ISO 29301:2023

Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures

This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

Analyse par microfaisceaux — Microscopie électronique analytique — Méthodes d'étalonnage du grandissement d'image au moyen de matériaux de référence de structures périodiques

General Information

• Status: Published
• Publication Date: 15-Oct-2023
• ICS: 37.020 - Optical equipment
• Technical Committee: ISO/TC 202/SC 3 - Analytical electron microscopy
• Drafting Committee: ISO/TC 202/SC 3 - Analytical electron microscopy
• Current Stage: 6060 - International Standard published
• Start Date: 16-Oct-2023
• Due Date: 12-Nov-2024
• Completion Date: 16-Oct-2023

Relations

• Revises: ISO 29301:2017 - Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
• Effective Date: 13-May-2023

Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 29301
Third edition
2023-10
Microbeam analysis — Analytical
electron microscopy — Methods
for calibrating image magnification
by using reference materials with
periodic structures
Analyse par microfaisceaux — Microscopie électronique analytique
— Méthodes d'étalonnage du grandissement d'image au moyen de
matériaux de référence de structures périodiques
Reference number
ISO 29301:2023(E)
© ISO 2023

---------------------- Page: 1 ----------------------
ISO 29301:2023(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2023
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: [phone]
Email: [e-mail]
Website: www.iso.org
Published in Switzerland
ii
  © ISO 2023 – All rights reserved

---------------------- Page: 2 ----------------------
ISO 29301:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image magnification . 5
4.1 Definition of the image magnification . 5
4.2 Expressing magnification . 6
5 Reference materials . 6
5.1 General . 6
5.2 Requirements for CRM/RM . 7
5.3 Storage and handling . 7
6 Calibration procedures .7
6.1 General . 7
6.2 Mounting CRM/RM . 8
6.3 Setting TEM operating conditions for calibration . 8
6.4 Capturing digitized image . 9
6.5 Digitizing the image recorded on photographic film . 10
6.5.1 General .
...

FINAL
INTERNATIONAL ISO/FDIS
DRAFT
STANDARD 29301
ISO/TC 202/SC 3
Microbeam analysis — Analytical
Secretariat: JISC
electron microscopy — Methods
Voting begins on:
2023-06-30 for calibrating image magnification
by using reference materials with
Voting terminates on:
2023-08-25
periodic structures
Analyse par microfaisceaux — Microscopie électronique analytique
— Méthodes d'étalonnage du grandissement d'image au moyen de
matériaux de référence de structures périodiques
RECIPIENTS OF THIS DRAFT ARE INVITED TO
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
DOCUMENTATION.
IN ADDITION TO THEIR EVALUATION AS
Reference number
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/FDIS 29301:2023(E)
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN-
DARDS TO WHICH REFERENCE MAY BE MADE IN
NATIONAL REGULATIONS. © ISO 2023

---------------------- Page: 1 ----------------------
ISO/FDIS 29301:2023(E)
FINAL
INTERNATIONAL ISO/FDIS
DRAFT
STANDARD 29301
ISO/TC 202/SC 3
Microbeam analysis — Analytical
Secretariat: JISC
electron microscopy — Methods
Voting begins on:
for calibrating image magnification
by using reference materials with
Voting terminates on:
periodic structures
Analyse par microfaisceaux — Microscopie électronique analytique
— Méthodes d'étalonnage du grandissement d'image au moyen de
matériaux de référence de structures périodiques
COPYRIGHT PROTECTED DOCUMENT
© ISO 2023
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
RECIPIENTS OF THIS DRAFT ARE INVITED TO
ISO copyright office
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
CP 401 • Ch. de Blandonnet 8
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
CH-1214 Vernier, Geneva
DOCUMENTATION.
Phone: [phone]
IN ADDITION TO THEIR EVALUATION AS
Reference number
Email: [e-mail]
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO­
ISO/FDIS 29301:2023(E)
Website: www.iso.org
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
Published in Switzerland
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN­
DARDS TO WHICH REFERENCE MAY BE MADE IN
ii
  © ISO 2023 – All rights reserved
NATIONAL REGULATIONS. © ISO 2023

---------------------- Page: 2 ----------------------
ISO/FDIS 29301:2023(E)
Contents Page
Foreword .iv
Introduction . vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image magnification . 5
4.1 Definition of the image magnification . 5
4.2 Expressing magnification . 6
5 Reference materials . 6
5.1 General .
...

ISO/FDIS 29301:2023(E)
ISO/TC 202/SC 3
Secretariat: JISC

Date: 2023-06-16
Microbeam analysis — Analytical electron microscopy — Methods for calibrating image
magnification by using reference materials with periodic structures
Analyse par microfaisceaux — Microscopie électronique analytique — Méthodes
d'étalonnage du grandissement d'image au moyen de matériaux de référence de
structures périodiques

---------------------- Page: 1 ----------------------
ISO/DIS 29301:2023
© ISO 2023
All rights reserved. Unless otherwise specified, or required in the context of its implementation,
no part of this publication may be reproduced or utilized otherwise in any form or by any means,
electronic or mechanical, including photocopying, or posting on the internet or an intranet,
without prior written permission. Permission can be requested from either ISO at the address
below or ISO's member body in the country of the requester.
ISO Copyright Office
CP 401 • CH-1214 Vernier, Geneva
Phone: + 41 22 749 01 11
Email: [e-mail]
Website: www.iso.org
Published in Switzerland.
© ISO 2017 – All rights reserved ii

---------------------- Page: 2 ----------------------
ISO/FDIS 29301:20172023(E)
Contents
Foreword . vi
Introduction . viii
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image magnification . 6
4.1 Definition of the image magnification . 6
4.2 Expressing magnification. 7
5 Reference materials . 7
5.1 General . 7
5.2 Requirements for CRM/RM . 7
5.3 Storage and handling . 8
6 Calibration procedures . 8
6.1 General . 8
6.2 Mounting CRM/RM . 8
6.3 Setting TEM operating conditions for calibration . 8
6.4 Capturing digitized image . 10
6.5 Digitizing the image recorded on photographic film . 12
6.5.1 General . 12
6.5.2 How to decide the pixel-resolution for digitization . 12
6.6 Measurement of the angle-corrected distance, D , from the digitized image . 14
t
6.6.1 General . 14
6.6.2 Measurement procedure . 15
6.7 Digitization of reference scale for pixel size calibration . 20
6.8 Calibration of image magnification .
...