ISO/FDIS 20171

Microbeam analysis - Scanning electron microscopy - Tagged image file format for scanning electron microscopy(TIFF/SEM)

Titre manque

General Information

• Status: Withdrawn
• ICS: 35.240.70 - IT applications in science
• ICS: 37.020 - Optical equipment
• Technical Committee: ISO/TC 202/SC 4 - Scanning electron microscopy
• Drafting Committee: ISO/TC 202/SC 4 - Scanning electron microscopy
• Current Stage: 5098 - Project deleted
• Start Date: 21-May-2019
• Completion Date: 13-Dec-2025

Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 20171
First edition
Microbeam analysis — Scanning
electron microscopy — Tagged image
file format for scanning electron
microscopy(TIFF/SEM)
PROOF/ÉPREUVE
Reference number
ISO 20171:2019(E)
©
ISO 2019
ISO 20171:2019(E)
© ISO 2019
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Website: www.iso.org
Published in Switzerland
ii PROOF/ÉPREUVE © ISO 2019 – All rights reserved

ISO 20171:2019(E)
Contents Page
Foreword .vi
Introduction .vii
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image data features . 1
4.1 TIFF file encoding structure . 1
4.2 TIFF/SEM file encoding structure . 2
5 TIFF/SEM tag definitions . 3
5.1 Basic tags in TIFF 6.0 . 3
5.2 Usable tags in TIFF 6.0 . 4
5.3 Usable tags in EXIF format . 4
5.4 Offset pointers defined as TIFF/SEM tags . 4
5.4.1 General. 4
5.4.2 ToSEMStdIFD . 4
5.4.3 ToSEMMakerNotesIFD . 5
5.4.4 ToProcessedImageIFD . 5
5.5 System marker tag . 5
5.5.1 General. 5
5.5.2 SystemMarker . 5
5.6 SEM basic information defined as TIFF/SEM tags . 5
5.6.1 General. 5
5.6.2 AccelerationVoltage . 6
5.6.3 ExtractionVoltage . 6
5.6.4 SuppressorVoltage. 6
5.6.5 LandingVoltage . 6
5.6.6 DecelerationVoltage . 7
5.6.7 BoosterVoltage . . 7
5.6.8 FilamentCurrent . 7
5.6.9 EmissionCurrent . 7
5.6.10 ProbeCurrent . 8
5.6.11 WorkingDistance . 8
5.6.12 ConvergenceAngle . 8
5.6.13 SphericalAberrationCoefficient . 8
5.6.14 ChromaticAberrationCoefficient . 9
5.6.15 Demagnification . 9
5.7 Electron/ion source information defined as TIFF/SEM tags . 9
5.7.1 General. 9
5.7.2 SourceType . 9
5.7.3 SourceBrightness.10
5.7.4 SourceAngularCurrentDensity .10
5.7.5 SourceDiameter .10
5.7.6 SourceEnergySpread .11
