IEC 62830-1:2017

Semiconductor devices - Semiconductor devices for energy harvesting and generation - Part 1: Vibration based piezoelectric energy harvesting

IEC 62830-1:2017 defines terms, definitions, symbols, configurations, and test methods that can be used to evaluate and determine the performance characteristics of vibration based piezoelectric energy harvesting devices for practical use. This document is applicable to energy harvesting devices for consumer, general industries, military and aerospace applications without any limitations on device technology and size.

Dispositifs à semiconducteurs - Dispositifs à semiconducteurs pour récupération et production d'énergie - Partie 1: Récupération d'énergie piézoélectrique basée sur des vibrations

L'IEC 62830-1:2017 définit des termes, des définitions, des symboles, des configurations et des méthodes d'essai qui peuvent être utilisés pour évaluer et déterminer les caractéristiques de performances de dispositifs pratiques de récupération d'énergie piézoélectrique basée sur des vibrations. Le présent document s'applique aux dispositifs de récupération d'énergie destinés à des applications grand public, industrielles, militaires et aérospatiales sans limitation sur la taille ni sur la technologie des dispositifs.

General Information

• Status: Published
• Publication Date: 02-Mar-2017
• ICS: 31.080.99 - Other semiconductor devices
• Technical Committee: TC 47 - Semiconductor devices
• Drafting Committee: WG 7 - TC 47/WG 7
• Current Stage: PPUB - Publication issued
• Start Date: 03-Mar-2017
• Completion Date: 10-Mar-2017

Standards Content (Sample)

IEC 62830-1 ®
Edition 1.0 2017-03
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Semiconductor devices for energy harvesting and
generation –
Part 1: Vibration based piezoelectric energy harvesting

Dispositifs à semiconducteurs – Dispositifs à semiconducteurs pour
récupération et production d'énergie –
Partie 1: Récupération d'énergie piézoélectrique basée sur des vibrations

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IEC 62830-1 ®
Edition 1.0 2017-03
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Semiconductor devices for energy harvesting and

generation –
Part 1: Vibration based piezoelectric energy harvesting

Dispositifs à semiconducteurs – Dispositifs à semiconducteurs pour

récupération et production d'énergie –

Partie 1: Récupération d'énergie piézoélectrique basée sur des vibrations

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.080.99 ISBN 978-2-8322-0000-0

– 2 – IEC 62830-1:2017 © IEC 2017
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
3.1 General terms . 6
3.2 Piezoelectric transducer . 8
3.3 Characteristic parameters . 9
4 Essential ratings and characteristic parameters . 11
4.1 Identification and type . 11
4.2 Limiting values and operating conditions . 11
4.3 Additional information . 11
5 Test method . 12
5.1 General . 12
5.2 Electrical characteristics . 13
5.2.1 Test procedure . 13
5.2.2 Capacitance . 14
5.2.3 Resonant frequency . 14
5.2.4 Bandwidth. 15
5.2.5 Open circuit voltage . 15
5.2.6 Output voltage . 15
5.2.7 Output current . 16
5.2.8 Output power . 16
5.2.9 Optimal load impedance . 17
5.2.10 Maximum output power . 17
5.2.11 Settling time . 17
5.3 Mechanical characteristics . 18
5.3.1 Test procedure . 18
5.3.2 Temperature range . 19
5.3.3 Relative humidity range . 19
5.3.4 Input vibration . 20
Annex A (informative) Piezoelectric mode . 21
A.1 d mode . 21
A.2 d mode . 21
Bibliography . 22

Figure 1 – A vibration based energy harvester using cantilever with piezoelectric film . 7
Figure 2 – Conceptual diagram of a vibration based piezoelectric energy harvester . 8
Figure 3 – Equivalent circuit of a vibration based piezoelectric energy harvester . 10
Figure 4 – Measurement procedure of vibration based piezoelectric energy harvesters . 13
Figure 5 – Test setup for the electrical characteristics of a vibration based piezoelectric
energy harvester . 14
Figure 6 – Frequency response of a vibration based piezoelectric energy harvester . 15
Figure 7 – Output voltage of a vibration based piezoelectric energy harvester at
various external loads . 16
Figure 8 – Output current of a vibration based piezoelectric energy harvester at various
output voltages . 16

