IEC TS 61994-5:2023
(Main)Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection - Glossary - Part 5: Piezoelectric sensors
Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection - Glossary - Part 5: Piezoelectric sensors
IEC TS 61994-5:2023 gives the terms and definitions for sensors representing the state of the art, which are intended for manufacturing piezoelectric elements, cells, modules and the systems. This edition includes the following significant technical changes with respect to the previous edition: New terms and definitions have been added from IEC 63041-1:2021 and IEC 63041-3:2020.
General Information
Relations
Overview
IEC TS 61994-5:2023 is the IEC Technical Specification (Edition 2.0, 2023‑09) that provides a consolidated glossary of terms and definitions for piezoelectric sensors. It defines state-of-the-art vocabulary used in the manufacture and specification of piezoelectric elements, cells, modules and systems. This edition updates and expands the terminology by incorporating new terms from IEC 63041‑1:2021 and IEC 63041‑3:2020. As a glossary (no normative references), its primary purpose is to harmonize language across industry, R&D, testing and standards work.
Key topics
- Scope: Terms and definitions covering piezoelectric sensor elements, cells, modules and systems.
- Sensor types defined: e.g. delay line type sensor element (SAW transversal filter type), non-acoustic type, differential sensor, dual mode sensor, multi‑measurand sensor.
- Functional sensor element definitions: Specific piezoelectric sensor element categories such as acceleration, biochemical, chemical (gas), film‑thickness, force, humidity, and pressure sensor elements.
- Component and system definitions: Clear distinctions between piezoelectric sensor element, sensor cell (element + mechanical attachments), sensor module (element/cell + electronics), and sensor system (modules + devices/software).
- Terminology updates: Incorporation of recently established terms from IEC 63041 series to reflect modern sensor architectures and multifunction sensing approaches.
- Documentation guidance: Terms are aligned with IEC Electropedia and ISO/IEC directives to support consistent international use.
Applications and practical value
- Product design & manufacturing: Use standardized definitions to specify piezoelectric elements, interfaces and modules precisely during product development and supplier contracts.
- Specification & procurement: Avoid ambiguity in datasheets and procurement documents by referencing IEC TS 61994‑5 terms.
- Test laboratories & certification: Ensure consistent test descriptions and reporting for piezoelectric sensors.
- R&D and system integration: Facilitate communication across multidisciplinary teams (materials, electronics, firmware, analytics) when developing dual‑mode or multi‑measurand sensors.
- Industry examples: Film‑thickness control in vacuum deposition, inertial measurement systems, gas sensing, biochemical detection, and oil/gas exploration systems use the vocabulary defined in this TS.
Who should use this standard
- Sensor manufacturers and materials suppliers
- Electronics and embedded systems designers integrating piezo sensors
- Test labs, quality and compliance teams
- Standards writers, technical writers and procurement specialists
- R&D teams working on SAW, quartz and other piezoelectric sensor technologies
Related standards
- IEC 63041‑1:2021, IEC 63041‑3:2020 (source of added terms)
- Other parts of the IEC 61994 series (glossary for frequency control, selection and detection)
- IEC Electropedia (terminology database) - useful for cross‑reference
Keywords: IEC TS 61994-5:2023, piezoelectric sensors, glossary, terms and definitions, piezoelectric sensor element, sensor module, dual mode sensor, multi-measurand sensor, SAW delay line.
Standards Content (Sample)
IEC TS 61994-5 ®
Edition 2.0 2023-09
TECHNICAL
SPECIFICATION
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 5: Piezoelectric sensors
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.
IEC Secretariat Tel.: +41 22 919 02 11
3, rue de Varembé info@iec.ch
CH-1211 Geneva 20 www.iec.ch
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.
About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.
IEC publications search - webstore.iec.ch/advsearchform IEC Products & Services Portal - products.iec.ch
The advanced search enables to find IEC publications by a Discover our powerful search engine and read freely all the
variety of criteria (reference number, text, technical publications previews. With a subscription you will always have
committee, …). It also gives information on projects, replaced access to up to date content tailored to your needs.
and withdrawn publications.
