SIST EN 62047-20:2014

Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes

EN IEC 62047-20 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes. Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor lasers are widely used for device technology of gyroscopes. Hereafter, gyroscope is referred to as gyro.

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L'IEC 62047-20:2014 spécifie les termes et définitions, les valeurs assignées et les caractéristiques, ainsi que les méthodes de mesure des gyroscopes. Les gyroscopes sont principalement utilisés dans des applications grand public, des applications industrielles générales et des applications aérospatiales. Les dispositifs microélectromécaniques (MEMS, Micro-Electrical-Mechanical Systems) et les lasers à semiconducteur sont largement utilisés dans la technologie des dispositifs de gyroscopes.

Polprevodniški elementi - Mikroelektromehanski elementi - 20. del: Žiroskopi (IEC 62047-20:2014)

Standard EN IEC 62047-20 določa izraze in definicije, mejne vrednosti in karakteristike ter merilne metode žiroskopov. Žiroskopi se uporabljajo predvsem za potrošniško in splošno industrijsko uporabo ter uporabo v aeronavtiki. MEMS in polprevodniški laserji se pogosto uporabljajo za tehnologijo elementov žiroskopov. V nadaljevanju se žiroskopu lahko reče tudi žiro.

General Information

• Status: Published
• Publication Date: 12-Oct-2014
• ICS: 31.080.01 - Semiconductor devices in general
• Technical Committee: I11 - Imaginarni 11
• Current Stage: 6060 - National Implementation/Publication (Adopted Project)
• Start Date: 09-Oct-2014
• Due Date: 14-Dec-2014
• Completion Date: 13-Oct-2014
• Ref Project: EN 62047-20:2014 - Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes

Standards Content (Sample)

SLOVENSKI STANDARD
SIST EN 62047-20:2014
01-november-2014
Polprevodniški elementi - Mikroelektromehanski elementi - 20. del: Žiroskopi (IEC
62047-20:2014)
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
/
/
Ta slovenski standard je istoveten z: EN 62047-20:2014
ICS:
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
SIST EN 62047-20:2014 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN 62047-20:2014

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SIST EN 62047-20:2014


EUROPEAN STANDARD EN 62047-20

NORME EUROPÉENNE

EUROPÄISCHE NORM
September 2014
ICS 31.080.99

English Version
Semiconductor devices - Micro-electromechanical devices -
Part 20: Gyroscopes
(IEC 62047-20:2014)
Dispositifs à semiconducteurs - Dispositifs Halbleiterbauelemente - Bauelemente der
microélectromécaniques - Mikrosystemtechnik -
Partie 20: Gyroscopes Teil 20: Gyroskope
(CEI 62047-20:2014) (IEC 62047-20:2014)
This European Standard was approved by CENELEC on 2014-07-31. CENELEC members are bound to comply with the CEN/CENELEC
Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration.
Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC
Management Centre or to any CENELEC member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the
same status as the official versions.
CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic,
Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,
Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.


European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2014 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC Members.
 Ref. No. EN 62047-20:2014 E

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SIST EN 62047-20:2014
EN 62047-20:2014 - 2 -
Foreword
The text of document 47F/188/FDIS, future edition 1 of IEC 62047-20, prepared by SC 47F
“Microelectromechanical systems” of IEC/TC 47 “Semiconductor devices" was submitted to the
IEC-CENELEC parallel vote and approved by CENELEC as EN 62047-20:2014.

The following dates are fixed:
(dop) 2015-04-30
• latest date by which the document has to be
implemented at national level by
publication of an identical national
standard or by endorsement
• latest date by which the national (dow) 2017-07-31
standards conflicting with the
document have to be withdrawn

Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CENELEC [and/or CEN] shall not be held responsible for identifying any or all such
patent rights.

Endorsement notice
The text of the International Standard IEC 62047-20:2014 was approved by CENELEC as a European
Standard without any modification.

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SIST EN 62047-20:2014




IEC 62047-20

®


Edition 1.0 2014-06




INTERNATIONAL



STANDARD




NORME



INTERNATIONALE
colour

inside










Semiconductor devices – Micro-electromechanical devices –

Part 20: Gyroscopes




Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –

Partie 20: Gyroscopes
















INTERNATIONAL

ELECTROTECHNICAL

COMMISSION


COMMISSION

ELECTROTECHNIQUE

PRICE CODE
INTERNATIONALE

CODE PRIX XA


ICS 31.080.99 ISBN 978-2-8322-1667-5



Warning! Make sure that you obtained this publication from an authorized distributor.

