EN 62416:2010
(Main)Semiconductor devices - Hot carrier test on MOS transistors
Semiconductor devices - Hot carrier test on MOS transistors
IEC 62416:2010 describes the wafer level hot carrier test on NMOS and PMOS transistors. The test is intended to determine whether the single transistors in a certain (C)MOS process meet the required hot carrier lifetime.
Halbleiterbauelemente - Hot-Carrier-Prüfverfahren für MOS-Transistoren
Dispositifs à semi-conducteurs - Essai de porteur chaud sur les transistors MOS
La CEI 62416:2010 décrit l'essai de porteur chaud au niveau de la plaquette sur les transistors NMOS et PMOS. Cet essai est destiné à déterminer si les transistors individuels sont conformes à la durée de vie exigée du porteur chaud dans un processus (C)MOS donné.",PE
Polprevodniški elementi - Preskušanje z vročimi nosilci pri tranzistorjih MOS (IEC 62416:2010)
Ta standard opisuje preskušanje z vročimi nosilci na ploščici pri tranzistorjih NMOS in PMOS. Preskus je namenjen ugotavljanju, ali posamezni tranzistorji v določenem (C)MOS procesu ustrezajo zahtevani življenjski dobi za vroče nosilce.
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
01-september-2010
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Semiconductor devices - Hot carrier test on MOS transistors (IEC 62416:2010)
Halbleiterbauelemente - Hot-Carrier-Prüfverfahren für MOS-Transistoren (IEC
62416:2010)
Dispositifs à semi-conducteurs - Essai de porteur chaud sur les transistors MOS (CEI
62416:2010)
Ta slovenski standard je istoveten z: EN 62416:2010
ICS:
31.080.30 Tranzistorji Transistors
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
EUROPEAN STANDARD
EN 62416
NORME EUROPÉENNE
June 2010
EUROPÄISCHE NORM
ICS 31.080
English version
Semiconductor devices -
Hot carrier test on MOS transistors
(IEC 62416:2010)
Dispositifs à semi-conducteurs - Halbleiterbauelemente -
Essai de porteur chaud sur les transistors Hot-Carrier-Prüfverfahren für MOS-
MOS Transistoren
(CEI 62416:2010) (IEC 62416:2010)
This European Standard was approved by CENELEC on 2010-06-01. CENELEC members are bound to comply
with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard
the status of a national standard without any alteration.
Up-to-date lists and bibliographical references concerning such national standards may be obtained on
application to the Central Secretariat or to any CENELEC member.
This European Standard exists in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CENELEC member into its own language and notified
to the Central Secretariat has the same status as the official versions.
CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus,
the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy,
Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia,
Spain, Sweden, Switzerland and the United Kingdom.
CENELEC
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung
Management Centre: Avenue Marnix 17, B - 1000 Brussels
© 2010 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members.
Ref. No. EN 62416:2010 E
Foreword
The text of document 47/2041/FDIS, future edition 1 of IEC 62416, prepared by IEC TC 47,
Semiconductor devices, was submitted to the IEC-CENELEC parallel vote and was approved by
CENELEC as EN 62416 on 2010-06-01.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN and CENELEC shall not be held responsible for identifying any or all such patent
rights.
The following dates were fixed:
– latest date by which the EN has to be implemented
at national level by publication of an identical
(dop) 2011-03-01
national standard or by endorsement
– latest date by which the national standards conflicting
(dow) 2013-06-01
with the EN have to be withdrawn
__________
Endorsement notice
The text of the International Standard IEC 62416:2010 was approved by CENELEC as a European
Standard without any modification.
__________
IEC 62416 ®
Edition 1.0 2010-04
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Semiconductor devices – Hot carrier test on MOS transistors
Dispositifs à semiconducteurs – Essai de porteur chaud sur les transistors MOS
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
K
CODE PRIX
ICS 31.080 ISBN 978-2-88910-695-0
– 2 – 62416 © IEC:2010
CONTENTS
FOREWORD.3
1 Scope.5
2 Abbreviations and letter symbols .5
3 Test structures .6
4 Stress time .6
5 Stress conditions .6
6 Sample size.7
7 Temperature.7
8 Failure criteria .7
9 Lifetime estimation method.7
9.1 DC acceleration models .7
9.1.1 General .7
9.1.2 Method 1: extrapolation vs. drain currrent.8
9.1.3 Method 2: extrapolation vs. drain bias and channel length .8
9.2 AC estimation model .9
10 Lifetime requirements .9
11 Reporting .9
Bibliography.10
62416 © IEC:2010 – 3 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
HOT CARRIER TEST ON MOS TRANSISTORS
FOREWORD
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9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 62416 has been prepared by IEC technical committee 47:
Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
47/2041/FDIS 47/2048/RVD
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.
– 4 – 62416 © IEC:2010
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC web site under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
62416 © IEC:2010 – 5 –
SEMICOND
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