IEC 63041-2:2017

Piezoelectric sensors - Part 2: Chemical and biochemical sensors

IEC 63041-2:2017 is applicable to piezoelectric chemical sensors mainly used in the field of biological, medical, gas and environmental sciences. It provides users with technical guidelines on biochemical sensors as well as basic knowledge of common chemical sensors.

Capteurs piézoélectriques - Partie 2 : Capteurs chimiques et biochimiques

L'IEC 63041-2:2017 s'applique aux capteurs chimiques piézoélectriques principalement utilisés dans le domaine biologique, médical, des gaz et des sciences environnementales. Elle donne aux utilisateurs des lignes directrices techniques relatives aux capteurs biochimiques, ainsi que les connaissances concernant les capteurs chimiques communs.

General Information

• Status: Published
• Publication Date: 12-Dec-2017
• ICS: 01 - GENERALITIES. TERMINOLOGY. STANDARDIZATION. DOCUMENTATION
• ICS: 31.140 - Piezoelectric devices
• Technical Committee: TC 49 - Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection
• Drafting Committee: WG 13 - TC 49/WG 13
• Current Stage: PPUB - Publication issued
• Start Date: 13-Dec-2017
• Completion Date: 11-Jan-2018

Standards Content (Sample)

IEC 63041-2 ®
Edition 1.0 2017-12
INTERNATIONAL
STANDARD
colour
inside
Piezoelectric sensors –
Part 2: Chemical and biochemical sensors
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.

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About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.

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IEC 63041-2 ®
Edition 1.0 2017-12
INTERNATIONAL
STANDARD
colour
inside
Piezoelectric sensors –
Part 2: Chemical and biochemical sensors

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.140 ISBN 978-2-8322-5144-7

– 2 – IEC 63041-2:2017 © IEC 2017
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
3.1 General . 5
3.2 Types of chemical and biochemical sensors . 6
4 Specifications . 6
4.1 General . 6
4.2 Conceptual diagram of BAW sensor elements and cells . 6
4.3 Conceptual diagram of SAW sensor elements and cells . 6
4.4 Key points of specifications . 7
4.4.1 General . 7
4.4.2 Interface layer . 7
4.4.3 Sensitive or receptive layer (target recognition material) . 7
4.4.4 Nonspecific and unselective reactions . 8
4.5 Improved sensor performance . 8
4.6 Technical documents . 8
5 Delivery conditions . 8
6 Quality and reliability . 8
7 Test and measurement procedures . 8
Annex A (informative) Chemical reaction in sensor cells . 9
A.1 Reference values before and after reaction . 9
A.2 Typical formulae . 10
A.2.1 General . 10
A.2.2 BAW (AT-cut QCM) . 10
A.2.3 SAW . 11
A.3 Calibration . 14
Bibliography . 15

Figure 1 – Conceptual diagram for chemical and biochemical sensor elements and
cells of BAW resonator type (side view) . 6
Figure 2 – Conceptual diagram for chemical and biochemical sensor elements and
cells of SAW resonator type (side view) . 7
Figure 3 – Conceptual diagram for chemical and biochemical sensor elements and
cells of SAW delay-line type (top view) . 7
Figure 4 – Conceptual diagram for SAW chemical and biochemical sensor elements
and cells with three-layer reaction region on a propagation surface (side view) . 8
Figure A.1 – Frequency-time characteristics . 9
Figure A.2 – Conceptual resonance response of an SAW sensor cell . 10

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 2: Chemical and biochemical sensors

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 63041-2 has been prepared by IEC technical committee TC 49:
Piezoelectric, dielectric and electrostatic devices and associated materials for frequency
control, selection and detection.
The text of this International Standard is based on the following documents:
CDV Report on voting
49/1221/CDV 49/1250/RVC
Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts in the IEC 63041 series, published under the general title Piezoelectric
sensors, can be found on the IEC website.

– 4 – IEC 63041-2:2017 © IEC 2017
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC website under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
A bilingual version of this publication may be issued at a later date.

IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct
understanding of its contents. Users should therefore print this document using a
colour printer.
PIEZOELECTRIC SENSORS –
Part 2: Chemical and biochemical sensors

1 Scope
This part of IEC 63041 is applicable to piezoelectric chemical sensors mainly used in the field
of biological, medical, gas and environmental sciences. It provides users with technical
guidelines on biochemical sensors as well as basic knowledge of common chemical sensors.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their
content constitutes requirements of this document. For dated references, only the edition
cited applies. For undated references, the latest edition of the referenced document (including
any amendments) applies.
IEC 60027 (all parts), Letter symbols to be used in electrical technology
IEC 60050-561-:2014, International Electrotechnical Vocabulary – Part 561: Piezoelectric,
dielectric and electrostatic devices and associated materials for frequency control, selection
and detection
IEC 60617, Graphical symbols for diagrams, available at http://std.iec.ch/iec60617
IEC 63041-1, Piezoelectric sensors – Part 1: Generic specifications
ISO 80000-1:2009, Quantities and units – Part 1: General
3 Terms and definitions
3.1 General
For the purpose of this document, the following terms and definitions apply.
ISO and IEC maintain terminological databases for use in standardization at the following
addresses;
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http://www.iso.org/obp
Units, letter symbols and terminology shall, wherever possible, be taken from the following
standards: IEC 60027, IEC 60050-561, IEC 60617, IEC 63041-1, and ISO 80000-1.
NOTE 1 In the market of chemical and biochemical sensors, the terms related in fields such as chemistry,
biochemistry, healthcare, etc. are widely used.
NOTE 2 Piezoelectric sensors covered herein are those used for the detection and measurement of either
chemical substance in the gas phase or biological molecules in aqueous media.

– 6 – IEC 63041-2:2017 © IEC 2017
3.2 Types of chemical and biochemical sensors
3.2.1
piezoelectric chemical sensor element
piezoelectric sensor component including a sensitive layer (target recognition material), which
is necessary for the practical measurement of simple non-biological molecules in quantity,
and which works and detects chemical substances mainly in the gas phase
Note 1 to entry: For example, there are odour sensors, vapour sensors, smoke sensors, etc.
[SOURCE: IEC 63041-1:2017, 3.3.1, modified – Note 1 to entry has been added.]
3.2.2
piezoelectric biochemical sensor element
piezoelectric sensor component including a receptive layer (target recognition material), which
is necessary for the practical measurement of complex biological molecules in quantity, and
which works mainly in aqueous media and detects biomolecules therein
[SOURCE: IEC 63041-1:2017, 3.3.2]
4 Specifications
4.1 General
Chemical and biochemical sensors are used in various applications, for example, in the
detection of target molecules/substances, the detection of growth, decrease, differentiation
and cohesion in cells, the detection of adsorption or absorption, the confirmation of the
competition reaction, etc. Concepts and specifications for chemical and biochemical sensors
are shown in detail in 4.2 to 4.5.
4.2 Conceptual diagram of BAW sensor elements and cells
Figure 1 shows the practical conceptual diagram for a bulk acoustic wave (BAW) sensor
element. In the figure, mounting stages and enclosures are omitted.
Target substances
Sensitive or receptive layer
Interface layer
Electrode
Piezoelectric plate
Electrode
IEC
Figure 1 – Conceptual diagram for chemical and biochemical sensor elements
and cells of BAW resonator type (side view)
4.3 Conceptual diagram of SAW sensor elements and cells
...