Attention! Veuillez vous assurer que vous avez obtenu cette publication via un distributeur agréé.

® Registered trademark of the International Electrotechnical Commission
Marque déposée de la Commission Electrotechnique Internationale

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SIST EN 62047-20:2014
– 2 – IEC 62047-20:2014  IEC 2014
CONTENTS

FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
4 Essential ratings and characteristics . 6
4.1 Categorization of gyro . 6
4.2 Absolute maximum ratings . 7
4.3 Normal operating rating . 8
4.4 Characteristics . 8
5 Measuring methods . 10
5.1 Scale factor . 10
5.1.1 Purpose . 10
5.1.2 Measuring circuit (circuit diagram) . 10
5.1.3 Measuring principle . 12
5.1.4 Measurement procedures . 21
5.1.5 Specified conditions . 23
5.2 Cross axis sensitivity . 24
5.2.1 Purpose . 24
5.2.2 Measuring circuit (circuit diagram) . 24
5.2.3 Principle of measurement . 25
5.2.4 Precautions to be observed during the measurements of the angular
rate applied . 27
5.2.5 Measurement procedures . 27
5.2.6 Specified conditions . 27
5.3 Bias . 28
5.3.1 Purpose . 28
5.3.2 Measuring circuit . 28
5.3.3 Principle of measurement . 30
5.3.4 Measurement procedures . 35
5.3.5 Specified conditions . 37
5.4 Output noise . 38
5.4.1 Purpose . 38
5.4.2 Measuring circuit . 38
5.4.3 Principle of measurement . 39
5.4.4 Precautions during measurement . 40
5.4.5 Measurement procedures . 40
5.4.6 Specified conditions . 43
5.5 Frequency band . 43
5.5.1 Purpose . 43
5.5.2 Measuring circuit . 43
5.5.3 Principle of measurement . 45
5.5.4 Precautions during measurement . 47
5.5.5 Measurement procedure . 47
5.5.6 Specified conditions . 49
5.6 Resolution . 49
5.6.1 Purpose . 49

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SIST EN 62047-20:2014
IEC 62047-20:2014  IEC 2014 – 3 –
5.6.2 Measuring circuit . 49
5.6.3 Principle of measurement . 49
5.6.4 Measurement procedures . 50
5.6.5 Specified conditions . 51
Annex A (informative) Accuracy of measured value of gyro characteristics . 52
A.1 General . 52
A.2 Angle and angular rate . 52
A.3 Example of angular deviation occurring after calibration . 52
Bibliography . 53

Figure 1 – Example of measuring circuit . 11
Figure 2 – Example of wiring configuration . 12
Figure 3 – Example of measurement data when the angular rate is applied . 13
Figure 4 – Example of scale factor data at each temperature . 15
Figure 5 – Example of relationship between scale factor and scale factor temperature
coefficient at each temperature . 16
Figure 6 – Example of measurement of ratiometric error for the scale factor . 17
Figure 7 – Example measurement of scale factor stability . 19
Figure 8 – Example of measurement of scale factor symmetry . 20
Figure 9 – Measuring circuit for cross axis sensitivity . 25
Figure 10 – Principle of measurement for cross axis sensitivity . 26
Figure 11 – Measuring circuit 1 for bias . 29
Figure 12 – Measuring circuit 2 for bias . 30
Figure 13 – Example measurement of ratiometric error for bias . 32
Figure 14 – Bias temperature sensitivity and bias hysteresis. 34
Figure 15 – Bias linear acceleration sensitivity . 35
Figure 16 – Output noise measuring system . 39
Figure 17 – Example of wiring configuration for output noise. 39
Figure 18 – Frequency power spectrums. 40
Figure 19 – Angular random walk . 41
Figure 20 – Bias instability and Allan variance curve . 42
Figure 21 – Measuring circuit for frequency response . 44
Figure 22 – Example of wiring configuration for frequency response . 45
Figure 23 – Frequency response characteristics . 46
Figure 24 – Gain peak response characteristics . 46
Figure 25 – Calibration of frequency response . 48

Table 1 – Categories of gyro . 7
Table 2 – Absolute maximum ratings . 7
Table 3 – Normal operating ratings . 8
Table 4 – Characteristics . 9
Table 5 – Specified condition for measurement of scale factor . 23
Table 6 – Specified conditions for the measurement of bias . 37
Table 7 – Specified condition for the measurement of frequency band . 49
Table 8 – Specified condition for the measurement of resolution . 51

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SIST EN 62047-20:2014
– 4 – IEC 62047-20:2014  IEC 2014
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________

SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 20: Gyroscopes

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 62047-20 has been prepared by subcommittee 47F: Micro-
electromechanical systems, of IEC 47: Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
47F/188/FDIS 47F/191/RVD

Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.