5.8 Electron optical elements setting information defined as TIFF/SEM tags .11
5.8.1 General.11
5.8.2 NumberOfCondenserLens .11
5.8.3 CondenserLensSetting .11
5.8.4 CondenserLensSettingUnit .11
5.8.5 NumberOfObjectiveLens .12
5.8.6 ObjectiveLensSetting .12
5.8.7 ObjectiveLensSettingUnit .12
5.8.8 NumberOfStigmatorLens.12
ISO 20171:2019(E)
5.8.9 StigmatorLensSetting .13
5.8.10 StigmatorLensSettingUnit .13
5.8.11 NumberOfElectricalBeamAligner .13
5.8.12 ElectricalBeamAlignerSetting .13
5.8.13 ElectricalBeamAlinerSettingUnit.13
5.8.14 BeamShiftSetting .14
5.8.15 BeamShiftSettingUnit .14
5.8.16 NumberOfAperture . . .14
5.8.17 ApertureSetting .14
5.8.18 ApertureSettingUnit.15
5.8.19 NumberOfDetectorRelatedElectrode .15
5.8.20 DetectorRelatedElectrodeSetting .15
5.8.21 DetectorRelatedElectrodeSettingUnit .15
5.9 Detector signal information defined as TIFF/SEM tags .15
5.9.1 General.15
5.9.2 NumberOfDetector . .16
5.9.3 DetectorType .16
5.9.4 DetectorOperation .16
5.9.5 NumberOfDetectorSegment .16
5.9.6 DetectorSegmentOperation .17
5.10 Image capture information defined as TIFF/SEM tags .17
5.10.1 General.17
5.10.2 CaptureTime .17
5.10.3 PixelTime .17
5.10.4 FrameIntegration .17
5.10.5 LineIntegration .18
5.10.6 BrightnessSetting .18
5.10.7 BrightnessSettingUnit .18
5.10.8 ContrastSetting .18
5.10.9 ContrastSettingUnit .18
5.10.10 GainSetting .19
5.10.11 GainSettingUnit .19
5.10.12 ImageProcessing .19
5.10.13 FieldOfView .19
5.11 Continuously acquired and related images information defined as TIFF/SEM tags .20
5.11.1 General.20
5.11.2 PluralImageInformation .20
5.11.3 NumberOfSerialImage .20
5.11.4 SliceDepth .21
5.11.5 MappingElement .21
5.11.6 MappingShell .21
5.11.7 MontageOriginalLocation.21
5.11.8 MontageColumn .22
5.11.9 MontageRow .22
5.12 Vacuum information defined as TIFF/SEM tags .22
5.12.1 General.22
5.12.2 VacuumMode .22
5.12.3 NumberOfVacuumGauge.22
5.12.4 PressureVacuumGauge .23
5.12.5 NumberOfIonPump .23
5.12.6 PressureIonPump .23
5.12.7 VacuumGaugePosition .23
5.12.8 PumpTypeInSpecimenChamber .23
5.13 Stage Coordinate information defined as TIFF/SEM tags .24
5.13.1 General.24
5.13.2 RasterRotationAngle .24
5.13.3 AngleStageBeam . .24
5.13.4 StageXPosition .24
iv PROOF/ÉPREUVE © ISO 2019 – All rights reserved