IEC 63041-2 ®
Edition 1.0 2017-12
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Piezoelectric sensors –
Part 2: Chemical and biochemical sensors

Capteurs piézoélectriques –
Partie 2: Capteurs chimiques et biochimiques

All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
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IEC 63041-2 ®
Edition 1.0 2017-12
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Piezoelectric sensors –
Part 2: Chemical and biochemical sensors

Capteurs piézoélectriques –
Partie 2: Capteurs chimiques et biochimiques

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.140 ISBN 978-2-8322-7535-1

– 2 – IEC 63041-2:2017 © IEC 2017
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
3.1 General . 5
3.2 Types of chemical and biochemical sensors . 6
4 Specifications . 6
4.1 General . 6
4.2 Conceptual diagram of BAW sensor elements and cells . 6
4.3 Conceptual diagram of SAW sensor elements and cells . 6
4.4 Key points of specifications . 7
4.4.1 General . 7
4.4.2 Interface layer . 7
4.4.3 Sensitive or receptive layer (target recognition material) . 7
4.4.4 Nonspecific and unselective reactions . 8
4.5 Improved sensor performance . 8
4.6 Technical documents . 8
5 Delivery conditions . 8
6 Quality and reliability . 8
7 Test and measurement procedures . 8
Annex A (informative) Chemical reaction in sensor cells . 9
A.1 Reference values before and after reaction . 9
A.2 Typical formulae . 10
A.2.1 General . 10
A.2.2 BAW (AT-cut QCM) . 10
A.2.3 SAW . 11
A.3 Calibration . 14
Bibliography . 15

Figure 1 – Conceptual diagram for chemical and biochemical sensor elements and
cells of BAW resonator type (side view) . 6
Figure 2 – Conceptual diagram for chemical and biochemical sensor elements and
cells of SAW resonator type (side view) . 7
Figure 3 – Conceptual diagram for chemical and biochemical sensor elements and
cells of SAW delay-line type (top view) . 7
Figure 4 – Conceptual diagram for SAW chemical and biochemical sensor elements
and cells with three-layer reaction region on a propagation surface (side view) . 8
Figure A.1 – Frequency-time characteristics . 9
Figure A.2 – Conceptual resonance response of an SAW sensor cell . 10

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 2: Chemical and biochemical sensors

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 63041-2 has been prepared by IEC technical committee TC 49:
Piezoelectric, dielectric and electrostatic devices and associated materials for frequency
control, selection and detection.
This bilingual version (2019-11) corresponds to the monolingual English version, published in
2017-12.
The text of this International Standard is based on the following documents:
CDV Report on voting
49/1221/CDV 49/1250/RVC
Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
The French version of this standard has not been voted upon.

– 4 – IEC 63041-2:2017 © IEC 2017
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts in the IEC 63041 series, published under the general title Piezoelectric
sensors, can be found on the IEC website.
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC website under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct
understanding of its contents. Users should therefore print this document using a
colour printer.
PIEZOELECTRIC SENSORS –
Part 2: Chemical and biochemical sensors

1 Scope
This part of IEC 63041 is applicable to piezoelectric chemical sensors mainly used in the field
of biological, medical, gas and environmental sciences. It provides users with technical
guidelines on biochemical sensors as well as basic knowledge of common chemical sensors.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their
content constitutes requirements of this document. For dated references, only the edition
cited applies. For undated references, the latest edition of the referenced document (including
any amendments) applies.
IEC 60027 (all parts), Letter symbols to be used in electrical technology
IEC 60050-561-:2014, International Electrotechnical Vocabulary – Part 561: Piezoelectric,
dielectric and electrostatic devices and associated materials for frequency control, selection
and detection
IEC 60617, Graphical symbols for diagrams, available at http://std.iec.ch/iec60617
IEC 63041-1, Piezoelectric sensors – Part 1: Generic specifications
ISO 80000-1:2009, Quantities and units – Part 1: General
3 Terms and definitions
3.1 General
For the purpose of this document, the following terms and definitions apply.
ISO and IEC maintain terminological databases for use in standardization at the following
addresses;
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http://www.iso.org/obp
Units, letter symbols and terminology shall, wherever possible, be taken from the following
standards: IEC 60027, IEC 60050-561, IEC 60617, IEC 63041-1, and ISO 80000-1.
NOTE 1 In the market of chemical and biochemical sensors, the terms related in fields such as chemistry,
biochemistry, healthcare, etc. are widely used.
NOTE 2 Piezoelectric sensors covered herein are those used for the detection and measurement of either
chemical substance in the gas phase or biological molecules in aqueous media.