Figure 9 – Output power of a vibration based piezoelectric energy harvester at various
external loads . 17
Figure 10 – Output power and output voltage of a vibration based piezoelectric energy
harvester at various input vibrations. 17
Figure 11 – Transient response of output voltage of a vibration based piezoelectric
energy harvester to excitation . 18
Figure 12 – Block diagram of a test setup for evaluating the reliability of a vibration
based piezoelectric energy harvester . 19
Figure A.1 – Piezoelectric mode of vibrating beam based energy harvester . 21

Table 1 – Specification parameters for vibration based piezoelectric energy harvesters . 11

– 4 – IEC 62830-1:2017 © IEC 2017
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES – SEMICONDUCTOR DEVICES
FOR ENERGY HARVESTING AND GENERATION –

Part 1: Vibration based piezoelectric energy harvesting

FOREWORD
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International Standard IEC 62830-1 has been prepared by IEC technical committee 47:
Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
47/2341/FDIS 47/2366/RVD
Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

A list of all parts in the IEC 62830 series, published under the general title Semiconductor
devices – Semiconductor devices for energy harvesting and generation, can be found on the
IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct
understanding of its contents. Users should therefore print this document using a
colour printer.
– 6 – IEC 62830-1:2017 © IEC 2017
SEMICONDUCTOR DEVICES – SEMICONDUCTOR DEVICES
FOR ENERGY HARVESTING AND GENERATION –

Part 1: Vibration based piezoelectric energy harvesting

1 Scope
This part of IEC 62830 defines terms, definitions, symbols, configurations, and test methods
that can be used to evaluate and determine the performance characteristics of vibration based
piezoelectric energy harvesting devices for practical use. This document is applicable to
energy harvesting devices for consumer, general industries, military and aerospace
applications without any limitations on device technology and size.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their
content constitutes requirements of this document. For dated references, only the edition
cited applies. For undated references, the latest edition of the referenced document (including
any amendments) applies.
IEC 60749-5:2003, Semiconductor devices – Mechanical and climatic test methods – Part 5:
Steady-state temperature humidity bias life test
IEC 60749-12:2002, Semiconductor devices – Mechanical and climatic test methods – Part 12:
Vibration, variable frequency
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminological databases for use in standardization at the following
addresses:
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http://www.iso.org/obp
3.1 General terms
3.1.1
vibration
mechanical oscillation
3.1.2
vibration based energy harvester
energy transducer that transforms vibration energy into electric energy
Note 1 to entry: A vibration based energy harvester to convert vibration to electricity by using piezoelectric
transducers comprises an inertial mass, spring, and piezoelectric transducer as shown in Figure 1. The
piezoelectric transducer contains the two electrodes and a piezoelectric film. The induced vibration introduces the
reciprocating motion to the mass. The spring which suspends the mass bends and the bending of the spring
introduces tensile and compression of the piezoelectric film. The top and bottom electrodes of the piezoelectric film
harvest charges generated from the piezoelectric effect.

Note 2 to entry: A vibration based energy harvester is represented as shown in Figure 2. It is configured by mass,
spring, damping, and piezoelectric transducer. The piezoelectric transducer consumes and transforms the kinetic
energy of oscillated proof mass. Therefore, the piezoelectric transducer is generally viewed as damping.
Air-to-solid
interface
L+
R
L-
Fixed to substrate
A(t)
Air-to-solid
interface
IEC
Key
Configuration of energy harvester Components to operate an energy harvester
1 piezoelectric film which is a body layer of a A(t) vibration which is mechanically induced
piezoelectric transducer for energy harvesting oscillation to fixed substrate to vibrate the
mass of the energy harvester
2 spring to couple the induced vibration to the mass R external load
by suspending it
3 inertial mass to introduce mechanical motion L+, L- output of energy harvester
coupling from induced vibration
Figure 1 – A vibration based energy harvester using cantilever with piezoelectric film

