IEC/IEEE 62659:2015

Nanomanufacturing - Large scale manufacturing for nanoelectronics

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

General Information

• Status: Published
• Publication Date: 29-Sep-2015
• ICS: 07.030 - Physics. Chemistry
• ICS: 07.120 - Nanotechnologies
• ICS: 25.020 - Manufacturing forming processes
• Technical Committee: TC 113 - Nanotechnology for electrotechnical products and systems
• Drafting Committee: WG 3 - TC 113/WG 3
• Current Stage: PPUB - Publication issued
• Start Date: 31-Oct-2015
• Completion Date: 30-Sep-2015

Standards Content (Sample)

IEC/IEEE 62659
®

Edition 1.0 2015-09
INTERNATIONAL
STANDARD



Nanomanufacturing – Large scale manufacturing for nanoelectronics

IEC/IEEE 62659:2015-09(en)

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IEC/IEEE 62659

®


Edition 1.0 2015-09




INTERNATIONAL



STANDARD



















Nanomanufacturing – Large scale manufacturing for nanoelectronics




























INTERNATIONAL

ELECTROTECHNICAL

COMMISSION





ICS 07.030; 25.020 ISBN 978-2-8322-2915-6



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– 2 – IEC/IEEE 62659:2015
  IEC/IEEE 2015
CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
4 Abbreviations . 8
5 Nanomaterials incorporation into electronics fabrication . 9
5.1 Gener
...