Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

Céramiques techniques — Méthode d’essai pour déterminer la résistance au plasma des composants céramiques dans les équipements de production à semi-conducteurs

General Information

Status
Published
Publication Date
17-Jun-2019
Current Stage
6060 - International Standard published
Start Date
18-Jun-2019
Completion Date
18-Jun-2019
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ISO 21859:2019 - Fine ceramics (advanced ceramics, advanced technical ceramics) -- Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
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INTERNATIONAL ISO
STANDARD 21859
First edition
2019-06
Fine ceramics (advanced ceramics,
advanced technical ceramics) — Test
method for plasma resistance of
ceramic components in semiconductor
manufacturing equipment
Céramiques techniques — Méthode d’essai pour déterminer
la résistance au plasma des composants céramiques dans les
équipements de production à semi-conducteurs
Reference number
ISO 21859:2019(E)
ISO 2019
---------------------- Page: 1 ----------------------
ISO 21859:2019(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2019

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ii © ISO 2019 – All rights reserved
---------------------- Page: 2 ----------------------
ISO 21859:2019(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ...................................................................................................................................................................................... 1

3 Terms and definitions ..................................................................................................................................................................................... 1

4 Principle of measurement .......................................................................................................................................................................... 1

5 Test environment ................................................................................................................................................................................................. 2

6 Apparatus ..................................................................................................................................................................................................................... 2

7 Test pieces ................................................................................................................................................................................................................... 2

7.1 General consideration ....................................................................................................................................................................... 2

7.2 Surface conditions ................................................................................................................................................................................ 2

8 Procedure..................................................................................................................................................................................................................... 2

8.1 Measurement of surface roughness before a plasma resistance test ...................................................... 2

8.2 Masking ......................................................................................................................................................................................................... 3

8.3 Plasma resistance test ...................................................................................................................................................................... 3

8.3.1 Setting of test pieces ..................................................................................................................................................... 3

8.3.2 Test conditions................................................................................................................................................................... 3

8.4 Measurement of erosion depth ................................................................................................................................................. 3

8.5 Measurement of surface roughness after the plasma resistance test ..................................................... 3

9 Calculation .................................................................................................................................................................................................................. 3

9.1 Calculation of mean erosion depth ........................................................................................................................................ 3

9.2 Calculation of surface roughness ............................................................................................................................................ 4

10 Test report ................................................................................................................................................................................................................... 4

© ISO 2019 – All rights reserved iii
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ISO 21859:2019(E)
Foreword

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This document was prepared by Technical Committee ISO/TC 206, Fine ceramics.

Any feedback or questions on this document should be directed to the user’s national standards body. A

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iv © ISO 2019 – All rights reserved
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