Semiconductor devices - Part 14-11: Semiconductor sensors - Test method of surface acoustic wave-based integrated sensors for measuring ultraviolet, illumination and temperature

IEC 60747-14-11:2021(E) defines the terms, definitions, configuration, and test methods can be used to evaluate and determine the performance characteristics of surface acoustic wave-based semiconductor sensors integrated with ultraviolet, illuminance, and temperature sensors. The measurement methods are for DC characteristics and RF characteristics, and the measurement method for RF characteristics includes a direct mode and differential amplifier mode based on feedback oscillation. This document excludes devices dealt with by TC 49: piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection.

General Information

Status
Published
Publication Date
02-Mar-2021
Current Stage
PPUB - Publication issued
Completion Date
03-Mar-2021
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IEC 60747-14-11:2021 - Semiconductor devices - Part 14-11: Semiconductor sensors - Test method of surface acoustic wave-based integrated sensors for measuring ultraviolet, illumination and temperature
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IEC 60747-14-11
Edition 1.0 2021-03
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 14-11: Semiconductor sensors – Test method of surface acoustic
wave-based integrated sensors for measuring ultraviolet, illumination and
temperature
IEC 60747-14-11:2021-03(en)
---------------------- Page: 1 ----------------------
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---------------------- Page: 2 ----------------------
IEC 60747-14-11
Edition 1.0 2021-03
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 14-11: Semiconductor sensors – Test method of surface acoustic
wave-based integrated sensors for measuring ultraviolet, illumination and
temperature
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.01 ISBN 978-2-8322-9465-9

Warning! Make sure that you obtained this publication from an authorized distributor.

® Registered trademark of the International Electrotechnical Commission
---------------------- Page: 3 ----------------------
– 2 – IEC 60747-14-11:2021 © IEC 2021
CONTENTS

FOREWORD ........................................................................................................................... 4

1 Scope .............................................................................................................................. 6

2 Normative references ...................................................................................................... 6

3 Terms and definitions ...................................................................................................... 6

3.1 General terms ......................................................................................................... 6

3.2 SAW-based integrated light sensors ....................................................................... 7

3.3 Characteristics parameters ..................................................................................... 7

4 Device structure and characteristics ................................................................................ 8

4.1 General ................................................................................................................... 8

4.2 Device structure ...................................................................................................... 8

4.2.1 SAW based resonator type light-sensor elements ............................................ 8

4.2.2 SAW-based delay line type light sensor elements ............................................ 9

4.3 Characteristics of integrated UV and visible-light sensors ....................................... 9

4.4 Key points of integrated UV and visible-light sensors ............................................ 10

4.4.1 UV sensitive layer .......................................................................................... 10

4.4.2 Visible-light sensitive layer ............................................................................ 10

5 Test conditions .............................................................................................................. 10

5.1 Test environmental conditions ............................................................................... 10

5.2 Darkroom condition ............................................................................................... 11

5.3 Setup conditions ................................................................................................... 11

5.3.1 Starting conditions of test .............................................................................. 11

5.3.2 Conditions of UV and visible light measurement equipment ........................... 11

6 Test methods ................................................................................................................. 11

6.1 General ................................................................................................................. 11

6.2 Test methods of DC-characteristics for the light sensor element ........................... 12

6.3 Test methods of RF characteristics for integrated light sensors ............................. 14

6.3.1 Direct mode ................................................................................................... 14

6.3.2 Differential amplifier mode ............................................................................. 14

Annex A (informative) Ultraviolet and visible light characteristics of the sensitive layer ........ 18

Annex B (informative) Hysteresis of frequency shift according to the on/off state light

condition ............................................................................................................................... 20

Bibliography .......................................................................................................................... 21

Figure 1 – Configuration of an interdigital transducer (IDT) ..................................................... 7

Figure 2 – Conceptual diagram for SAW based resonator type light sensor elements .............. 9

Figure 3 – Conceptual diagram for SAW based delay line type light sensor elements ............. 9

Figure 4 – Conceptual diagram for integrated multi UV and visible light sensors ................... 10

Figure 5 – Measurement procedure for the semiconductor light sensor ................................. 12

Figure 6 – Test setup to measure the I-V characteristics of semiconductor light sensor ....... 13

Figure 7 – Example of I-V characteristics of a UV sensor element as a function of UV

intensity ................................................................................................................................ 13

