Piezoelectric sensors - Part 1: Generic specifications

IEC 63041-1:2021 is available as IEC 63041-1:2021 RLV which contains the International Standard and its Redline version, showing all changes of the technical content compared to the previous edition.
IEC 63041-1:2021 applies to piezoelectric sensors of resonator, delay-line and non-acoustic types, which are used in physical and engineering sciences, chemistry and biochemistry, medical and environmental sciences, etc. The purpose of this document is to specify the terms and definitions for piezoelectric sensors, and to make sure from a technological perspective that users understand the state-of-art piezoelectric sensors and how to use them correctly. This edition includes the following significant technical changes with respect to the previous edition:
- the new terms "piezoelectric sensor system" and "wireless SAW sensor system" and their definitions have been added;
- new types of sensor modules and sensor system have been added;
- some symbols of sensor elements are added in Clause 4;
- a new Figure B.3 has been added in Annex B;
- Annex C has been added.

Capteurs piézoélectriques - Partie 1: Spécifications génériques

IEC 63041-1:2021 est disponible sous forme de IEC 63041-1:2021 RLV qui contient la Norme internationale et sa version Redline, illustrant les modifications du contenu technique depuis l'édition précédente.
L'IEC 63041-1:2021 s'applique aux capteurs piézoélectriques de type résonateur, de type à ligne à retard et de type non acoustique, utilisés en sciences physiques, en sciences de l'ingénierie, en chimie et en biochimie, en sciences médicales et environnementales, etc. Le présent document a pour objet de spécifier les termes et définitions relatifs aux capteurs piézoélectriques et de vérifier, d'un point de vue technologique, que les utilisateurs ont une bonne approche des capteurs piézoélectriques de pointe et qu'ils savent les utiliser correctement. Cette édition inclut les modifications techniques majeures suivantes par rapport à l'édition précédente:
- ajout de nouveaux termes et définitions (système de capteur piézoélectrique et système de capteur à OAS sans fil);
- ajout de nouveaux types de modules et de systèmes de capteurs;
- ajout de certains symboles des éléments de capteurs à l'Article 4;
- ajout d’une nouvelle Figure B.3 à l'Annexe B;
- ajout de l’Annexe C.

General Information

Status
Published
Publication Date
16-Sep-2021
Current Stage
PPUB - Publication issued
Completion Date
17-Sep-2021
Ref Project

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IEC 63041-1
Edition 2.0 2021-09
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 1: Generic specifications
Capteurs piézoélectriques –
Partie 1: Spécifications génériques
IEC 63041-1:2021-09(en-fr)
---------------------- Page: 1 ----------------------
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---------------------- Page: 2 ----------------------
IEC 63041-1
Edition 2.0 2021-09
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 1: Generic specifications
Capteurs piézoélectriques –
Partie 1: Spécifications génériques
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.140 ISBN 978-2-8322-1023-7

Warning! Make sure that you obtained this publication from an authorized distributor.

Attention! Veuillez vous assurer que vous avez obtenu cette publication via un distributeur agréé.

® Registered trademark of the International Electrotechnical Commission
Marque déposée de la Commission Electrotechnique Internationale
---------------------- Page: 3 ----------------------
– 2 – IEC 63041-1:2021 © IEC 2021
CONTENTS

FOREWORD ........................................................................................................................... 5

1 Scope .............................................................................................................................. 7

2 Normative references ...................................................................................................... 7

3 Terms and definitions ...................................................................................................... 7

3.1 Piezoelectric sensors .............................................................................................. 8

3.2 Types of chemical sensors ...................................................................................... 9

3.3 Types of physical sensors ....................................................................................... 9

3.4 Types of sensor modules ...................................................................................... 10

3.5 Types of sensor systems....................................................................................... 10

4 Symbols of sensor elements .......................................................................................... 10

4.1 General ................................................................................................................. 10

4.2 Symbol for sensor elements of BAW resonator type .............................................. 10

4.3 Symbol for sensor elements of SAW resonator type .............................................. 11

4.4 Symbol for sensor elements of SAW delay-line type .............................................. 11

4.5 Symbol for sensor elements of non-acoustic type .................................................. 12

4.6 Symbol for wireless SAW sensor element ............................................................. 12

4.7 Symbols ................................................................................................................ 14

