EN ISO 14644-10:2013
(Main)Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
Reinräume und zugehörige Reinraumbereiche - Teil 10: Klassifizierung der chemischen Oberflächenreinheit (ISO 14644-10:2013)
Dieser Teil der Reihe ISO 14644 legt das Klassifizierungssystem für die Oberflächenreinheit in Reinräumen hinsichtlich vorhandener chemischer Verbindungen oder Elemente (einschließlich Molekülen, Ionen, Atomen und Partikeln) fest. Dieser Teil der Reihe ISO 14644 gilt für alle festen Oberflächen in Reinräumen und zugehörigen Reinraum¬bereichen, wie z. B. Wände, Decken, Fußböden, Arbeitsbereiche, Werkzeuge, Ausrüstungsgegenstände und Geräte.
ANMERKUNG 1 Für die Anwendung dieses Teils der Reihe ISO 14644 werden nur die chemischen Eigenschaften eines Partikels in Betracht gezogen. Die physikalischen Eigenschaften des Partikels werden nicht berücksichtigt und dieser Teil der Reihe ISO 14644 behandelt nicht die Wechselwirkung zwischen der Kontamination und der Oberfläche.
ANMERKUNG 2 Dieser Teil der Reihe ISO 14644 enthält nicht den Entstehungsprozess der Kontamination und zeitabhängige Einflüsse (Ablagerung, Sedimentation, Alterung usw.) oder prozessabhängige Tätigkeiten wie z. B. Transport und Handhabung. Auch enthält sie keine Leitlinie zu statistischen Qualitätskontrollverfahren zur Sicherstellung der Übereinstimmung.
Salles propres et environnements maîtrisés apparentés - Partie 10: Classification de la propreté chimique des surfaces (ISO 14644-10:2013)
L'ISO 14644-10:2013 définit le système de classification de la propreté des surfaces dans les salles propres en fonction de la présence de composés ou éléments chimiques (molécules, ions, atomes et particules). Elle s'applique à toute surface solide dans une salle propre ou un environnement maîtrisé, telle que murs, plafonds, sols, plans de travail, outils, équipements et dispositifs.
Čiste sobe in podobna nadzorovana okolja - 10. del: Klasifikacija čistosti površine na osnovi koncentracije onesnaževal (ISO 14644-10:2013)
Ta del standarda ISO 14644 določa sistem klasifikacije čistosti površine v čistih sobah glede na prisotnost kemičnih spojin ali elementov (vključno z molekulami, ioni, atomi in delci). Ta del standarda ISO 14644 se uporablja za vse trdne površine v čistih sobah in podobnih nadzorovanih okoljih, kot so zidovi, stropi, tla, delovno okolje, orodja, oprema in naprave. OPOMBA 1 V tem delu standarda ISO 14644 so obravnavane le kemične značilnosti delcev. Fizikalne lastnosti delca niso upoštevane in ta del standarda ISO 14644 ne zajema medsebojnih vplivov onesnaženosti in površine. OPOMBA 2 Ta del standarda ISO 14644 ne vključuje postopka nastajanja onesnaženosti in kakršnih koli časovno odvisnih vplivov (nalaganje, usedanje, staranje itd.) ali od postopkov odvisnih dejavnosti, kot sta prevoz in ravnanje. Prav tako ne vključuje navodil za metode kontrole statistične kakovosti, da se zagotovi ustreznost.
General Information
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Standards Content (Sample)
SLOVENSKI STANDARD
01-maj-2013
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QDRVQRYLNRQFHQWUDFLMHRQHVQDåHYDO ,62
Cleanrooms and associated controlled environments - Part 10: Classification of surface
cleanliness by chemical concentration (ISO 14644-10:2013)
Reinräume und zugehörige Reinraumbereiche - Teil 10: Klassifizierung der chemischen
Oberflächenreinheit (ISO 14644-10:2013)
Salles propres et environnements maîtrisés apparentés - Partie 10: Classification de la
propreté chimique des surfaces (ISO 14644-10:2013)
Ta slovenski standard je istoveten z: EN ISO 14644-10:2013
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
EUROPEAN STANDARD
EN ISO 14644-10
NORME EUROPÉENNE
EUROPÄISCHE NORM
March 2013
ICS 13.040.35
English Version
Cleanrooms and associated controlled environments - Part 10:
Classification of surface cleanliness by chemical concentration
(ISO 14644-10:2013)
Salles propres et environnements maîtrisés apparentés - Reinräume und zugehörige Reinraumbereiche - Teil 10:
Partie 10: Classification de la propreté chimique des Klassifizierung der chemischen Oberflächenreinheit (ISO
surfaces (ISO 14644-10:2013) 14644-10:2013)
This European Standard was approved by CEN on 2 February 2013.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United
Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2013 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-10:2013: E
worldwide for CEN national Members.