– 6 – IEC 63041-2:2017 © IEC 2017
3.2 Types of chemical and biochemical sensors
3.2.1
piezoelectric chemical sensor element
piezoelectric sensor component including a sensitive layer (target recognition material), which
is necessary for the practical measurement of simple non-biological molecules in quantity,
and which works and detects chemical substances mainly in the gas phase
Note 1 to entry: For example, there are odour sensors, vapour sensors, smoke sensors, etc.
[SOURCE: IEC 63041-1:2017, 3.3.1, modified – Note 1 to entry has been added.]
3.2.2
piezoelectric biochemical sensor element
piezoelectric sensor component including a receptive layer (target recognition material), which
is necessary for the practical measurement of complex biological molecules in quantity, and
which works mainly in aqueous media and detects biomolecules therein
[SOURCE: IEC 63041-1:2017, 3.3.2]
4 Specifications
4.1 General
Chemical and biochemical sensors are used in various applications, for example, in the
detection of target molecules/substances, the detection of growth, decrease, differentiation
and cohesion in cells, the detection of adsorption or absorption, the confirmation of the
competition reaction, etc. Concepts and specifications for chemical and biochemical sensors
are shown in detail in 4.2 to 4.5.
4.2 Conceptual diagram of BAW sensor elements and cells
Figure 1 shows the practical conceptual diagram for a bulk acoustic wave (BAW) sensor
element. In the figure, mounting stages and enclosures are omitted.
Target substances
Sensitive or receptive layer
Interface layer
Electrode
Piezoelectric plate
Electrode
IEC
Figure 1 – Conceptual diagram for chemical and biochemical sensor elements
and cells of BAW resonator type (side view)
4.3 Conceptual diagram of SAW sensor elements and cells
Figures 2 and 3 show the practical conceptual diagrams for two kinds of sensor elements and
cells, respectively, of surface acoustic wave (SAW) resonator and delay-line types. In the
figures, mounting stages and enclosures are omitted.

Target substances
Sensitive or receptive layer
Interface layer
Reflector IDT Reflector
Piezoelectric substrate
IEC
Figure 2 – Conceptual diagram for chemical and biochemical sensor elements
and cells of SAW resonator type (side view)
NOTE Reflector and interdigital transducer (IDT) are defined in IEC 61019-1:2004.
Target substances
Piezoelectric substrate
IDT IDT
Sensitive or receptive layer
IEC
Figure 3 – Conceptual diagram for chemical and biochemical sensor elements
and cells of SAW delay-line type (top view)
4.4 Key points of specifications
4.4.1 General
Key points of the specification are identified in Clause 5 of IEC 63041-1:2017. In addition, the
items specified in 4.4.2 to 4.4.4 should clearly be defined.
4.4.2 Interface layer
As can be seen in Figures 1 and 2, an interface layer is formed to increase the adhesion of
the sensitive or receptive layer to the electrode/substrate.
4.4.3 Sensitive or receptive layer (target recognition material)
A sensitive layer employed in chemical sensor applications or a receptive layer employed in
biochemical sensor applications should properly be selected for specific target
molecules/substances.
For BAW resonator type sensor elements and cells, the sensitive or receptive layer is formed
on the electrode of one surface (see Figure 1), whereas it is formed on the SAW propagation
surface of SAW resonator and delay-line type sensor elements and cells (see Figures 2
and 3).
– 8 – IEC 63041-2:2017 © IEC 2017
4.4.4 Nonspecific and unselective reactions
For chemical and biochemical sensor elements and cells, sensitive or receptive layers and
solvents should be selected so that nonspecific and unselective reactions may be minimized
in conjunction with target molecules/substances.
4.5 Improved sensor performance
In some situations, an acoustic waveguide layer is formed to increase the sensitivity of SAW
delay-line type chemical and biochemical sensor elements and cells.
Figure 4 shows the conceptual diagram of shear horizontal (SH)-SAW delay-line type
chemical and biochemical sensor elements and cells, where the material for the interface
layer, acoustic waveguide layer and the like should be defined in the contract.
Target substances
Sensitive or receptive layer
Waveguide layer
Interface layer
IDT
IDT
Piezoelectric substrate
IEC
Figure 4 – Conceptual diagram for SAW chemical and biochemical sensor elements
and cells with three-layer reaction region on a propagation surface (side view)
4.6 Technical documents
The following 1) and 2) should clearly be defined in the specifications in the contract to be
concluded between the manufacturer and customers.
1) When a term other than a) to d) shown below is used.
a) Limit of detection: the minimum amount or concentration detectable by sensor cells.
b) Limit of quantitation: the minimum amount or concentration detectable by sensor
modules.
c) Maximum limit of determination: the maximum analyte amount or concentration on
which quantitative analysis can be performed, also called the “maximum limit of
quantitation”.
d) Sensitivity: the dependence of the output of sensor elements and cells upon the
detected amount or concentration, i.e., the slope of a calibration curve.
2) Setting of reliability interval.
5 Delivery conditions
See Clause 7 of IEC 63041-1:2017.
6 Quality and reliability
See Clause 8 of IEC 63041-1:2017.
7 Test and measurement procedures
See Clause 9, and Annexes A and B of IEC 63041-1:2017.

