IEC TS 62607-9-2:2024

Nanomanufacturing - Key control characteristics - Part 9-2: Nanomagnetic products - Magnetic field distribution: Magneto-optical indicator film technique

IEC TS 62607-9-2:2024, which is a Technical Specification, establishes a standardized method to determine the key control characteristic
• magnetic field distribution
of nanomagnetic materials, structures and devices by the
• magneto-optical indicator film technique.
The magnetic field distribution is derived by utilizing a magneto optical indicator film, which is a thin film of magneto-optic material that is placed on the surface of an object exhibiting a spatially varying magnetic field distribution. The Faraday effect is then employed to measure the magnetic field strength by analysing the rotation of the polarization plane of light passing through the magneto-optic film.
The method is applicable for measuring the stray field distribution of flat nanomagnetic materials, structures and devices.
- The method can especially be used to perform fast quantitative measurements of stray field distributions at the surface of an object.
- The magneto-optic indicator film technique (MOIF) is a fast, non-destructive method, making it an attractive option for materials analysis and testing in the industry.
- MOIF measurements can be done without any sample preparation and do not rely on specific surface properties of the object. It can be applied to the characterization of rough samples as well as of samples with non-magnetic cover layers.
- MOIF can quantitatively measure magnetic field distributions:
• with a one-shot measurement which typically takes a few seconds
• over areas of several square centimetres (over diameters of up to 15 cm with special techniques)
• in a field range from 1 mT to more than 100 mT
• with down to 1 µm spatial resolution
- Although techniques with nano-scale resolution are suitable for analysing the details of magnetic field structure, their ability to characterize larger areas is limited by their scanning area. Therefore, the MOIF technique is an indispensable complementary method that can offer a more comprehensive understanding of material properties.
This document focuses on the calibration procedures, calibrated measurement process, and evaluation of measurement uncertainty to ensure the traceability of quantitative magnetic field measurements obtained through the magneto-optic indicator film technique.

General Information

• Status: Published
• Publication Date: 15-Jul-2024
• ICS: 07.120 - Nanotechnologies
• Technical Committee: TC 113 - Nanotechnology for electrotechnical products and systems
• Drafting Committee: WG 3 - TC 113/WG 3
• Current Stage: PPUB - Publication issued
• Start Date: 16-Jul-2024
• Completion Date: 21-Jun-2024

Overview

IEC TS 62607-9-2:2024 specifies a standardized, traceable method to determine the magnetic field distribution of nanomagnetic materials, structures and devices using the magneto‑optical indicator film (MOIF) technique. This Technical Specification describes the MOIF measurement principle (Faraday effect), calibration procedures, calibrated measurement workflows, and procedures for evaluating measurement uncertainty to ensure quantitative, repeatable stray‑field mapping at the surface of flat nanomagnetic samples.

Key Topics and Requirements

• Measurement principle: Use of a thin magneto‑optic indicator film placed on the sample surface; Faraday rotation of polarized light is analyzed to derive perpendicular magnetic field components.
• Calibration and traceability: Defined calibration workflows for analyser‑based and differential MOIF detection, one‑pixel and array sensor approaches, background subtraction and provision of controlled perpendicular calibration fields.
• Quantitative measurement range and resolution: Typical field range from 1 mT to >100 mT, single‑shot measurements in a few seconds, spatial resolution down to 1 µm, and area coverage of several square centimetres (with techniques for up to ~15 cm diameters).
• Measurement process controls: Key control characteristics include MOIF thickness, measurement height, light source intensity, optical geometry, sensor and environmental temperature, pixel resolution and scan size, and frame averaging.
• Uncertainty and artefact management: Methods to evaluate uncertainty contributions (calibration, sensor thickness, in‑plane field components), artefact identification (illumination inhomogeneity, sensor domain patterns), forward simulation and transfer‑function corrections, and contingency strategies.
• Data analysis and reporting: Procedures for quantitative data analysis, extraction of secondary parameters, and required reporting items (sample ID, measurement conditions, results).

