SIST EN ISO 25178-700:2023
(Main)Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration, adjustment and verification of areal topography measuring instruments (ISO 25178-700:2022)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration, adjustment and verification of areal topography measuring instruments (ISO 25178-700:2022)
This part of ISO 25178 specifies generic procedures for the calibration, adjustment and verification of
areal topography measuring instruments with planar rather than full 3D measurement behaviour and for
the determination of measurement uncertainty components associated with effects on the metrological
characteristics. It considers, what all areal instruments have in common, including. point sensing
instruments with lateral scanning devices. For instrument specific principles, other parts may be
developed in the 700 series of ISO standard 25178. In particular, the calibration of contacting systems
with additional arcuate motion is not covered by this standard and may be described in a future revision
of the ISO 25178-701.
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Fläche - Teil 700: Kalibrierung, Justierung und Verifizierung von flächenhaften Topographiemessgeräten (ISO 25178-700:2022)
Dieser Teil von ISO 25178 legt allgemeine Verfahren für die Kalibrierung, Justierung und Verifizierung von flächenhaften Topographiemessgeräten nach ISO 25178-6 sowie für die Bestimmung ihrer messtechnischen Merkmale fest. Dieser Teil von ISO 25178 betrachtet gemeinsame messtechnische Merkmale von Topographiemessgeräten, insbesondere entsprechend der Beschreibung nach ISO 25178, Teile 601 bis 607. In ihrer Gesamtheit umfassen diese Normen sowohl mikroskopische Messgeräte als auch Punktsensor-Messgeräte mit Einrichtungen für die laterale Abtastung.
Dieses Dokument bietet ein Verfahren zur Abschätzung der Unsicherheit für einen weiten aber nicht erschöpfenden Bereich von Oberflächen. Der Bereich von Oberflächen wird vom verwendeten Messgerät abhängig sein, siehe 6.6.2 zur Beschreibung der Topographietreue.
Für messgerätespezifische Grundsätze können andere Teile innerhalb der Normenreihe ISO 25178-700 entwickelt werden.
Beispielsweise deckt dieses Dokument ausschließlich Messgeräte ohne zusätzliche bogenförmige Bewegung ab, die in einer künftigen Überarbeitung von ISO 25178-701 beschrieben sein können.
Dieses Dokument schließt keine Verfahren für flächenhaft integrierende Methoden ein, obwohl diese ebenfalls in ISO 25178-6 definiert sind. Lichtstreuung gehört beispielsweise zu einer Klasse von Techniken, die als flächenhaft integrierende Methoden zur Messung der Oberflächentopographie bekannt sind.
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 700: Étalonnage, ajustage et vérification d'instruments de mesure de la topographie des surfaces (ISO 25178-700:2022)
Le présent document spécifie des modes opératoires génériques pour l’étalonnage, l’ajustage et la vérification des caractéristiques métrologiques que les instruments de mesure de la topographie des surfaces ont en commun, comme indiqué dans l’ISO 25178‑600.
Comme les profils peuvent être extraits des images par topographie de surface, la plupart des méthodes décrites dans le présent document peuvent être adaptées aux instruments de profilométrie.
Les problèmes spécifiques des instruments ne sont pas couverts dans le présent document. Par exemple, pour les instruments basés sur un palpage mécanique, lorsque le palpeur suit un mouvement arqué additionnel, des mesures additionnelles sont spécifiées dans l’ISO 25178‑701.
Le présent document n’inclut pas de modes opératoires pour les méthodes d’intégration des surfaces, bien que celles-ci soient aussi mentionnées dans l’ISO 25178‑6. Par exemple, la diffusion de la lumière appartient à une classe de techniques connue sous le nom de méthodes d’intégration des surfaces servant à mesurer la topographie des surfaces.
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna - 700. del: Umerjanje, nastavitev in preverjanje merilnih instrumentov za površinsko topografijo (ISO 25178-700:2022)
Ta del standarda ISO 25178 določa splošne postopke za umerjanje, nastavitev in preverjanje
merilnih instrumentov za površinsko topografijo z ravninskim in ne polnim 3D-merilnim obnašanjem ter za določanje komponent merilne negotovosti, povezanih z učinki na meroslovne lastnosti. Upošteva, kaj je skupnega vsem površinskim instrumentom, vključno z instrumenti za točkovno zaznavanje z napravami za bočno skeniranje. Za specifična načela posameznega instrumenta se lahko v skupini 700 standarda ISO 25178 razvijejo drugi deli. Umerjanje kontaktnih sistemov z dodatnim ločnim gibanjem na primer ni zajeto v tem standardu in se ga lahko opiše v prihodnji reviziji standarda ISO 25178-701.