Annex A
(informative)
Chemical reaction in sensor cells
A.1 Reference values before and after reaction
As shown in Figures A.1 and A.2, resonance frequency, oscillation frequency, phase, insertion
loss/gain, motional resistance, etc. of sensor cell outputs should be defined at time t as the

initial values before chemical and/or biochemical reactions occur. In a similar way, they
should be also defined at time t as final values after the reaction has completed.
For these specifications, the manufacturer and customer shall have detailed discussions, the
discrepancies shall be eliminated, and the results shall clearly be described in the contract
clause, the requirements specifications of the customer, the delivery specifications thereof or
the like, and shall be settled as one of the contracts with the customer.
The reaction shall be quantified using formulae and recorded.
Before reaction
f
After reaction
f
t
t 2
Time
IEC
Figure A.1 – Frequency-time characteristics
Frequency
– 10 – IEC 63041-2:2017 © IEC 2017
Change in frequency
Change in loss/gain
f f
2 1
Before reaction (t=t )
After reaction (t=t )
Frequency
IEC
Figure A.2 – Conceptual resonance response of an SAW sensor cell
A.2 Typical formulae
A.2.1 General
The formulae presented in A.2.2 and A.2.3 are typical examples used for chemical and
biochemical sensor cells. For these formulae, the manufacturer and customer shall have
detailed discussions, the discrepancies shall be eliminated, and the results shall be described
clearly in the contract clause.
A.2.2 BAW (AT-cut QCM)
a) Mass-loading
−7 2
(A.1)
∆f=−2,26×10 ∆mf
and
′
∆m=ρd (A.2)
where
f is the frequency;
Δm is the change in the surface mass density;
′
ρ is the density of a sensitive or receptive layer;
d is the thickness of a sensitive or receptive layer.
Δf = f − f
1 2
b) Viscosity
Relationship between viscosity and frequency deviation,
1 1
 
 
−8
∆f=−4,17×10 f (ρ′η′) −(ρη ) (A.3)
 2 2
e e e
e
 
 
where
Loss/gain
ρ is the density of a reference liquid;
e
η is the viscosity of a reference liquid;
e
′
ρ is the density of a liquid to be measured;
e
′
η is the viscosity of a liquid to be measured.
e
Relationship between viscosity and resonance resistance,
A
R =(ωρη )
(A.4)
L L
r
K
where
R is the resonance resistance;
r
K is the electromechanical coupling factor;
η is the viscosity of a liquid;
L
ρ is the density of a liquid;
L
A is the electrode area;
ω is the angular frequency.
The resonance resistance R is measured based on IEC 60444-1, IEC 60444-5, or alternative
r
measurement methods.
A.2.3 SAW
A.2.3.1 Rayleigh wave sensors
a) Mass-loading
(A.5)
Δf=−(k +k )Δmf
1 2
where
k and k are the parameters depending on a piezoelectric material.
1 2
b) Acoustic electric interaction
ΔV K 1+ jε Z′(0)
0 E
= ε (A.6)
T
V 2 ′
ε − jε Z (0)
0 P E
where
V is the reference phase velocity;
is the electromechanical coupling factor;
K
is the permittivity of a free space;
ε
′ is the normalized surface acoustic impedance;
Z (0)
E
T
ε is the effective permittivity of a plate.
P
NOTE Generally, when a liquid is loaded upon the propagation surface of a Rayleigh wave, its power is radiated
from the substrate surface into the liquid as a longitudinal wave and the Rayleigh wave is attenuated by virtue of
the power lost. This means that the sensor cells employing a Rayleigh wave which is one of the SAW families can
be unable to be used in a liquid.