Electropedia - www.electropedia.org
IEC Just Published - webstore.iec.ch/justpublished
The world's leading online dictionary on electrotechnology,
Stay up to date on all new IEC publications. Just Published
containing more than 22 300 terminological entries in English
details all new publications released. Available online and once
and French, with equivalent terms in 19 additional languages.
a month by email.
Also known as the International Electrotechnical Vocabulary
(IEV) online.
IEC Customer Service Centre - webstore.iec.ch/csc
If you wish to give us your feedback on this publication or need
further assistance, please contact the Customer Service
Centre: sales@iec.ch.
IEC TS 61994-5 ®
Edition 2.0 2023-09
TECHNICAL
SPECIFICATION
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 5: Piezoelectric sensors
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 01.040.31; 31.140 ISBN 978-2-8322-7500-9
– 2 – IEC TS 61994-5:2023 © IEC 2023
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
Bibliography . 11
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,
SELECTION AND DETECTION –
GLOSSARY –
Part 5: Piezoelectric sensors
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international
co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and
in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports,
Publicly Available Specifications (PAS) and Guides (hereafter referred to as "IEC Publication(s)"). Their
preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with
may participate in this preparatory work. International, governmental and non-governmental organizations liaising
with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for
Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence between
any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) IEC draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). IEC takes no position concerning the evidence, validity or applicability of any claimed patent rights in
respect thereof. As of the date of publication of this document, IEC had not received notice of (a) patent(s), which
may be required to implement this document. However, implementers are cautioned that this may not represent
the latest information, which may be obtained from the patent database available at https://patents.iec.ch. IEC
shall not be held responsible for identifying any or all such patent rights.
IEC TS 61944-5 has been prepared by IEC technical committee 49: Piezoelectric, dielectric and
electrostatic devices and associated materials for frequency control, selection and detection. It
is a Technical Specification.
This second edition cancels and replaces the first edition published in 2019. This edition
constitutes a technical revision.
This edition includes the following significant technical changes with respect to the previous
edition:
a) New terms and definitions have been added from IEC 63041-1:2021 and IEC 63041-3:2020.
– 4 – IEC TS 61994-5:2023 © IEC 2023
The text of this Technical Specification is based on the following documents:
Draft Report on voting
49/1421/DTS 49/1439/RVDTS
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this Technical Specification is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/publications.
A list of all parts in the IEC 61994 series, published under the general title Piezoelectric,
dielectric and electrostatic devices and associated materials for frequency control, selection
and detection – Glossary, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
• reconfirmed,
• withdrawn, or
• revised.
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,
SELECTION AND DETECTION –
GLOSSARY –
Part 5: Piezoelectric sensors
1 Scope
This part of IEC 61994 gives the terms and definitions for sensors representing the state of the
art, which are intended for manufacturing piezoelectric elements, cells, modules and the
systems.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminology databases for use in standardization at the following
addresses:
• IEC Electropedia: available at https://www.electropedia.org/
• ISO Online browsing platform: available at https://www.iso.org/obp
3.1
delay line type sensor element
piezoelectric sensor component using a delay line of SAW transversal filter type
[SOURCE: IEC 63041-1:2021, 3.1.3, modified – "surface acoustic wave (SAW) transversal filter
type" of the definition has been replaced by "SAW transversal filter type".]
3.2
differential sensor
piezoelectric sensor element that can detect physical quantities from a differential change in
resonance frequencies or delays of two independent and same micro-acoustic structures
assembled on the same or different piezoelectric plates
Note 1 to entry: The differential sensor is a general term for sensors of the above type.
[SOURCE: IEC 63041-3:2020, 3.1.6, modified – "piezoelectric sensor which is able to" of the
definition has been replaced by "piezoelectric sensor element that can". "from a change in
resonance frequencies" has been replaced by "from a differential change in resonanc
...
IEC TS 61994-5 ®
Edition 2.0 2023-09
REDLINE VERSION
TECHNICAL
SPECIFICATION
colour
inside
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 5: Piezoelectric sensors
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.