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 25178-700:2023
01-marec-2023
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna -
700. del: Umerjanje, nastavitev in preverjanje merilnih instrumentov za površinsko
topografijo (ISO 25178-700:2022)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration,
adjustment and verification of areal topography measuring instruments (ISO 25178-
700:2022)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Fläche - Teil
700: Kalibrierung, Justierung und Verifizierung von flächenhaften
Topographiemessgeräten (ISO 25178-700:2022)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 700:
Étalonnage, ajustage et vérification d'instruments de mesure de la topographie des
surfaces (ISO 25178-700:2022)
Ta slovenski standard je istoveten z: EN ISO 25178-700:2023
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
SIST EN ISO 25178-700:2023 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN ISO 25178-700:2023
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SIST EN ISO 25178-700:2023
EN ISO 25178-700
EUROPEAN STANDARD
NORME EUROPÉENNE
January 2023
EUROPÄISCHE NORM
ICS 17.040.20; 17.040.40
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 700: Calibration, adjustment and verification
of areal topography measuring instruments (ISO 25178-
700:2022)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 700: Étalonnage, ajustage Oberflächenbeschaffenheit: Fläche - Teil 700:
et vérification d'instruments de mesure de la Kalibrierung, Justierung und Verifizierung von
topographie des surfaces (ISO 25178-700:2022) flächenhaften Topographiemessgeräten (ISO 25178-
700:2022)
This European Standard was approved by CEN on 12 December 2022.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2023 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-700:2023 E
worldwide for CEN national Members.
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SIST EN ISO 25178-700:2023
EN ISO 25178-700:2023 (E)
Contents Page
European foreword . 3
2
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SIST EN ISO 25178-700:2023
EN ISO 25178-700:2023 (E)
European foreword
This document (EN ISO 25178-700:2023) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the
secretariat of which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by July 2023, and conflicting national standards shall be
withdrawn at the latest by July 2023.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
Any feedback and questions on this document should be directed to the users’ national standards
body/national committee. A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the
United Kingdom.
Endorsement notice
The text of ISO 25178-700:2022 has been approved by CEN as EN ISO 25178-700:2023 without any
modification.
3
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SIST EN ISO 25178-700:2023
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SIST EN ISO 25178-700:2023
INTERNATIONAL ISO
STANDARD 25178-700
First edition
2022-12
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 700:
Calibration, adjustment and
verification of areal topography
measuring instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 700: Étalonnage, ajustage et vérification d'instruments de
mesure de la topographie des surfaces
Reference number
ISO 25178-700:2022(E)
© ISO 2022
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SIST EN ISO 25178-700:2023
ISO 25178-700:2022(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2022
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii
© ISO 2022 – All rights reserved
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SIST EN ISO 25178-700:2023
ISO 25178-700:2022(E)
Contents Page
Foreword .v
Introduction . vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms.2
5 Calibration, adjustment and verification of an instrument . 3
5.1 General . 3
5.2 Methods for calibration, adjustment and verification . 3
5.3 Instrument calibration procedure . 4
5.3.1 Calibration by measurement standards . 4
5.3.2 Handling of defects on material measures . 4
5.3.3 Measurement procedures for calibration with measurement standards . 4
5.3.4 Calibration conditions . 4
6 Determination of the metrological characteristics of the instrument .5
6.1 General . 5
6.2 Reporting of the measurement conditions . 5
6.3 Handling of non-measured points . 5
6.4 Handling of spurious data and outliers . 5
6.5 Metrological characteristic: measurement noise, N , and instrument noise, N . 5
M I
6.5.1 General . 5
6.5.2 Determination of measurement and instrument noise: application of filters
or operators . 6
6.5.3 Determination of measurement and instrument noise: material measures
for instrument and measurement noise estimation . 6
