EN ISO 25178-700:2023
(Main)Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration, adjustment and verification of areal topography measuring instruments (ISO 25178-700:2022)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration, adjustment and verification of areal topography measuring instruments (ISO 25178-700:2022)
This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in ISO 25178-600.
Because surface profiles can be extracted from surface topography images, most of the methods described in this document can be adapted to profiling instruments.
Instrument-specific issues are not covered by this document. For example, for instruments based on mechanical probing where the probe follows an additional arcuate motion, additional measures are specified in ISO 25178-701.
This document does not include procedures for area-integrating methods, although those are also stated in ISO 25178-6. For example, light scattering belongs to a class of techniques known as area-integrating methods for measuring surface topography.
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Fläche - Teil 700: Kalibrierung, Justierung und Verifizierung von flächenhaften Topographiemessgeräten (ISO 25178-700:2022)
Dieses Dokument legt allgemeine Verfahren für die Kalibrierung, Justierung und Verifizierung von messtechnischen Merkmalen fest, die flächenhafte Topographiemessgeräte gemeinsam haben, wie in ISO 25178 600 angegeben.
Da Oberflächenprofile aus Bildern von Oberflächentopographien extrahiert werden können, können die meisten der in diesem Dokument beschriebenen Verfahren an Profilmessgeräte angepasst werden.
Messgerätespezifische Fragen werden in diesem Dokument nicht behandelt. Für Geräte, die auf mechanischer Abtastung beruhen und bei denen die Sonde einer zusätzlichen bogenförmigen Bewegung folgt, sind beispielsweise in ISO 25178 701 zusätzliche Maßnahmen festgelegt.
Dieses Dokument schließt keine Verfahren für flächenhaft integrierende Methoden ein, obwohl diese ebenfalls in ISO 25178 6 angegeben sind. Lichtstreuung gehört beispielsweise zu einer Klasse von Techni¬ken, die als flächenhaft integrierende Methoden zur Messung der Oberflächentopographie bekannt sind.
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 700: Étalonnage, ajustage et vérification d'instruments de mesure de la topographie des surfaces (ISO 25178-700:2022)
Le présent document spécifie des modes opératoires génériques pour l’étalonnage, l’ajustage et la vérification des caractéristiques métrologiques que les instruments de mesure de la topographie des surfaces ont en commun, comme indiqué dans l’ISO 25178‑600.
Comme les profils peuvent être extraits des images par topographie de surface, la plupart des méthodes décrites dans le présent document peuvent être adaptées aux instruments de profilométrie.
Les problèmes spécifiques des instruments ne sont pas couverts dans le présent document. Par exemple, pour les instruments basés sur un palpage mécanique, lorsque le palpeur suit un mouvement arqué additionnel, des mesures additionnelles sont spécifiées dans l’ISO 25178‑701.
Le présent document n’inclut pas de modes opératoires pour les méthodes d’intégration des surfaces, bien que celles-ci soient aussi mentionnées dans l’ISO 25178‑6. Par exemple, la diffusion de la lumière appartient à une classe de techniques connue sous le nom de méthodes d’intégration des surfaces servant à mesurer la topographie des surfaces.
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna - 700. del: Umerjanje, nastavitev in preverjanje merilnih instrumentov za površinsko topografijo (ISO 25178-700:2022)
Ta del standarda ISO 25178 določa splošne postopke za umerjanje, nastavitev in preverjanje
merilnih instrumentov za površinsko topografijo z ravninskim in ne polnim 3D-merilnim obnašanjem ter za določanje komponent merilne negotovosti, povezanih z učinki na meroslovne lastnosti. Upošteva, kaj je skupnega vsem površinskim instrumentom, vključno z instrumenti za točkovno zaznavanje z napravami za bočno skeniranje. Za specifična načela posameznega instrumenta se lahko v skupini 700 standarda ISO 25178 razvijejo drugi deli. Umerjanje kontaktnih sistemov z dodatnim ločnim gibanjem na primer ni zajeto v tem standardu in se ga lahko opiše v prihodnji reviziji standarda ISO 25178-701.