IEC Secretariat Tel.: +41 22 919 02 11
3, rue de Varembé info@iec.ch
CH-1211 Geneva 20 www.iec.ch
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.
About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.
IEC publications search - webstore.iec.ch/advsearchform IEC Products & Services Portal - products.iec.ch
The advanced search enables to find IEC publications by a Discover our powerful search engine and read freely all the
variety of criteria (reference number, text, technical publications previews. With a subscription you will always have
committee, …). It also gives information on projects, replaced access to up to date content tailored to your needs.
and withdrawn publications.
Electropedia - www.electropedia.org
IEC Just Published - webstore.iec.ch/justpublished
The world's leading online dictionary on electrotechnology,
Stay up to date on all new IEC publications. Just Published
containing more than 22 300 terminological entries in English
details all new publications released. Available online and once
and French, with equivalent terms in 19 additional languages.
a month by email.
Also known as the International Electrotechnical Vocabulary
(IEV) online.
IEC Customer Service Centre - webstore.iec.ch/csc
If you wish to give us your feedback on this publication or need
further assistance, please contact the Customer Service
Centre: sales@iec.ch.
IEC TS 61994-5 ®
Edition 2.0 2023-09
REDLINE VERSION
TECHNICAL
SPECIFICATION
colour
inside
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 5: Piezoelectric sensors
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 01.040.31; 31.140 ISBN 978-2-8322-7557-3
– 2 – IEC TS 61994-5:2023 RLV © IEC 2023
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
Bibliography . 11
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,
SELECTION AND DETECTION –
GLOSSARY –
Part 5: Piezoelectric sensors
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international
co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and
in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports,
Publicly Available Specifications (PAS) and Guides (hereafter referred to as "IEC Publication(s)"). Their
preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with
may participate in this preparatory work. International, governmental and non-governmental organizations liaising
with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for
Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence between
any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) IEC draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). IEC takes no position concerning the evidence, validity or applicability of any claimed patent rights in
respect thereof. As of the date of publication of this document, IEC had not received notice of (a) patent(s), which
may be required to implement this document. However, implementers are cautioned that this may not represent
the latest information, which may be obtained from the patent database available at https://patents.iec.ch. IEC
shall not be held responsible for identifying any or all such patent rights.
This redline version of the official IEC Standard allows the user to identify the changes
made to the previous edition IEC TS 61944-5:2019. A vertical bar appears in the margin
wherever a change has been made. Additions are in green text, deletions are in
strikethrough red text.
– 4 – IEC TS 61994-5:2023 RLV © IEC 2023
IEC TS 61944-5 has been prepared by IEC technical committee 49: Piezoelectric, dielectric and
electrostatic devices and associated materials for frequency control, selection and detection. It
is a Technical Specification.
This second edition cancels and replaces the first edition published in 2019. This edition
constitutes a technical revision.
This edition includes the following significant technical changes with respect to the previous
edition:
a) New terms and definitions have been added from IEC 63041-1:2021 and IEC 63041-3:2020.
The text of this Technical Specification is based on the following documents:
Draft Report on voting
49/1421/DTS 49/1439/RVDTS
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this Technical Specification is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/publications.
A list of all parts in the IEC 61994 series, published under the general title Piezoelectric,
dielectric and electrostatic devices and associated materials for frequency control, selection
and detection – Glossary, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
• reconfirmed,
• withdrawn, or
• revised.
IMPORTANT – The "colour inside" logo on the cover page of this document indicates
that it contains colours which are considered to be useful for the correct understanding
of its contents. Users should therefore print this document using a colour printer.
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,
SELECTION AND DETECTION –
GLOSSARY –
Part 5: Piezoelectric sensors
1 Scope
This part of IEC 61994 gives the terms and definitions for sensors representing the state of the
art, which are intended for manufacturing piezoelectric elements, cells, modules and the
systems.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminology databases for use in standardization at the following
addresses:
• IEC Electropedia: available at https://www.electropedia.org/
• ISO Online browsing platform: available at https://www.iso.org/obp
3.1
delay line type sensor element
piezoelectric sensor component using a delay line of surface acoustic wave ( SAW) transversal
filter type
[SOURCE: IEC 63041-1:2017, 3.2.3, modified – The phrase has been rewritten in an easy-to-
understand manner using a well-known term IEC 63041-1:2021, 3.1.3, modified – "surface
acoustic wave (SAW) transversal filter type" of the definition has been replaced by "SAW
transversal filter type".]
