/m of total organic compounds

(TOC). This is within the class limit of 1E-4 g/m for Class −4. The designation would be: “ISO-SCC Class −4 (TOC).”

4.4 Converter for substances into surface atomic concentration

Very low concentrations are usually measured in surface number concentrations in the units of number

of molecules, atoms or ions per surface area [1/m ]. For classification purposes, these should be

4 © ISO 2013 – All rights reserved
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)

converted into surface mass concentrations in the unit mass per surface area [g/m ]. This conversion is

made using Formula (2):
MC()
SCC_number
C =
SCC
(2)
where

C is the surface number concentration = number of molecules, atoms or ions per sur-

SCC_number
face area [1/m ];
C is the surface mass concentration [g/m ];
SCC
N is Avogadro’s number [6,02 × 10 /mol];
M is the molar mass of atomic, molecular or ionic species [g/mol].

For information purposes, Figure A.4 in Annex A illustrates the relationship between chemical

concentration on a surface (expressed in g/m ) and the atomic concentration on a surface (expressed in

atoms/m ) for typical substances.
5 Measuring and monitoring the cleanliness of surfaces for chemical contamina-
tion and demonstration of compliance
5.1 Criteria for good cleanliness assessment

Figure D.2 in Annex D illustrates how to measure different types of contamination, showing differing

sampling and measuring methods.

Tests performed to demonstrate compliance shall be conducted in a classified environment where the

airborne chemical contaminant and the airborne particle contaminant levels do not negatively influence

the classification. Suitable measurement methods and calibrated instruments shall be used for all tests. The

environment, measurement methods and instruments shall be agreed upon between customer and supplier.

Additional test essentials are discussed in Annex C, while Annex D details measurement methods for

demonstrating compliance.

The list of typical measurement methods is not exhaustive. Alternative methods that produce results

with comparable accuracy may be specified by agreement between customer and supplier.

Measurement by different methods, even when those methods are correctly applied, may produce

different results of equal validity.
Repeated measurements are recommended as part of the statistical approach.

Specific problems such as concentration spikes may occur when measuring high levels of cleanliness.

Special quality control techniques will then be required, as explained in Figure D.4 in Annex D.

Precautions should be taken to reduce electrostatic charge around the test zone, as electrostatic charge

enhances chemical deposition onto surfaces. If the surface is neither conductive nor grounded or charge-

neutralized, electrostatic charges might occur. Therefore, test results may vary.

For typical methods of measurement for testing surface cleanliness by chemical concentration, refer

to Annex D.
© ISO 2013 – All rights reserved 5
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)
5.2 Documentation and reporting
5.2.1 Principle

Compliance with surface cleanliness by chemical concentration (SCC) class requirements, as specified

by the customer, is verified by performing measurements and by providing documentation of the results

and conditions of measurement. Details for demonstrating compliance shall be agreed upon between

customer and supplier in advance.
5.2.2 Testing

Tests performed to demonstrate compliance shall be conducted using suitable measurement methods

together with calibrated instruments whenever possible.

Measurement methods for demonstrating compliance are described in Annex D. The list of typical

methods described is not exhaustive. The testing environment shall be agreed between customer and

supplier. Alternative methods of comparable accuracy also may be specified by agreement between

customer and supplier.

Measurement by different methods, even when correctly applied, may produce different results of

equal validity.
Repeated measurements are recommended.
The testing environment should be agreed between customer and supplier.
5.2.3 Test report

The results from testing each surface shall be recorded and submitted as a comprehensive report,

together with a statement of compliance or non-compliance of the specified SCC class. The test report

shall include as a minimum the following:
a) name and address of the testing organization;
b) name of the person performing the test;
c) measurement environment;
d) date, time and duration of sampling;
e) time of measurement;

f) number and year of publication of this part of ISO 14644, i.e. ISO 14644-10:2013

g) clear identification of the location of the surface measured and specific designations for coordinates

of the surface, if applicable;

h) surface cleanliness by chemical concentration class with designation expressed as SCC class N;

i) acceptance criteria for the clean surface if agreed between customer and supplier;

j) specified measurement method(s), equipment resolution and detection limits;

k) details of the test procedure used, with any available data describing deviations from the test

procedure (if agreed);

l) identification of the instrument(s) used and current calibration certificate(s);

m) number of measurements performed;

n) test results, including chemical concentration(s) data for given substances, for all measurements

performed;
6 © ISO 2013 – All rights reserved
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)

o) surface condition, i.e. after final cleaning, before or after packaging, with agreement on type and

quality of packaging required.