– 8 – IEC 62830-1:2017 © IEC 2017
k
sp
m
PZ
A(t)
b
m
IEC
Key
Configuration of energy harvester
k spring constant m effective mass
sp
b damping coefficient PZ piezoelectric transducer
m
A(t) input vibration
Figure 2 – Conceptual diagram of a vibration
based piezoelectric energy harvester
3.1.3
mass-spring-damping system
system using effective mass, spring and damper to derive motion
3.1.4
effective mass
m
quantitative measure suspended by a spring to obtain kinetic energy by means of induced
acceleration
3.1.5
spring
elastic object to store mechanical energy with spring constant, k
sp
3.1.6
parasitic damping
effect that reduces the acceleration of an oscillated object with damping coefficient, b
m
3.2 Piezoelectric transducer
3.2.1
piezoelectric transducer
energy converter to generate electricity from mechanical energy by means of piezoelectric
effect
3.2.2
piezoelectric effect
effect by which a mechanical deformation of piezoelectric material produces a proportional
change in the electric polarization of that material
3.2.3
piezoelectric constant
d
quantifying value of the polarization in the piezoelectric material on application of a stress
3.2.4
electromechanical coupling coefficient
k
value that describes the conversion rate of electrical energy to mechanical energy or vice
versa
Note 1 to entry: The coefficient is a combination of elastic, dielectric and piezoelectric constants which appears
naturally in the expression of a piezoelectric transducer.
Ed
(1)
k=
ε
where
E is Young’s modulus,
d is the piezoelectric constant, and
ε is the dielectric constant
3.2.5
capacitance
C
p
capacitance between two electrodes of a piezoelectric transducer
3.3 Characteristic parameters
3.3.1
equivalent circuit
electrical circuit which has the same output
voltage from induced vibration as a piezoelectric vibration energy harvester in the immediate
neighbourhood of resonance
Note 1 to entry: A vibration based piezoelectric energy harvester can be divided into mechanical and electrical
parts as shown in Figure 3. The mechanical part consists of series elements m, k , b , and a transformer. m, k ,
sp m sp
and b represent the effective mass, spring constant, damping coefficient, and piezoelectric effect to convert
m
mechanically induced strain to electrical charge density with coupling coefficient k. The electrical part comprises
parallel connected C , R, and transformer. C represents the capacitance between two electrodes of the
p p
piezoelectric transducer and R is the external load.

– 10 – IEC 62830-1:2017 © IEC 2017
k
sp
m
b
m
k
A(t) C R
p
Mechanical part Electrical part

IEC
Key
Mechanical part Electrical part
m C
effective mass capacitance of piezoelectric transducer
p
k spring constant R external load
sp
b damping coefficient k electromechanical coupling coefficient
m
A(t) induced vibration
Figure 3 – Equivalent circuit of a vibration based piezoelectric energy harvester
3.3.2
resonant frequency
f
o
lowest frequency of the induced vibration of the energy harvester to generate largest output
power:
k
sp
f = (2)
o
2p m
3.3.3
bandwidth
f
BW
separation of frequencies between which the output power is equal to or larger than a
specified value
3.3.4
open circuit voltage
V
electrical potential difference relative to a reference node of an energy harvester when there
is no external load connected to the terminal of the energy harvester
3.3.5
output power
P
electrical power transferred to the external load connected to the terminal of an energy
harvester
3.3.6
output current
I
current through the external load connected to the terminal of an energy harvester

3.3.7
optimal load
R
opt
specified value of the external load for transferring the largest electrical energy from the
energy harvester
3.3.8
settling time
τ
time necessary for the measured output signal to reach a specified value in the transient
response
3.3.9
temperature range
range of temperatures as measured on the enclosure over which the energy harvester will not
sustain permanent damage though not necessarily functioning within the specified tolerances
3.3.10
input vibration
range of accelerations of induced vibration to the energy harvester as measured on the
enclosure over which the energy harvester will not sustain permanent damage though not
necessarily functioning within the specified tolerances
4 Essential ratings and characteristic parameters
4.1 Identification and type
The vibration energy harvester shall be clearly and durably marked in the order given below:
a) year and week (or month) of manufacture;
b) manufacturer’s name or trademark;
c) terminal identification (optional);
d) serial number;
e) factory identification code (optional).
4.2 Limiting values and operating conditions
Characteristic parameters should be listed as shown in Table 1. The manufacturer shall
clearly announce the operating conditions and their limitation for energy harvesting. Limiting
value is the maximum induced vibration to ensure the operation of vibration energy harvester
for power generation without any damage.
Table 1 – Specification parameters for vibration
based piezoelectric energy harvesters
Measuring
Parameter Symbol Min. Max. Unit
conditions
Insert name of
characteristic
parameters
4.3 Additional information
Some additional information should be given such as equivalent circuits (resonant frequency,
internal impedance, frequency response, output voltage and power, etc.), handling
precautions, physical information (outline dimensions, terminals, etc.), accessories,