ISO 20171:2019(E)
5.13.5 StageYPosition .24
5.13.6 StageZPosition .25
5.13.7 StageRPosition .25
5.13.8 StageTPositions.25
5.14 General information defined as TIFF/SEM tags .25
5.14.1 General.25
5.14.2 OperatorName .25
5.14.3 Specimen.26
5.14.4 TimeZoneOriginal .26
5.14.5 TimeZoneDigitized .26
5.14.6 DayLightSavings .27
Annex A (informative) TIFF/SEM tag list .28
Annex B (informative) Example of TIFF/SEM .32
Bibliography .35
ISO 20171:2019(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see www .iso
.org/iso/foreword .html.
This document was prepared by Technical Committee ISO/TC 202, Microbeam analysis, Subcommittee
SC 4, Scanning electron microscopy (SEM).
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/members .html.
vi PROOF/ÉPREUVE © ISO 2019 – All rights reserved

ISO 20171:2019(E)
Introduction
Storing an image file as a TIFF (tagged image file format) does not reduce the quality of an image
because the image is either not compressed or is compressed using a lossless compression algorithm.
A format such as JPEG, which optimises the degree of compression at the expense of reducing some
image fidelity, is not recommended, since the necessary information, such as the contrast in a scanning
electron microscopy (SEM) image, is changed during compression of the image. Moreover, TIFF is able
to embed many kinds of information as “tags” in the image file. Therefore, conditions when acquiring
the SEM image (accelerating voltage or magnification or others) can be added.
The purpose in developing this document is to prevent SEM users, who own SEMs from different
vendors, from losing the SEM conditional information from when an image is taken, and to standardize
what kinds of information must be included in a single SEM image file independently of the make or
model of the instrument or detector used to collect the image. The format is based on TIFF Revision 6.0
[3]
Final . It aims to prevent original image data, including the date when the image was taken, from being
overwritten whenever the original image data is processed. This document also explains how related
images, such as montage images, sequential images of focused ion beam or microtome cross-sectioning
and energy dispersive spectrum mapping images, can be labelled in a TIFF/SEM file.
In this document, new tags are defined to encode image data features which are not included in TIFF
Revision 6.0 Final as private tags. These new tags conform to the practices specified in TIFF Revision 6.0
[1]
Final. They have been chosen so as not to overlap with the fields of TIFF/EP (see ISO 12234-2) , TIFF/
[2] [4]
IT (see ISO 12639) or the EXIF (Exchangeable Image File Format for Digital Still Cameras) .
INTERNATIONAL STANDARD ISO 20171:2019(E)
Microbeam analysis — Scanning electron microscopy
— Tagged image file format for scanning electron
microscopy(TIFF/SEM)
1 Scope
This document specifies the data file format of digital images generated by a scanning electron
microscope (SEM) by adapting the TIFF-based format. The data file includes not only the image data but
the SEM conditional information defined in this format. This document does not address the security of
the data file.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 22493, Microbeam analysis — Scanning electron microscopy — Vocabulary
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 22493 and the following apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https: //www .iso .org/obp
— IEC Electropedia: available at http: //www .electropedia .org/
3.1
TIFF/SEM tags
tags described in 5.6 to 5.14 which are commonly used parameters in SEM
3.2
TIFF/SEM file
TIFF file taken by a SEM and saved using the structure shown in Figure 2
3.3
TIFF 6.0
[3]
specification defined in TIFF Revision 6.0 Final
3.4
EXIF format
[4]
specification defined in Exchangeable Image File Format for Digital Still Cameras
4 Image data features
4.1 TIFF file encoding structure
The TIFF/SEM header is exactly the same as the TIFF header as indicated in TIFF Revision 6.0 Final:
1992, Clause 2, and the structure is shown in Figure 1. It should be noted that Type “II” (0x4949, little-
endian) is mandatory for “Byte Order” in a TIFF/SEM file.
ISO 20171:2019(E)
Figure 1 — TIFF file structure
The following subclause describes image file directories (IFDs) for TIFF/SEM in more detail.
4.2 TIFF/SEM file encoding structure
Tags for the TIFF/SEM are identified in the “ToSEMStdIFD” tag-field as shown in Figure 2. In this field,
each SEM manufacturer can include SEM specific tags. TIFF/SEM tags are not mandatory in the TIFF/
SEM file, unless otherwise stipulated in the tag’s specification.
There are some informative parameters that SEM manufacturers might not want to show to rival SEM
manufacturers and/or SEM users. SEM manufacturers can define their own tags, not listed in 5.6 to
5.14, related to such parameters. These parameters can be recorded in the “ToSEMMakerNotesIFD” tag-
field as shown in Figure 2.
Software using the TIFF/SEM file format shall not overwrite original image data. The
“ToProcessedImageIFD” tag gives an offset to store processed image data without losing the original
image data. This tag is unique to the TIFF/SEM file format specification; therefore, if users process
images using software not conforming to the TIFF/SEM format, original images may be lost. Software
conforming with the TIFF/SEM format shall provide an appropriate viewer or an image-processing
software which can extract and display both the original and processed images.
SEM specific tags listed from 5.6 onwards are commonly used parameters in SEM. Tags which are
not listed but become useful can be added, or existing tags that are no longer useful deleted, in later
revisions of the document.
2 PROOF/ÉPREUVE © ISO 2019 – All rights reserved

