ISO 23737:2021
(Main)Fine ceramics (advanced ceramics, advanced technical ceramics) — Methods for evaluating wear and friction characteristics of fine ceramic thin films under dry and humid conditions
Fine ceramics (advanced ceramics, advanced technical ceramics) — Methods for evaluating wear and friction characteristics of fine ceramic thin films under dry and humid conditions
This document specifies a method for testing the wear resistance and friction coefficient for fine ceramic thin films in dry and high-humidity environments, where such films have a thickness of up to approximately 1 µm and are deposited on a substrate or a base, including a thin substrate or a very thin organic polymer film base.
Céramiques techniques — Méthodes pour l'évaluation des caractéristiques d'usure et de frottement des films minces de céramiques techniques en conditions sèches et humides
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INTERNATIONAL ISO
STANDARD 23737
First edition
2021-08
Fine ceramics (advanced ceramics,
advanced technical ceramics) —
Methods for evaluating wear and
friction characteristics of fine ceramic
thin films under dry and humid
conditions
Céramiques techniques — Méthodes pour l'évaluation des
caractéristiques d'usure et de frottement des films minces de
céramiques techniques en conditions sèches et humides
Reference number
©
ISO 2021
© ISO 2021
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2021 – All rights reserved
Contents Page
Foreword .v
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Test specimens. 2
5 Measurement principle . 2
6 Testing room environment . 2
7 Wear formation test apparatus . 3
8 Test specimen preparation . 5
9 Test specimen pretreatment . 5
9.1 General . 5
9.2 Test specimen cleaning . 5
9.3 Test specimen drying . 5
10 Environmental conditions for the formation of the wear and the evaluation of
friction coefficient . 6
10.1 General . 6
10.2 Dry environment . 6
10.3 High-humidity environment . 6
11 Wear motion conditions . 6
11.1 Reciprocating wear conditions . 6
11.2 Rotating disc wear conditions . 7
12 E valuation of wear track cross-section formed on thin film test specimen surface .8
13 Evaluation of volume of worn portion on indenter ball surface .8
13.1 General . 8
13.2 Observation of indenter ball wear surface profile . 8
13.3 Calculation of volume of worn portion on indenter ball surface . 9
14 Investigations of morphology and elemental distribution maps for wear tracks on
thin film test specimens and worn sections on indenter balls .9
14.1 General . 9
14.2 Observation of the morphology . 9
14.3 Investigations of elemental distribution maps .10
15 Calculation of friction coefficient .10
16 Testing procedures .10
16.1 Measurement of thickness of thin film test specimen .10
16.2 Thin film test specimen preparation and cleaning .10
16.3 Setting of wear formation conditions .10
16.3.1 General.10
16.3.2 Wear formation conditions for a dry environment .11
16.3.3 Wear formation conditions for a high-humidity environment .11
16.4 Wear formation .11
16.4.1 Start of wear formation on the thin film test specimen .11
16.4.2 Friction force measurement .11
16.5 E valuation of thin film test specimen surface and indenter ball surface after wear
formation .11
16.5.1 General.11
16.5.2 Measurement of wear track cross-section on thin film test specimen .11
16.5.3 Evaluation of volume of worn portion on indenter ball surface .11
16.5.4 Investigations of morphology and elemental distribution maps .11
16.6 Calculation of friction coefficient .11
17 Precautions for summarization of test results .12
18 Test report .12
Annex A (informative) Example of reciprocating slide wear results and rotating slide wear
results .13
Annex B (informative) Method of holding polymer film or thin glass plate with a thickness
of < 200 µm in sliding wear formations .15
Annex C (informative) Effects of combining thin film materials and indenter materials
in sliding wear tests.17
Annex D (informative) Investigation of optimal load for indenter .22
Annex E (informative) Quantification of wear track cross-section area .24
Annex F (informative) Examples of investigations of morphology and elemental
distribution maps for wear tracks on thin films and worn sections of indenter balls .25
Bibliography .30
iv © ISO 2021 – All rights reserved
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/
iso/ foreword .html.
This document was prepared by Technical Committee ISO/TC 206, Fine ceramics.