Applications and Users

• Who benefits: Nanomanufacturing engineers, materials scientists, device developers (spintronics, magnetic sensors, magnetic storage), metrology and quality‑control laboratories, and R&D groups needing fast, non‑destructive stray‑field mapping.
• Use cases: Fast quantitative stray‑field mapping of flat nanomagnetic films and patterned devices, process control in nanomanufacturing, failure analysis, comparative materials characterization, and large‑area complementary mapping where nanoscale scanning probes are impractical.
• Advantages: Non‑destructive, no sample preparation required, tolerant of rough surfaces and non‑magnetic cover layers, rapid one‑shot imaging and wide‑area coverage complementing high‑resolution scanning techniques.

Related Standards

• Part of the IEC 62607 series on Nanomanufacturing - Key control characteristics; consult other parts of IEC 62607 for complementary measurement methods and additional nanomagnetic characterization guidance.

Standards Content (Sample)

IEC TS 62607-9-2 ®
Edition 1.0 2024-07
TECHNICAL
SPECIFICATION
Nanomanufacturing – Key control characteristics –
Part 9-2: Nanomagnetic products – Magnetic field distribution: Magneto-optical
indicator film technique
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IEC TS 62607-9-2 ®
Edition 1.0 2024-07
TECHNICAL
SPECIFICATION
Nanomanufacturing – Key control characteristics –

Part 9-2: Nanomagnetic products – Magnetic field distribution: Magneto-optical

indicator film technique
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120  ISBN 978-2-8322-8987-7