– 12 – IEC 63041-2:2017 © IEC 2017
A.2.3.2 SH-SAW sensors
a) Mass-loading
Δf=kΔmf (A.7)
where
k is the parameter depending on a piezoelectric material.
−8
EXAMPLE: k =−3,30×10 , for 36° Y-cut, X-propagated LiTaO
3 3
b) Viscosity
1 1
ΔV  
′ ′ ′
=k f (ρη) −(ρη)
2 2 (A.8)
 
3 e e e e
V
0  
and
1 1
 
∆α
 
′ ′ ′
= k f (ρη ) −(ρη )
2 2 (A.9)
3  e e e e 
k
 
 
where
k is the wave number, which depends on a piezoelectric material;
′
k is the wave parameter, which depends on a piezoelectric material;
Δα is the attenuation.
c) Acoustic electric interaction
σ′
  T
+ε(ε′−ε)(ε′ε +ε )
 
0 r r r 0 P
ΔV K ω
S  
(A.10)
=−
V 2 2
′
0 σ
T
(′ )
  +εε +ε
r 0 P
ω
 
and
σ′
 
T
′ ′
  (ε −ε)(εε +ε )
2 r r r 0 p
Δα K ω
S  
= (A.11)
k 2
′ 2
σ
T
′
+(εε +ε )
 
r 0 P
ω
 
where
K is the electromechanical coupling factor in reference load;
S
ε′ is the relative permittivity of a liquid;
t
′
σ is the relative conductivity of a liquid.

A.2.3.3 SH-Acoustic Plate Mode sensors
a) Mass-loading
ΔV 1
(A.12)
=− Δm
V ρ d
0 sub
or
ΔV 1
(A.13)
=− Δm
V C
0 f
where
ρ is the density of a piezoelectric material;
sub
d is the thickness of a piezoelectric material;
C is the surface mass loading sensitivity.
f
b) Viscosity
ΔV Cη  ξ 
f e
(A.14)
=− ⋅ Im 
 
V 2ω 1+ jωτ
0  
2 2
 
ω ρ ω ρ
e e
  (A.15)
ξ= k − + j
 
μ μ
e e
 
and
ρ
e
τ= (A.16)
μ
e
where
τ is the relaxation time(τ=η /µ ) ;
e e
is the shear modulus of a liquid.
µ
e
c) Viscoelastic fluid
Cη  
Δα ξ
f e
  (A.17)
=− ⋅ Re
 
k 2V 1+ jωτ
0  
d) Acoustic electric interaction
′
σ
T
′ ′
  +ε(ε −ε)(εε +ε )
2 0 r r r 0 P
ΔV K ω
 
S
(A.18)
=−
V 2
σ′
0  
T
+(ε′ε +ε )
 
r 0 P
ω
 
and
σ′
  T
(ε′ε +ε )
 
r 0 P
Δα K
ω
S  
(A.19)
=
k 2
′ 2
σ
T
′
+(εε +ε )
 
r 0 P
ω
 
– 14 – IEC 63041-2:2017 © IEC 2017
A.2.3.4 Lamb wave sensors
a) Mass-loading
′
ρh
(A.20)
Δf=− f
2(M+ρδ )
1 P
or
Δm
(A.21)
Δf=− f
2(M+ρδ )
1 P
b) Viscosity
 