Any feedback or questions on this document should be directed to the user's national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
Introduction
Fine ceramic thin films are used in a wide variety of applications, such as sensors, actuators or other
micromechanical elements; display elements; memory elements; recording media; optical elements;
packaging films; and films and glass for building construction and vehicles. In the industrial application
of fine ceramic thin films, resistance to wear is an important index for evaluation. The resistance
to wear
...
INTERNATIONAL ISO
STANDARD 23737
First edition
2021-08
Fine ceramics (advanced ceramics,
advanced technical ceramics) —
Methods for evaluating wear and
friction characteristics of fine ceramic
thin films under dry and humid
conditions
Céramiques techniques — Méthodes pour l'évaluation des
caractéristiques d'usure et de frottement des films minces de
céramiques techniques en conditions sèches et humides
Reference number
©
ISO 2021
© ISO 2021
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2021 – All rights reserved
Contents Page
Foreword .v
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Test specimens. 2
5 Measurement principle . 2
6 Testing room environment . 2
7 Wear formation test apparatus . 3
8 Test specimen preparation . 5
9 Test specimen pretreatment . 5
9.1 General . 5
9.2 Test specimen cleaning . 5
9.3 Test specimen drying . 5
10 Environmental conditions for the formation of the wear and the evaluation of
friction coefficient . 6
10.1 General . 6
10.2 Dry environment . 6
10.3 High-humidity environment . 6
11 Wear motion conditions . 6
11.1 Reciprocating wear conditions . 6
11.2 Rotating disc wear conditions . 7
12 E valuation of wear track cross-section formed on thin film test specimen surface .8
13 Evaluation of volume of worn portion on indenter ball surface .8
13.1 General . 8
13.2 Observation of indenter ball wear surface profile . 8
13.3 Calculation of volume of worn portion on indenter ball surface . 9
14 Investigations of morphology and elemental distribution maps for wear tracks on
thin film test specimens and worn sections on indenter balls .9
14.1 General . 9
14.2 Observation of the morphology . 9
14.3 Investigations of elemental distribution maps .10
15 Calculation of friction coefficient .10
16 Testing procedures .10
16.1 Measurement of thickness of thin film test specimen .10
16.2 Thin film test specimen preparation and cleaning .10
16.3 Setting of wear formation conditions .10
16.3.1 General.10
16.3.2 Wear formation conditions for a dry environment .11
16.3.3 Wear formation conditions for a high-humidity environment .11
16.4 Wear formation .11
16.4.1 Start of wear formation on the thin film test specimen .11
16.4.2 Friction force measurement .11
16.5 E valuation of thin film test specimen surface and indenter ball surface after wear
formation .11
16.5.1 General.11
16.5.2 Measurement of wear track cross-section on thin film test specimen .11
16.5.3 Evaluation of volume of worn portion on indenter ball surface .11
16.5.4 Investigations of morphology and elemental distribution maps .11
16.6 Calculation of friction coefficient .11
17 Precautions for summarization of test results .12
18 Test report .12
Annex A (informative) Example of reciprocating slide wear results and rotating slide wear
results .13
Annex B (informative) Method of holding polymer film or thin glass plate with a thickness
of < 200 µm in sliding wear formations .15
Annex C (informative) Effects of combining thin film materials and indenter materials
in sliding wear tests.17
Annex D (informative) Investigation of optimal load for indenter .22
Annex E (informative) Quantification of wear track cross-section area .24
Annex F (informative) Examples of investigations of morphology and elemental
distribution maps for wear tracks on thin films and worn sections of indenter balls .25
Bibliography .30
iv © ISO 2021 – All rights reserved
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/
iso/ foreword .html.
This document was prepared by Technical Committee ISO/TC 206, Fine ceramics.
Any feedback or questions on this document should be directed to the user's national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
Introduction
Fine ceramic thin films are used in a wide variety of applications, such as sensors, actuators or other
micromechanical elements; display elements; memory elements; recording media; optical elements;
packaging films; and films and glass for building construction and vehicles. In the industrial application
of fine ceramic thin films, resistance to wear is an important index for evaluation. The resistance
to wear
...
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