– 12 – IEC 62830-1:2017 © IEC 2017
installation guide, package information, PCB interface and mounting information, and other
information.
5 Test method
5.1 General
Basically, general test procedures for a vibration energy harvester are performed as shown in
Figure 4. After the vibration based piezoelectric energy harvester has been mounted on a test
fixture, it is measured by using voltage, current, and LCR meters. For measuring and
characterizing these devices accurately, ultra-high-impedance meters should be used.
Before connecting the vibration energy harvester to the test fixture, voltage, current, and LCR
meters shall be calibrated. After calibration, connect a test cable to the vibration energy
harvester test fixture mounted on a vibration exciter. The output voltage or current reading on
the display of the meters is carefully taken, together with induced vibration which is measured
by the accelerometer.
NOTE After mounting the energy harvester on a vibration exciter, electrical characteristics are measured by using
a meter or equivalent equipment. If the measurements are satisfactory, the reliability test for the temperature range
with thermal cycling and mechanical failure with various vibrations is performed for commercial use.

Start
Output voltage
Resonant frequency
Output power
Bandwidth Electrical characterization
Optimal load
Capacitance
Maximum output power
Temperature range
Input vibration Mechanical characterization
Relative humidity range
End
IEC
Key
Procedure Reference subclause Procedure Reference subclause
Start Optimal load 3.3.7 and 5.2.9
Electrical characterization Maximum output power 5.2.10
Resonant frequency 3.3.2 and 5.2.3 Mechanical characterization
Bandwidth 3.3.3 and 5.2.4 Temperature range 5.3.2
Capacitance 3.2.5 and 5.2.2 Input vibration 3.3.10 and 5.3.4
Output voltage 3.3.4 and 5.2.6 Relative humidity range 5.3.3
Output power 3.3.5 and 5.2.8
Figure 4 – Measurement procedure of vibration
based piezoelectric energy harvesters
5.2 Electrical characteristics
5.2.1 Test procedure
Figure 5 shows a test setup for measuring the electrical characteristics of a vibration based
piezoelectric energy harvester. To measure the electrical characteristics of vibration based
piezoelectric energy harvester, the device shall be mounted on a vibration exciter as shown in
Figure 5. When a continuous vibration with specified acceleration is applied to the device, an
output voltage or current across an external load is measured.
The following test procedure is performed:
a) A specified vibration is induced to the energy harvester.

– 14 – IEC 62830-1:2017 © IEC 2017
b) The voltage or current across the external load which is connected to the terminals of the
energy harvester is measured using a voltage or current meter.
c) The voltage and current are measured with various vibration accelerations by adjusting
the amplifying ratio of the power amplifier.
d) The maximum voltage and current are derived from various external loads to find the
optimal load.
Function generator
A
DUT
Terminal V
Power amplifier
Vibration exciter
R
IEC
Key
Component and meters to monitor Equipment and supplies
DUT: device energy harvester Function To supply a specified frequency of
under test generator electrical signal to the power
amplifier
Voltage meter (V) To detect a voltage across the Power To supply a specified level of
external load amplifier electrical power to the vibration
exciter
Ampere meter (A) To detect a current through the Vibration To supply a specified level and
external load exciter frequency of mechanical vibration to
the DUT
External load (R) A load with specific impedance
Figure 5 – Test setup for the electrical characteristics of a
vibration based piezoelectric energy harvester
5.2.2 Capacitance
Capacitance is measured between two terminals of an energy harvesting device at a specified
frequency and voltage. A calibration of an LCR meter shall be made in order to eliminate
systematic errors in the LCR meter, cable, and connectors. When the device is connected to
the LCR meter, its capacitance will be displayed. When measuring capacitance, the specified
frequency and voltage for measurement shall be recorded.
5.2.3 Resonant frequency
Resonant frequency is a measured frequency of the energy harvester, normally expressed in
hertz, to generate the largest output power to be used in subsystem and system applications.
Figure 6 shows the graphical shape of the measured frequency characteristic of an energy
harvester. When measuring resonant frequency, specified acceleration and external load for
measurement shall be recorded.