ISO 20171:2019(E)
Figure 2 — TIFF/SEM file structure
The following subclauses describe image file tags for TIFF/SEM in more detail. A list of TIFF/SEM and
an example of TIFF/SEM are summarized in Annex A and Annex B, respectively.
5 TIFF/SEM tag definitions
5.1 Basic tags in TIFF 6.0
These are required tags for grayscale images generally used in SEM images. These are indicated in
TIFF 6.0.
ISO 20171:2019(E)
5.2 Usable tags in TIFF 6.0
Some useful tags have been defined in TIFF 6.0. Those tags listed below in TIFF 6.0 can be labelled in
files that are saved as the TIFF/SEM. Detailed descriptions are indicated in TIFF 6.0. Tags listed below
are also summarized in Annex A.
Tag number Tag name Type Count Value
271 (0x010F) Make ASCII any VALUE or OFFSET
272 (0x0110) Model ASCII any VALUE or OFFSET
305 (0x0131) Software ASCII any VALUE or OFFSET
306 (0x0132) DateTime ASCII 20 OFFSET
“YYYY:M M: DD HH:
MM: SS” in 24 h
33432 (0x8298) Copyright ASCII For example, OFFSET
“Copyright, [compa-
ny or person name],
20xx. All rights
reserved.”
5.3 Usable tags in EXIF format
Some useful private tags have been defined and standardized in EXIF format used in digital still
cameras. Those listed below as the private tags in EXIF format can be labelled in files that are saved
in the TIFF/SEM format. Detailed descriptions are indicated in EXIF format. Tags listed below are also
summarized in Annex A.
Tag number Tag name Type Count Value
36867 (0x9003) DateTimeOriginal ASCII 20 OFFSET
“YYYY:M M: DD HH:
MM: SS” in 24 hours
36868(0x9004) DateTimeDigitized ASCII 20 OFFSET
“YYYY:M M: DD HH:
MM: SS” in 24 hours
37510(0x9286) UserComment UNDEFINED N OFFSET
5.4 Offset pointers defined as TIFF/SEM tags
5.4.1 General
Offset pointers are used to specify the area if the file where the TIFF/SEM tags, any SEM manufacturers’
private information, and/or information any processing carried out on the image are stored. Tags
defined in this subclause are summarized in Annex A.
5.4.2 ToSEMStdIFD
This mandatory tag encodes an offset to the TIFF/SEM standard IFD. The information of tags listed
from 5.5 onwards is included in the field where the offset pointer specifies.
Tag Name = ToSEMStdIFD
Tag = 65000(0xFDE8)
Type = LONG
N = 1
4 PROOF/ÉPREUVE © ISO 2019 – All rights reserved

ISO 20171:2019(E)
Value = VALUE
5.4.3 ToSEMMakerNotesIFD
Offset to the TIFF/SEM maker notes IFD. Each manufacturer can set their own private tags in this field
which they are not willing to show to the public but may wish users to have access to.
Tag Name = ToSEMMakerNotesIFD
Tag = 65001(0xFDE9)
Type = LONG
N = 1
Value = VALUE
5.4.4 ToProcessedImageIFD
Offset to the processed image IFD. Digitally processed image data shall be stored after the offset point
provided by “ToProcessedImageIFD”, in order to not overwrite the original image data. Software
conforming to the TIFF/SEM format shall not overwrite original image data. Multiple processed images
can be stored by assigning multiple offset values.
Tag Name = ToProcessedImageIFD
Tag = 65002(0xFDEA)
Type = LONG
N = 1
Value = VALUE
5.5 System marker tag
5.5.1 General
A unified image file format for other kinds of microscopes may be proposed in the future. To provide for
such future development, a system marker tag is defined here. It is mandatory to include this tag in the
data file. Tags defined in this subclause are summarized in Annex A.
5.5.2 SystemMarker
The value on TIFF/SEM is “SEM”.
Tag Name = SystemMarker
Tag = 65003(0xFDEB)
Type = ASCII
N = 1
Value = “SEM ”
5.6 SEM basic information defined as TIFF/SEM tags
5.6.1 General
Tags defined in this subclause are summarized in Annex A.
ISO 20171:2019(E)
5.6.2 AccelerationVoltage
Potential difference between a cathode (source) and an anode (grounded) over which electrons/ions
are accelerated in an electron/ion gun. Values are expressed in “kV”.
Tag Name = AccelerationVoltage
Tag = 65004(0xFDEC)
Type = SSHORT or FLOAT
N = 1
Value = VALUE
5.6.3 ExtractionVoltage
Potential difference between the first anode and the tip in order to pull out electrons/ions from the
source. Values are expressed in “kV”.
Tag Name = ExtractionVoltage
Tag = 65005(0xFDED)
Type = SSHORT or FLOAT
N = 1
Value = VALUE
5.6.4 SuppressorVoltage
Potential to suppress electrons emitted from the heated filament while an electrical field is excited by
applying the extraction voltage. Values are expressed in “V”.
Tag Name = SurppressorVoltage
Tag = 65006(0xFDEE)
Type = SSHORT or FLOAT
N = 1
Value = VALUE
5.6.5 LandingVoltage
“Landing Voltage” is the term used to describe the energy of decelerated electrons/ions as they impact
a specimen. Values are expressed in “kV”.
Tag Name = LandingVoltage
Tag = 65007(0xFDEF)
Type = SSHORT or FLOAT
N = 1
Value = VALUE
6 PROOF/ÉPREUVE © ISO 2019 – All rights reserved

