Nanomanufacturing - Key control characteristics - Part 2-4: Carbon nanotube materials - Test methods for determination of resistance of individual carbon nanotubes

IEC TS 62607-2-4:2020 specifies the test method for determining the resistivity and the contact resistance of an individual CNT and the dependability of the measurement.
This document includes:
– outlines of the experimental procedures used to measure resistance of carbon nanotubes,
– methods of interpretation of results and discussion of data analysis, and
– case studies.

General Information

Status
Published
Publication Date
08-Apr-2020
Current Stage
PPUB - Publication issued
Start Date
20-Mar-2020
Completion Date
09-Apr-2020
Ref Project

Buy Standard

Technical specification
IEC TS 62607-2-4:2020 - Nanomanufacturing - Key control characteristics - Part 2-4: Carbon nanotube materials - Test methods for determination of resistance of individual carbon nanotubes
English language
19 pages
sale 15% off
Preview
sale 15% off
Preview

Standards Content (Sample)


IEC TS 62607-2-4 ®
Edition 1.0 2020-04
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 2-4: Carbon nanotube materials – Test methods for determination
of resistance of individual carbon nanotubes
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.

IEC Central Office Tel.: +41 22 919 02 11
3, rue de Varembé info@iec.ch
CH-1211 Geneva 20 www.iec.ch
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.

About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.

IEC publications search - webstore.iec.ch/advsearchform Electropedia - www.electropedia.org
The advanced search enables to find IEC publications by a The world's leading online dictionary on electrotechnology,
variety of criteria (reference number, text, technical containing more than 22 000 terminological entries in English
committee,…). It also gives information on projects, replaced and French, with equivalent terms in 16 additional languages.
and withdrawn publications. Also known as the International Electrotechnical Vocabulary

(IEV) online.
IEC Just Published - webstore.iec.ch/justpublished
Stay up to date on all new IEC publications. Just Published IEC Glossary - std.iec.ch/glossary
details all new publications released. Available online and 67 000 electrotechnical terminology entries in English and
once a month by email. French extracted from the Terms and Definitions clause of
IEC publications issued since 2002. Some entries have been
IEC Customer Service Centre - webstore.iec.ch/csc collected from earlier publications of IEC TC 37, 77, 86 and
If you wish to give us your feedback on this publication or CISPR.

need further assistance, please contact the Customer Service

Centre: sales@iec.ch.
IEC TS 62607-2-4 ®
Edition 1.0 2020-04
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –

Part 2-4: Carbon nanotube materials – Test methods for determination

of resistance of individual carbon nanotubes

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.030; 07.120 ISBN 978-2-8322-7968-7

– 2 – IEC TS 62607-2-4:2020 © IEC 2020
CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms, definitions, and abbreviated terms . 6
3.1 Terms and definitions . 6
3.2 Abbreviated terms . 8
4 Measurement of resistance . 8
4.1 General . 8
4.2 Method for processing and fabrication of DUT . 8
4.3 4-probe measurement . 8
5 Reporting data . 9
6 Data analysis / interpretation of results (Annex A) . 10
6.1 General . 10
6.2 Measurement error . 10
6.3 Need to prepare the proper electric probing circuit . 11
6.4 Need to prepare the proper substrate and electric contact . 11
6.5 Dynamic range . 11
6.6 Current density . 11
6.7 Voltage bias of the substrate . 11
6.8 Measurement in vacuum . 11
Annex A (informative) Case study . 12
A.1 4-probe measurement of MWCNT . 12
A.1.1 I-V measurements of MWCNT. 12
A.1.2 Fabrication process information of MWCNT and DUT . 14
A.2 4-probe measurement of SWCNT . 15
A.2.1 I-V measurements of SWCNT . 15
A.2.2 Fabrication process information of SWCNT and DUT . 18
Bibliography . 19

Figure 1 – 4-probe measurement in a SEM chamber . 9
Figure 2 – A crooked/curved CNT under measurement . 10
Figure 3 – I-V measurement of a sufficiently straight CNT . 11
Figure A.1 – I-V measurements of a CNT with different lengths, L. 12
Figure A.2 – I-V relationships for different CNT lengths – 2-probe measurement . 13
Figure A.3 – I-V relationships for different CNT lengths – 2-probe measurement (0 to 0,5 V) 13
Figure A.4 – I-V relationships for different CNT lengths – 4-probe measurement . 14
Figure A.5 – Resistance vs. CNT length . 14
Figure A.6 – I-V relationships of SWCNT . 15
Figure A.7 – Resistance vs. SWCNT length . 16
Figure A.8 – I-V relationships of SWCNT under the electron-beam exposure . 17
Figure A.9 – Breakdown characteristics of SWCNT . 18

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 2-4: Carbon nanotube materials – Test methods for determination
of resistance of individual carbon nanotubes

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising all
national electrotechnical committees (IEC National Committees). The object of IEC is to promote international co-
operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition
to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports, Publicly
Available Specifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their preparation is entrusted
to technical committees; any IEC National Committee interested in the subject dealt with may participate in this
preparatory work. International, governmental and non-governmental organizations liaising with the IEC also
participate in this preparation. IEC collaborates closely with the International Organization for Standardization (ISO)
in accordance with conditions determined by agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all interested
IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National Committees
in that sense. While all reasonable efforts are made to ensure that the technical content of IEC Publications is accurate,
IEC cannot be held responsible for the way in which they are used or for any misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence between any
IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any services
carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and members
of its technical committees and IEC National Committees for any personal injury, property damage or other damage of
any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and expenses arising out of the
publication, use of, or reliance upon, this IEC Publication or any other IEC Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent
rights. IEC shall not be held responsible for identifying any or all such patent rights.
The main task of IEC technical committees is to prepare International Standards. In exceptional
circumstances, a technical committee may propose the publication of a Technical Specification when
• the required support cannot be obtained for the publication of an International Standard, despite
repeated efforts, or
• the subject is still under technical development or where, for any other reason, there is the future
but no immediate possibility of an agreement on an International Standard.
Technical Specifications are subject to review within three years of publication to decide whether
they can be transformed into International Standards.
IEC TS 62607-2-4, which is a Technical Specification, has been prepared by IEC technical
committee 113: Nanotechnology for electrotechnical products and systems.

– 4 – IEC TS 62607-2-4:2020 © IEC 2020
The text of this Technical Specification is based on the following documents:
DTS Report on voting
113/492/DTS 113/509/RVDTS
Full information on the voting for the approval of this Technical Specification can be found in the
report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts in the IEC 62607 series, published under the general title Nanomanufacturing –
Key control characteristics, can be found on the IEC website.
The committee has decided that the contents of this publication will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to the
specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct understanding
of its contents. Users should therefore print this document using a colour printer.

INTRODUCTION
Carbon nanotubes (CNTs) are one-dimensional conductors that exhibit a rich variety of
low-dimensional electric transport phenomena. Ballistic conduction is the typical nano-enabled
characteristic that possesses the largest potential for industrial application. In the field of
nanoelectronics, for example, CNT-based interconnects are a promising alternative to conventional
Cu interconnects. However, even in the academic research society, the resistive characteristics
have not yet been systematically investigated. This is because these characteristics are very
sensitive to the protocol and the measurement conditions. Furthermore, since the individual CNT
reaches the nanometre dimension, the contact resistance has a larger relative impact on the
measurement. These bottlenecks impede not only the above-mentioned interconnect application but
also developments of
...

Questions, Comments and Discussion

Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.