An example of how this test report may be constructed can be found in Annex E. Other variations of the

test report which are agreeable to both the customer and supplier may be used.
© ISO 2013 – All rights reserved 7
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)
Annex A
(informative)
Conversion between different unit expressions of surface
concentration for chemical substances
A.1 Principle

In addition to the unit of surface mass concentration of g/m , there exist several different units to express

surface number concentration of an organic compound or a group of organics such as molecules/m ,

based on a number of organic molecules, and atoms C/m , based on a number of atoms of carbon

composing organic compound(s) under consideration.
A.2 Examples

For information purposes, Tables A.1 to A.3 illustrate how the different units of surface number

2 2

concentrations (molecules/m or atoms C/m ) can be converted into surface mass concentrations

2 2

in terms of carbon (g C/m ) or whole compound (g/m ) respectively using the examples of heptane,

hexadecane and di (2-ethylhexyl) phthalate.

Table A.1 — Illustration of the relationship between unit of surface concentration [g/m ] and

2 2

surface number concentration [molecules/m , atoms C/m ] for heptane (C H ), CAS No. 142-82-5

7 16
Symbol Unit M = 100,2, N = 7
Example 1 Example 2 Example 3 Example 4
Surface number molecular
C [molecules/m ] 1,00E+19 1,42E+18 7,16E+16 6,01E+16
molecule
concentration
Surface number concentra-
C [atoms C/m ] 7,00E+19 1,00E+19 5,00E+17 4,19E+17
carbon_number
tion in terms of carbon
Surface mass concentration
C [g C/m ] 1,39E-3 1,98E-4 1,00E-4 8,39E-6
carbon_mass
in terms of carbon
Surface mass concentration C [g/m ] 1,66E-3 2,36E-4 1,19E-4 1,00E-6
SCC

Table A.2 — Illustration of the relationship between unit of surface concentration [g/m ]

2 2

and surface number concentration [molecules/m , atoms C/m ] for hexadecane (C H ),

17 34
CAS No. 544-76-3
Symbol Unit M = 226,4, N = 17
Example 1 Example 2 Example 3 Example 4
Surface number molecular
C [molecules/m ] 1,00E+19 6,20E+18 3,12E+16 2,60E+16
molecule
concentration
Surface number concentra-
C [atoms C/m ] 1,59E+20 1,00E+19 5,00E+17 4,20E+17
carbon_atom
tion in terms of carbon
Surface mass concentration
C [g C/m ] 3,19E-3 2,00E-4 1,00E-4 8,49E-6
carbon_mass
in terms of carbon
Surface mass concentration C [g/m ] 3,77E-3 2,35E-4 1,17E-4 1,00E-4
SCC
8 © ISO 2013 – All rights reserved
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)

Table A.3 — Illustration of the relationship between unit of surface concentration [g/m ] and

2 2

surface number concentration [molecules/m , atoms C/m ] for di (2-ethylhexyl) phthalate

(C H O ), CAS No. 117-817-7
24 38 4
Symbol Unit M = 390,6, N = 24
Example 1 Example 2 Example 3 Example 4
Surface number molecular
C [molecules/m ] 1,00E+19 4,20E+18 2,00E+16 1,50E+16
molecule
concentration
Surface number concentra-
C [atoms C/m ] 2,39E+20 1,00E+19 4,89E+17 3,60E+17
carbon_atom
tion in terms of carbon
Surface mass concentration
C [g C/m ] 4,89E-3 2,04E-4 1,00E-4 7,37E-6
carbon_mass
in terms of carbon
Surface mass concentration C [g/m ] 6,62E-3 2,76E-4 1,35E-4 1,00E-4
SCC

Each surface number concentration can be converted to the original surface concentration from

Formulae (A.1) to (A.3):
M gm/ ol
   
CCgm//= moleculesm ×
SCCmolecule
   
N molecules//mol
(A.1)
 
C atoms Cm/
carbon _ atom M gm/ ol
 
 
C gm/ = ×
SCC
 
N atoms Cm/ olecule N moleculesm/ ol
[ ]] []
c a
(A.2)
 
C [/g Cm ]
carbon _ mass
 
M [g /mol]
 
2  c 
 
C gm/ = ×M [g /mol] (A.3)
SCC
 
N [atoms C/molecule]
where
N is the number of carbon composing organic compound(s) under consideration; and
M is the molar mass of carbon.

Surface number concentration with different types of unit expression based on Langmuir–Blodgett (LB)

film for typical organics is also listed in Table A.4. The surface number concentration can be obtained

from Formula (A.4):
2 13//23
 
CMgm/(= /)Nd (A.4)
SCCL_ Ba
 
where
d is the density of organic compound(s) in g/m .
© ISO 2013 – All rights reserved 9
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SIST EN ISO 14644-10:2013
ISO 14644-10:2013(E)
Table A.4 — Monolayer concentration based on Langmuir–Blodgett film
Di (2-ethylhexyl)
Heptane (C H ), Hexadecane (C H ),
7 16 17 34
phthalate (C H O ),
24 38 4
CAS No. 142-82-5 CAS No. 544-76-3
CAS No. 117-817-7
Surface number
...

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