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SIST EN 62047-20:2014
IEC 62047-20:2014  IEC 2014 – 5 –
A list of all parts in the IEC 62047 series, published under the general title Semiconductor
devices – Micro-electromechanical devices, can be found on the IEC website.
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC web site under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.

IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct
understanding of its contents. Users should therefore print this document using a
colour printer.

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SIST EN 62047-20:2014
– 6 – IEC 62047-20:2014  IEC 2014
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 20: Gyroscopes



1 Scope
This part of IEC 62047 specifies terms and definitions, ratings and characteristics, and
measuring methods of gyroscopes.
Gyroscopes are primarily used for consumer, general industries and aerospace applications.
MEMS and semiconductor lasers are widely used for device technology of gyroscopes.
Hereafter, gyroscope is referred to as gyro.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and
are indispensable for its application. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any
amendments) applies.
None
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
rotating table
rate table
rotating tool on which a gyro is loaded during measurement
3.2
earth rate
angular rate generated in inertial space due to the rotation of the earth
Note 1 to entry: When the angular rate in inertial space is defined as stellar day 23 hours, 56 minutes, a
reference of 4,098 903 691 seconds is obtained as specified by the International Earth Rotation and Reference
Systems Service (IERS) and therefore, the angular rate of Earth in inertial space is approximately 15,04 °/h. For
details of the definition, refer to the IERS website (http://www.iers.org).
3.3
scale factor
ratio of gyro output voltage or output digital signal versus the rotating angular rate being
applied, described in unit: V/(°/s) or bit/(°/s )
4 Essential ratings and characteristics
4.1 Categorization of gyro
Table 1 shows uses of gyro categorized by application fields.

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SIST EN 62047-20:2014
IEC 62047-20:2014  IEC 2014 – 7 –
Table 1 – Categories of gyro
Category Contents
1 primarily for consumer use where variations of bias are not specified
2 primarily for industrial use where designing with appropriate range of values of
variations of bias
3 primarily for aerospace use where designing with detectable function of the earth
rate
4.2 Absolute maximum ratings
Table 2 describes absolute maximum ratings of gyro.
The following items listed in the table shall be described in the specification, unless otherwise
stated in the relevant procurement specifications. Stresses over these limits can be one of the
causes of permanent damage to the devices.
Table 2 – Absolute maximum ratings
Item no Absolute Category Specification Unit Remarks
maximum

1 2 3 min typ max
ratings
4.2.1 Storage x x x x x °C
temperature
range
4.2.2 Operating x x x x x °C
temperature
range
4.2.3 Storage    % Moisture absorption management level (for
humidity example, see levels specified in Table 5-1
range "Moisture Sensitivity Levels" of page 7 in
1
IPC/JEDEC J-STD-020C, [1] ) for reflow
soldering shall be specified. Those
descriptions shall not be provided to devices
applied with no reflow soldering process
and/or hermetic seal packaging process.
2

4.2.4 Mechanical x x x  x m/s Maximum limiting value of mechanical shock
shock in which does not cause permanent damage to
operating devices under an appropriate operating
state state. Acceleration, times and wave forms
shall be specified.
2

4.2.5 Mechanical x x x  x m/s Maximum limiting value of mechanical shock
shock in non which does not cause permanent damage to
operating devices under an appropriate non-operating
state state. Acceleration, times and wave forms
shall be specified.
2
4.2.6 Mechanical x x x  x m/s Maximum limiting value of mechanical

vibration in vibration acceleration and frequency which
operating does not cause permanent damage to
state devices under an appropriate operating
state.
2
4.2.7 Mechanical x x x  x m/s Maximum limiting value of mechanical

vibration in vibration acceleration and frequency which
non operating does not cause permanent damage to
state devices under an appropriate non-operating
state.
4.2.8 Angular rate x x x  x °/s Maximum limiting value of angular rate

limit which does not cause permanent damage to
devices under an appropriate operating
state.
______________
1
 Numbers in square brackets refer to the Bibliography.

