IEC 60204-33:2009

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Sécurité des machines - Equipement électrique des machines - Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

La CEI 60204-33:2009 s'applique aux équipements électriques et électroniques associés aux équipements de fabrication des semi-conducteurs pour la fabrication, les mesures, l'assemblage et les essais des semi-conducteurs. Elle s'applique aux équipements ou parties d'équipement électrique qui sont alimentés sous une tension d'alimentation nominale n'excédant pas 1 000 V en courant alternatif (c.a.) ou 1 500 V en courant continu (c.c.) et pour des fréquences nominales d'alimentation n'excédant pas 200 Hz. Pour des tensions ou des fréquences supérieures, des exigences particulières peuvent être nécessaires.

General Information

• Status: Published
• Publication Date: 09-Dec-2009
• ICS: 13.110 - Safety of machinery
• ICS: 25.040.30 - Industrial robots. Manipulators
• ICS: 29.020 - Electrical engineering in general
• Technical Committee: TC 44 - Safety of machinery - Electrotechnical aspects
• Drafting Committee: MT 60204-33 - TC 44/MT 60204-33
• Current Stage: PPUB - Publication issued
• Start Date: 15-Dec-2009
• Completion Date: 10-Dec-2009

Standards Content (Sample)

IEC 60204-33 ®
Edition 1.0 2009-12
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Safety of machinery – Electrical equipment of machines –
Part 33: Requirements for semiconductor fabrication equipment

Sécurité des machines – Equipement électrique des machines –
Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

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IEC 60204-33 ®
Edition 1.0 2009-12
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Safety of machinery – Electrical equipment of machines –
Part 33: Requirements for semiconductor fabrication equipment

Sécurité des machines – Equipement électrique des machines –
Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
XF
CODE PRIX
ICS 13.110; 25.040.30; 29.020 ISBN 978-2-88910-070-5
– 2 – 60204-33 © IEC:2009
CONTENTS
FOREWORD.2H10
INTRODUCTION.3H12
1 Scope.4H13
2 Normative references.5H14
3 Terms and definitions .6H15
4 General requirements .7H25
4.1 General considerations .8H25
4.2 Selection of electrical equipment.9H26
4.3 Electrical supply .10H26
4.3.1 General .11H26
4.4 Physical environment and operating conditions .12H26
4.4.1 General .13H26
4.4.2 Contaminants .14H27
4.4.3 Ionizing and non-ionizing radiation .15H27
4.4.4 Vibration, shock, and bump.16H27
4.5 Transportation and storage .17H27
4.6 Provisions for handling .18H27
4.7 Installation.19H27
5 Incoming supply conductor terminations and devices for disconnecting and
switching off .20H27
5.1 Incoming supply conductor terminations.21H27
5.1.1 General .22H27
5.1.2 Termination of the supply conductors .23H27
5.1.3 Neutral conductor .24H28
5.1.4 Terminal identification.25H28
5.2 Terminal for connection to the external protective earthing system .26H28
5.3 Supply disconnecting (isolating) device .27H28
5.3.1 General .28H28
5.3.2 Type .29H29
5.3.3 Requirements .30H29
5.3.4 Operating means .31H30
5.3.5 Supply disconnecting device mounting .32H30
5.3.6 Supply disconnecting device door interlock.33H30
5.3.7 UPS disconnection.34H30
5.4 Additional disconnecting devices.35H31
5.5 Protection against unauthorized, inadvertent and/or mistaken connection of
plug/socket combination .36H31
6 Protection against electric shock.37H31
6.1 General .38H31
6.2 Protection against direct contact .39H31
6.2.1 General .40H31
6.2.2 Protection by enclosures .41H32
6.2.3 Protection by insulation of live parts .42H32
6.2.4 Protection against residual voltages .43H32
6.3 Protection against indirect contact .44H33
6.3.1 General .45H33
6.3.2 Prevention of the occurrence of a touch voltage .46H33

60204-33 © IEC:2009 – 3 –
6.3.3 Protection by automatic disconnection of supply.47H34
6.4 Protection by the use of PELV.48H35
6.4.1 General requirements .49H35
6.4.2 Sources for PELV .50H35
6.4.3 Design to minimise risks of live working .51H36
6.5 Protection of skilled persons and instructed persons against inadvertent
contact with hazardous-live-parts .52H36
6.5.1 General .53H36
6.5.2 Obstacles .54H36
6.5.3 Probe holes .55H36
7 Protection of equipment .56H36
7.1 General .57H36
7.2 Overcurrent protection .58H37
7.2.1 General .59H37
7.2.2 Supply conductors .60H37
7.2.3 Neutral conductor protection .61H37
7.2.4 Socket outlets and their associated conductors .62H37
7.2.5 Lighting circuits.63H37
7.2.6 Transformers .64H37
7.2.7 Location of overcurrent protective devices.65H37
7.2.8 Overcurrent protective devices.66H38
7.2.9 Rating and setting of overcurrent protective devices.67H38
7.3 Protection of motors against overheating .68H39
7.3.1 General .69H39
7.3.2 Overload protection.70H40
7.3.3 Over-temperature protection .71H40
7.4 Motor overspeed protection.72H40
7.5 Abnormal temperature detection .73H40
7.6 Protection against supply interruption or voltage reduction and subsequent
restoration .74H41
7.7 Earth fault/residual current protection.75H41
7.8 Phase sequence protection.
...