EN 62047-20:2014
(Main)Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
IEC 62047-20:2014 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes. Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor lasers are widely used for device technology of gyroscopes.
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 20: Gyroskope
Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 20: Gyroscopes
L'IEC 62047-20:2014 spécifie les termes et définitions, les valeurs assignées et les caractéristiques, ainsi que les méthodes de mesure des gyroscopes. Les gyroscopes sont principalement utilisés dans des applications grand public, des applications industrielles générales et des applications aérospatiales. Les dispositifs microélectromécaniques (MEMS, Micro-Electrical-Mechanical Systems) et les lasers à semiconducteur sont largement utilisés dans la technologie des dispositifs de gyroscopes.
Polprevodniški elementi - Mikroelektromehanski elementi - 20. del: Žiroskopi (IEC 62047-20:2014)
Standard EN IEC 62047-20 določa izraze in definicije, mejne vrednosti in karakteristike ter merilne metode žiroskopov. Žiroskopi se uporabljajo predvsem za potrošniško in splošno industrijsko uporabo ter uporabo v aeronavtiki. MEMS in polprevodniški laserji se pogosto uporabljajo za tehnologijo elementov žiroskopov. V nadaljevanju se žiroskopu lahko reče tudi žiro.
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
01-november-2014
Polprevodniški elementi - Mikroelektromehanski elementi - 20. del: Žiroskopi (IEC
62047-20:2014)
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
/
/
Ta slovenski standard je istoveten z: EN 62047-20:2014
ICS:
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
EUROPEAN STANDARD EN 62047-20
NORME EUROPÉENNE
EUROPÄISCHE NORM
September 2014
ICS 31.080.99
English Version
Semiconductor devices - Micro-electromechanical devices -
Part 20: Gyroscopes
(IEC 62047-20:2014)
Dispositifs à semiconducteurs - Dispositifs Halbleiterbauelemente - Bauelemente der
microélectromécaniques - Mikrosystemtechnik -
Partie 20: Gyroscopes Teil 20: Gyroskope
(CEI 62047-20:2014) (IEC 62047-20:2014)
This European Standard was approved by CENELEC on 2014-07-31. CENELEC members are bound to comply with the CEN/CENELEC
Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration.
Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC
Management Centre or to any CENELEC member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the
same status as the official versions.
CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic,
Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,
Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2014 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC Members.
Ref. No. EN 62047-20:2014 E
Foreword
The text of document 47F/188/FDIS, future edition 1 of IEC 62047-20, prepared by SC 47F
“Microelectromechanical systems” of IEC/TC 47 “Semiconductor devices" was submitted to the
IEC-CENELEC parallel vote and approved by CENELEC as EN 62047-20:2014.
The following dates are fixed:
(dop) 2015-04-30
• latest date by which the document has to be
implemented at national level by
publication of an identical national
standard or by endorsement
• latest date by which the national (dow) 2017-07-31
standards conflicting with the
document have to be withdrawn
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CENELEC [and/or CEN] shall not be held responsible for identifying any or all such
patent rights.
Endorsement notice
The text of the International Standard IEC 62047-20:2014 was approved by CENELEC as a European
Standard without any modification.
IEC 62047-20 ®
Edition 1.0 2014-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 20: Gyroscopes
Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –
Partie 20: Gyroscopes
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
CODE PRIX XA
ICS 31.080.99 ISBN 978-2-8322-1667-5
– 2 – IEC 62047-20:2014 IEC 2014
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
4 Essential ratings and characteristics . 6
4.1 Categorization of gyro . 6
4.2 Absolute maximum ratings . 7
4.3 Normal operating rating . 8
4.4 Characteristics . 8
5 Measuring methods . 10
5.1 Scale factor . 10
5.1.1 Purpose . 10
5.1.2 Measuring circuit (circuit diagram) . 10
5.1.3 Measuring principle . 12
5.1.4 Measurement procedures . 21
5.1.5 Specified conditions . 23
5.2 Cross axis sensitivity . 24
5.2.1 Purpose . 24
5.2.2 Measuring circuit (circuit diagram) . 24
5.2.3 Principle of measurement . 25
5.2.4 Precautions to be observed during the measurements of the angular
rate applied . 27
5.2.5 Measurement procedures . 27
5.2.6 Specified conditions . 27
5.3 Bias . 28
5.3.1 Purpose . 28
5.3.2 Measuring circuit . 28
5.3.3 Principle of measurement . 30
5.3.4 Measurement procedures . 35
5.3.5 Specified conditions . 37
5.4 Output noise . 38
5.4.1 Purpose . 38
5.4.2 Measuring circuit . 38
5.4.3 Principle of measurement . 39
5.4.4 Precautions during measurement . 40
5.4.5 Measurement procedures . 40
5.4.6 Specified conditions . 43
5.5 Frequency band . 43
5.5.1 Purpose . 43
5.5.2 Measuring circuit . 43
5.5.3 Principle of measurement . 45
5.5.4 Precautions during measurement . 47
5.5.5 Measurement procedure . 47
5.5.6 Specified conditions . 49
5.6 Resolution . 49
5.6.1 Purpose . 49
IEC 62047-20:2014 IEC 2014 – 3 –
5.6.2 Measuring circuit . 49
5.6.3 Principle of measurement . 49
5.6.4 Measurement procedures . 50
5.6.5 Specified conditions . 51
Annex A (informative) Accuracy of measured value of gyro characteristics . 52
A.1 General . 52
A.2 Angle and angular rate . 52
A.3 Example of angular deviation occurring after calibration . 52
Bibliography . 53
Figure 1 – Example of measuring circuit . 11
Figure 2 – Example of wiring configuration . 12
Figure 3 – Example of measurement data when the angular rate is applied . 13
Figure 4 – Example of scale factor data at each temperature . 15
Figure 5 – Example of relationship between scale factor and scale factor temperature
coefficient at each temperature . 16
Figure 6 – Example of measurement of ratiometric error for the scale factor . 17
Figure 7 – Example measurement of scale factor stability . 19
Figure 8 – Example of measurement of scale factor symmetry . 20
Figure 9 – Measuring circuit for cross axis sensitivity . 25
Figure 10 – Principle of measurement for cross axis sensitivity . 26
Figure 11 – Measuring circuit 1 for bias . 29
Figure 12 – Measuring circuit 2 for bias . 30
Figure 13 – Example measurement of ratiometric error for bias . 32
Figure 14 – Bias temperature sensitivity and bias hysteresis. 34
Figure 15 – Bias linear acceleration sensitivity . 35
Figure 16 – Output noise measuring system . 39
Figure 17 – Example of wiring configuration for output noise. 39
Figure 18 – Frequency power spectrums. 40
Figure 19 – Angular random walk . 41
Figure 20 – Bias instability and Allan variance curve . 42
Figure 21 – Measuring circuit for frequency response . 44
Figure 22 – Example of wiring configuration for frequency response . 45
Figure 23 – Frequency response characteristics . 46
Figure 24 – Gain peak response characteristics . 46
Figure 25 – Calibration of frequency response . 48
Table 1 – Categories of gyro . 7
Table 2 – Absolute maximum ratings . 7
Table 3 – Normal operating ratings . 8
Table 4 – Characteristics .
...
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