Semiconductor devices - Micro-electromechanical devices - Part 36: Environmental and dielectric withstand test methods for MEMS piezoelectric thin films

IEC 62047-36:2019 (E) specifies test methods for evaluating the durability of MEMS piezoelectric thin film materials under the environmental stress of temperature and humidity and under electrical stress, and test conditions for appropriate quality assessment. Specifically, this document specifies test methods and test conditions for measuring the durability of a DUT under temperature and humidity conditions and applied voltages. It further applies to evaluations of converse piezoelectric properties in piezoelectric thin films formed primarily on silicon substrates, i.e., piezoelectric thin films used as actuators. This document does not cover reliability assessments, such as methods of predicting the lifetime of a piezoelectric thin film based on a Weibull distribution.

General Information

Status
Published
Publication Date
04-Apr-2019
Current Stage
PPUB - Publication issued
Start Date
26-Apr-2019
Completion Date
05-Apr-2019
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IEC 62047-36:2019 - Semiconductor devices - Micro-electromechanical devices - Part 36: Environmental and dielectric withstand test methods for MEMS piezoelectric thin films
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IEC 62047-36
®

Edition 1.0 2019-04
INTERNATIONAL
STANDARD

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inside


Semiconductor devices – Micro-electromechanical devices –
Part 36: Environmental and dielectric withstand test methods for MEMS
piezoelectric thin films
IEC 62047-36:2019-04(en)

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IEC 62047-36

®


Edition 1.0 2019-04




INTERNATIONAL



STANDARD








colour

inside










Semiconductor devices – Micro-electromechanical devices –

Part 36: Environmental and dielectric withstand test methods for MEMS

piezoelectric thin films


























INTERNATIONAL

ELECTROTECHNICAL


COMMISSION





ICS 31.080.99; 31.140 ISBN 978-2-8322-6720-2



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® Registered trademark of the International Electrotechnical Commission

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– 2 – IEC 62047-36:2019 © IEC 2019
CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
4 Testing procedure . 6
4.1 General . 6
4.2 Initial measurements . 7
4.3 Tests . 7
4.3.1 DUT setup and environmental conditions . 7
4.3.2 Test duration . 7
4.3.3 Number of tests and number o
...

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