5 Specifications ................................................................................................................ 14

5.1 Sensor elements ................................................................................................... 14

5.1.1 General ......................................................................................................... 14

5.1.2 Sensor elements of resonator and delay-line types ........................................ 14

5.1.3 Sensor elements of non-acoustic type ........................................................... 15

5.2 Frequency ranges ................................................................................................. 15

5.3 Level of drive or input power ................................................................................. 15

5.4 Unwanted response .............................................................................................. 15

5.5 Analysis of measurements .................................................................................... 15

5.6 Enclosure ............................................................................................................. 16

5.7 Performance confirmation ..................................................................................... 16

5.8 Long-term and short-term stabilities ...................................................................... 16

5.9 Transmission power .............................................................................................. 16

6 Measurement and detection methods ............................................................................ 16

7 Delivery conditions ........................................................................................................ 16

7.1 Marking ................................................................................................................. 16

7.2 Wrapping .............................................................................................................. 16

7.3 Packaging ............................................................................................................. 17

8 Quality and reliability ..................................................................................................... 17

8.1 Reuse ................................................................................................................... 17

8.2 Validity of release ................................................................................................. 17

8.3 Test procedures .................................................................................................... 17

8.4 Screening requirements ........................................................................................ 17

8.5 Unchecked parameters ......................................................................................... 17

9 Test and measurement procedures ................................................................................ 17

9.1 General ................................................................................................................. 17

9.1.1 Test classification .......................................................................................... 17

9.1.2 Shipping test ................................................................................................. 17

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IEC 63041-1:2021 © IEC 2021 – 3 –

9.1.3 Mechanical and environmental test ................................................................ 18

9.2 Test and measurement conditions ......................................................................... 18

9.2.1 Standard conditions for testing ...................................................................... 18

9.2.2 Equilibrium state ............................................................................................ 18

9.2.3 Power supply ................................................................................................. 18

9.2.4 Alternative test system .................................................................................. 19

9.2.5 Visual inspection ........................................................................................... 19

9.3 Test conditions for shipment ................................................................................. 19

9.3.1 Temperature dependence of frequency, phase, insertion loss/gain,

motional resistance, and electric charge / voltage .......................................... 19

9.3.2 Unwanted response ....................................................................................... 19

9.3.3 Shunt capacitance ......................................................................................... 19

9.3.4 Insulation resistance ...................................................................................... 20

Annex A (normative) Measurement methods ........................................................................ 21

A.1 General ................................................................................................................. 21

A.2 Measurement methods using reflection and transmission characteristics .............. 21

A.3 Measurement methods using oscillation circuits .................................................... 22

A.4 Measurement method of non-acoustic type sensor elements and cells .................. 23

A.5 Other measurement methods ................................................................................ 23

Annex B (normative) Detection methods .............................................................................. 24

B.1 General ................................................................................................................. 24

B.2 Detection methods ................................................................................................ 24

B.2.1 Frequency difference measurement ............................................................... 24

B.2.2 Insertion loss/gain measurement ................................................................... 25

B.2.3 Phase difference measurement...................................................................... 26

B.2.4 Other detection methods ................................................................................ 26

Annex C (normative) Wireless SAW sensor .......................................................................... 27

C.1 General ................................................................................................................. 27

C.2 Detection methods ................................................................................................ 27

C.2.1 General ......................................................................................................... 27

C.2.2 Conceptual diagrams of wireless SAW resonator type sensor system ............ 27

C.2.3 Conceptual diagrams of wireless SAW reflective delay-line type sensor

system ........................................................................................................... 27

C.2.4 Key points of detection mechanism ................................................................ 28

C.2.5 Technical documents ..................................................................................... 28

Bibliography .......................................................................................................................... 29

Figure 1 – Conceptual diagrams for sensor elements of BAW resonator type ........................ 11

Figure 2 – Symbol for sensor elements of BAW resonator type ............................................. 11

Figure 3 – Conceptual diagram of sensor elements of SAW resonator type ........................... 11

Figure 4 – Symbol for sensor elements of SAW resonator type ............................................. 11

