IEC 60204-33:2009

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Sécurité des machines - Equipement électrique des machines - Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

La CEI 60204-33:2009 s'applique aux équipements électriques et électroniques associés aux équipements de fabrication des semi-conducteurs pour la fabrication, les mesures, l'assemblage et les essais des semi-conducteurs. Elle s'applique aux équipements ou parties d'équipement électrique qui sont alimentés sous une tension d'alimentation nominale n'excédant pas 1 000 V en courant alternatif (c.a.) ou 1 500 V en courant continu (c.c.) et pour des fréquences nominales d'alimentation n'excédant pas 200 Hz. Pour des tensions ou des fréquences supérieures, des exigences particulières peuvent être nécessaires.

General Information

• Status: Published
• Publication Date: 09-Dec-2009
• ICS: 13.110 - Safety of machinery
• ICS: 25.040.30 - Industrial robots. Manipulators
• ICS: 29.020 - Electrical engineering in general
• Technical Committee: TC 44 - Safety of machinery - Electrotechnical aspects
• Drafting Committee: MT 60204-33 - TC 44/MT 60204-33
• Current Stage: PPUB - Publication issued
• Start Date: 10-Dec-2009
• Completion Date: 15-Dec-2009

Standards Content (Sample)

IEC 60204-33 ®
Edition 1.0 2009-12
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Safety of machinery – Electrical equipment of machines –
Part 33: Requirements for semiconductor fabrication equipment

Sécurité des machines – Equipement électrique des machines –
Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

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IEC 60204-33 ®
Edition 1.0 2009-12
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Safety of machinery – Electrical equipment of machines –
Part 33: Requirements for semiconductor fabrication equipment

Sécurité des machines – Equipement électrique des machines –
Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
XF
CODE PRIX
ICS 13.110; 25.040.30; 29.020 ISBN 978-2-88910-070-5
– 2 – 60204-33 © IEC:2009
CONTENTS
FOREWORD.2H10
INTRODUCTION.3H12
1 Scope.4H13
2 Normative references.5H14
3 Terms and definitions .6H15
4 General requirements .7H25
4.1 General considerations .8H25
4.2 Selection of electrical equipment.9H26
4.3 Electrical supply .10H26
4.3.1 General .11H26
4.4 Physical environment and operating conditions .12H26
4.4.1 General .13H26
4.4.2 Contaminants .14H27
4.4.3 Ionizing and non-ionizing radiation .15H27
4.4.4 Vibration, shock, and bump.16H27
4.5 Transportation and storage .17H27
4.6 Provisions for handling .18H27
4.7 Installation.19H27
5 Incoming supply conductor terminations and devices for disconnecting and
switching off .20H27
5.1 Incoming supply conductor terminations.21H27
5.1.1 General .22H27
5.1.2 Termination of the supply conductors .23H27
5.1.3 Neutral conductor .24H28
5.1.4 Terminal identification.25H28
5.2 Terminal for connection to the external protective earthing system .26H28
5.3 Supply disconnecting (isolating) device .27H28
5.3.1 General .28H28
5.3.2 Type .29H29
5.3.3 Requirements .30H29
5.3.4 Operating means .31H30
5.3.5 Supply disconnecting device mounting .32H30
5.3.6 Supply disconnecting device door interlock.33H30
5.3.7 UPS disconnection.34H30
5.4 Additional disconnecting devices.35H31
5.5 Protection against unauthorized, inadvertent and/or mistaken connection of
plug/socket combination .36H31
6 Protection against electric shock.37H31
6.1 General .38H31
6.2 Protection against direct contact .39H31
6.2.1 General .40H31
6.2.2 Protection by enclosures .41H32
6.2.3 Protection by insulation of live parts .42H32
6.2.4 Protection against residual voltages .43H32
6.3 Protection against indirect contact .44H33
6.3.1 General .45H33
6.3.2 Prevention of the occurrence of a touch voltage .46H33