Voltage
Power
Frequency (Hz)
IEC
Figure 6 – Frequency response of a vibration
based piezoelectric energy harvester
5.2.4 Bandwidth
Bandwidth is the working frequency range of the energy harvester having designated output
power to be used in subsystem and system applications. It is the measured range, normally
expressed in hertz, of the separation between the lower and upper frequencies relative to the
specified value of the frequency response curve.
f = f − f [Hz] (3)
BW upper(specified) lower(specified)
It is obtained from the measured output power (or voltage). The upper and lower frequencies
are selected when the measured output reaches a specified value.
5.2.5 Open circuit voltage
Open circuit voltage is the voltage measured across the terminals of the energy harvester
from induced vibration without external load. When measuring open circuit voltage, the input
impedance of the voltage meter shall be recorded.
5.2.6 Output voltage
Output voltage is the rms value of the voltage measured across the terminals of the energy
harvester with a specified external load and induced vibration. Figure 7 shows the graphical
shape of measured output voltage as a function of external resistive load connected to the
terminal of an energy harvester. The open circuit voltage is the rms value of measured
voltage when there is no external load connected to the terminal of the energy harvester with
specified induced vibration.
Output voltage (V)
Output power (µW)
– 16 – IEC 62830-1:2017 © IEC 2017
External load (MΩ)
IEC
Figure 7 – Output voltage of a vibration based piezoelectric
energy harvester at various external loads
5.2.7 Output current
Output current is the current measured through the specified external load connected to the
terminal of a vibration energy harvester at the specified induced vibration. Figure 8 shows the
graphical shape of measured current as a function of output voltage of an energy harvester.
The short-circuit current from the terminal of the energy harvester is the rms value of
measured current when the voltage across the energy harvester is zero.
Output voltage (V)
IEC
Figure 8 – Output current of a vibration based piezoelectric
energy harvester at various output voltages
5.2.8 Output power
Output power is calculated from the rms value of measured output voltage and current of the
energy harvester with external load.
P= IV [W] (4)
Figure 9 shows the graphical shape of measured output power as a function of external load
of an energy harvester.
Output voltage (V)
Output current (µA)
External load (MΩ)
IEC
Figure 9 – Output power of a vibration based piezoelectric
energy harvester at various external loads
5.2.9 Optimal load impedance
Optimal load impedance is determined as the value of the external load when the output
power of the energy harvester is maximized.
5.2.10 Maximum output power
Maximum output power is a maximum value of output power measured from an energy
harvester at a specified maximum input vibration. The maximum input vibration is defined in
5.3.4. Figure 10 shows the graphical shape of measured output power and output voltage as
functions of input vibration.
Voltage
Power
Input vibration (g)
IEC
Figure 10 – Output power and output voltage of a vibration based piezoelectric
energy harvester at various input vibrations
5.2.11 Settling time
Settling time is a relaxation time to ensure the output voltage is in steady state from excitation.
It is the measured time, normally expressed in seconds, necessary for the measured output
signal to reach a specified value in the transient response. Figure 11 shows the transient
response of measured output voltage as a function of time. The settling time is affected by the
packaging condition of the energy harvester.
Output power (µW)
Output voltage (V)
Output power (µW)
– 18 – IEC 62830-1:2017 © IEC 2017
τ
Time (s)
IEC
Figure 11 – Transient response of output voltage of a vibration
based piezoelectric energy harvester to excitation
The damping ratio (ς) is measured after measurement of settling time from excitation.
ς= (5)
τ 2p f
o
It is obtained from the excited vibration (f ) and settling time of the energy harvester (τ). The
o
damping coefficient (b ) shall be calculated as
m
b = 2ς mk (6)
m sp
5.3 Mechanical characteristics
5.3.1 Test procedure
Figure 12 shows a test setup for evaluating the reliability of a vibration based piezoelectric
energy harvester. When a continuous vibration is applied to the device, output voltage or
current is measured through an external load connected to the device.
To test the reliability, the following test procedure is performed:
a) A vibration is induced to the energy harvester.
b) The output voltage or current of the energy harvester is measured by the meter.
Output voltage (V)
Temperature
controller
Temperature controlled
Function generator A
environmental chamber
DUT V
Power amplifier
Vibration exciter
IEC
Key
Component and meters to monitor Equipment and supplies
DUT: device under test energy harvester Function generator To supply a specified frequency
of electrical signal to the power
amplifier
Voltage meter (V) To detect a voltage Power amplifier To supply a specified level of
across the external load electrical power to the vibration
exciter
Ampere meter (A) To detect a current Vibration exciter To supply a specified level and
through the external load frequency of mechanical
vibration to a DUT
Temperature controlled To keep a specified
environment chamber temperature value of a DUT
Figure 12 – Block diagram of a test setup for evaluating the reliability of
a vibration based piezoelectric energy harvester
5.3.2 Temperature range
The objective of this test is to evaluate the reliability of the device by a low/high temperature
cycling test. The temperature range should be specified from the applications. First, the test is
performed in the temperature cycling test chamber, and second, by placing the finished
energy harvester in an oven. The performance characteristics are monitored by a meter.
See IEC 60749-5:2003.
5.3.3 Relative humidity range
The objective of this test is to evaluate the reliability of the device by a low/high humidity test.
The humidity range should be specified from the applications. The test is performed in the
humidity cycling test chamber with specific temperature. The performance characteristics are
monitored by a meter.
See IEC 60749-5:2003.
– 20 – IEC 62830-1:2017 © IEC 2017
5.3.4 Input vibration
The objective of this test is to evaluate the reliability of the device by high input vibration. The
vibration range should be specified from the applications. First, the test is performed as a
cycling test of induced vibration with various accelerations, and second, by placing the
finished energy harvester on the vibration exciter. The performance characteristics are
monitored by a meter.
See IEC 60749-12:2002.
Annex A
(informative)
Piezoelectric mode
A.1 d mode
A piezoelectric transducer generates an electric field in the same direction as an induced
strain or stress applied to the piezoelectric film. The electrodes for the d mode of
piezoelectric thin film are on the top or bottom side of the film and are shaped like comb
electrodes. This configuration is sensitive to the induced vibration and high output voltage due
to the low capacitance.
The d mode is illustrated in Figure A.1 a).
A.2 d mode
A piezoelectric transducer generates an electric field perpendicular to an induced strain or
stress applied to the piezoelectric film. The electrodes for the d mode of piezoelectric thin
film are on the top and bottom sides of the film. The d mode is widely used for making
energy harvesters.
The d mode is illustrated in Figure A.1 b).
Electrode
Electric field
Silicon
Induced strain
Induced strain Piezoelectric layer
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a) d mode
Electrode
Electric field
Silicon
Induced strain
Piezoelectric layer
Induced strain
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b) d mode
Figure A.1 – Piezoelectric mode of vibrating beam based energy harvester