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SIST EN 62047-20:2014
– 8 – IEC 62047-20:2014  IEC 2014
Item no Absolute Category Specification Unit Remarks
maximum

1 2 3 min typ max
ratings
2
4.2.9 Angular x x x  x °/s Maximum limiting value of angular

acceleration acceleration which does not cause
limit permanent damage to devices under an
appropriate operating state.
4.2.10 Maximum x x x  x V Maximum limiting value of supply voltage

supply which does not cause permanent damage to

voltage devices.
4.2.11 Maximum   x A Maximum limiting value of supply current

supply current which does not cause permanent damage to

devices. This limiting value shall be

specified only for a kind of constant current
driving devices.
NOTE x: mandatory, blank: optional

4.3 Normal operating rating
Table 3 describes normal operating ratings of gyro.
The following items should be described in the specification, unless otherwise stated in the
relevant procurement specifications. These conditions are recommended to keep specified
characteristics in stable state during operations of applying devices.
Table 3 – Normal operating ratings
Item no. Normal operating Category Specification Unit Remarks
ratings
1 2 3 min typ max

4.3.1 Guarantee operating x x x x x °C
temperature range
4.3.2 Guarantee operating x x x  x %
humidity range
4.3.3 Supply voltage range x x x x x x V
4.3.4 Current consumption x x x  x A
4.3.5 Start up current  x  x A
4.3.6 Power supply ripple  x  x Vpp
requirement
4.3.7 Other environmental  x x Recommended ranges of appropriate

condition indexes of environmental conditions
(such as conditions of

electromagnetic environments, air
pressure) specified as a specified
minimum value to maximum value.
4.3.8 Overload recovering  x  x s Maximum value of overload
time recovering time in the range of

measurement less than maximum

rating.
NOTE x: mandatory, blank: optional

4.4 Characteristics
Table 4 describes characteristics of gyro.

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SIST EN 62047-20:2014
IEC 62047-20:2014  IEC 2014 – 9 –
Table 4 – Characteristics
Item Characteristics Category Specification Unit Remarks
no

1 2 3 min typ max
4.4.1 Measurement x x x  x °/s Angular rate measuring range for

range guarantee of performance
4.4.2 Nominal scale x x x x V/(°/s) Nominal scale factor is also called as
factor
standard sensitivity.
or
bit/(°/s)
4.4.3 Initial scale x x x x % Minimum and maximum value of
factor variation variation from standard sensitivity at
a specified temperature
4.4.4 Scale factor x x x x % Minimum and maximum value of

variation with standard sensitivity under a specified
temperature or variation in temperature
Temperature
coefficient of
scale factor
4.4.5 Ratiometric error  x  x % Maximum value of error of sensitivity

for scale factor applying voltage fluctuation caused
by operating instability of applying
electric power supply
4.4.6 Linearity   x %
4.4.7 Scale factor n x x  A typical value of stability of

stability sensitivity under a specified definite
input voltage value
4.4.8 Scale factor n x x  A typical value of asymmetry of

symmetry sensitivity defined as a ratio of the
sensitivity applying plus value of a
specified input voltage to minus
value of a specified input voltage,
see 5.1.3.8.
4.4.9 Cross axis  x  x % Maximum value of sensitivity of cross

sensitivity axis (see 5.2.3 Principle of
measurement).
4.4.10 Nominal bias x x x x V or bit Typical value of bias voltage or bit

value under an appropriate applying
input voltage value
4.4.11 Initial bias  x x x °/s Minimum and maximum value of bias

variation under a specified temperature
4.4.12 Bias variation  x x x °/s Minimum and maximum value of

with temperature standard bias under a specified
or Temperature variation in temperature
coefficient of
bias
4.4.13 Ratiometric error  x  x V Maximum value of error of bias

for bias applying voltage fluctuation caused
by operating instability of applying
electric power supply. No description
is required for digital output case.
4.4.14 Bias repeatability  x x x °/s Minimum value and maximum value

(switch on to of bias fluctuation of each period
switch off) during a switching on state to a
switching off state
4.4.15 Bias hysteresis  x  x °/s Maximum value of hysteresis of bias

under a specified variation in
temperature
4.4.16 Linear g  x  x Maximum value of changed bias

sensitivity value under operating conditions of a
specified constant acceleration
value, expressed in comparison with
g((°/s)/g)

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SIST EN 62047-20:2014
– 10 – IEC 62047-20:2014  IEC 2014
Item Characteristics Category Specification Unit Remarks
no


1 2 3 min typ max
4.4.17 Bias drift after  x  x °/s Maximum value of drift of bias during

power on turned on state of applying electric

power supply
4.4.18 In-band n
...