– 2 – IEC TS 62607-9-2:2024 © IEC 2024
CONTENTS
FOREWORD . 7
INTRODUCTION . 9
1 Scope . 11
2 Normative references . 11
3 Terms and definitions . 12
3.1 General terms . 12
3.2 General terms related to magnetic stray field characterization . 12
3.3 Terms related to the measurement method described in this document . 12
3.4 Terms related to the magneto optical indicator film (MOIF) . 15
3.5 Terms related to Faraday rotation . 18
3.6 Terms related to the magneto-optical measurement setup . 19
3.7 Terms related to optical microscopy . 21
3.8 Terms related to the setup calibration process . 22
3.9 Terms related to the magneto-optical measurement process . 23
3.10 Key control characteristics measured according to this standard . 23
4 Symbols and abbreviated terms . 24
5 General . 25
5.1 Measurement principle . 25
5.1.1 Overview . 25
5.1.2 Magneto-optical indicator films . 26
5.1.3 Sensor . 27
5.1.4 Faraday effect in reflection . 28
5.1.5 Measurement scheme . 28
5.1.6 MOIF signal generation theory . 29
5.1.7 MOIF measurement modes . 29
5.1.8 Feature detection mode . 30
5.1.9 Quantitative spatially resolved feature detection mode . 30
5.2 Description of measurement equipment or apparatus . 30
5.2.1 MOIF imaging system . 30
5.2.2 MOIF imaging systems for spot measurements, confocal microscopy . 31
5.2.3 Imaging systems in wide field geometry . 31
5.2.4 MOIF signal detection . 31
5.2.5 MOIF signal detection schemes overview . 32
5.2.6 MOIF signal detection by a polarizing filter as an analyser . 32
5.2.7 Differential MOIF signal detection by a polarizing filter plus a Faraday
rotator to modulate the signal for lock-in detection . 32
5.2.8 MOIF signal generation by a polarization camera . 33
5.2.9 MOIF signal generation theory for direct MOIF measurements . 33
5.2.10 Selecting the analyser operating angle . 33
5.2.11 MOIF signal generation theory in differential MOIF measurements . 34
5.2.12 MOIF signal generation theory in the polarization measurement using a
polarization camera . 35
5.3 Ambient conditions during measurement . 35
6 Measurement procedure . 36
6.1 Calibration of measurement equipment . 36
6.1.1 Calibration of analyser-based MOIF measurements for purely
perpendicular magnetic fields H = H . 36
z
6.1.2 Calibration approach for one pixel . 36
6.1.3 Calibration approach for array sensors using an analyser-based
detection scheme . 37
6.1.4 Background image subtraction . 37
6.1.5 Calibration of differential MOIF for perpendicular magnetic fields H = H . 38
z
6.1.6 Calibration approach . 38
6.1.7 Providing the perpendicular calibration field . 39
6.2 MOIF key control parameters . 40
6.2.1 General . 40
ext
6.2.2 Calibrated external magnetic field, H . 40
z
6.2.3 Intensity of the light source . 40
6.2.4 Optical imaging geometry . 40
MOIF
6.2.5 Thickness of the MOIF, d . 40
6.2.6 Measurement height, h . 41
sensor
6.2.7 Sensor measurement temperature, T . 41
env
6.2.8 Environmental measurement temperature, T . 41
6.2.9 Scan size Sx × Sy and pixel resolution Nx, Ny and pixel size ∆x × ∆x . 41
6.3 Detailed description of the measurement procedure . 42
6.3.1 General . 42
6.3.2 Sample mounting . 42
6.3.3 Temperature stabilization . 42
6.3.4 Frame averaging . 42
6.3.5 Background image . 42
6.3.6 Raw data distribution . 43
6.3.7 Measurement procedure for geometrical feature detection . 43
6.3.8 Measurement procedure for calibrated magnetic field measurements
(analyser based) . 43
6.3.9 Detailed description of the MOIF calibration procedure for quantitative
stray field measurements . 44
6.3.10 Detailed description of the MOIF calibrated stray field measurement
procedure . 46
6.4 Measurement accuracy . 48
6.4.1 Contribution of in-plane magnetic field components . 48
6.4.2 In-plane magnetic fields contribution for low magnetic fields H << H . 48
uoop
6.4.3 In-plane magnetic field contribution for fields in the order of magnitude
of H . 49
uoop
6.4.4 Forward simulation . 49
6.4.5 Influence of the finite sensor thickness . 49
6.4.6 Transfer function-based sensor thickness correction . 50
6.4.7 Spatial resolution . 50
6.4.8 Diffraction limited resolution . 50
6.4.9 Sensor thickness limited resolution . 50
6.4.10 Signal generation artefacts in MOIF measurements . 51
6.4.11 Uncertainty evaluation . 51
6.4.12 Calibration uncertainty . 51
6.4.13 Uncertainty of calibrated field measurement . 51
7 Data analysis and interpretation of results . 52
7.1 Quantitative data analysis . 52

– 4 – IEC TS 62607-9-2:2024 © IEC 2024
7.2 Secondary parameters from MOIF measurements . 52
7.2.1 General . 52
7.2.2 Secondary parameters of magnetic scales . 52
7.2.3 Secondary parameters of grain-oriented electrical steel sheets . 53
8 Results to be reported . 53
8.1 Cover sheet . 53
8.2 Product / sample identification . 53
8.3 Measurement conditions . 53
8.4 Measurement specific information (examples) . 53
8.5 Measurement results . 53
Annex A (informative) Supporting information . 54
A.1 Mathematical basics . 54
A.1.1 Continuous Fourier transform versus discrete Fourier transform . 54
A.1.2 Partial (two-dimensional) Fourier space . 54
A.1.3 Cross correlation theorem . 55
A.2 Pseudo-Wiener filter . 55
A.2.1 Pseudo-Wiener filter-based deconvolution process . 55
A.2.2 L-curve criterion . 55
A.3 Magnetic fields in partial Fourier space . 55
A.3.1 Differentiation in partial Fourier space . 55
A.3.2 Magnetic fields in partial Fourier space . 56
A.4 Calculating the equilibrium magnetization of uniaxial in-plane MOIF sensors
in external magnetic fields . 56
A.4.1 Solving the free energy equation . 56
A.4.2 Determination of the anisotropy constants of the sensor active material . 58
A.4.3 Determination of the saturation magnetization at the MOIF active
sensor material . 60
A.5 Impact of finite sensor thickness . 60
A.5.1 Transfer function-based thickness correction . 60
A.5.2 Estimation of the impact of the finite sensor thickness . 61
A.6 Measurement reliability and signal generation artefacts in MOIF