Figure 8 – Test setup to measure the frequency shift of semiconductor light sensor ............. 14

Figure 9 – Differential amplifier mode method ....................................................................... 16

Figure 10 – Measurement results of UV and visible light sensors using differential

amplifier mode ...................................................................................................................... 17

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IEC 60747-14-11:2021 © IEC 2021 – 3 –

Figure A.1 – Operation principle of the ZnO sensitive layer for UV sensing ........................... 18

Figure A.2 – Operation principle in terms of band theory ....................................................... 19

Figure B.1 – Hysteresis of the frequency shift under optimal light conditions ......................... 20

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– 4 – IEC 60747-14-11:2021 © IEC 2021
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
Part 14-11: Semiconductor sensors – Test method of surface acoustic
wave-based integrated sensors for measuring ultraviolet,
illumination and temperature
FOREWORD

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rights. IEC shall not be held responsible for identifying any or all such patent rights.

International Standard IEC 60747-14-11 has been prepared by subcommittee 47E: Discrete

semiconductor devices, of IEC technical committee 47: Semiconductor devices.
The text of this International Standard is based on the following documents:
CDV Report on voting
47E/674/CDV 47E/709/RVC

Full information on the voting for the approval of this International Standard can be found in the

report on voting indicated in the above table.

This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

A list of all parts in the IEC 60747 series, published under the general title Semiconductor

devices, can be found on the IEC website.
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IEC 60747-14-11:2021 © IEC 2021 – 5 –

The committee has decided that the contents of this document will remain unchanged until the

stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to

the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.

IMPORTANT – The "colour inside" logo on the cover page of this document indicates

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of its contents. Users should therefore print this document using a colour printer.

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– 6 – IEC 60747-14-11:2021 © IEC 2021
SEMICONDUCTOR DEVICES –
Part 14-11: Semiconductor sensors – Test method of surface acoustic
wave-based integrated sensors for measuring ultraviolet,
illumination and temperature
1 Scope

This part of IEC 60747 defines the terms, definitions, configuration, and test methods can be

used to evaluate and determine the performance characteristics of surface acoustic wave-

based semiconductor sensors integrated with ultraviolet, illuminance, and temperature sensors.

The measurement methods are for DC characteristics and RF characteristics, and the

measurement method for RF characteristics includes a direct mode and differential amplifier

mode based on feedback oscillation. This document excludes devices dealt with by TC 49:

piezoelectric, dielectric and electrostatic devices and associated materials for frequency control,

selection and detection.
2 Normative references

The following documents are referred to in the text in such a way that some or all of their content

constitutes requirements of this document. For dated references, only the edition cited applies.

For undated references, the latest edition of the referenced document (including any

amendments) applies.
IEC 63041-1, Piezoelectric sensors – Part 1: Generic specifications
IEC 63041-2, Piezoelectric sensors – Part 2: Chemical and biochemical sensors
3 Terms and definitions
For the purpose of this document, the following terms and definitions apply.

ISO and IEC maintain terminological databases for use in standardization at the following

addresses:
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http://www.iso.org/obp

Units, letter symbols and terminology shall, wherever possible, be taken from IEC 63041-1 and

IEC 63041-2.
3.1 General terms
3.1.1
surface acoustic wave
SAW

acoustic wave, propagating along the surface of an elastic substrate, the amplitude of which

decays exponentially with substrate depth

Note 1 to entry: This entry was numbered 561-06-01 in IEC 60050-561:1991, Amendment 1:1995.

[SOURCE: IEC 60050-561:2014, 561-01-86]
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IEC 60747-14-11:2021 © IEC 2021 – 7 –
3.1.2
interdigital transducer
IDT

SAW transducer made of a comb-like conductive structure that is deposited on a piezoelectric

substrate and consists of interleaved metal electrodes (fingers) whose function is to transform

electrical energy into acoustic energy or vice versa by means of the piezoelectric effect

Figure 1 – Configuration of an interdigital transducer (IDT)

Note 1 to entry: This entry was numbered 561-06-09 in IEC 60050-561:1991, Amendment 1:1995.

[SOURCE: IEC 60050-561:2014, 561-01-41]
3.2 SAW-based integrated light sensors
3.2.1
ultraviolet sensor elemen
...

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