Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019, Corrected version 2020-06)

This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational. The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements. This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices.

Reinräume und zugehörige Reinraumbereiche - Teil 3: Prüfverfahren (ISO 14644-3:2019, korrigierte Fassung 2020-06)

Dieses Dokument umfasst Prüfverfahren zur Unterstützung des Betriebs für Reinräume und reine Bereiche, im Hinblick auf die Erfüllung von Luftreinheitsklassifizierungen, weiteren Reinheitsattributen und zugehörigen geregelten Bedingungen.
Es werden Leistungsprüfungen für zwei Arten von Reinräumen und reinen Bereichen festgelegt, solche mit turbulenzarmer Verdrängungsströmung und solche mit turbulenter Mischströmung. Es werden drei Betriebszustände betrachtet: Bereitstellung, Leerlauf, Fertigung.
Die Prüfverfahren, empfohlene Prüfgeräte und Prüfverfahren zur Bestimmung von Kenngrößen für die Leistung werden angegeben. An Stellen, an denen das Prüfverfahren durch die Art des Reinraums oder reinen Bereichs beeinflusst wird, werden alternative Verfahren vorgeschlagen.
Für einige Prüfungen werden mehrere unterschiedliche Verfahren und Geräte empfohlen, so dass verschiedenen Nutzungsarten Rechnung getragen werden kann. Soweit zwischen Kunden und Lieferanten vereinbart, können alternative, nicht in diesem Dokument beschriebene Verfahren angewendet werden. Solche Verfahren liefern nicht zwingend gleichwertige Messungen.
Dieses Dokument ist nicht auf die Messung von Produkten oder Prozessen in Reinräumen, reinen Bereichen oder SD-Modulen anwendbar.
ANMERKUNG Dieses Dokument nimmt nicht in Anspruch, mit seiner Anwendung verbundene Sicherheitsaspekte zu behandeln (z. B. beim Einsatz gefährlicher Stoffe, Arbeitsgänge und Geräte). Es liegt in der Verantwortlichkeit des Anwenders dieses Dokuments, geeignete Verhaltensregeln für den Arbeits- und Gesundheitsschutz festzulegen und vor der Anwendung zu klären, ob einschränkende Vorschriften zu berücksichtigen sind.

Salles propres et environnements maîtrisés apparentés - Partie 3: Méthodes d'essai (ISO 14644-3:2019, Version corrigée 2020-06)

Le présent document fournit des méthodes d'essai relatives au fonctionnement des salles propres et zones propres dans le but de satisfaire à la classification de propreté de l'air, aux autres attributs de propreté et aux conditions maîtrisées associées.
Des essais de performance sont spécifiés pour deux types de salles propres et de zones propres: des essais mettant en œuvre un flux d'air soit unidirectionnel, soit non unidirectionnel et dans trois états possibles d'occupation: après construction, au repos et en activité.
Les méthodes d'essai, l'appareillage d'essai recommandé ainsi que les modes opératoires d'essai permettant de déterminer les paramètres de performance sont indiqués. Quand la méthode d'essai est susceptible de modification en fonction du type de salle propre ou de zone propre dont il est question, des modes opératoires alternatifs sont proposés.
Pour certains essais, plusieurs méthodes et appareils sont recommandés afin de tenir compte des considérations spécifiques de plusieurs applications. Des méthodes alternatives ne figurant pas dans le présent document peuvent être utilisées sous réserve d'un accord entre le client et le fournisseur. Des méthodes alternatives ne fournissent pas nécessairement des mesurages équivalents.
Le présent document ne s'applique pas au mesurage effectué sur des produits ou des procédés situés dans les salles propres, les zones propres ou les dispositifs séparatifs.
NOTE Le présent document ne prétend pas traiter les aspects de sécurité associés à son utilisation (par exemple, lors de la mise en œuvre de matériaux, d'opérations et d'équipements dangereux). Il relève de la responsabilité de l'utilisateur du présent document d'établir des pratiques appropriées en matière d'hygiène et de sécurité et de déterminer l'applicabilité des limitations réglementaires avant son utilisation.

Čiste sobe in podobna nadzorovana okolja - 3. del: Preskusne metode (ISO 14644-3:2019, popravljena verzija 2020-06)

Ta dokument določa preskusne metode v podporo postopkom v čistih sobah in čistih območjih za izpolnjevanje klasifikacije čistosti zraka, drugih atributov čistosti in povezanih nadzorovanih pogojev. Preskusi učinkovitosti so določeni za dve vrsti čistih sob in čistih območij: z enosmernim pretokom zraka in z večsmernim pretokom zraka ter v treh različnih stanjih: kot pri izvajanju, pri počitku in delovanju. Podane so preskusne metode, priporočene preskusne naprave in preskusni postopki za določanje parametrov učinkovitosti. Kadar na preskusno metodo vpliva vrsta čiste sobe ali čistega območja, so predlagani nadomestni postopki. Pri nekaterih preskusih je predlaganih več različnih metod in naprav za različne končne primere. Naročnik in dobavitelj se lahko dogovorita o uporabi nadomestnih metod, ki niso vključene v ta dokument. Ni nujno, da nadomestne metode zagotovijo enakovredne meritve. Ta dokument se ne uporablja za meritve izdelkov ali postopkov v čistih sobah, čistih območjih ali naprave za ločevanje.

