IEC TS 61994-5:2023
(Main)Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection - Glossary - Part 5: Piezoelectric sensors
Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection - Glossary - Part 5: Piezoelectric sensors
IEC TS 61994-5:2023 gives the terms and definitions for sensors representing the state of the art, which are intended for manufacturing piezoelectric elements, cells, modules and the systems. This edition includes the following significant technical changes with respect to the previous edition: New terms and definitions have been added from IEC 63041-1:2021 and IEC 63041-3:2020.
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IEC TS 61994-5 ®
Edition 2.0 2023-09
TECHNICAL
SPECIFICATION
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 5: Piezoelectric sensors
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.
IEC Secretariat Tel.: +41 22 919 02 11
3, rue de Varembé info@iec.ch
CH-1211 Geneva 20 www.iec.ch
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.
About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.
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(IEV) online.
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further assistance, please contact the Customer Service
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IEC TS 61994-5 ®
Edition 2.0 2023-09
TECHNICAL
SPECIFICATION
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 5: Piezoelectric sensors
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 01.040.31; 31.140 ISBN 978-2-8322-7500-9
– 2 – IEC TS 61994-5:2023 © IEC 2023
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
Bibliography . 11
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,
SELECTION AND DETECTION –
GLOSSARY –
Part 5: Piezoelectric sensors
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international
co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and
in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports,
Publicly Available Specifications (PAS) and Guides (hereafter referred to as "IEC Publication(s)"). Their
preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with
may participate in this preparatory work. International, governmental and non-governmental organizations liaising
with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for
Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence between
any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) IEC draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). IEC takes no position concerning the evidence, validity or applicability of any claimed patent rights in
respect thereof. As of the date of publication of this document, IEC had not received notice of (a) patent(s), which
may be required to implement this document. However, implementers are cautioned that this may not represent
the latest information, which may be obtained from the patent database available at https://patents.iec.ch. IEC
shall not be held responsible for identifying any or all such patent rights.
IEC TS 61944-5 has been prepared by IEC technical committee 49: Piezoelectric, dielectric and
electrostatic devices and associated materials for frequency control, selection and detection. It
is a Technical Specification.
This second edition cancels and replaces the first edition published in 2019. This edition
constitutes a technical revision.
This edition includes the following significant technical changes with respect to the previous
edition:
a) New terms and definitions have been added from IEC 63041-1:2021 and IEC 63041-3:2020.
– 4 – IEC TS 61994-5:2023 © IEC 2023
The text of this Technical Specification is based on the following documents:
Draft Report on voting
49/1421/DTS 49/1439/RVDTS
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this Technical Specification is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/publications.
A list of all parts in the IEC 61994 series, published under the general title Piezoelectric,
dielectric and electrostatic devices and associated materials for frequency control, selection
and detection – Glossary, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
• reconfirmed,
• withdrawn, or
• revised.
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,
SELECTION AND DETECTION –
GLOSSARY –
Part 5: Piezoelectric sensors
1 Scope
This part of IEC 61994 gives the terms and definitions for sensors representing the state of the
art, which are intended for manufacturing piezoelectric elements, cells, modules and the
systems.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminology databases for use in standardization at the following
addresses:
• IEC Electropedia: available at https://www.electropedia.org/
• ISO Online browsing platform: available at https://www.iso.org/obp
3.1
delay line type sensor element
piezoelectric sensor component using a delay line of SAW transversal filter type
[SOURCE: IEC 63041-1:2021, 3.1.3, modified – "surface acoustic wave (SAW) transversal filter
type" of the definition has been replaced by "SAW transversal filter type".]
3.2
differential sensor
piezoelectric sensor element that can detect physical quantities from a differential change in
resonance frequencies or delays of two independent and same micro-acoustic structures
assembled on the same or different piezoelectric plates
Note 1 to entry: The differential sensor is a general term for sensors of the above type.
[SOURCE: IEC 63041-3:2020, 3.1.6, modified – "piezoelectric sensor which is able to" of the
definition has been replaced by "piezoelectric sensor element that can". "from a change in
resonance frequencies" has been replaced by "from a differential change in resonance
frequencies".]
– 6 – IEC TS 61994-5:2023 © IEC 2023
3.3
dual mode sensor
piezoelectric sensor element that can detect physical quantities from a change in resonance
frequencies of two independent modes on a single piezoelectric plate
Note 1 to entry: In order to achieve improved precision and/or to eliminate undesirable influence factors, sensor
solutions are employed that utilize two or more modes. By evaluation of combinations of those modes' sensitivities
to various ambient conditions, improved detection sensitivity can be achieved, whereas undesirable sensitivities can
be reduced or eliminated.