60204-33 © IEC:2009 – 3 –
6.3.3 Protection by automatic disconnection of supply.47H34
6.4 Protection by the use of PELV.48H35
6.4.1 General requirements .49H35
6.4.2 Sources for PELV .50H35
6.4.3 Design to minimise risks of live working .51H36
6.5 Protection of skilled persons and instructed persons against inadvertent
contact with hazardous-live-parts .52H36
6.5.1 General .53H36
6.5.2 Obstacles .54H36
6.5.3 Probe holes .55H36
7 Protection of equipment .56H36
7.1 General .57H36
7.2 Overcurrent protection .58H37
7.2.1 General .59H37
7.2.2 Supply conductors .60H37
7.2.3 Neutral conductor protection .61H37
7.2.4 Socket outlets and their associated conductors .62H37
7.2.5 Lighting circuits.63H37
7.2.6 Transformers .64H37
7.2.7 Location of overcurrent protective devices.65H37
7.2.8 Overcurrent protective devices.66H38
7.2.9 Rating and setting of overcurrent protective devices.67H38
7.3 Protection of motors against overheating .68H39
7.3.1 General .69H39
7.3.2 Overload protection.70H40
7.3.3 Over-temperature protection .71H40
7.4 Motor overspeed protection.72H40
7.5 Abnormal temperature detection .73H40
7.6 Protection against supply interruption or voltage reduction and subsequent
restoration .74H41
7.7 Earth fault/residual current protection.75H41
7.8 Phase sequence protection.76H41
7.9 Protection against overvoltages due to lightning and to switching surges .77H41
7.10 Electrolytic capacitors .78H41
8 Equipotential bonding .79H42
8.1 General .80H42
8.2 Protective bonding circuit.81H44
8.2.1 General .82H44
8.2.2 Protective conductors .83H45
8.2.3 Continuity of the protective bonding circuit .84H45
8.2.4 Exclusion of switching devices from the protective bonding circuit .85H46
8.2.5 Protective conductor connecting points .86H46
8.2.6 Mobile machines.87H46
8.2.7 Limitation of touch current on cord and plug connected equipment .88H47
8.3 Functional bonding .89H47
8.4 Measures to limit the effects of high leakage current .90H47
9 Control circuits, emergency off (EMO), and protective interlock circuits .91H47
9.1 Control circuits .92H47
9.1.1 Control circuit supply .93H47

– 4 – 60204-33 © IEC:2009
9.1.2 DC circuits derived from an a.c. supply .94H47
9.1.3 Start functions .95H47
9.1.4 Stop functions.96H48
9.1.5 Operating modes .97H48
9.1.6 Multiple control stations .98H48
9.2 Emergency Off (EMO) .99H48
9.2.1 General .100H48
9.2.2 Circuits to be de-energized .101H49
9.2.3 Requirements for EMO circuits.102H49
9.3 Operations other than emergency off .103H49
9.3.1 General .104H49
9.3.2 Start .105H49
9.3.3 Stop.106H50
9.3.4 Other control functions.107H50
9.3.5 Cableless control .108H51
9.4 Protective interlocks .109H51
9.4.1 General .110H51
9.4.2 Protective interlock circuit design .111H51
9.5 Suspension of safety functions and/or protective measures.112H53
10 Operator interfaces.113H53
10.1 General .114H53
10.1.1 General device requirements .115H53
10.1.2 Location and mounting.116H53
10.1.3 Degree of protection .117H53
10.1.4 Portable and pendant control stations .118H54
10.2 Push-buttons .119H54
10.2.1 Colours.120H54
10.2.2 Markings.121H55
10.3 Indicator lights .122H55
10.3.1 General .123H55
10.3.2 Colours.124H55
10.3.3 Flashing lights and displays .125H56
10.4 Illuminated push-buttons.126H56
10.5 Rotary control devices .127H56
10.6 Start devices .128H56
10.7 Emergency off devices.129H56
10.8 Emergency stop devices .130H57
10.9 Enabling control device.131H57
11 Controlgear: location, mounting, and enclosures .132H57
11.1 General requirements .133H57
11.2 Location and mounting.134H58
11.2.1 Accessibility and maintenance.135H58
11.2.2 Physical separation or grouping .136H59
11.2.3 Heating effects .137H59
11.3 Degrees of protection .138H59
11.4 Enclosures for electrical equipment.139H59
11.4.1 General .140H59
11.4.2 Fasteners .141H59
11.4.3 Windows.142H59