ISO 20171:2019(E)
5.6.6 DecelerationVoltage
Also called the retarding voltage. In electron or negative ion columns a negative voltage is applied to
a specimen, and the electron beam is decelerated just above the specimen. The landing voltage is the
difference between the accelerating and decelerating voltages. For positive ion columns, a positive
retarding voltage is applied to the specimen. Values are expressed in “kV”. For retarding voltages
applied to the final lens see the BoosterVoltage tag.
Tag Name = DecelerationVoltage
Tag = 65008(0xFDF0)
Type = SSHORT or FLOAT
N = 1
Value = VALUE
5.6.7 BoosterVoltage
The electron beam emitted from the electron gun at a specified voltage value of the accelerating voltage
is further accelerated by a booster voltage, passes through the lens system, and is then decelerated
to its original accelerating voltage at the lower part of an object lens placed above the specimen. This
technique may also be used in ion beam systems. Values are expressed in “kV”.
Tag Name = BoosterVoltage
Tag = 65009(0xFDF1)
Type = SSHORT or FLOAT
N = 1
Value = VALUE
5.6.8 FilamentCurrent
Total current applied to W hairpin emitter, hairpin of SE emitter. Values are expressed in “A”.
Tag Name = FilamentCurrent
Tag = 65010(0xFDF2)
Type = SHORT or FLOAT
N = 1
Value = VALUE
5.6.9 EmissionCurrent
Total current emitted from a source. Values are expressed in “μA”.
Tag Name = EmissionCurrent
Tag = 65011(0xFDF3)
Type = SHORT or FLOAT
N = 1
Value = VALUE
ISO 20171:2019(E)
5.6.10 ProbeCurrent
Amount of beam current incident onto a specimen. Values are expressed in “pA”.
Tag Name = ProbeCurrent
Tag = 65012(0xFDF4)
Type = SHORT or FLOAT
N = 1
Value = VALUE
5.6.11 WorkingDistance
Distance from the lower surface of an objective lens to the surface of a specimen. Values are expressed
in “mm”.
Tag Name = WorkingDistance
Tag = 65013(0xFDF5)
Type = SHORT or FLOAT
N = 1
Value = VALUE
5.6.12 ConvergenceAngle
Half-angle of the cone of the beam converging on the specimen. Values are expressed in “mrad”. This
information is necessary when users are willing to calculate the theoretical beam diameter at a
specimen using their own method.
Tag Name = ConvergenceAngle
Tag = 65014(0xFDF6)
Type = SHORT or FLOAT
N = 1
Value = VALUE
5.6.13 SphericalAberrationCoefficient
Coefficient related to the spherical aberration on an image plane as well as on a specimen. The spherical
aberration is the lens defect which arises because electrons/ions in trajectories further away from the
optic axis are bent more strongly by the lens magnetic and/or electrostatic field than those near the
lens. Values are expressed in “mm”. This information is necessary when users are willing to calculate
the theoretical beam diameter at a specimen using their own method.
Tag Name = SphericalAberrationCoefficient
Tag = 65015(0xFDF7)
Type = SHORT or FLOAT
N = 1
Value = VALUE
8 PROOF/ÉPREUVE © ISO 2019 – All rights reserved