Note 2 to entry: The dual mode sensor is a general term for sensors of the above type
[SOURCE: IEC 63041-3:2020, 3.1.5, modified – "piezoelectric sensor which is able to" of
definition has been replaced by "piezoelectric sensor element that can". Note 1 to entry has
been rewritten. Note 2 to entry has been added.]
3.4
dual mode sensor module
dual mode sensor element or cell equipped with circuit units for temperature compensation and
electronic accessories for interfacing to external data acquisitions
[SOURCE: IEC 63041-1:2021, 3.4.2, modified – The note to entry has been removed.]
3.5
dual mode sensor system
system that consists of dual mode sensor modules, electronic devices, PCs, memory, wired or
wireless devices, software, etc.
Note 1 to entry: The dual mode quartz crystal sensor system is used in oil-well exploration and gas-well exploration
systems.
[SOURCE: IEC 63041-1:2021, 3.5.2, modified – Since the dual mode sensor is not necessarily
limited to quartz crystal-based sensors, the definition was rewritten as above.]
3.6
multi-measurand sensor
piezoelectric sensor element that can detect two or more different physical quantities from an
analysis of different sensor responses
Note 1 to entry: The multi-measurand sensor is a general term for sensors of the above type,
[SOURCE: IEC 63041-3:2020, 3.1.7, modified – The words "piezoelectric sensor which is able
to" of the definition have been replaced by "piezoelectric sensor element that can". Note 1 to
entry has been added.]
3.7
piezoelectric acceleration sensor element
piezoelectric sensor component whose resonance frequency or delay is used to measure the
change in velocity of an object with time
[SOURCE: IEC 63041-3:2020, 3.1.1]
3.8
piezoelectric biochemical sensor element
piezoelectric sensor component including a receptive layer, which is necessary for the practical
measurement of complex biological molecules in quantity, and which works mainly in aqueous
media and detects biomolecules therein
Note 1 to entry: The receptive layer is usually formed as a thin film of a target recognition material on the surface
of the piezoelectric sensor element and is often called a target recognition material.
[SOURCE: IEC 63041-1:2021, 3.2.2, modified – In the definition, "(target recognition material)"
has been deleted. Note 1 to entry has been added.]
3.9
piezoel
...
IEC TS 61994-5 ®
Edition 2.0 2023-09
REDLINE VERSION
TECHNICAL
SPECIFICATION
colour
inside
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 5: Piezoelectric sensors
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.
IEC Secretariat Tel.: +41 22 919 02 11
3, rue de Varembé info@iec.ch
CH-1211 Geneva 20 www.iec.ch
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.
About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.
IEC publications search - webstore.iec.ch/advsearchform IEC Products & Services Portal - products.iec.ch
The advanced search enables to find IEC publications by a Discover our powerful search engine and read freely all the
variety of criteria (reference number, text, technical publications previews. With a subscription you will always have
committee, …). It also gives information on projects, replaced access to up to date content tailored to your needs.
and withdrawn publications.
Electropedia - www.electropedia.org
IEC Just Published - webstore.iec.ch/justpublished
The world's leading online dictionary on electrotechnology,
Stay up to date on all new IEC publications. Just Published
containing more than 22 300 terminological entries in English
details all new publications released. Available online and once
and French, with equivalent terms in 19 additional languages.
a month by email.
Also known as the International Electrotechnical Vocabulary
(IEV) online.
IEC Customer Service Centre - webstore.iec.ch/csc
If you wish to give us your feedback on this publication or need
further assistance, please contact the Customer Service
Centre: sales@iec.ch.
IEC TS 61994-5 ®
Edition 2.0 2023-09
REDLINE VERSION
TECHNICAL
SPECIFICATION
colour
inside
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 5: Piezoelectric sensors
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 01.040.31; 31.140 ISBN 978-2-8322-7557-3
– 2 – IEC TS 61994-5:2023 RLV © IEC 2023
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
Bibliography . 11
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,
SELECTION AND DETECTION –
GLOSSARY –
Part 5: Piezoelectric sensors
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international
co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and
in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports,
Publicly Available Specifications (PAS) and Guides (hereafter referred to as "IEC Publication(s)"). Their
preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with
may participate in this preparatory work. International, governmental and non-governmental organizations liaising
with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for
Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence between
any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) IEC draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). IEC takes no position concerning the evidence, validity or applicability of any claimed patent rights in
respect thereof. As of the date of publication of this document, IEC had not received notice of (a) patent(s), which
may be required to implement this document. However, implementers are cautioned that this may not represent
the latest information, which may be obtained from the patent database available at https://patents.iec.ch. IEC
shall not be held responsible for identifying any or all such patent rights.
This redline version of the official IEC Standard allows the user to identify the changes
made to the previous edition IEC TS 61944-5:2019. A vertical bar appears in the margin
wherever a change has been made. Additions are in green text, deletions are in
strikethrough red text.