Figure 5 – Conceptual diagram for sensor elements of SAW delay-line type ......................... 12

Figure 6 – Symbol for sensor elements of SAW delay-line type ............................................. 12

Figure 7 – Conceptual diagrams for sensor elements of non-acoustic type............................ 12

Figure 8 – Symbol for sensor elements of non-acoustic type ................................................. 12

Figure 9 – Conceptual diagram for basic sensor elements of wireless SAW

resonator type ....................................................................................................................... 13

Figure 10 – Symbol for basic sensor elements of wireless SAW resonator type .................... 13

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– 4 – IEC 63041-1:2021 © IEC 2021

Figure 11 – Conceptual diagram for basic sensor elements of wireless SAW reflective

delay-line type ...................................................................................................................... 13

Figure 12 – Symbol for basic sensor elements of wireless SAW reflective

delay‑line type ...................................................................................................................... 13

Figure A.1 – Measurement method using reflection characteristics of BAW resonator

type sensor elements and cells ............................................................................................. 21

Figure A.2 – Measurement method using reflection characteristics of SAW resonator

type sensor elements and cells ............................................................................................. 21

Figure A.3 – Measurement method using transmission characteristics of SAW delay-

line type sensor elements and cells ...................................................................................... 22

Figure A.4 – Measurement method using oscillation circuit consisting of BAW

resonator type sensor elements and cells ............................................................................. 22

Figure A.5 – Measurement method using oscillation circuit consisting of SAW

resonator type sensor elements and cells ............................................................................. 22

Figure A.6 – Measurement method using oscillation circuit consisting of SAW delay-

line type sensor elements and cells ...................................................................................... 23

Figure A.7 – Measurement method using amplifier consisting of non-acoustic type

sensor elements and cells ..................................................................................................... 23

Figure B.1 – Measurement of frequency difference using two oscillation circuits ................... 24

Figure B.2 – Measurement of frequency difference using an oscillation circuit and

frequency synthesizer ........................................................................................................... 25

Figure B.3 – Conceptual diagram of piezoelectric dual mode sensor module ........................ 25

Figure B.4 – Measurement of insertion loss/gain difference using two oscillation

circuits .................................................................................................................................. 26

Figure B.5 – Measurement of phase difference using signal generator and phase

detector ................................................................................................................................ 26

Figure C.1 – Fundamental measurement system of wireless SAW resonator type

sensor .................................................................................................................................. 27

Figure C.2 – Fundamental measurement system of wireless SAW reflective delay-line

type sensor ........................................................................................................................... 28

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IEC 63041-1:2021 © IEC 2021 – 5 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 1: Generic specifications
FOREWORD

1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising

all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international

co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and

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with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for

Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.

2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international

consensus of opinion on the relevant subjects since each technical committee has representation from all

interested IEC National Committees.

3) IEC Publications have the form of recommendations for international use and are accepted by IEC National

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indispensable for the correct application of this publication.

9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent

rights. IEC shall not be held responsible for identifying any or all such patent rights.

IEC 63041-1 has been prepared by IEC technical committee 49: Piezoelectric, dielectric and

electrostatic devices and associated materials for frequency control, selection and detection. It

is an International Standard.

This second edition cancels and replaces the first edition published in 2017. This edition

constitutes a technical revision.

This edition includes the following significant technical changes with respect to the previous

edition:

a) the new terms "piezoelectric sensor system" and "wireless SAW sensor system" and their

definitions have been added;
b) new types of sensor modules and sensor system have been added;
c) some symbols of sensor elements are added in Clause 4;
d) a new Figure B.3 has been added in Annex B;
e) Annex C has been added.
---------------------- Page: 7 ----------------------
– 6 – IEC 63041-1:2021 © IEC 2021
The text of this International Standard is based on the following documents:
Draft Report on voting
49/1357/CDV 49/1364/RVC

Full information on the voting for its approval can be found in the report on voting indicated in

the above table.
The language used for the development of this International Standard is English.

This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in

accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available

at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are

described in greater detail at www.iec.ch/standardsdev/publications.

A list of all parts in the IEC 63041 series, published under the general title Piezoelectric sensors,

can be found on the IEC website.