6.5.4 Determination of measurement and instrument noise: procedure for the
determination of measurement noise . 6
6.6 Determination of flatness deviation . 10
6.6.1 General . 10
6.6.2 Material measure for determination of flatness deviation . 10
6.6.3 Procedure for determination of flatness deviation . 10
6.6.4 Improvement of flatness deviation estimation . 10
6.6.5 Application of filters and operators . 11
6.6.6 Calibration of flatness deviation . 11
6.7 Determination of the amplification coefficient α for the z-axis . 11
z
6.7.1 General . 11
6.7.2 Determination of the amplification coefficient α for the z-axis: material
z
measures . 11
6.7.3 Procedure for determination of amplification coefficient α for the
z
instrument z-axis .12
6.7.4 Type PGR (profile-groove-rectangular): groove, straight (rectangular or
trapezoidal) measurement areas .12
6.7.5 Other material measures for the instrument z-axis calibration. 14
6.7.6 Procedure for determination of amplification coefficient α for the
z
instrument z-axis: range and distance of measurement positions for the
calibration of the z-scale of the instrument . 15
6.7.7 Range and distance of measurement position for the calibration of a
reduced z-scale of the instrument . 15
6.8 Determination of z-linearity deviation l . 15
z
6.8.1 General .15
6.8.2 Determination of the complete and local z-linearity deviation l : z-scan
z
range . 15
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SIST EN ISO 25178-700:2023
ISO 25178-700:2022(E)
6.8.3 Determination of z-linearity deviation l . . 15
z
6.8.4 Determination of z-linearity deviation l : sizes of step heights to be
z
measured. 16
6.8.5 Determination of z-linearity deviation l : positions within the instrument
z
z-range . 17
6.8.6 Determination of z-linearity deviation l : Non-default methods. 17
z
6.9 Determination of the amplification coefficients α and α in x- and y-direction and
x y
mapping deviation Δ (x,y) and Δ (x,y) . 17
x y
6.9.1 General . 17
6.9.2 Determination of the amplification coefficient α and α in x- and
x y
y-direction and mapping deviation Δ (x,y) and Δ (x,y): material measures . 18
x y
6.9.3 Determination of the amplification coefficient α and α in x- and y-direction
x y
and mapping deviation Δ (x,y) and Δ (x,y): assessed measurement volume . 19
x y
6.9.4 Procedure for the determination of the amplification coefficient α and α
x y
and mapping deviation Δ (x,y) and Δ (x,y) of the x- and y-axes .20
x y
6.10 Perpendicularity of the instrument z-axis with respect to the x-y areal reference .20
6.11 Topographic spatial resolution W . 20
R
6.11.1 General .20
6.11.2 Material measures for topographic spatial resolution .20
6.11.3 Instrument transfer function (ITF) curve f . 21
ITF
6.11.4 Lateral period limit D . 21
LIM
6.11.5 Use of optical lateral resolution parameters . 21
6.12 Topography fidelity T . 21
FI
6.12.1 General . 21
6.12.2 Determination of the topography fidelity T using reference metrology . 21
FI
6.12.3 Determination of the small-scale fidelity limit T .22
FIL
6.12.4 Slope-dependent effects . 22
7 General information .22
Annex A (informative) Relation to the GPS matrix model .23
Bibliography .24
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SIST EN ISO 25178-700:2023
ISO 25178-700:2022(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to
the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see
www.iso.org/iso/foreword.html.
This document was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification, in collaboration with the European Committee for Standardization (CEN)
Technical Committee CEN/TC 290, Dimensional and geometrical product specification and verification, in
accordance with the Agreement on technical cooperation between ISO and CEN (Vienna Agreement).
A list of all parts in the ISO 25178 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www.iso.org/members.html.
v
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SIST EN ISO 25178-700:2023
ISO 25178-700:2022(E)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general
GPS standard (see ISO 14638). It influences chain links E, F and G of the chains of standards on profile
surface texture and areal surface texture.
The ISO/GPS matrix model given in ISO 14638 gives an overview of the ISO/GPS system, of which this
document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex A.
In the GPS concept, the design values of geometric parameters on workpieces and their tolerances are
compared with the measurement of those parameters on the corresponding manufactured workpieces
and their associated measurement uncertainties. For a reliable result it is therefore necessary to
calibrate the measurement instrument involved in this process.
