Fine ceramics (advanced ceramics, advanced technical ceramics) — Measurement method of spectral transmittance of fine ceramics thin films under humid condition

ISO 17861:2014 specifies a measurement method of spectral transmittance of fine ceramics thin films under humid condition. It provides test methods that will easily and accurately evaluate changes in optical properties of fine ceramic coatings in a humid atmosphere due to water adsorption.

Céramiques techniques — Méthode de mesurage de la transmittance spectrale des films minces de céramiques fines en conditions humides

General Information

Status
Published
Publication Date
20-May-2014
Technical Committee
Drafting Committee
Current Stage
9093 - International Standard confirmed
Completion Date
20-Nov-2020
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ISO 17861:2014 - Fine ceramics (advanced ceramics, advanced technical ceramics) -- Measurement method of spectral transmittance of fine ceramics thin films under humid condition
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INTERNATIONAL ISO
STANDARD 17861
First edition
2014-06-01
Fine ceramics (advanced ceramics,
advanced technical ceramics) —
Measurement method of spectral
transmittance of fine ceramics thin
films under humid condition
Céramiques techniques — Méthode de mesurage de la transmittance
spectrale des films minces de céramiques fines en conditions humides
Reference number
ISO 17861:2014(E)
©
ISO 2014

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ISO 17861:2014(E)

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© ISO 2014
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ii © ISO 2014 – All rights reserved

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ISO 17861:2014(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Principle . 2
5 Ambient room environment . 2
6 Test piece . 2
7 Measuring apparatus . 3
7.1 Apparatus configuration . 3
7.2 Spectrometer calibration . 4
8 Environmental conditions and control procedures . 4
9 Optical transmittance measurement procedure. 4
10 Evaluations of measured spectra . 5
11 Test report . 8
Annex A (informative) Structure and function of mini-chamber . 9
© ISO 2014 – All rights reserved iii

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ISO 17861:2014(E)

Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
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For an explanation on the meaning of ISO specific terms and expressions related to conformity
assessment, as well as information about ISO’s adherence to the WTO principles in the Technical Barriers
to Trade (TBT) see the following URL: Foreword - Supplementary information
The committee responsible for this document is ISO/TC 206, Fine ceramics.
iv © ISO 2014 – All rights reserved

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ISO 17861:2014(E)

Introduction
Fine ceramics thin films are used in many applications such as anti-reflective coatings, infrared sensor
cut filters, X-ray sensor cut filters, and band-pass filters for medical analysis equipment. Even though
spectral transmittance of fine ceramics thin films are specified for each product, the refractive index
and optical property change when water vapor or other vapor is adsorbed to the surface of fine ceramics
thin films, because, generally, fine ceramics thin films have a columnar and voided structure. For this
matter, an International Standard that could evaluate the reliability under a range of humidity was
required. This International Standard provides test methods that will easily and accurately evaluate
effects of humidity on optical properties of fine ceramic coatings. By establishing this International
Standard, it aims for a rapid spread of this test method that will then lead to further growth of the
industry.
© ISO 2014 – All rights reserved v

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INTERNATIONAL STANDARD ISO 17861:2014(E)
Fine ceramics (advanced ceramics, advanced technical
ceramics) — Measurement method of spectral
transmittance of fine ceramics thin films under humid
condition
1 Scope
This International Standard specifies a measurement method of spectral transmittance of fine ceramics
thin films under humid condition. This International Standard provides test methods that will easily
and accurately evaluate changes in optical properties of fine ceramic coatings in a humid atmosphere
due to water adsorption.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and are
indispensable for its application. For dated references, only the edition cited applies. For undated
references, the latest edition of the referenced document (including any amendments) applies.
ISO 9211-1, Optics and photonics — Optical coatings — Definitions
ISO 8980-3:2013, Ophthalmic optics — Uncut finished spectacle lenses — Part 3: Transmittance specifications
and test methods
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 8980-3 and ISO 9211-1, and
the following apply.
3.1
half transmittance wavelength
λ
T1/2
center of a segment delimited by the wavelengths at which the transmittance is maximal and minimal
in a given wavelength range
3.2
environmental mini-chamber
small chamber to keep the environmental condition of a test piece contained inside the chamber
Note 1 to entry: The chamber is equipped with optical feed-through ports with a ball valve for evacuation or air-
circulation. The chamber shall be air-tight to keep the chamber in vacuum or with the atmosphere at a certain
humidity by closing the ball valves after evacuation or air-circulating to expose the test piece inside to a certain
atmosphere.
3.3
transmittance
fraction of intensity of incident optical beam transferring through the sample
3.4
monochromator
optical device that selects light beam with a certain wavelength with a range
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ISO 17861:2014(E)

3.5
spectrophotometer
optical instrument that measures spectral transmittance or reflectance
Note 1 to entry: The instrument consists of optical source, monochromator, sample chamber, optical detector,
signal processor, data processor, and interface.
3.6
double beam spectrophotometer
type of spectrophotometer that is utilized to compare the light intensity between the reference sample
and the test pieces
Note 1 to entry: Compared to single-beam spectrophotometer measures, a high stability of measurements is
obtained. The instrument consists of optics that divide a source light beam into two beams and two detectors.
The instability of a source beam mainly due to that of the source lamp is compensated by that of a reference beam.
3.7
integrating-sphere
optical component consisting of a hollow spherical cavity with its inner surface covered with a diffuse
white reflective coating
Note 1 to entry: The cavity is equipped with small holes to set a sample piece and for inlet and outlet of the light
beam.
4 Principle
Fine ceramics thin films sometimes possess a voided micro columnar structure, depending on film
deposition conditions. If a fine ceramics thin film with a voided structure is exposed to a certain
atmosphere with humidity, moisture in the atmosphere adsorbs on surfaces of the columns consisting
the voided structures. The quantity of adsorbed water is affected by hydrostatic vapor pressure in the
atmosphere. Depending on the quantity of water adsorbed, the refractive index of thin films changes,
resulting in the change in transmittance and reflectance. To evaluate effects of water adsorption on
to surface of voids of fine ceramics films on film optical properties, it is necessary to measure optical
properties under a certain atmosphere, typically in an atmosphere with a high humidity. In addition to
the measurements under a high humidity, for the sake of comparison, it is also necessary to measure the
properties in vacuum, i.e. under the condition without water adsorption and low humidity. By comparing
optical transmittance measured in vacuum, low humidity, and high humidity conditions, the stability of
fine ceramics thin films shall be evaluated.
5 Ambient room environment
The test shall be carried out under an ambient laboratory room atmosphere where deviations in
the temperature and humidity are small. In particular, to prevent the condensation of water in the
environmental mini-chamber, after removing the mini-chamber from the humidity-temperature
control chamber to the laboratory room, the ambient temperature should be controlled to a certain
range. Recommended laboratory room conditions are the following:
a) temperature: 23 °C ± 2 °C;
b) relative humidity: below 70 %.
NOTE Attention is needed to dew condensation when environmen
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