ISO 20171:2019(E)
5.6.14 ChromaticAberrationCoefficient
Coefficient related to the chromatic aberration on an image plane as well as on a specimen. The
chromatic aberration is the lens defect which arises because electrons/ions from the same point,
but of slightly different energies, will be focused at different positions in the image plane. Values are
expressed in “mm”. This information is necessary when users are willing to calculate the theoretical
beam diameter at a specimen using their own method.
Tag Name = ChromaticAberrationCoefficient
Tag = 65016(0xFDF8)
Type = SHORT or FLOAT
N = 1
Value = VALUE
5.6.15 Demagnification
Total demagnification value from a source to the beam focus position on a specimen. This number can
be used to calculate the beam diameter on a specimen projected from the source. This information is
necessary when users are willing to calculate the theoretical beam diameter at a specimen using their
own method.
Tag Name = Demagnification
Tag = 65017(0xFDF9)
Type = SHORT or FLOAT
N = 1
Value = VALUE
5.7 Electron/ion source information defined as TIFF/SEM tags
5.7.1 General
Tags defined in this subclause are summarized in Annex A.
5.7.2 SourceType
Tag Name = SourceType
Tag = 65018(0xFDFA)
Type = SHORT or ASCII
N = 1 or any
Value = possible values are listed as follows. If sources which are not listed are used in SEM, the SEM
manufacturer can label words of source name in ASCII code; in that case, Value is “Offset”.
An electron source consists of the tip of tungsten single crystal or an-
1 Cold field emitter
other tip based on the cold field emission process, e.g. CNT tip
An electron source consists of the tip of the tungsten single or poly
2 Thermal field emitter
crystal
An electron source consists of the tip of the tungsten single crystal
3 Schottky emitter
coated with ZrO , or another materials like LaB or CeB
2 6 6
ISO 20171:2019(E)
4 Thermionic emitter 1 An electron source consists of a tungsten hairpin filament
5 Thermionic emitter 2 An electron source consists of a LaB or CeB single crystal
6 6
A liquid metal ion source used in the focused ion beam systems. Gallium
6 LMIS
is mainly used in the systems
7 GFIS A gas phased ion source used mainly in the He ion microscopes
8 Plasma ion source An ion source produced by the plasma field
5.7.3 SourceBrightness
The brightness of the source selected in the “SourceType” tag. Values are expressed in “A/m /str/V”.
This information is necessary when users are wanting to calculate the theoretical beam diameter using
their own method. If the “SourceAngularCurrentDensity” and “SourceDiameter” tags are labelled, the
“SourceBrightness” tag does not have to be labelled.
Tag Name = SourceBrightness
Tag = 65019(0xFDFB)
Type = FLOAT
N = 1
Value = VALUE
5.7.4 SourceAngularCurrentDensity
Angular current density selected in the “SourceType” tag, where electrons are extracted. Values are
expressed in “A/str”. This information is necessary when users are”SourceType, where electrons
are extracted. Values are expressed in “nm”. This information is necessary when users are willing to
calculate the theoretical beam diameter at a specimen using their own method. If the “SourceBrightness”
and “SourceAngularCurrentDensity” tags are labelled, the “SourceDiameter” tag does not have to be
labelled.
Tag Name = SourceEnergySpread
Tag = 65020(0xFDFC)
Type = FLOAT
N = 1
Value = VALUE
5.7.5 SourceDiameter
Source diameter, where electrons are extracted. Values are expressed in “nm”. This information
is necessary when users are willing to calculate the theoretical beam diameter at a specimen using
their own method. If the “SourceBrigthness” and “SourceAngularCurrentDensity” tags are labelled,
the “SourceDiameter” tag does not have to be labelled. The usage of the tag is transferred to the
manufacturers or users.
Tag Name = SourceDiameter
Tag = 65021(0xFDFD)
Type = FLOAT
N = 1
Value = VALUE
10 PROOF/ÉPREUVE © ISO 2019 – All rights reserved

ISO 20171:2019(E)
5.7.6 SourceEnergySpread
Energy spread selected in the “SourceType” tag. Values are expressed in “eV”. This information is
necessary when users are willing to calculate the theoretical beam diameter at a specimen using their
own method.
Tag Name = SourceEnergySpread
Tag = 65022(0xFDFE)
Type = FLOAT
N = 1
Value = VALUE
5.8 Electron optical elements setting information defined as TIFF/SEM tags
5.8.1 General
Tags defined in this subclause are summarized in Annex A.
5.8.2 NumberOfCondenserLens
Number of condenser lenses in the column. The condenser lenses are responsible for incident beam
formation. Lenses may operate electrostatically or magnetically.
Tag Name = NumberOfCondenserLens
Tag = 65023(0xFDFF)
Type = SHORT
N = 1
Value = VALUE
5.8.3 CondenserLensSettin
...