This document specifies default procedures for the calibration, adjustment and verification of surface
topography measuring instruments, using material measures traceable to the meter through a national
metrology institute or qualified laboratory, see ISO/IEC Guide 99:2007, 2.41. Default methods are
recommended when no other calibration procedures have been clearly defined.
This document describes the calibration (see ISO/IEC Guide 99:2007, 2.39), adjustment (see
ISO/IEC Guide 99:2007, 3.11) and verification (see ISO/IEC Guide 99:2007, 2.44) in general for
topography measuring instruments.
The calibration of an instrument’s metrological characteristics enables the verification of the
instrument’s specifications when the specifications are based on these metrological characteristics.
This also enables the comparison of systems of different manufacturers that may be based on different
measurement principles.
The metrological characteristics capture all of the factors that can influence a measurement result
(influence quantities) and can be propagated appropriately through a specific measurement model to
estimate measurement uncertainty.
Calibration is a part of the determination of the overall uncertainty of measurement. The complete
evaluation of measurement uncertainty may include other factors such as operator variability, changing
environmental influences, the effects of thermal and mechanical stresses on the sample part and other
factors that are not accounted for in the instrument calibrations.
Alternative calibration techniques to the defaults given here are equally acceptable, depending on
the capabilities of the instrumentation and provided those alternatives have clear traceability paths.
Example techniques include those based on an independent realization of the meter using a natural
emission wavelength, the value for which has been established with a known uncertainty.
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SIST EN ISO 25178-700:2023
INTERNATIONAL STANDARD ISO 25178-700:2022(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 700:
Calibration, adjustment and verification of areal
topography measuring instruments
1 Scope
This document specifies generic procedures for the calibration, adjustment and verification of
metrological characteristics that areal topography measuring instruments have in common, as stated
in ISO 25178-600.
Because surface profiles can be extracted from surface topography images, most of the methods
described in this document can be adapted to profiling instruments.
Instrument-specific issues are not covered by this document. For example, for instruments based on
mechanical probing where the probe follows an additional arcuate motion, additional measures are
specified in ISO 25178-701.
This document does not include procedures for area-integrating methods, although those are also
stated in ISO 25178-6. For example, light scattering belongs to a class of techniques known as area-
integrating methods for measuring surface topography.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 25178-600:2019, Geometrical product specifications (GPS) — Surface texture: Areal — Part 600:
Metrological characteristics for areal topography measuring methods
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminology databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
3.1
non-measured points
surface locations for which no valid measured values exist
Note 1 to entry: The handling of non-measured points is specified in 6.3.
Note 2 to entry: Non-measured points may be caused by a feature of the measuring instrument or by a defect on
the surface of the measurement standard which is outside the range of the instrument.
1
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SIST EN ISO 25178-700:2023
ISO 25178-700:2022(E)
3.2
spurious data
data that have been qualified as measurable by the measurement principle but deviate significantly
from a reasonable value range, based on a priori knowledge
Note 1 to entry: Spurious data may relate to single points or a small group of points that have been classified as
measurable by the measurement instrument. They are identified as spurious data by determining their values
to be unlikely based on a priori knowledge about both the expected surface and the instrument, or simply by
defects and contamination on the surface. Spurious data may appear as outliers or spikes.
Note 2 to entry: Spurious data can be caused by environmental conditions, such as vibration or external light
sources, by interaction between the surface and instrument, or simply by defects and contamination on the
surface. Spurious data may appear as outliers or spikes.
Note 3 to entry: The handling of spurious data is specified in 6.4.
3.3
measurement noise
N
M
noise added to the output signal occurring during the normal use of the instrument
[SOURCE: ISO 25178-600:2019, 3.1.15, modified — Notes to entry removed.]
3.4
instrument noise
N
I
internal noise added to the output signal caused by the instrument if ideally placed in a noise-free
environment
[SOURCE: ISO 25178-600:2019, 3.1.14, modified — Notes to entry removed.]
3.5
z-linearity deviation
l
z
maximum local linearity difference between the line from which the amplification coefficient is derived
and the response function
[SOURCE: ISO 25178-600:2019, 3.1.11, modified — Term revised and note to entry removed.]
3.6
instrument transfer function curve
f
ITF
curve describing an instrument’s height response as a function of the spatial frequency of the surface
topography
[SOURCE: ISO 25178-600:2019, 3.1.19, modified — Term revised and notes to entry removed.]