Contents Page
Foreword . 3
Foreword
This document (EN ISO 14644-10:2013) has been prepared by Technical Committee ISO/TC 209
"Cleanrooms and associated controlled environments" in collaboration with Technical Committee CEN/TC 243
“Cleanroom technology” the secretariat of which is held by BSI.
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by September 2013, and conflicting national standards shall be
withdrawn at the latest by September 2013.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,
Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.
Endorsement notice
The text of ISO 14644-10:2013 has been approved by CEN as EN ISO 14644-10:2013 without any
modification.
INTERNATIONAL ISO
STANDARD 14644-10
First edition
2013-03-01
Cleanrooms and associated controlled
environments —
Part 10:
Classification of surface cleanliness by
chemical concentration
Salles propres et environnements maîtrisés apparentés —
Partie 10: Classification de la propreté chimique des surfaces
Reference number
ISO 14644-10:2013(E)
©
ISO 2013
ISO 14644-10:2013(E)
© ISO 2013
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
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Tel. + 41 22 749 01 11
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Published in Switzerland
ii © ISO 2013 – All rights reserved
ISO 14644-10:2013(E)
Contents Page
Foreword .iv
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Classification . 2
4.1 Principles for establishing classification of clean surfaces in cleanrooms and
controlled environments . 2
4.2 Classification for surface cleanliness by chemical concentration . 2
4.3 ISO-SCC designation . 4
4.4 Converter for substances into surface atomic concentration . 4
5 Measuring and monitoring the cleanliness of surfaces for chemical contamination and
demonstration of compliance . 5
5.1 Criteria for good cleanliness assessment . 5
5.2 Documentation and reporting . 6
Annex A (informative) Conversion between different unit expressions of surface concentration for
chemical substances . 8
Annex B (informative) Parameters influencing testing and interpretation of results .15
Annex C (informative) Essential considerations for a good cleanliness assessment .16
Annex D (informative) Methods for testing surface cleanliness by chemical concentration .17
Annex E (informative) Test record documentation .28
Bibliography .29
ISO 14644-10:2013(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International
Standards adopted by the technical committees are circulated to the member bodies for voting.
Publication as an International Standard requires approval by at least 75 % of the member bodies
casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 14644-10 was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled
environments.
ISO 14644 consists of the following parts, under the general title Cleanrooms and associated controlled
environments:
— Part 1: Classification of air cleanliness by particle concentration
— Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
— Part 3: Test methods
— Part 4: Design, construction and start-up
— Part 5: Operations
— Part 6: Vocabulary
— Part 7: Separative devices (clean air hoods, glove boxes, isolators, mini-environments)
— Part 8: Classification of air cleanliness by chemical concentration (ACC)
— Part 9: Classification of surface cleanliness by particle concentration
— Part 10: Classification of surface cleanliness by chemical concentration
The following part is under preparation:
— Part 12: Classification of air cleanliness by nanoscale particle concentration
Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
will form the subject of a future Part 13.
iv © ISO 2013 – All rights reserved
INTERNATIONAL STANDARD ISO 14644-10:2013(E)
Cleanrooms and associated controlled environments —
Part 10:
Classification of surface cleanliness by chemical
concentration
1 Scope
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with
regard to the presence of chemical compounds or elements (including molecules, ions, atoms and
particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled
environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
NOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of
a particle. The physical properties of the particle are not considered and this part of ISO 14644 does not cover the
interaction between the contamination and the surface.
NOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent
influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and
handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.
2 Normative references
The following referenced documents are recommended for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.
1)
ISO 14644-1:— , Cleanrooms and associated controlled environments — Part 1: Classification of air
cleanliness by particle concentration
ISO 14644-6, Cleanrooms and associated controlled environments — Part 6: Vocabulary
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 14644-6 and the following apply.
3.1
air cleanliness by chemical concentration
ACC
level, expressed as an ISO Class N, which represents the maximum allowable concentration of a given
chemical species or group of chemical species, expressed in grams per cubic metre (g/m )
Note 1 to entry: This definition does not include macromolecules of biological origin, which are judged to be particles.
3.2
contaminant category
common name for a group of compounds with a specific and similar deleterious effect when deposited
on the surface of interest
1) To be published. (Revision of ISO 14644-1:1999.)
...
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