measurements . 61
A.6.1 Illumination inhomogeneity . 61
A.6.2 Residual intensities due to non-ideal optical setups, background signals . 61
A.6.3 Nonlinearities of the sensors used as detection units . 62
A.6.4 Artefacts resulting from magnet units . 62
A.6.5 Artefacts resulting from sensor domain pattern . 62
A.6.6 Driving the sensor in saturation . 62
A.6.7 Driving the detection unit in saturation . 62
A.6.8 Contingency strategy . 63
A.6.9 Choice of adequate measurement conditions . 63
Annex B (informative) Worked example for geometrical feature detection . 64
B.1 Background. 64
B.2 Measurement procedure and data analysis . 64
B.3 Test report . 64
B.3.1 Cover sheet . 64
B.3.2 General product description and procurement information . 64
B.3.3 Measurement conditions . 65
B.3.4 Measurement specific information . 65

B.3.5 KCC measurement results . 65
Annex C (informative) Worked example for quantitative spatially resolved stray field
measurements . 67
C.1 Background. 67
C.2 Measurement procedure and data analysis . 67
C.3 Test report . 67
C.3.1 Cover sheet . 67
C.3.2 General product description and procurement information . 67
C.3.3 Measurement conditions . 67
C.3.4 Measurement specific information . 67
C.3.5 KCC measurement results . 68
Bibliography . 69

Figure 1 – Typical MOIF hysteresis curve and effective MOIF anisotropy field B . 27
A
Figure 2 – Schematic of the functional layers of a MOIF sensor . 27
Figure 3 – Schematic MOIF setup . 28
Figure 4 – Imaging geometries that can be used for MOIF imaging . 31
Figure 5 – MOIF measurement schemes for detection of the Faraday rotation . 32
Figure 6 – Schematic representation of the impact of angle θ between analyser and
det
polarizer on the relation between intensity I at the detector and magnetic field in the
measurement plane H . 33
z
Figure 7 – Example of a calibration curve . 37
Figure 8 – Angle of rotation of the plane of polarization of MOIF magnetization vector
under an external magnetic field . 38
Figure 9 – Field distribution of a 25 cm diameter pole shoe electromagnet at 19,8 mT . 40
Figure 10 – Impact of high in-plane components on the measured MOIF signal . 49
Figure 11 – Decay behaviour of H as a function of the pole width for magnetic scales
z
with a periodic magnetic pole pattern . 50
Figure A.1 – Example of the results of an FMR characterization of a MOIF sensor . 59
Figure A.2 – Impact of finite MOIF thickness: wavelength λ dependent relative decay
factor . 61
Figure A.3 – Typical intensity versus magnetic field curve . 62
Figure B.1 – Characteristic domain structure of grain-oriented electrical steel . 64
Figure B.2 – Measurement results: Domain visualization via magneto-optical imaging:
a) Spontaneous domain structure (initial state), b) to e) domain behaviour under
successively increasing external magnetic field parallel to the rolling direction, and
f) after subsequently switching off the field . 66
Figure C.1 – Calibrated stray field distribution at a distance of h = 560 µm from the
surface of the magnetic scale . 68
Figure C.2 – The calibrated field distribution along a cross section of Figure C.1 at y =
6,1 mm and derived positions of all zero crossings . 68

Table 1 – Abbreviated terms . 24
Table 2 – Symbols . 25
Table 3 – Ambient conditions key control characteristics . 35
Table 4 – External magnetic field control characteristics . 39
Table 5 – MOIF setup key control characteristics . 41

– 6 – IEC TS 62607-9-2:2024 © IEC 2024
Table 6 – MOIF calibration protocol . 45
Table 7 – Calibrated stray field measurement procedure . 46
Table 8 – Uncertainty evaluation key control characteristics . 52
Table A.1 – Sensor related artefacts and contingency strategies . 63
Table A.2 – Imaging system and light source related artefacts and contingency
strategies . 63
Table B.1 – Product description and procurement information . 64
Table C.1 – Product description and procurement information. 67