3.7
topography fidelity
T
FI
closeness of agreement between a measured surface profile or measured topography and one whose
uncertainties are insignificant by comparison
[SOURCE: ISO 25178-600:2019, 3.1.26, modified — Note to entry removed.]
4 Sym
...
SLOVENSKI STANDARD
oSIST prEN ISO 25178-700:2021
01-januar-2021
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna -
700. del: Umerjanje, nastavitev in preverjanje merilnih instrumentov za površinsko
topografijo (ISO/DIS 25178-700:2020)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration,
adjustment and verification of areal topography measuring instruments (ISO/DIS 25178-
700:2020)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit - Teil 700:
Kalibrierung, Justierung und Verifizierung von flächenhaften Topographiemessgeräten
(ISO/DIS 25178-700:2020)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 700:
Étalonnage, ajustage et vérification d'instruments de mesure de la topographie des
surfaces (ISO/DIS 25178-700:2020)
Ta slovenski standard je istoveten z: prEN ISO 25178-700
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
oSIST prEN ISO 25178-700:2021 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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oSIST prEN ISO 25178-700:2021
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oSIST prEN ISO 25178-700:2021
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-700
ISO/TC 213 Secretariat: BSI
Voting begins on: Voting terminates on:
2020-10-26 2021-01-18
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 700:
Calibration, adjustment and verification of areal
topography measuring instruments
Spécification géométrique des produits (GPS) — État de surface: Surfacique —
Partie 700: Étalonnage, réglage et vérification d'instruments de mesure de topographie de surface
ICS: 17.040.40; 17.040.20
THIS DOCUMENT IS A DRAFT CIRCULATED
This document is circulated as received from the committee secretariat.
FOR COMMENT AND APPROVAL. IT IS
THEREFORE SUBJECT TO CHANGE AND MAY
NOT BE REFERRED TO AS AN INTERNATIONAL
STANDARD UNTIL PUBLISHED AS SUCH.
IN ADDITION TO THEIR EVALUATION AS
ISO/CEN PARALLEL PROCESSING
BEING ACCEPTABLE FOR INDUSTRIAL,
TECHNOLOGICAL, COMMERCIAL AND
USER PURPOSES, DRAFT INTERNATIONAL
STANDARDS MAY ON OCCASION HAVE TO
BE CONSIDERED IN THE LIGHT OF THEIR
POTENTIAL TO BECOME STANDARDS TO
WHICH REFERENCE MAY BE MADE IN
Reference number
NATIONAL REGULATIONS.
ISO/DIS 25178-700:2020(E)
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oSIST prEN ISO 25178-700:2021
ISO/DIS 25178-700:2020(E)
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oSIST prEN ISO 25178-700:2021
ISO/DIS 25178-700:2020(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 2
3.1 General metrological definitions . 3
3.2 Measurement related terms and definitions . 4
4 Symbols and abbreviated terms . 4
5 Calibration, adjustment and verification of an instrument . 4
5.1 General . 4
5.2 Use of the methods for calibration, adjustment and verification . 5
5.3 Instrument calibration procedure . 6
5.3.1 Calibration by measurement standards . 6
5.3.2 Measurement procedures for calibration with measurement standards . 6
5.3.3 Calibration by other methods . 6
5.4 Calibration conditions . 6
5.5 Adjustment and Verification. 7
5.5.1 General. 7
5.5.2 Adjustment of systematic deviations . 7
5.5.3 Verification (Calibration after adjustment) . 7
5.5.4 Validation . 7
6 Determination of the metrological characteristics of an instrument .7
6.1 General . 7
6.2 Reporting of the measurement conditions . 8
6.3 Handling of non-measured points . . 8
6.4 Handling of spurious points and outliers . 8
6.5 Metrological characteristics . 8
6.5.1 Measurement noise and instrument noise . 8
6.5.2 Flatness deviation .12
6.5.3 Amplification coefficient (α ) of the z-axis .14
z
6.5.4 Determination of z-linearity deviation l .
z 19
6.5.5 Determination of the amplification coefficient α and α in x- and y-
x y
direction and mapping deviation Δ (x,y) and Δ (x,y) .21
x y
6.5.6 Perpendicularity of the instrument z-axis with respect to the x-y areal
reference .25
6.6 Topography induced influences on measurement uncertainty .25
6.6.1 Topographic spatial resolution .25
6.6.2 Topography fidelity.26
6.6.3 Instrument transfer function (ITF) curve f .
ITF 27
6.7 Slope-dependent effects .27
Annex A (informative) Relation to the GPS matrix model .28
Bibliography .29
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oSIST prEN ISO 25178-700:2021
ISO/DIS 25178-700:2020(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/
iso/ foreword .html.
