ISO 11952:2019
(Main)Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This document has the following objectives: — to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length; — to define the minimum requirements for the calibration process and the conditions of acceptance; — to ascertain the instrument's ability to be calibrated (assignment of a "calibrate-ability" category to the instrument); — to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); — to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM; — to define the requirements for reporting results.
Analyse chimique des surfaces — Microscopie à sonde à balayage — Détermination des quantités géométriques en utilisant des microscopes à sonde à balayage: Étalonnage des systèmes de mesure
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Standards Content (Sample)
INTERNATIONAL ISO
STANDARD 11952
Second edition
2019-05
Surface chemical analysis — Scanning-
probe microscopy — Determination
of geometric quantities using SPM:
Calibration of measuring systems
Analyse chimique des surfaces — Microscopie à sonde à balayage
— Détermination des quantités géométriques en utilisant des
microscopes à sonde à balayage: Étalonnage des systèmes de mesure
Reference number
ISO 11952:2019(E)
©
ISO 2019
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ISO 11952:2019(E)
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© ISO 2019
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ISO 11952:2019(E)
Contents Page
Foreword .v
Introduction .ix
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols . 2
5 Characteristics of SPMs . 4
5.1 Components of an SPM . 4
5.2 Metrological categories of SPMs . 6
5.3 Block diagram of an SPM . 6
5.3.1 For category C: . 6
5.3.2 Additionally, for category B: . 6
5.3.3 Additionally, for category A: . 7
5.4 Calibration interval . 7
6 Preliminary characterization of the measuring system . 8
6.1 Overview of the instrument characteristics and influencing factors to be investigated . 8
6.2 Waiting times after interventions in the measuring system (e.g. instrument
installation, intrinsic effects, carrying out operation, warm-up, tip/specimen change) .10
6.2.1 Adjustment of the instrument to ambient conditions .10
6.2.2 Potential causes of drift .10
6.2.3 Procedure .
...
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