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 9-2: Nanomagnetic products – Magnetic field distribution:
Magneto-optical indicator film technique

FOREWORD
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IEC TS 62607-9-2 has been prepared by IEC technical committee 113: Nanotechnology for
electrotechnical products and systems. It is a Technical Specification.
The text of this Technical Specification is based on the following documents:
Draft Report on voting
113/817/DTS 113/830/RVDTS
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
– 8 – IEC TS 62607-9-2:2024 © IEC 2024
The language used for the development of this Technical Specification is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/publications.
A list of all parts in the IEC 62607 series, published under the general title Nanomanufacturing –
Key control characteristics, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
• reconfirmed,
• withdrawn, or
• revised.
IMPORTANT – The "colour inside" logo on the cover page of this document indicates
that it contains colours which are considered to be useful for the correct understanding
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INTRODUCTION
Measurements of magnetic fields that are homogeneous over macroscopic volumes can be
made traceable to the SI standards. Traceable calibration chains from national metrology
institutes to the end users are well-established.
However, many important industrial applications rely on precision sensing of spatially varying
magnetic fields. End-users need traceably quantitative characterization tools for magnetic
materials on the micrometre to centimetre scale to perform quality management of their
production processes.
IEC TS 62607-9-1 [1] established high-resolution magnetic field measurements based on
calibrated magnetic force microscopy. While qMFM can be regarded as the gold standard for
nanoscale magnetic field measurements with highest spatial resolution, its technical application
is often hindered by several drawbacks: qMFM does not provide a high time resolution and it
has a limited scan range (typically up to 100 µm × 100 µm in commercial systems). Also, qMFM
can only deal with samples that are flat on a 100 nm scale. On the other hand, nuclear magnetic
resonance (NMR) based SI standards can only be applied to centimetre scale macroscopic
objects. However, industrially relevant magnetic materials often combine micrometre scale
magnetic features with sample dimensions in the millimetre or centimetre range and rough
rather than flat surfaces.
Magneto-optical sensor technology is already used in the testing of magnetic materials and
partly also for quality control of magnetic components. Prominent examples for such industrial
samples with high economic relevance and high production numbers are:
– Magnetic scales for the fabrication of precise magnetic encoders for length measurement
systems and rotary encoders, e.g. for automotive applications; relevant parameters to be
metrologically assessed, like magnetic period, pole location, magnetic pole length, or pole
width, are, for example, defined in the DIN SPEC 91411 [2].
– High-quality electrical steel sheets (grain-oriented SiFe alloys), which are used in rotating
machinery and generators for efficient power generation and in transformers for low-loss
electrical energy conversion. While the relevant metrological parameters are for example
discussed in DIN EN 10107 [3], magneto-optical testing allows the magnetic and loss
properties to be related to the underlying grain and domain structure.
This document closes the length scale gap for magnetic field measurements by establishing a
quantitative magneto-optical indicator film measurement technique (qMOIF) for magnetic field
distribution. qMOIF is a fast (sub second resolution) imaging technique, that allows a one-shot
characterization of samples with areas of several square centimetres and with a resolution down
to the micrometre range. It can be used under room temperature conditions and for direct
sample testing without the need for costly and time-consuming surface treatments. qMOIF
allows a near-field testing of the distribution of the stray magnetic field directly at the specimen
surface. However, without magnetic and geometric calibration as well as proper adjustment of
the setup geometry, qMOIF merely delivers qualitative stray field images. This results from the
fact that the measured signal depends on the properties of magneto-optical indicator film used
as well as on the setup geometry and the detector.
___________
Numbers in square brackets refer to the Bibliography.