– 22 – IEC 62830-1:2017 © IEC 2017
Bibliography
IEC 62047-5:2011, Semiconductor devices – Micro-electromechanical devices – Part 5:
RF MEMS switches
IEC 62047-7:2011, Semiconductor devices – Micro-electromechanical devices – Part 7:
MEMS BAW filter and duplexer for radio frequency control and selection
IEC 60749-10, Semiconductor devices – Mechanical and climatic test methods – Part 10:
Mechanical shock
S. Roundy, P.K. Wright, and J. Rabaey, Energy Scavenging for Wireless Sensor Networks
with Special Focus on Vibrations, Kluwer Academic Press, 2003.

___________
– 24 – IEC 62830-1:2017 © IEC 2017
SOMMAIRE
AVANT-PROPOS . 26
1 Domaine d'application . 28
2 Références normatives . 28
3 Termes et définitions . 28
3.1 Termes généraux . 28
3.2 Transducteur piézoélectrique . 30
3.3 Paramètres caractéristiques . 31
4 Valeurs assignées et paramètres caractéristiques essentiels . 33
4.1 Identification et type . 33
4.2 Valeurs limites et conditions de fonctionnement . 33
4.3 Informations supplémentaires . 34
5 Méthode d’essai . 34
5.1 Généralités . 34
5.2 Caractéristiques électriques . 35
5.2.1 Procédure d’essai . 35
5.2.2 Capacité . 36
5.2.3 Fréquence de résonance . 36
5.2.4 Largeur de bande . 37
5.2.5 Tension en circuit ouvert. 37
5.2.6 Tension de sortie . 37
5.2.7 Courant de sortie .
...