– 4 – IEC TS 61994-5:2023 RLV © IEC 2023
IEC TS 61944-5 has been prepared by IEC technical committee 49: Piezoelectric, dielectric and
electrostatic devices and associated materials for frequency control, selection and detection. It
is a Technical Specification.
This second edition cancels and replaces the first edition published in 2019. This edition
constitutes a technical revision.
This edition includes the following significant technical changes with respect to the previous
edition:
a) New terms and definitions have been added from IEC 63041-1:2021 and IEC 63041-3:2020.
The text of this Technical Specification is based on the following documents:
Draft Report on voting
49/1421/DTS 49/1439/RVDTS
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this Technical Specification is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/publications.
A list of all parts in the IEC 61994 series, published under the general title Piezoelectric,
dielectric and electrostatic devices and associated materials for frequency control, selection
and detection – Glossary, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
• reconfirmed,
• withdrawn, or
• revised.
IMPORTANT – The "colour inside" logo on the cover page of this document indicates
that it contains colours which are considered to be useful for the correct understanding
of its contents. Users should therefore print this document using a colour printer.
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,
SELECTION AND DETECTION –
GLOSSARY –
Part 5: Piezoelectric sensors
1 Scope
This part of IEC 61994 gives the terms and definitions for sensors representing the state of the
art, which are intended for manufacturing piezoelectric elements, cells, modules and the
systems.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminology databases for use in standardization at the following
addresses:
• IEC Electropedia: available at https://www.electropedia.org/
• ISO Online browsing platform: available at https://www.iso.org/obp
3.1
delay line type sensor element
piezoelectric sensor component using a delay line of surface acoustic wave ( SAW) transversal
filter type
[SOURCE: IEC 63041-1:2017, 3.2.3, modified – The phrase has been rewritten in an easy-to-
understand manner using a well-known term IEC 63041-1:2021, 3.1.3, modified – "surface
acoustic wave (SAW) transversal filter type" of the definition has been replaced by "SAW
transversal filter type".]
3.2
non-acoustic type sensor element
piezoelectric sensor component using the electrical charge induced by a quasi-static force,
torque or the like
[SOURCE: IEC 63041-1:2017, 3.2.4, modified – Note 1 to entry has been deleted.]
3.2
differential sensor
piezoelectric sensor element that can detect physical quantities from a differential change in
resonance frequencies or delays of two independent and same micro-acoustic structures
assembled on the same or different piezoelectric plates
Note 1 to entry: The differential sensor is a general term for sensors of the above type.
– 6 – IEC TS 61994-5:2023 RLV © IEC 2023
[SOURCE: IEC 63041-3:2020, 3.1.6, modified – "piezoelectric sensor which is able to" of the
definition has been replaced by "piezoelectric sensor element that can". "from a change in
resonance frequencies" has been replaced by "from a differential change in resonance
frequencies".]
3.3
dual mode sensor
piezoelectric sensor element that can detect physical quantities from a change in resonance
frequencies of two independent modes on a single piezoelectric plate
Note 1 to entry: In order to achieve improved precision and/or to eliminate undesirable influence factors, sensor
solutions are employed that utilize two or more modes. By evaluation of combinations of those modes' sensitivities
to various ambient conditions, improved detection sensitivity can be achieved, whereas undesirable sensitivities can
be reduced or eliminated.
Note 2 to entry: The dual mode sensor is a general term for sensors of the above type
[SOURCE: IEC 63041-3:2020, 3.1.5, modified – "piezoelectric sensor which is able to" of
definition has been replaced by "piezoelectric sensor element that can". Note 1 to entry has
been rewritten. Note 2 to entry has been added.]
3.4
dual mode sensor module
dual mode sensor element or cell equipped with circuit units for temperature compensation and
electronic accessories for interfacing to external data acquisitions
[SOURCE: IEC 63041-1:2021, 3.4.2, modified – The note to entry has been removed.]
3.5
dual mode sensor system
system that consists of dual mode sensor modules, electronic devices, PCs, memory, wired or
wireless devices, software, etc.
Note 1 to entry: The dual mode quartz crystal sensor system is used in oil-well exploration and gas-well exploration
systems.
[SOURCE: IEC 63041-1:2021, 3.5.2, modified – Since the dual mode sensor is not necessarily
limited to quartz crystal-based sensors, the definition was rewritten as above.]
3.6
multi-measurand sensor
piezoelectric sensor element that can detect two or more different physical quantities from an
analysis of different sensor responses
Note 1 to entry: The multi-measurand sensor is a general term for sensors of the above type,
[SOURCE: IEC 63041-3:2020, 3.1.7, modified – The words "piezoelectric sensor which is able
to" of the definition have been replaced by "piezoelectric sensor element that can". Note 1 to
entry has been added.]
3.7
piezoelectric acceleration sensor element
piezoelectric sensor component whose r
...
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