The committee has decided that the contents of this document will remain unchanged until the

stability date indicated on the IEC website under webstore.iec.ch in the data related to the

specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
---------------------- Page: 8 ----------------------
IEC 63041-1:2021 © IEC 2021 – 7 –
PIEZOELECTRIC SENSORS –
Part 1: Generic specifications
1 Scope

This part of IEC 63041 applies to piezoelectric sensors of resonator, delay-line and non-

acoustic types, which are used in physical and engineering sciences, chemistry and

biochemistry, medical and environmental sciences, etc.

The purpose of this document is to specify the terms and definitions for piezoelectric sensors,

and to make sure from a technological perspective that users understand the state-of-art

piezoelectric sensors and how to use them correctly.
2 Normative references

The following documents are referred to in the text in such a way that some or all of their content

constitutes requirements of this document. For dated references, only the edition cited applies.

For undated references, the latest edition of the referenced document (including any

amendments) applies.
IEC 60027 (all parts), Letter symbols to be used in electrical technology

IEC 60050-561, International Electrotechnical Vocabulary – Part 561: Piezoelectric, dielectric

and electrostatic devices and associated materials for frequency control, selection and

detection

IEC 60122-2-1, Quartz crystal units for frequency control and selection – Part 2: Guide to the

use of quartz crystal units for frequency control and selection – Section One: Quartz crystals

for microprocessor clock supply

IEC 60444-9, Measurement of quartz crystal unit parameters – Part 9: Measurement of spurious

resonances of piezoelectric crystal units

IEC 60617, Graphical symbols for diagrams, available at https://std.iec.ch/iec60617

IEC 63041-3:2020, Piezoelectric sensors – Part 3: Physical sensors

ISO 2859-1:1999, Sampling procedures for inspection by attributes – Part 1: Sampling schemes

indexed by acceptance quality limit (AQL) for lot-by-lot inspection
ISO 80000-1, Quantities and units – Part 1: General
3 Terms and definitions

For the purposes of this document, the terms and definitions given in IEC 60027, IEC 60050-

561, IEC 60617, ISO 80000-1 and the following apply.
---------------------- Page: 9 ----------------------
– 8 – IEC 63041-1:2021 © IEC 2021

ISO and IEC maintain terminological databases for use in standardization at the following

addresses:
• IEC Electropedia: available at https://www.electropedia.org/
• ISO Online browsing platform: available at https://www.iso.org/obp

NOTE Piezoelectric sensors covered herein are those used for the detection and measurement of physical

quantities, chemical substances or biological molecules.
3.1 Piezoelectric sensors
3.1.1
piezoelectric sensor element

electronic component which is able to detect physical quantities as a change in its frequency,

phase, delay, electrical charge, resistance, Q-value, bandwidth, etc.

Note 1 to entry: For chemical and biochemical sensor applications, the piezoelectric sensor element includes a

sensitive or receptive layer (target recognition material).
3.1.2
resonator type sensor element
piezoelectric sensor component using acoustic resonances
3.1.3
delay-line type sensor element

piezoelectric sensor component using a delay-line of surface acoustic wave (SAW) transversal

filter type
3.1.4
non-acoustic type sensor element

piezoelectric sensor component using the electrical charge induced by a quasi-static force,

torque or the like

Note 1 to entry: Here, the term, "non-acoustic", represents "quasi-static piezoelectric". Accordingly, the

(piezoelectric) non-acoustic type sensor element means a sensor element using the quasi-static piezoelectric effect.

3.1.5
piezoelectric sensor cell

sensor element equipped with necessary mechanical accessories and attachments to correctly

detect the parameters to be measured
3.1.6
piezoelectric sensor module

sensor element or cell equipped with electronic accessories for interfacing to external data

acquisitions
3.1.7
piezoelectric sensor system

organized system including detection, amplification of detected value, communication with other

equipment and analysis of detected value
Note 1 to entry: Here, these functions cooperate mutually.
3.1.8
piezoelectric sensor
generic term that includes a sensor element, cell, module and system
---------------------- Page: 10 ----------------------
IEC 63041-1:2021 © IEC 2021 – 9 –
3.1.9
QCM
quartz crystal microbalance
one of the families of chemical and biochemical sensors using crystal resonato
...

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