General Information

Status
Published
Public Enquiry End Date
31-Dec-2016
Publication Date
05-Nov-2019
Technical Committee
Current Stage
6060 - National Implementation/Publication (Adopted Project)
Start Date
24-Oct-2019
Due Date
29-Dec-2019
Completion Date
06-Nov-2019

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Standards Content (sample)

SLOVENSKI STANDARD
SIST EN ISO 14644-3:2020
01-januar-2020
Nadomešča:
SIST EN ISO 14644-3:2006
Čiste sobe in podobna nadzorovana okolja - 3. del: Preskusne metode (ISO 14644-
3:2019, popravljena verzija 2020-06)

Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-

3:2019, Corrected version 2020-06)
Reinräume und zugehörige Reinraumbereiche - Teil 3: Prüfverfahren (ISO 14644-
3:2019, korrigierte Fassung 2020-06)

Salles propres et environnements maîtrisés apparentés - Partie 3: Méthodes d'essai

(ISO 14644-3:2019, Version corrigée 2020-06)
Ta slovenski standard je istoveten z: EN ISO 14644-3:2019
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
SIST EN ISO 14644-3:2020 en,fr,de

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 14644-3:2020
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SIST EN ISO 14644-3:2020
EN ISO 14644-3
EUROPEAN STANDARD
NORME EUROPÉENNE
October 2019
EUROPÄISCHE NORM
ICS 13.040.35 Supersedes EN ISO 14644-3:2005
English Version
Cleanrooms and associated controlled environments - Part
3: Test methods (ISO 14644-3:2019, Corrected version
2020-06)

Salles propres et environnements maîtrisés apparentés Reinräume und zugehörige Reinraumbereiche - Teil 3:

- Partie 3: Méthodes d'essai (ISO 14644-3:2019, Prüfverfahren (ISO 14644-3:2019, korrigierte Fassung

Version corrigée 2020-06) 2020-06)
This European Standard was approved by CEN on 24 July 2019.

This European Standard was corrected and reissued by the CEN-CENELEC Management Centre on 17 June 2020.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this

European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references

concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN

member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by

translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management

Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,

Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,

Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and

United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATIO N
EUROPÄISCHES KOMITEE FÜR NORMUN G
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels

© 2019 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-3:2019 E

worldwide for CEN national Members.
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SIST EN ISO 14644-3:2020
EN ISO 14644-3:2019 (E)
Contents Page

European foreword ....................................................................................................................................................... 3

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SIST EN ISO 14644-3:2020
EN ISO 14644-3:2019 (E)
European foreword

This document (EN ISO 14644-3:2019) has been prepared by Technical Committee ISO/TC 209

"Cleanrooms and associated controlled environments" in collaboration with Technical Committee

CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI.

This European Standard shall be given the status of a national standard, either by publication of an

identical text or by endorsement, at the latest by April 2020, and conflicting national standards shall be

withdrawn at the latest by April 2020.

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. CEN shall not be held responsible for identifying any or all such patent rights.

This document supersedes EN ISO 14644-3:2005.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the

following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,

Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,

Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of

North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the

United Kingdom.
Endorsement notice

The text of ISO 14644-3:2019, Corrected version 2020-06 has been approved by CEN as EN ISO 14644-

3:2019 without any modification.
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SIST EN ISO 14644-3:2020
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SIST EN ISO 14644-3:2020
INTERNATIONAL ISO
STANDARD 14644-3
Second edition
2019-08
Corrected version
2020-06
Cleanrooms and associated controlled
environments —
Part 3:
Test methods
Salles propres et environnements maîtrisés apparentés —
Partie 3: Méthodes d'essai
Reference number
ISO 14644-3:2019(E)
ISO 2019
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2019

All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may

be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting

on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address

below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2019 – All rights reserved
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

Introduction ..................................................................................................................................................................................................................................v

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ...................................................................................................................................................................................... 1

3 Terms and definitions ..................................................................................................................................................................................... 1

3.1 General terms ........................................................................................................................................................................................... 1

3.2 Terms related to airborne particles ...................................................................................................................................... 3

3.3 Terms related to air filters and systems ............................................................................................................................ 3

3.4 Terms related to airflow and other physical states ................................................................................................. 4

3.5 Terms related to electrostatic measurement ................................................................................................................ 5

3.6 Terms related to measuring apparatus and measuring conditions .......................................................... 5

3.7 Terms related to occupancy states ......................................................................................................................................... 6

4 Test procedures ..................................................................................................................................................................................................... 6

4.1 Cleanroom tests ...................................................................................................................................................................................... 6

4.1.1 General...................................................................................................................................................................................... 6

4.1.2 Supporting tests ............................................................................................................................................................... 7

4.2 Principle ........................................................................................................................................................................................................ 7

4.2.1 Air pressure difference test .................................................................................................................................... 7

4.2.2 Airflow test ........................................................................................................................................................................... 7

4.2.3 Airflow direction test and visualization ...................................................................................................... 8

4.2.4 Recovery test ....................................................................................................................................................................... 8

4.2.5 Temperature test ............................................................................................................................................................. 8

4.2.6 Humidity test ...................................................................................................................................................................... 8

4.2.7 Installed filter system leakage tests ................................................................................................................ 8

4.2.8 Containment leak test ........................................................................................................................................... ....... 8

4.2.9 Electrostatic and ion generator tests ............................................................................................................. 8

4.2.10 Particle deposition test ........................................................................................................................................... .... 8

4.2.11 Segregation test ................................................................................................................................................................ 9

5 Test reports ................................................................................................................................................................................................................ 9

Annex A (informative) Choice of supporting tests and checklist .........................................................................................10

Annex B (informative) Supporting test methods ..................................................................................................................................14

Annex C (informative) