SIST EN ISO 11554:2000
(Main)Optics and optical instruments - Lasers and laser-related equipment - Test methods for laser beam power, energy and temporal characteristics (ISO 11554:1998)
Optics and optical instruments - Lasers and laser-related equipment - Test methods for laser beam power, energy and temporal characteristics (ISO 11554:1998)
This International Standard specifies test methods for determining the power and energy of continuous-wave and pulsed laser beams, as well as their temporal characteristics of pulse duration and pulse repetition rate. Test and evaluation methods are also given for the power stability of cw-lasers, energy stability of pulsed lasers, pulse duration stability and pulse repetition rate stability. The test methods given in this International Standard are intended to be used for testing and characterization of lasers.
Optik und optische Instrumente - Laser und Laseranlagen - Prüfverfahren für Leistung, Energie und Kenngroßen des Zeitverhaltens von Laserstrahlen (ISO 11554:1998)
Diese Internationale Norm legt Meßverfahren zur Bestimmung der Leistung und Energie von Dauerstrich- und Pulslasern und für deren Nenngrößen für das Zeitverhalten fest: Pulsform, -breite und Pulsfolgefrequenz. Darüber hinaus sind Prüf- und Auswerteverfahren für die entsprechenden Stabilitätsgrößen enthalten (Leistungsstabilität von Dauerstrichlasern, Energiestabilität von Pulslasern, Pulsdauerstabilität und Stabilität der Pulsfolgefrequenz). Die Prüfverfahren, die in dieser Norm angegeben werden, dienen zur Prüfung und Charakterisierung von Lasern.
Optique et instruments d'optique - Lasers et équipements associés aux lasers - Méthodes d'essai de la puissance et l'énergie des lasers et de leurs caractéristiques temporelles (ISO 11554:1998)
L'IEC 62047-21:2014 spécifie la détermination du coefficient de Poisson à partir des résultats obtenus par l'application d'essais de charges uniaxiales et biaxiales aux matériaux pour systèmes microélectromécaniques (MEMS, Micro-Electrical-Mechanical Systems) à couche mince dont les longueurs et les largeurs sont inférieures à 10 mm et les épaisseurs sont inférieures à 10 µm.
Optika in optični instrumenti – Laserji in laserska oprema – Preskusne metode za moč žarka, energijo in časovne karakteristike (ISO 11554:1998)
General Information
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Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 11554:2000
01-januar-2000
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PRþåDUNDHQHUJLMRLQþDVRYQHNDUDNWHULVWLNH ,62
Optics and optical instruments - Lasers and laser-related equipment - Test methods for
laser beam power, energy and temporal characteristics (ISO 11554:1998)
Optik und optische Instrumente - Laser und Laseranlagen - Prüfverfahren für Leistung,
Energie und Kenngroßen des Zeitverhaltens von Laserstrahlen (ISO 11554:1998)
Optique et instruments d'optique - Lasers et équipements associés aux lasers -
Méthodes d'essai de la puissance et l'énergie des lasers et de leurs caractéristiques
temporelles (ISO 11554:1998)
Ta slovenski standard je istoveten z: EN ISO 11554:1998
ICS:
31.260 Optoelektronika, laserska Optoelectronics. Laser
oprema equipment
SIST EN ISO 11554:2000 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN ISO 11554:2000
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SIST EN ISO 11554:2000
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SIST EN ISO 11554:2000
INTERNATIONAL ISO
STANDARD 11554
First edition
1998-12-15
Optics and optical instruments — Lasers
and laser-related equipment — Test
methods for laser beam power, energy and
temporal characteristics
Optique et instruments d'optique — Lasers et équipements associés aux
lasers — Méthodes d'essai de la puissance et l'énergie des faisceaux
lasers et de leurs caractéristiques temporelles
A
Reference number
ISO 11554:1998(E)
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SIST EN ISO 11554:2000
ISO 11554:1998(E)
Contents Page
1 Scope .1
2 Normative references .1
3 Terms and definitions .1
4 Symbols and units.1
5 Measurement principles.2
6 Measurement configuration, test equipment and auxiliary devices.2
7 Measurements.4
8 Evaluation.5
9 Test report .9
Annex ZA (informative) EN standards equivalent to normative International Standards.11
© ISO 1998
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic
or mechanical, including photocopying and microfilm, without permission in writing from the publisher.
International Organization for Standardization
Case postale 56 • CH-1211 Genève 20 • Switzerland
Internet iso@iso.ch
Printed in Switzerland
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SIST EN ISO 11554:2000
© ISO
ISO 11554:1998(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO
member bodies). The work of preparing International Standards is normally carried out through ISO technical
committees. Each member body interested in a subject for which a technical committee has been established has
the right to be represented on that committee. International organizations, governmental and non-governmental, in
liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical
Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3.
Draft International Standards adopted by the technical committees are circulated to the member bodies for voting.
Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote.
International Standard ISO 11554 was prepared by Technical Committee ISO/TC 172, Optics and optical
instruments, Subcommittee SC 9, Electro-optical systems.
Annex ZA of this International Standard is for information only.
iii
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SIST EN ISO 11554:2000
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SIST EN ISO 11554:2000
INTERNATIONAL STANDARD © ISO ISO 11554:1998(E)
Optics and optical instruments — Lasers and laser-related
equipment — Test methods for laser beam power, energy and
temporal characteristics
1 Scope
This International Standard specifies test methods for determining the power and energy of continuous-wave and
pulsed laser beams, as well as their temporal characteristics of pulse shape, pulse duration and pulse repetition
rate. Test and evaluation methods are also given for the power stability of cw-lasers, energy stability of pulsed
lasers, pulse duration stability and pulse repetition rate stability.
The test methods given in this International Standard are intended to be used for testing and characterization of
lasers.
2 Normative references
The following normative documents contain provisions which, through reference in this text, constitute provisions of
this International Standard. For dated references, subsequent amendments to, or revisions of, any of these
publications do not apply. However, parties to agreements based on this International Standard are encouraged to
investigate the possibility of applying the most recent editions of the normative documents indicated below. For
undated references, the latest edition of the normative document referred to applies. Members of ISO and IEC
maintain registers of currently valid International Standards.
ISO 11145:1994, Optics and optical instruments — Lasers and laser-related equipment — Vocabulary and symbols.
IEC 61040:1990, Power and energy measuring detectors — Instruments and equipment for laser radiation.
VIM, International Vocabulary of Basic and General Terms in Metrology (BIPM, IEC, ISO, OIML).
3 Terms and definitions
For the purposes of this International Standard, the terms and definitions given in ISO 11145 and in the International
Vocabulary of Basic and General Terms in Metrology apply.
4 Symbols and units
The symbols and units given in ISO 11145 and in Table 1 are used in this International Standard.
1
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SIST EN ISO 11554:2000
© ISO
ISO 11554:1998(E)
Table 1 — Symbols and units of measurement
Symbol Unit Term
W Medium-term relative power fluctuation (1 min) to a 95 % confidence level
ΔP
1
ΔP W Long-term relative power fluctuation (60 min) to a 95 % confidence level
60
P , P W Power averaged over 0,01 s for t and over 1 s for t
1 60 1 60
W Mean power, averaged over 1 min and 60 min, respectively, at the operating conditions specified
PP,
160
by the manufacturer
ΔQ J Relative pulse energy fluctuation to a 95 % confidence level
t s Medium-term interval (1 min)
1
t s Long-term interval (60 min)
60
s - Measured standard deviation
u - Relative uncertainty of calibration factor to a 95 % confidence level
rel,k
u - Relative uncertainty of measurement to a 95 % confidence level
rel
f Hz Upper cutoff frequency
D
s Pulse repetition period
T
s Rise time of laser pulse
τ
R
Δτ - Relative pulse duration fluctuation with regard to τ to a 95 % confidence level
H H
-
Δτ Relative pulse duration fluctuation with regard to τ to a 95 % confidence level
10 10
m - Reading
- Mean value of readings
m
( ) - Detector signal
U t
5 Measurement principles
The laser beam is directed onto the detector surface to produce a signal with amplitude proportional to the power or
energy of the laser. The amplitude versus time is measured. Beam-forming and/or -attenuation devices may be
used.
The evaluation method depends on the parameter to be determined and is described in clause 8.
6 Measurement configuration, test equipment and auxiliary devices
6.1 Preparation
The laser beam and the optical axis of the measuring system shall be coaxial. Select the diameter (cross-section) of
the optical system such that it accommodates the entire cross-section of the laser beam, and so that clipping or
diffraction loss is smaller than 10 % of the intended measurement uncertainty.
Arrange an optical axis in such a way that it is coaxial with the laser beam to be measured. Suitable optical
alignment devices are available for this purpose (e.g. aligning lasers or steering mirrors). Mount the attenuators or
beam-forming optics such that the optical axis runs through the geometrical centers. Care should be exercized to
avoid systematic errors.
2
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SIST EN ISO 11554:2000
© ISO
ISO 11554:1998(E)
NOTE Reflections, external ambient light, thermal radiation and air currents are all potential sources of errors.
After the initial preparation is completed, make an evaluation to determine if the entire laser beam reaches the
detector surface. Apertures of different diameters can be introduced into the beam path in front of each optical
component. Reduce the aperture size until the output signal has been reduced by 5 %. This aperture should have a
diameter at least 20 % smaller than the aperture of the optical component.
6.2 Control of environmental impacts
Take suitable precautions, such as mechanical and acoustical isolation of the test set-up, shielding from extraneous
radiation, temperature stabilization of the laboratory, choice of low-noise amplifiers, to ensure that the contribution to
the total error is less than 10 % of the intended uncertainty. Check by performing a background measurement such
as described in clause 7, but with the laser beam blocked from the detector (e.g. by a beam stop in the laser
resonator or close to the laser output). The value for the standard deviation (laser beam blocked) obtained by an
evaluation as described in clause 8 shall be smaller than 1/10 of the value obtained from a measurement with the
laser beam reaching the detector.
6.3 Detectors
The provisions of IEC 61040:1990 apply to the radiation detector, clauses 3 and 4 being particularly important.
Furthermore, the following points shall be noted:
a) Calibrated power/energy meter
Any wavelength dependency, non-linearity or non-uniformity of the detector or the electronic device shall
be minimized or corrected by use of a calibration procedure.
b) Time-resolving detector
It shall be confirmed, from manufacturer's data or by measurement, that the output quantity of the detector
(e.g. the voltage) is linearly dependent on the input quantity (laser power). Any wavelength dependency,
non-linearity or non-uniformity of the dete
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