3.2
non-acoustic type sensor element
piezoelectric sensor component using the electrical charge induced by a quasi-static force,
torque or the like
[SOURCE: IEC 63041-1:2017, 3.2.4, modified – Note 1 to entry has been deleted.]
3.2
differential sensor
piezoelectric sensor element that can detect physical quantities from a differential change in
resonance frequencies or delays of two independent and same micro-acoustic structures
assembled on the same or different piezoelectric plates
Note 1 to entry: The differential sensor is a general term for sensors of the above type.
– 6 – IEC TS 61994-5:2023 RLV © IEC 2023
[SOURCE: IEC 63041-3:2020, 3.1.6, modified – "piezoelectric sensor which is able to" of the
definition has been replaced by "piezoelectric sensor element that can". "from a change in
resonance frequencies" has been replaced by "from a differential change in resonance
frequencies".]
3.3
dual mode sensor
piezoelectric sensor element that can detect physical quantities from a change in resonance
frequencies of two independent modes on a single piezoelectric plate
Note 1 to entry: In order to achieve improved precision and/or to eliminate undesirable influence factors, sensor
solutions are employed that utilize two or more modes. By evaluation of combinations of those modes' sensitivities
to various ambient conditions, improved detection sensitivity can be achieved, whereas undesirable sensitivities can
be reduced or eliminated.
Note 2 to entry: The dual mode sensor is a general term for sensors of the above type
[SOURCE: IEC 63041-3:2020, 3.1.5, modified – "piezoelectric sensor which is able to" of
definition has been replaced by "piezoelectric sensor element that can". Note 1 to entry has
been rewritten. Note 2 to entry has been added.]
3.4
dual mode sensor module
dual mode sensor element or cell equipped with circuit units for temperature compensation and
electronic accessories for interfacing to external data acquisitions
[SOURCE: IEC 63041-1:2021, 3.4.2, modified – The note to entry has been removed.]
3.5
dual mode sensor system
system that consists of dual mode sensor modules, electronic devices, PCs, memory, wired or
wireless devices, software, etc.
Note 1 to entry: The dual mode quartz crystal sensor system is used in oil-well exploration and gas-well exploration
systems.
[SOURCE: IEC 63041-1:2021, 3.5.2, modified – Since the dual mode sensor is not necessarily
limited to quartz crystal-based sensors, the definition was rewritten as above.]
3.6
multi-measurand sensor
piezoelectric sensor element that can detect two or more different physical quantities from an
analysis of different sensor responses
Note 1 to entry: The multi-measurand sensor is a general term for sensors of the above type,
[SOURCE: IEC 63041-3:2020, 3.1.7, modified – The words "piezoelectric sensor which is able
to" of the definition have been replaced by "piezoelectric sensor element that can". Note 1 to
entry has been added.]
3.7
piezoelectric acceleration sensor element
piezoelectric sensor component whose resonance frequency or delay is used to measure the
change in velocity of an object with time
[SOURCE: IEC 63041-3:2020, 3.1.1]
3.8
piezoelectric biochemical sensor element
piezoelectric sensor component including a receptive layer (target recognition material), which
is necessary for the practical measurement of complex biological molecules in quantity, and
which works mainly in aqueous media and detects biomolecules therein
Note 1 to entry: The receptive layer is usually formed as a thin film of a target recognition material on the surface
of the piezoelectric sensor element and is often called a target recognition material.
[SOURCE: IEC 63041-1:2017, 3.3.2 IEC 63041-1:2021, 3.2.2, modified – In the definition,
"(target recognition material)" has been deleted. Note 1 to entry has been added.]