60204-33 © IEC:2009 – 5 –
11.4.4 Doors .143H59
11.4.5 Openings .144H59
11.4.6 High surface temperatures .145H60
11.4.7 Containment of molten material or burning insulation.146H60
11.4.8 Enclosures that can be fully entered.147H60
11.4.9 Clearance for access to electrical equipment.148H60
12 Conductors and cables .149H62
12.1 General requirements .150H62
12.2 Insulation.151H62
12.2.1 General .152H62
12.2.2 Fire propagation and fume emissions.153H62
12.2.3 Printed circuit boards .154H62
12.3 Current-carrying capacity.155H63
12.4 Conductor and cable voltage drop.156H63
12.5 Flexible cables.157H63
12.5.1 General .158H63
12.5.2 Flexible cables inside enclosures or ducts.159H63
12.5.3 Mechanical rating in cable handling systems .160H63
13 Wiring practices.161H64
13.1 Connections and routing .162H64
13.1.1 General requirements .163H64
13.1.2 Conductor and cable runs .164H65
13.1.3 Conductors of different circuits.165H65
13.1.4 Conductors smaller than 50 mm .166H65
13.1.5 Temperature exposure of conductors .167H65
13.1.6 Terminal temperatures.168H65
13.2 Multi-outlet assemblies .169H65
13.3 Plug/socket combinations .170H66
13.4 Identification of conductors .171H66
13.4.1 General requirements .172H66
13.4.2 Identification of the protective conductor .173H66
13.4.3 Identification of the neutral conductor by colour.174H67
13.4.4 Identification by colour .175H67
13.4.5 Wiring inside enclosures .176H67
13.5 Wiring outside enclosures.177H68
13.5.1 General requirements .178H68
13.5.2 Plug/socket combinations external to electrical enclosures.179H68
13.5.3 Cables and conductors external to the electrical enclosure.180H68
13.5.4 Ducts .181H69
13.5.5 Pendant control stations .182H69
13.5.6 Strain relief.183H69
13.5.7 Protection of flexible cables .184H69
13.5.8 Clearance between cables and moving parts.185H69
13.5.9 Clearance between flexible conduit and moving parts.186H69
13.5.10 Interconnection of electrical equipment .187H69
13.5.11 Dismantling for shipment .188H70
13.6 Ducts, connection boxes and other boxes .189H70
13.6.1 General .190H70
13.6.2 Cable trunking systems.191H70

– 6 – 60204-33 © IEC:2009
13.6.3 Fabrication equipment compartments and cable trunking systems .192H71
13.6.4 Connection boxes and other boxes.193H71
14 Electric motors and associated equipment .194H71
14.1 General requirements .195H71
14.2 Remotely installed motors.196H71
14.3 Motor dimensions .197H71
14.4 Motor mounting and compartments .198H72
15 Accessories and lighting .199H72
15.1 Accessories.200H72
15.2 Local lighting of the fabrication equipment.201H72
15.2.1 General .202H72
15.2.2 Supply .203H72
15.2.3 Protection .204H73
15.2.4 Fittings .205H73
16 Marking, warning signs and reference designations.206H73
16.1 General .207H73
16.2 Electric shock hazard warning signs.208H73
16.3 Functional identification .209H73
16.4 Equipment nameplate .210H73
16.5 Reference designations .211H74
17 Technical documentation .212H74
17.1 General .213H74
17.2 Information to be provided .214H74
17.3 Requirements applicable to all documentation.215H75
17.4 Installation documents .216H75
17.4.1 General .217H75
17.4.2 Supply cables .218H75
17.4.3 Overcurrent protection devices.219H75
17.4.4 Ducts, cable trays, or cable supports.220H76
17.4.5 Diagrams.221H76
17.5 Overview diagrams and function diagrams .222H76
17.6 Circuit diagrams .223H76
17.7 Operating documentation.224H77
17.8 Maintenance documentation .225H77
17.8.1 General .226H77
17.8.2 Identification of replacement parts.227H77
18 Testing .228H77
18.1 General .229H77
18.1.1 Test schedule .230H77
18.1.2 Test conditions .231H77
18.2 Earthing continuity and continuity of the protective bonding circuit test .232H78
18.2.1 General .233H78
18.2.2 Test equipment.234H78
18.2.3 Procedure 1.235H78
18.2.4 Procedure 2.236H78
18.2.5 Acceptable results .237H79
18.3 Touch current test for cord and plug connected electrical equipment .238H79
18.3.1 Application.239H79
18.3.2 Test equipment.240H79