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
01-marec-2023
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna -
700. del: Umerjanje, nastavitev in preverjanje merilnih instrumentov za površinsko
topografijo (ISO 25178-700:2022)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration,
adjustment and verification of areal topography measuring instruments (ISO 25178-
700:2022)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Fläche - Teil
700: Kalibrierung, Justierung und Verifizierung von flächenhaften
Topographiemessgeräten (ISO 25178-700:2022)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 700:
Étalonnage, ajustage et vérification d'instruments de mesure de la topographie des
surfaces (ISO 25178-700:2022)
Ta slovenski standard je istoveten z: EN ISO 25178-700:2023
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
EN ISO 25178-700
EUROPEAN STANDARD
NORME EUROPÉENNE
January 2023
EUROPÄISCHE NORM
ICS 17.040.20; 17.040.40
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 700: Calibration, adjustment and verification
of areal topography measuring instruments (ISO 25178-
700:2022)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 700: Étalonnage, ajustage Oberflächenbeschaffenheit: Fläche - Teil 700:
et vérification d'instruments de mesure de la Kalibrierung, Justierung und Verifizierung von
topographie des surfaces (ISO 25178-700:2022) flächenhaften Topographiemessgeräten (ISO 25178-
700:2022)
This European Standard was approved by CEN on 12 December 2022.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2023 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-700:2023 E
worldwide for CEN national Members.
Contents Page
European foreword . 3
European foreword
This document (EN ISO 25178-700:2023) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the
secretariat of which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by July 2023, and conflicting national standards shall be
withdrawn at the latest by July 2023.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
Any feedback and questions on this document should be directed to the users’ national standards
body/national committee. A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the
United Kingdom.
Endorsement notice
The text of ISO 25178-700:2022 has been approved by CEN as EN ISO 25178-700:2023 without any
modification.
INTERNATIONAL ISO
STANDARD 25178-700
First edition
2022-12
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 700:
Calibration, adjustment and
verification of areal topography
measuring instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 700: Étalonnage, ajustage et vérification d'instruments de
mesure de la topographie des surfaces
Reference number
ISO 25178-700:2022(E)
ISO 25178-700:2022(E)
© ISO 2022
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
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Published in Switzerland
ii
ISO 25178-700:2022(E)
Contents Page
Foreword .v
Introduction . vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms.2
5 Calibration, adjustment and verification of an instrument . 3
5.1 General . 3
5.2 Methods for calibration, adjustment and verification . 3
5.3 Instrument calibration procedure . 4
5.3.1 Calibration by measurement standards . 4
5.3.2 Handling of defects on material measures . 4
5.3.3 Measurement procedures for calibration with measurement standards . 4
5.3.4 Calibration conditions . 4
6 Determination of the metrological characteristics of the instrument .5
6.1 General . 5
6.2 Reporting of the measurement conditions . 5
6.3 Handling of non-measured points . 5
6.4 Handling of spurious data and outliers . 5
6.5 Metrological characteristic: measurement noise, N , and instrument noise, N . 5
M I
6.5.1 General . 5
6.5.2 Determination of measurement and instrument noise: application of filters
or operators . 6
6.5.3 Determination of measurement and instrument noise: material measures
for instrument and measurement noise estimation . 6
6.5.4 Determination of measurement and instrument noise: procedure for the
determination of measurement noise . 6
6.6 Determination of flatness deviation . 10
6.6.1 General . 10
6.6.2 Material measure for determination of flatness deviation . 10
6.6.3 Procedure for determination of flatness deviation . 10
6.6.4 Improvement of flatness deviation estimation . 10
6.6.5 Application of filters and operators . 11
6.6.6 Calibration of flatness deviation . 11
6.7 Determination of the amplification coefficient α for the z-axis . 11
z
6.7.1 General . 11
6.7.2 Determination of the amplification coefficient α for the z-axis: material
z
measures . 11
6.7.3 Procedure for determination of amplification coefficient α for the
z
instrument z-axis .12
6.7.4 Type PGR (profile-groove-rectangular): groove, straight (rectangular or
trapezoidal) measurement areas .12
6.7.5 Other material measures for the instrument z-axis calibration. 14
6.7.6 Procedure for determination of amplification coefficient α for the
z
instrument z-axis: range and distance of measurement positions for the
calibration of the z-scale of the instrument . 15
6.7.7 Range and distance of measurement position for the calibration of a
reduced z-scale of the instrument . 15
6.8 Determination of z-linearity deviation l . 15
z
6.8.1 General .15
6.8.2 Determination of the complete and local z-linearity deviation l : z-scan
z
range .
...
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