ISO 25178-700 was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification.
A list of all parts in the ISO 25178 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
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oSIST prEN ISO 25178-700:2021
ISO/DIS 25178-700:2020(E)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general
GPS standard (see ISO 14638). It influences the chain link F of the chains of standards on areal surface
texture and profile surface texture.
The ISO/GPS matrix model given in ISO 14638 gives an overview of the ISO/GPS system of which this
document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex A.
In the GPS concept the design values of geometric parameters on workpieces and their tolerances are
compared with the measurement of those parameters on the corresponding manufactured workpieces
and their associated measurement uncertainties. For a reliable result it is therefore necessary to
calibrate the measurement instrument involved in this process. Calibration realizes an unbroken
traceability chain of the concerned values to worldwide accepted common reference unit values. In this
standard calibration strictly means the determination of the measurement deviation from the reference
value. In common language calibration is often used for the combination of the operations "calibration"
and "adjustment".
This standard describes the calibration, see ISO/IEC Guide 99:2007, 2.39, adjustment, see
ISO/IEC Guide 99:2007, 3.11 and verification, see ISO/IEC Guide 99:2007, 2.44, in general for topography
measuring instruments.
Metrological characteristics defined in ISO 25178-600 are connected with results of measurement
executed with topography measuring instruments. So, it is necessary to have the instrument in a
calibrated state, which guarantees the traceability of the measurement results. The calibration is the
basis for possible correction by adjustment of the instrument and the verification after the adjustment.
The residual deviation after verification can be used as a contribution to the measurement uncertainty,
which enables one to quantify the characteristics in a traceable way.
The metrological characteristics capture all of the factors that can influence a measurement result
(influence quantities) and can be propagated appropriately through a specific measurement model to
estimate measurement uncertainty. Also, in ISO 25178 parts 60X, influence quantities are defined for
each instrument type. These influence quantities are given to show how they affect the metrological
characteristics and are not needed for uncertainty estimation if the metrological characteristics are
properly used in the measurement model.
This document describes default procedures for instrument calibration, adjustment, and verification
when using material measures traceable to the meter through a national metrology institute or
qualified laboratory, see ISO/IEC Guide 99:2007, 2.41. Default methods are recommended when no
other calibration procedures have been clearly defined.
Alternative calibration techniques with clear traceability path are equally acceptable, depending on the
capabilities of the instrumentation, see 5.1 and 5.3.3. Example techniques include those based on an
independent realization of the meter using a natural emission wavelength, the value for which has been
established with a known uncertainty.
Specific influences caused for example by environmental conditions are not considered. However, these
must be considered by the user working under such environmental conditions.
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oSIST prEN ISO 25178-700:2021
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oSIST prEN ISO 25178-700:2021
DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-700:2020(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 700:
Calibration, adjustment and verification of areal
topography measuring instruments
1 Scope
This part of ISO 25178 specifies generic procedures for the calibration, adjustment and verification
of areal topography measuring instruments defined in ISO 25178-6, and for the determination of
their metrological characteristics. This part of ISO 25178 considers metrological characteristics that
topography measuring instruments have in common, notably those described in ISO 25178, Parts 601
to 607. Collectively, those standards encompass both microscope based instruments and point sensing
instruments with lateral scanning devices.
This document presents a method to estimate uncertainty for a large range of surfaces, but not all. The
range of surfaces will be dependent on the instrument used, see Clause 6.6.2 describing the topography
fidelity.
For instrument specific principles, other parts may be developed in the 700 series of ISO 25178.
For example, this document covers only instruments without additional arcuate motion, which may be
described in a future revision of the ISO 25178-701.