3.9
piezoelectric chemical sensor element
piezoelectric sensor component including a sensitive layer (target recognition material), which
is necessary for the practical measurement of simple non-biological molecules in quantity, and
which works and detects chemical substances mainly in the gas phase
Note 1 to entry: The sensitive layer is usually formed as a thin film of a target recognition material on the surface
of the piezoelectric sensor element and is often called a target recognition material.
Note 2 to entry: A gas sensor element is one of the chemical sensor elements.
[SOURCE: IEC 63041-1:2017, 3.3.1, modified – Note 1 to entry has been deleted IEC 63041-
1:2021, 3.2.1, modified – In the definition, "(target recognition material)" has been deleted. Note
1 to entry has been moved to Note 2 to entry. A new Note 1 to entry has been added.]
3.10
piezoelectric film-thickness sensor element
piezoelectric sensor component whose resonance frequency is used for film-thickness
measurement
EXAMPLE Film-thickness control in vacuum deposition and sputter deposition
[SOURCE: IEC 63041-1:2017, 3.4.6 IEC 63041-1:2021, 3.3.6, modified – The example has
been added.]
3.11
piezoelectric force sensor element
piezoelectric sensor component whose resonance frequency, delay or, electrical charge/, or
voltage is used for force measurement
EXAMPLE Inertial measurement system
[SOURCE: IEC 63041-1: 2017, 3.4.1 IEC 63041-1:2021, 3.3.1, modified – "delay or electrical
charge/voltage" of the definition has been replaced by "delay, electrical charge, or voltage".
The example has been added.]
3.12
piezoelectric humidity sensor element
piezoelectric sensor component whose resonance frequency or delay is used for dew point and
moisture detection
[SOURCE: IEC 63041-3:2020, 3.1.2]
– 8 – IEC TS 61994-5:2023 RLV © IEC 2023
3.13
piezoelectric pressure sensor element
piezoelectric sensor component whose resonance frequency, delay, electrical charge, or
voltage is used for pressure measurement
EXAMPLE Oil pressure measuring device and flow meter.
[SOURCE: IEC 63041-1:2021, 3.3.2, modified – "delay or electrical charge/voltage" of the
definition has been replaced by "delay, electrical charge, or voltage". The example has been
added.]
3.14
piezoelectric sensor
generic term that includes a sensor element, cell and module
general term for a piezoelectric sensor element, piezoelectric sensor cell, piezoelectric sensor
module, and piezoelectric sensor system
[SOURCE: IEC 63041-1:2017, 3.2.7 IEC 63041-1:2021, 3.1.8, modified – In the definition, "a
sensor element, cell, module and system" has been replaced by "piezoelectric sensor element,
piezoelectric cell, piezoelectric module, and piezoelectric system".]
3.15
piezoelectric sensor cell
piezoelectric sensor element equipped with necessary mechanical accessories and
attachments to correctly detect the parameters to be measured
[SOURCE: IEC 63041-1:2017, 3.2.5 IEC 63041-1:2021, 3.1.5, modified – In the definition,
"sensor" has been replaced by "piezoelectric sensor".]
3.16
piezoelectric sensor element
electronic component which is able to that can piezoelectrically detect physical quantities as a
change in its frequency, phase, delay, electrical charge, resistance, Q-value, bandwidth, etc.
Note 1 to entry: For chemical and biochemical sensor applications, the piezoelectric sensor element includes a
sensitive or receptive layer (target recognition material).
[SOURCE: IEC 63041-1:2017, 3.2.1, modified – Note 1 to entry has been deleted IEC 63041-
1:2021, 3.1.1, modified – In the definition, "which is able to" has been replaced by "that can
piezoelectrically detect".]
3.17
piezoelectric sensor module
piezoelectric sensor element or cell equipped with electronic accessories for interfacing to
external data acquisitions
[SOURCE: IEC 63041-1:2017, 3.2.6 IEC 63041-1:2021, 3.1.6, modified – In the definition,
"sensor element" has been replaced by "piezoelectric sensor element".]
