ISO 14594:2024
(Main)Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
This document gives general guidelines for the determination of experimental parameters relating to the electron probe, the wavelength spectrometer, and the specimen that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of probe current, probe diameter, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume. This document is applicable for the analysis of a well-polished specimen using normal beam incidence. This document does not apply to energy dispersive X-ray spectroscopy.
Analyse par microfaisceaux — Analyse par microsonde électronique (Microsonde de Castaing) — Lignes directrices pour la détermination des paramètres expérimentaux pour la spectrométrie à dispersion de longueur d'onde
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International
Standard
ISO 14594
Third edition
Microbeam analysis — Electron
2024-06
probe microanalysis — Guidelines
for the determination of
experimental parameters for
wavelength dispersive spectroscopy
Analyse par microfaisceaux — Analyse par microsonde
électronique (Microsonde de Castaing) — Lignes directrices
pour la détermination des paramètres expérimentaux pour la
spectrométrie à dispersion de longueur d'onde
Reference number
ISO 14594:2024(en) © ISO 2024
---------------------- Page: 1 ----------------------
ISO 14594:2024(en)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2024
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
© ISO 2024 – All rights reserved
ii
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ISO 14594:2024(en)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Abbreviated terms . 3
5 Experimental parameters . 3
5.1 General .3
5.2 Parameters related to the electron probe .3
5.2.1 Accelerating voltage .3
5.2.2 Probe current .3
5.2.3 Magnification and field of view .3
5.3 Parameters related to wavelength dispersive X-ray spectrometers .3
5.3.1 General .3
5.3.2 Take-off angle .4
5.3.3 Wavelength resolution .4
5.3.4 X-ray detector and Pulse height analyser .4
5.3.5 Peak location (wavelength) .
...
FINAL DRAFT
International
Standard
ISO/FDIS 14594
ISO/TC 202/SC 2
Microbeam analysis — Electron
Secretariat: SAC
probe microanalysis — Guidelines
Voting begins on:
for the determination of
2024-03-05
experimental parameters for
Voting terminates on:
wavelength dispersive spectroscopy
2024-04-30
Analyse par microfaisceaux — Analyse par microsonde
électronique (Microsonde de Castaing) — Lignes directrices
pour la détermination des paramètres expérimentaux pour la
spectrométrie à dispersion de longueur d'onde
RECIPIENTS OF THIS DRAFT ARE INVITED TO SUBMIT,
WITH THEIR COMMENTS, NOTIFICATION OF ANY
RELEVANT PATENT RIGHTS OF WHICH THEY ARE AWARE
AND TO PROVIDE SUPPOR TING DOCUMENTATION.
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INTERNATIONAL STANDARDS MAY ON OCCASION HAVE
TO BE CONSIDERED IN THE LIGHT OF THEIR POTENTIAL
TO BECOME STAN DARDS TO WHICH REFERENCE MAY BE
MADE IN NATIONAL REGULATIONS.
Reference number
ISO/FDIS 14594:2024(en) © ISO 2024
---------------------- Page: 1 ----------------------
FINAL DRAFT
ISO/FDIS 14594:2024(en)
International
Standard
ISO/FDIS 14594
ISO/TC 202/SC 2
Microbeam analysis — Electron
Secretariat: SAC
probe microanalysis — Guidelines
Voting begins on:
for the determination of
experimental parameters for
Voting terminates on:
wavelength dispersive spectroscopy
Analyse par microfaisceaux — Analyse par microsonde
électronique (Microsonde de Castaing) — Lignes directrices
pour la détermination des paramètres expérimentaux pour la
spectrométrie à dispersion de longueur d'onde
RECIPIENTS OF THIS DRAFT ARE INVITED TO SUBMIT,
COPYRIGHT PROTECTED DOCUMENT
WITH THEIR COMMENTS, NOTIFICATION OF ANY
RELEVANT PATENT RIGHTS OF WHICH THEY ARE AWARE
AND TO PROVIDE SUPPOR TING DOCUMENTATION.
© ISO 2024
IN ADDITION TO THEIR EVALUATION AS
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO
LOGICAL, COMMERCIAL AND USER PURPOSES, DRAFT
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
INTERNATIONAL STANDARDS MAY ON OCCASION HAVE
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
TO BE CONSIDERED IN THE LIGHT OF THEIR POTENTIAL
or ISO’s member body in the country of the requester.
TO BECOME STAN DARDS TO WHICH REFERENCE MAY BE
MADE IN NATIONAL REGULATIONS.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland Reference number
ISO/FDIS 14594:2024(en) © ISO 2024
© ISO 2024 – All rights reserved
ii
---------------------- Page: 2 ----------------------
ISO/FDIS 14594:2024(en)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Abbreviated terms . 3
5 Experimental parameters . 3
5.1 General .3
5.2 Parameters related to the electron probe .3
5
...
ISO/DISFDIS 14594:2023(E)
ISO/TC 202/SC 2
Date: 2023-08-07
Secretariat: SAC
Date: 2024-02-20
Microbeam analysis — Electron probe microanalysis — Guidelines
for the determination of experimental parameters for wavelength
dispersive spectroscopy
Analyse par microfaisceaux — Analyse par microsonde électronique (Microsonde de Castaing) — Lignes
directrices pour la détermination des paramètres expérimentaux pour la spectrométrie à dispersion de
longueur d'onde
FDIS stage
---------------------- Page: 1 ----------------------
ISO/DISFDIS 14594:2023(E2024(en)
© ISO 20232024
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication
may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying,
or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO
at the address below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: + 41 22 749 01 11
EmailE-mail: copyright@iso.org
Website: www.iso.orgwww.iso.org
Published in Switzerland
ii © ISO 2023 – All rights reserved
© ISO 2024 – All rights reserved
ii
---------------------- Page: 2 ----------------------
ISO/DISFDIS 14594:2023(E2024(en)
Contents
Foreword . v
Introduction . vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Abbreviated terms . 3
5 Experimental parameters . 3
5.1 General . 3
5.2 Parameters related to the electron probe . 3
5.2.1 Accelerating voltage . 3
5.2.2 Probe current . 3
5.2.3 Magnification and field of view . 4
5.3 Parameters related to wavelength dispersive X-ray spectrometers . 4
5.3.1 General . 4
5.3.2 Take-off angle . 4
5.3.3 Wavelength resolution . 4
5.3.4 X-ray detector and Pulse height analyser . 4
5.3.5 Peak location (wavelength) . 4
5.3.6 Background . 5
...
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