This document does not include procedures for area-integrating methods, although those are also
defined in ISO 25178-6. For example, light scattering belongs to a class of techniques known as area-
integrating methods for measuring surface topography.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 230-10, Test code for machine tools — Part 10: Determination of the measuring performance of probing
systems of numerically controlled machine tools
ISO 3274:1996, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal
characteristics of contact (stylus) instruments
ISO 4287:1997, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms,
definitions and surface texture parameters
ISO 5436-1, Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement
standards — Part 1: Material measures
ISO 5436-2, Geometrical product specifications (GPS) — Surface texture: Profile method; Measurement
standards — Part 2: Software measurement standards
ISO 8015, Geometrical product specifications (GPS) — Fundamentals — Concepts, principles and rules
ISO 10360-7, Geometrical product specifications (GPS) — Acceptance and reverification tests for coordinate
measuring machines (CMM) — Part 7: CMMs equipped with imaging probing systems
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ISO 10360-8, Geometrical product specifications (GPS) — Acceptance and reverification tests for coordinate
measuring systems (CMS) — Part 8: CMMs with optical distance sensors
ISO 11952, Surface chemical analysis — Scanning-probe microscopy — Determination of geometric
quantities using SPM: Calibration of measuring systems
ISO 14253-1, Geometrical product specifications (GPS) — Inspection by measurement of workpieces and
measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
ISO 14253-5, Geometrical product specifications (GPS) — Inspection by measurement of workpieces and
measuring equipment — Part 5: Uncertainty in verification testing of indicating measuring instruments
ISO 14406:2010, Geometrical product specifications (GPS) — Extraction
ISO 14638, Geometrical product specifications (GPS) — Matrix model
ISO 14978:2006, Geometrical product specifications (GPS) — General concepts and requirements for GPS
measuring equipment
ISO 17025, General requirements for the competence of testing and calibration laboratories
ISO 17450-1:2011, Geometrical product specifications (GPS) — General concepts — Part 1: Model for
geometrical specification and verification
ISO 25178-2:2012, Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms,
definitions and surface texture parameters
ISO 25178-3:2012, Geometrical product specifications (GPS) — Surface texture: Areal — Part 3:
Specification operators
ISO 25178-6:2010, Geometrical product specifications (GPS) — Surface texture: Areal — Part 6:
Classification of methods for measuring surface texture
ISO 25178-70:2013, Geometrical product specification (GPS) -- Surface texture: Areal -- Material measures
ISO 25178-71, Geometrical product specifications (GPS) — Surface texture: Areal — Part 71: Software
measurement standards
ISO 25178-72, Geometrical product specifications (GPS) — Surface texture: Areal — Part 72: XML file
format x3p
ISO 25178-73:2020, Geometrical product specifications (GPS) — Surface texture: Areal — Part 73: Terms
and definitions for surface defects on material measures
ISO 25178-600:2020, Geometrical product specifications (GPS) — Surface texture: Areal — Part 600:
Metrological characteristics for areal topography measuring methods
ISO 25178-601:2010, Geometrical product specifications (GPS) — Surface texture: Areal — Part 601:
Nominal characteristics of contact (stylus) instruments
ISO 25178-603, Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal
characteristics of non-contact (phase-shifting interferometric microscopy) instruments
ISO 25178-604:2013, Geometrical product specifications (GPS) — Surface texture: Areal — Part 604:
Nominal characteristics of non-contact (coherence scanning interferometry) instruments
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 3274, ISO 4287, ISO 5436-2,
ISO 10360-1, ISO 14406, ISO 14638, ISO 14978, ISO 17450-1, ISO 25178-2, ISO 25178-6, ISO 25178-70,
ISO 25178-71, ISO 25178-72, ISO 25178-73 and ISO 25178-600, ISO 25178-601, ISO 25178-603,
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oSIST prEN ISO 25178-700:2021
ISO/DIS 25178-700:2020(E)
ISO 25178-604 and the following terms and definitions related to the calibration, verification and
uncertainty calculation of all areal surface topography measurement principles apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at http:// www .electropedia .org
3.1 General metrological definitions
3.1.1
calibration
operation that, under specified conditions, in a first step, establishes a relation between the quantity
values with measurement uncertainties provided by measurement standards and corresponding
indications with associated measurement uncertainties and, in a second step, uses this information to
establish a relation for obtaining a measurement result from an indication
Note 1 to entry: A calibration may be expressed by a statement, calibration function, calibration diagram,
calibration curve, or calibration table. In some cases, it may consist of an additive or multiplicative correction of
the indication with associated measurement uncertainty.