– 10 – IEC TS 62607-9-2:2024 © IEC 2024
MOIF imaging can be used in two basic operation modes that enable feature analysis and the
characterization of quantitative stray field distributions, respectively.
a) The first mode, the “geometrical feature detection mode”, allows the characterization of the
density and characteristic dimension of certain magnetic features on the basis of a magneto-
optical image. The contrast is adjusted to give maximum contrast of certain features
compared to the background. It is for example used for a dichotomization of the surface into
areas with two distinct characteristics, like up and down magnetized domains. This mode is,
for example, used for a quantitative characterization of domain widths and areal percentage.
b) The second mode, the “quantitative stray field distribution analysis mode”, allows one to
perform a spatially resolved analysis of the stray field distribution above the surface of a
sample. This demands a magnetic calibration that includes the characterization of the
sensor and the setup. Thereby quantitative values of key control characteristics (KCCs) like
magnetic field amplitudes are made accessible and ultimately become traceable to national
calibration standards.
This document aims at providing a description of the measurement approaches for both above
defined modes. This includes the adjustment of the setup and the traceable calibration and thus
feature analysis as well as traceably calibrated field distribution measurements.
In summary, this document provides a traceable method for spatially resolved and quantitative
micrometre-resolution measurements of magnetic field patterns with centimetre image sizes
which can be applied to technologically relevant materials with flat surfaces. Thereby, it will
further advance the precise control of fabrication processes and final product qualification. The
values of the key control characteristics for those products are very product specific (see, for
example, IEC TS 62622:2012 [4]).

NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 9-2: Nanomagnetic products – Magnetic field distribution:
Magneto-optical indicator film technique

1 Scope
This part of IEC 62607 establishes a standardized method to determine the key control
characteristic
• magnetic field distribution
of nanomagnetic materials, structures and devices by the
• magneto-optical indicator film technique.
The magnetic field distribution is derived by utilizing a magneto optical indicator film, which is
a thin film of magneto-optic material that is placed on the surface of an object exhibiting a
spatially varying magnetic field distribution. The Faraday effect is then employed to measure
the magnetic field strength by analysing the rotation of the polarization plane of light passing
through the magneto-optic film.
– The method is applicable for measuring the stray field distribution of flat nanomagnetic
materials, structures and devices.
– The method can especially be used to perform fast quantitative measurements of stray field
distributions at the surface of an object.
– The magneto-optic indicator film technique is a fast, non-destructive method, making it an
attractive option for materials analysis and testing in the industry.
– MOIF measurements can be done without any sample preparation and do not rely on specific
surface properties of the object. It can be applied to the characterization of rough samples
as well as of samples with non-magnetic cover layers.
– MOIF can quantitatively measure magnetic field distributions.
• with a one-shot measurement which typically takes a few seconds
• over areas of several square centimetres (over diameters of up to 15 cm with special
techniques)
• in a field range from 1 mT to more than 100 mT
• with down to 1 µm spatial resolution
– Although techniques with nano-scale resolution are suitable for analysing the details of
magnetic field structure, their ability to characterize larger areas is limited by their scanning
area. Therefore, the MOIF technique is an indispensable complementary method that can
offer a more comprehensive understanding of material properties.
This document focuses on the calibration procedures, calibrated measurement process, and
evaluation of measurement uncertainty to ensure the traceability of quantitative magnetic field
measurements obtained through the magneto-optic indicator film technique.
2 Normative references
There are no normative references in this document.