60204-33 © IEC:2009 – 7 –
18.3.3 Procedure.241H79
18.3.4 Acceptable results .242H79
18.4 Dielectric test .243H79
18.4.1 Test equipment.244H79
18.4.2 Procedure.245H80
18.4.3 Acceptable results .246H80
18.5 Strain relief test .247H80
18.5.1 General .248H80
18.5.2 Test equipment.249H80
18.5.3 Procedure 1.250H80
18.5.4 Acceptable results for procedure 1 .251H80
18.5.5 Procedure 2.252H81
18.5.6 Acceptable results for procedure 2 .253H81
18.6 Power supply output short circuit test .254H81
18.6.1 Test equipment.255H81
18.6.2 Procedure.256H81
18.6.3 Acceptable results .257H81
18.7 Protective interlock circuit function test .258H81
18.7.1 Procedure.259H81
18.7.2 Acceptable results .260H81
18.8 Capacitor stored energy discharge test (see 6.2.4).261H81
18.8.1 Test equipment.262H81
18.8.2 Procedure.263H82
18.8.3 Acceptable results .264H82
18.9 Temperature test .265H82
18.9.1 Test equipment.266H82
18.9.2 Procedure.267H82
18.9.3 Acceptable results .268H82
18.10 Strength of electrical enclosures test; 30 N steady force test .269H83
18.10.1 General .270H83
18.10.2 Test equipment.271H83
18.10.3 Procedure .272H83
18.10.4 Acceptable results .273H83
18.11 Strength of electrical enclosures test; 250N steady force test .274H83
18.11.1 General .275H83
18.11.2 Test equipment.276H83
18.11.3 Procedure .277H83
18.11.4 Acceptable results .278H83
18.12 Finger probe test.279H84
18.12.1 General .280H84
18.12.2 Test equipment.281H84
18.12.3 Procedure .282H84
18.12.4 Acceptable results .283H84
18.13 Wire flexing test.284H84
18.14 Insulation resistance tests.285H84
18.15 EMO functional test.286H84
18.15.1 General .287H84
18.15.2 Actuation .288H84
18.15.3 EMO button reset .289H85

– 8 – 60204-33 © IEC:2009
18.15.4 EMO circuit reset.290H85
18.16 Input current test.291H85
18.16.1 Test equipment.292H85
18.16.2 Procedure .293H85
18.16.3 Acceptable results .294H85
18.17 Other safety circuit tests .295H85
18.18 Motor temperature test.296H85
18.18.1 Application .297H85
18.18.2 Test equipment.298H85
18.18.3 Procedure .299H85
18.18.4 Acceptable results .300H86
Annex A (normative) Basic protection (protection against indirect contact) in TN-
systems .301H87
Annex B (normative) Protection against indirect contact in TT-systems (Derived from
IEC 60364-4-41:2005 and IEC 60364-6:2006).302H91
Annex C (normative) Conductor ampacity, and creepage and clearance distances .303H93
Annex D (normative) Standard test fingers .304H102
Annex E (informative) Types of system earthing (Derived from IEC 60364-1: 2005) .305H104
Bibliography .306H120

Figure 1 – Example of equipotential bonding for electrical equipment.307H43
Figure 2 – Clearance in front of enclosures .308H61
Figure A.1 – Typical arrangement for fault loop impedance measurement .309H90
Figure D.1 – Rigid test finger.310H102
Figure D.2 – Jointed test finger .311H103
Figure E.1 – TN-S system with separate neutral conductor and protective conductor
throughout the system.312H105
Figure E.2 – TN-S system with separate earthed line conductor and protective
conductor throughout the system.313H106
Figure E.3 – TN-S system with earthed protective conductor and no distributed neutral
conductor throughout the system.314H106
Figure E.4 – TN-C-S system 3-phase, 4-wire, where the PEN is separated into PE and
N elsewhere in the installation .315H107
Figure E.5 – TN-C-S system 3-phase, 4-wire where the PEN is separated into PE and
N at the origin of the installation .316H108
Figure E.6 – TN-C-S system – single-phase, 2-wire where the PEN is separated into PE
and N at the origin of the installation.
...