Note 2 to entry: Calibration is not to be confused with adjustment of a measuring system, often mistakenly called
“self-calibration”, nor with verification of calibration.
Note 3 to entry: For the overall calibration of a topography measuring instrument, individual evaluations of the
individual metrological characteristics, each with a result and an assigned uncertainty, are needed.
Note 4 to entry: Calibration is performed to establish traceability of a measurement.
3.1.2
adjustment
set of operations carried out on a measuring system so that it provides prescribed indications
corresponding to given values of a quantity to be measured
Note 1 to entry: Adjustment of a measuring system is not to be confused with calibration, which is a prerequisite
for adjustment.
Note 2 to entry: Adjustment is principle specific and typically performed by the instrument manufacturers and
therefore no binding rules are given in ISO 25178-700.
Note 3 to entry: After an adjustment of a measuring system, the measuring system is usually recalibrated.
3.1.3
verification
provision of objective evidence that a metrological characteristic
fulfils stated specifications
Note 1 to entry: Verification procedures are used to demonstrate the validity of the calibration after adjustment.
Note 2 to entry: However, in ISO 17450 (GPS-General Concepts) verification is associated with the measurement
results of a manufactured part in relation to its requirement.
3.1.4
performance specification
explicit set of requirements to be satisfied by a topography
measuring instruments
Note 1 to entry: The emphasis here is on a set of characteristics that describe the requested, agreed or claimed
behaviour of a topography measuring instrument. Each characteristic is associated with a measurand.
Note 2 to entry: However, in other GPS-documents (e.g. ISO 17450-1, ISO 14638) specifications are associated
with requirements on manufactured work-pieces.
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3.1.5
validation
provision of objective evidence that instruments with specified
requirements are adequate for an intended use
EXAMPLE 1 Validation may refer to a modified measurement process to demonstrate that one type of
instrument can be used in place of another type of instrument for a particular type of topography measurement.
EXAMPLE 2 Repeatability and reproducibility tests are often used as elements of a validation test.
Note 1 to entry: See also ISO/IEC Guide 99:2007, International vocabulary of metrology — Basic and general
[1]
concepts and associated terms (VIM), 2.45 .
3.2 Measurement related terms and definitions
3.2.1
correction factor
factor used to correct the scaling of a measurement axis
Note 1 to entry: The correction factor is the inverse of the amplification coefficient (see ISO 25178-600, 2020) .
3.2.2
non-measured points
data for which no measured values exist
3.2.3
spurious data
points that have been qualified as measurable by the measurement principle, but deviate significantly
from the value, which is the most likely value based on a priori knowledge. Spurious data maybe
single points or a small group of points that have been classified as measurable by the measurement
instrument. They are identified as spurious data by a priori knowledge about the expected surface with
their difference between the expected surface and the measured surface
Note 1 to entry: For example, spurious data can be outliers or spikes.
Note 2 to entry: Spurious data can be caused by environmental conditions, for example by vibration, sun light, or
by interaction of surface and instrument.
4 Symbols and abbreviated terms
The metrological characteristics are defined in ISO 25178-600. The metrological characteristics may
show interdependencies.
5 Calibration, adjustment and verification of an instrument
5.1 General
In practice calibration of the instrument refers to a series of operations required to establish the
contribution of the metrological characteristics to the measurement uncertainty associated with the
instrument measurements. Table 1 contains the full list of metrological characteristics.
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Table 1 — List of metrological characteristics for surface topography measurement principles
Main potential
a
Metrological characteristic Symbol Reference in ISO 25178-600:2018
error along
Amplification coefficient α , α , α 3.1.10 (see Figure 2) x, y, z
x y z
Linearity deviation l , l , l 3.1.11 (see Figure 2) x, y, z
x y z
Flatness deviation z 3.1.12 z
FLT
Measurement noise N 3.1.15 z
M
Topographic spatial resolution W 3.1.20 z
R
a
x-y mapping deviations Δ (x,y), Δ (x,y) 3.1.13 x, y
x y
Topography fidelity T 3.1.26 x, y, z
Fi
NOTE The maximum measurable slope is an important limitation to be specified for a topography measuring
instruments. However, a user does not need to measure this parameter unless it is part of a measurement model according
ISO/IEC Gui
...
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