– 12 – IEC TS 62607-9-2:2024 © IEC 2024
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminology databases for use in standardization at the following
addresses:
• IEC Electropedia: available at https://www.electropedia.org/
• ISO Online browsing platform: available at https://www.iso.org/obp
3.1 General terms
3.1.1
key control characteristic
KCC
key performance indicator
measurement process characteristic which can affect compliance with regulations and quality,
reliability or subsequent application of the measurement result
Note 1 to entry: The measurement of a key control characteristic is described in a standardized measurement
procedure with known accuracy and precision.
Note 2 to entry: It is possible to define more than one measurement method for a key control characteristic, if the
correlation of the results is well-defined and known.
Note 3 to entry: In IATF 16949 the term "special characteristic" is used for a KCC. The term key control
characteristic is preferred since it signals directly the relevance of the parameter for the quality of the final product.
3.2 General terms related to magnetic stray field characterization
3.2.1
magnetic-force microscopy
MFM
atomic force microscopy mode employing a probe assembly that monitors both atomic forces
and magnetic interactions between the probe tip and a surface
[SOURCE: ISO 18115-2:2021, 3.1.15]
3.2.2
magneto-optical indicator film technique
MOIF technique
method of mapping the magnetic field above a sample surface by a thin magneto-optical
Faraday-active indicator film
Note 1 to entry: The magnetic fields induce a declination of the magnetization from equilibrium direction in the
active layer of the sensor, which is recorded with the Faraday effect.
3.3 Terms related to the measurement method described in this document
3.3.1
MOIF raw data distribution
S(Nx, Ny), S(x,y)
pixel position, S(Nx, Ny), for array sensors in wide field microscopes, or spatially resolved, S
(x,y), for sample scanning measurements in confocal microscopes, detector signal data array
of a MOIF measurement
Note 1 to entry: The signal data type depends on the applied analysis technique. For direct MOIF measurements,
raw data depict sensor dependent converted intensity distribution data in appropriate units. For differential, lock-in
based MOIF measurements, raw data depict lock-in amplitudes in units of volt.

3.3.2
measurement height
h
value of the distance between the MOIF active layer surface facing the sample surface resulting
rc
from the sum of the measurement gap height g, the MOIF reflective coating thickness d and
pc
the MOIF protective coating thickness d
3.3.3
measurement plane
x-y-plane at the measurement height
Note 1 to entry: The MOIF measurement technique detects a signal which results from an averaging of field values
over the sensor thickness. MOIF raw data therefore do not a priori represent the field distribution at the measurement
height.
3.3.4
non-magnetic spacer
flat spacer of permeability μ = μ placed in between the SUT and the sensor to adjust the
measurement height
3.3.5
MOIF observation variable
raw data output of the detection unit
Note 1 to entry: The data type depends on the applied analysis technique. For direct MOIF measurements, raw
data depict intensity distributions in appropriate units. For differential, lock-in based MOIF, raw data depict lock-in
amplitudes in units of volt.
3.3.6
intensity detection unit
system to detect the light intensity distribution imaged by the imaging system after passing the
polarizer
Note 1 to entry: The signal detection unit, typically a photo diode or an array sensor, converts light intensity into a
digital signal.
3.3.7
z-scanner
element for the realization of the vertical displacement of the sample during x-y-scanning
Note 1 to entry: See ISO 18115-2:2021, 5.136
3.3.8
magnetic field reference sample
magnetic sample whose magnetic field distribution above the sample surface is well-known
3.3.9
image size
Sx, Sy
length and width of the sample area that is mapped into a two-dimensional raster image
3.3.10
pixel
smallest element of the digital image to which attributes are assigned
[SOURCE: ISO 10934:2020, 3.1.116]

– 14 – IEC TS 62607-9-2:2024 © IEC 2024
3.3.11
pixel index
(Nx, Ny)
integer values indexing the position of a sensor unit in an array sensor
Note 1 to entry: These values also index the pixels of the mapped two-dimensional raster image.
3.3.12
pixel size
∆A
sample area represented by each measured point in a two-dimensional raster image
∆A = ∆x⋅∆y
Note 1 to entry: The values for ∆x and ∆y are determined by the imaging geometry.
3.3.13
lateral position
(x, y)
coordinates in units of meters depicting the position on the sample under test
3.3.14
geometrical imaging function
function that describes in the case of a wide-field measurement geometry how a position on the
sample (x, y) is mapped to the sensor pixels (Nx, Ny)
Note 1 to entry: The geometrical imaging function establishes an unambiguous and invertible relation between
pixels and a set of discretized sample positions. In this sense, (x, y) and (Nx, Ny) can be used equivalently.
3.3.15
sample under test
SUT
m
...