IEC TS 62607-6-4:2016

Nanomanufacturing - Key control characteristics - Part 6-4: Graphene - Surface conductance measurement using resonant cavity

IEC TS 62607-6-4:2016(E) establishes a method for determining the surface conductance of two-dimensional (2D) single-layer or multi-layer atomically thin nano-carbon graphene structures. These are synthesized by chemical vapour deposition (CVD), epitaxial growth on silicon carbide (SiC), obtained from reduced graphene oxide (rGO) or mechanically exfoliated from graphite. The measurements are made in an air filled standard R100 rectangular waveguide configuration, at one of the resonant frequency modes, typically at 7 GHz. Surface conductance measurement by resonant cavity involves monitoring the resonant frequency shift and change in the quality factor before and after insertion of the specimen into the cavity in a quantitative correlation with the specimen surface area. This measurement does not explicitly depend on the thickness of the nano-carbon layer. The thickness of the specimen does not need to be known, but it is assumed that the lateral dimension is uniform over the specimen area.

General Information

• Status: Published
• Publication Date: 27-Sep-2016
• ICS: 01 - GENERALITIES. TERMINOLOGY. STANDARDIZATION. DOCUMENTATION
• ICS: 07.120 - Nanotechnologies
• ICS: 29.120.20 - Connecting devices
• Technical Committee: TC 113 - Nanotechnology for electrotechnical products and systems
• Drafting Committee: PT 62607-6-4 - TC 113/PT 62607-6-4

Relations

• Revised: IEC TS 62607-6-4:2024 - Nanomanufacturing - Key control characteristics - Part 6-4: Graphene-based materials - Surface conductance: non-contact microwave resonant cavity method
• Effective Date: 05-Sep-2023

Standards Content (Sample)

IEC TS 62607-6-4 ®
Edition 1.0 2016-09
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 6-4: Graphene – Surface conductance measurement using resonant cavity

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IEC TS 62607-6-4 ®
Edition 1.0 2016-09
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –

Part 6-4: Graphene – Surface conductance measurement using resonant cavity

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120 ISBN 978-2-8322-3667-3

– 2 – IEC TS 62607-6-4:2016 © IEC 2016

CONTENTS
FOREWORD . 3

INTRODUCTION . 5

1 Scope . 6

2 Normative references. 6

3 Terms and definitions . 6

3.1 Graphene layers . 6

3.2 Measurement terminology . 8
4 Microwave cavity test fixture . 9
5 Test specimen . 10
6 Measurement procedure . 10
6.1 Apparatus . 10
6.2 Calibration . 11
6.3 Measurements . 11
6.3.1 General . 11
6.3.2 Empty cavity . 11
6.3.3 Specimen. 11
6.3.4 Repeated procedure . 12
6.3.5 Substrate . 12
7 Calculations of surface conductance . 12
8 Report . 12
9 Accuracy consideration . 13
Annex A (informative)  Case study of surface conductance measurement of single-
layer and few-layer graphene . 14
A.1 General . 14
A.2 Cavity perturbation procedure . 14
A.3 Experimental procedure . 15
A.4 Results . 15
A.5 Surface conductance of single-layer graphene and few-layer graphene . 16
A.6 Summary . 17
Bibliography . 18

Figure 1 – Microwave cavity test fixture . 10
Figure A.1 – S magnitude of the resonant peak TE as a function of frequency at
21 103
several specimen insertions (h ) . 16
x
Figure A.2 – Plots of 1/Q − 1/Q as a function of the normalized specimen area (w h ). . 16
x 0 x
INTERNATIONAL ELECTROTECHNICAL COMMISSION

____________
NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 6-4: Graphene – Surface conductance

measurement using resonant cavity

FOREWORD
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IEC TS 62607-6-4, which is a Technical Specification, has been prepared by IEC technical
committee 113: Nanotechnology for electrotechnical products and systems.

– 4 – IEC TS 62607-6-4:2016 © IEC 2016

The text of this Technical Specification is based on the following documents:

Enquiry draft Report on voting

113/295/DTS 113/324/RVC
Full information on the voting for the approval of this Technical Specification can be found in

the report on voting indicated in the above table.

This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

A list of all parts in the IEC 62607 series, published under the general title
Nanomanufacturing – Key control characteristics, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
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INTRODUCTION
The microwave resonant cavity test method for surface conductance is non-contact, fast,

sensitive and accurate. It is well suited for standards, research and development (R&D), and

for quality control in the manufacturing of two-dimensional (2D) nano-carbon materials. These

sheet-like or flake-like carbon forms can be assembled into atomically-thin monolayer or

multilayer graphene materials, which can be stacked, folded, crumpled or pillared into a

variety of nano-carbon architectures with the lateral dimension limited to a few tenths of a

nanometre. Many of these materials are new and exhibit extraordinary physical and electrical

properties such as optical transparency, anisotropic heat diffusivity and charge transport that
are of significant interest to science, technology and commercial applications [1, 2] .

Depending on particular morphologies, density of states and structural perfection, the surface
−4
conductance of these materials may vary from 1 S to about 10 S. Conventional direct
current (DC) surface conductance measurement techniques require a complex test vehicle
and interc
...