IEC TS 62607-6-10:2021

Nanomanufacturing - Key control characteristics - Part 6-10: Graphene-based material - Sheet resistance: Terahertz time-domain spectroscopy

IEC TS 62607-6-10:2021(E) establishes a standardized method to determine the electrical key control characteristic
– sheet resistance (Rs)
for films of graphene-based materials by
– terahertz time domain spectroscopy (THz-TDS).
In this technique, a THz pulse is sent to the graphene-based material. The transmitted or reflected THz waveform is measured in the time domain and transformed to the frequency domain by the fast Fourier transform (FFT). Finally, the spectrum is fitted to the Drude model (or another comparable model) to obtain the sheet resistance.
• This non-contact inspection method is non-destructive, fast and robust for the mapping of large areas of graphene films, with no upper sample size limit.
• The method is applicable for statistical process control, comparison of graphene films produced by different vendors, or to obtain information about imperfections on the microscale such as grain boundaries and defects, etc.
• The method is applicable for graphene grown by chemical vapour deposition (CVD) or other methods on or transferred to dielectric substrates, including but not limited to quartz, silica (SiO2), silicon (Si), sapphire, silicon carbide (SiC) and polymers.
• The minimum spatial resolution is in the order of 300 µm (at 1 THz) given by the diffraction limited spot size of the THz pulse.

General Information

• Status: Published
• Publication Date: 13-Oct-2021
• ICS: 07.120 - Nanotechnologies
• Technical Committee: TC 113 - Nanotechnology for electrotechnical products and systems
• Drafting Committee: WG 8 - TC 113/WG 8
• Current Stage: PPUB - Publication issued
• Start Date: 03-Nov-2021
• Completion Date: 14-Oct-2021

Standards Content (Sample)

IEC TS 62607-6-10
®

Edition 1.0 2021-10
TECHNICAL
SPECIFICATION

colour
inside


Nanomanufacturing – Key control characteristics –
Part 6-10: Graphene-based material – Sheet resistance: Terahertz time-domain
spectroscopy
IEC TS 62607-6-10:2021-10(en)

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IEC TS 62607-6-10

®


Edition 1.0 2021-10




TECHNICAL



SPECIFICATION








colour

inside










Nanomanufacturing – Key control characteristics –

Part 6-10: Graphene-based material – Sheet resistance: Terahertz time-domain

spectroscopy

























INTERNATIONAL

ELECTROTECHNICAL


COMMISSION





ICS 07.120 ISBN 978-2-8322-1033-3




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– 2 – IEC TS 62607-6-10:2021 © IEC 2021
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 General terms . 7
3.2 Key control characteristics measured according to this document . 9
3.3 Terms related to the measurement method described in this document . 10
4 General . 11
4.1 Measurement principle . 11
4.2 Sample preparation method . 13
4.3 Description of measurement equipment . 13
4.3.1 Principal components of a THz-TDS system .
...