3.18
piezoelectric sensor system
organized system including detection and amplification of raw data, communication with other
equipment, and processing and analysis of observation data
[SOURCE: IEC 63041-1:2021, 3.1.7, modified – In the definition "amplification of detected
value" has been replaced by "amplification of raw data" and "analysis of detected value" has
been replaced by "analysis of observation data".]
3.19
piezoelectric temperature sensor element
piezoelectric sensor component whose resonance frequency or delay is used for temperature
measurement
[SOURCE: IEC 63041-1:2017, 3.4.5 IEC 63041-1:2021, 3.3.5.]
3.20
piezoelectric tilt angle sensor element
piezoelectric sensor component whose resonance frequency or delay is used to measure tilt
angles, elevation, or depression of an object with respect to gravity's detection
EXAMPLE Gyro sensor
[SOURCE: IEC 63041-3:2020, 3.1.3, modified – The example has been added.]
3.21
piezoelectric torque sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical charge/, or
voltage is used for torque measurement
[SOURCE: IEC 63041-1:2017, 3.4.3 IEC 63041-1:2021, 3.3.3., modified – In the definition,
"delay or electrical charge/voltage" has been replaced by "delay, electrical charge, or voltage".]
3.22
piezoelectric vibration sensor element
piezoelectric sensor component whose resonance frequency or delay is used for measurement
of vibration
EXAMPLE Volcano infrasound monitoring system
[SOURCE: IEC 63041-3:2020, 3.1.4, modified – The example has been added.]
3.23
piezoelectric viscosity sensor element
piezoelectric sensor component whose resonance frequency, delay or, insertion loss/, or gain
is used for viscosity measurement
EXAMPLE Hydrogen leak-detector for fuel-cell
[SOURCE: IEC 63041-1:2017, 3.4.4 IEC 63041-1:2021, 3.3.4, modified – In the definition,
"delay, or insertion loss/gain" has been replaced by "delay, insertion loss, or gain". The example
has been added.]
3.24
quartz crystal microbalance
QCM
one of the families of chemical and biochemical sensors using crystal resonators
piezoelectric sensor element for detecting small mass change using quartz crystal resonators
Note 1 to entry: A thickness shear mode (TSM) sensor is identical with a QCM.
[SOURCE: IEC 63041-1:2017, 3.2.8, modified – Note 1 to entry has been deleted IEC 63041-
1:2021, 3.1.9, modified – "one of the families of chemical and biochemical sensors using crystal
resonators" of the definition has been replaced by "piezoelectric sensor element for detecting
small mass change using quartz crystal resonators" to make it easi
...
Frequently Asked Questions
IEC TS 61994-5:2023 is a technical specification published by the International Electrotechnical Commission (IEC). Its full title is "Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection - Glossary - Part 5: Piezoelectric sensors". This standard covers: IEC TS 61994-5:2023 gives the terms and definitions for sensors representing the state of the art, which are intended for manufacturing piezoelectric elements, cells, modules and the systems. This edition includes the following significant technical changes with respect to the previous edition: New terms and definitions have been added from IEC 63041-1:2021 and IEC 63041-3:2020.
IEC TS 61994-5:2023 gives the terms and definitions for sensors representing the state of the art, which are intended for manufacturing piezoelectric elements, cells, modules and the systems. This edition includes the following significant technical changes with respect to the previous edition: New terms and definitions have been added from IEC 63041-1:2021 and IEC 63041-3:2020.
IEC TS 61994-5:2023 is classified under the following ICS (International Classification for Standards) categories: 01.040.31 - Electronics (Vocabularies); 31.140 - Piezoelectric devices. The ICS classification helps identify the subject area and facilitates finding related standards.
IEC TS 61994-5:2023 has the following relationships with other standards: It is inter standard links to IEC TS 61994-5:2019. Understanding these relationships helps ensure you are using the most current and applicable version of the standard.
You can purchase IEC TS 61994-5:2023 directly from iTeh Standards. The document is available in PDF format and is delivered instantly after payment. Add the standard to your cart and complete the secure checkout process. iTeh Standards is an authorized distributor of IEC standards.
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.
Loading comments...