1 B ρη 2
   
e
f= +  (A.22)
 
λ M+ρδ 2ω
 
e P
 
 
and
 
 
λ V
 
 
δ = π 1−
(A.23)
 
P
 
2 V
 f
 
 
where
V is the phase velocity for Lamb wave;
is sound velocity in a liquid;
V
f
M is the surface density;
B
is the actual stiffness;
η is the viscosity in a liquid.
Sensor cells employing the lowest anti-symmetrical ( A ) mode of Lamb wave have a high
sensitivity for detecting the mass density of a liquid.
This is because the phase velocity of an mode Lamb wave gets smaller than the
A
longitudinal wave velocity in a liquid when the thickness of the plate supporting a Lamb wave
is reduced to the value of the order of 0,1λ (λ is the wavelength of the mode) or less.
A
The mode Lamb wave, therefore, propagates in a liquid without losing its power caused by
A
the longitudinal wave radiation typically observed in a Rayleigh wave, and has been employed
to develop sensor cells in a liquid.
A.3 Calibration
It is recommended to compare the quantified reaction data with the result obtained by a
reference measurement system. The calibration method should be specified in the detailed
specification and / or contract.

Bibliography
IEC 60068 (all parts), Environmental testing
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resistance of quartz crystal units by zero phase technique in a pi-network
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IEC 60444-9, Measurement of quartz crystal unit parameters – Part 9: Measurement of
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IEC 60642, Piezoelectric ceramic resonators and resonator units for frequency control and
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___________
– 18 – IEC 63041-2:2017 © IEC 2017
SOMMAIRE
AVANT-PROPOS . 19
1 Domaine d'application . 21
2 Références normatives . 21
3 Termes et définitions . 21
3.1 Généralités . 21
3.2 Types de capteurs chimiques et biochimiques. 22
4 Spécifications . 22
4.1 Généralités . 22
4.2 Schéma conceptuel des éléments et cellules de capteurs BAW . 22
4.3 Schéma conceptuel des éléments et cellules de capteurs SAW . 23
4.4 Points essentiels des spécifications . 23
4.4.1 Généralités . 23
4.4.2 Couche d'interface . 23
4.4.3 Couche sensible ou réceptive (matériau de reconnaissance cible) . 23
4.4.4 Réactions non spécifiques et non sélectives . 24
4.5 Performances améliorées du capteur . 24
4.6 Documents techniques . 24
5 Conditions de livraison . 25
6 Qualité et fiabilité . 25
7 Modes opératoires d'essais et de mesure . 25
Annexe A (informative) Réaction chimique dans les cellules de capteurs . 26
A.1 Valeurs de référence avant et après la réaction . 26
A.2 Formules classiques . 27
A.2.1 Généralités . 27
A.2.2 BAW (QCM taille AT) . 27
A.2.3 SAW . 28
A.3 Étalonnage . 31
Bibliographie . 32

Figure 1 – Schéma conceptuel d'éléments et cellules de capteurs chimiques et
biochimiques d'un type de résonateurs BAW (vue de côté) . 22
Figure 2 – Schéma conceptuel d'éléments et cellules de capteurs chimiques et
biochimiques d'un type de résonateurs SAW (vue de côté) . 23
Figure 3 – Schéma conceptuel d'éléments et cellules de capteurs chimiques et
biochimiques d'un type à ligne de retard SAW (vue de dessus) . 23
Figure 4 – Schéma conceptuel des éléments et cellules de capteurs chimiques et
biochimiques SAW avec une zone de réaction à trois couches sur une surface de
propagation (vue de côté) . 24
Figure A.1 – Caractéristiques fréquence-temps . 26
Figure A.2 – Réponse en résonance conceptuelle d'une cellule de capteur SAW . 27

COMMISSION ÉLECTROTECHNIQUE INTERNATIONALE
____________
CAPTEURS PIÉZOÉLECTRIQUES –
Partie 2: Capteurs chimiques et biochimiques

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La Norme internationale IEC 63041-2 a été ét
...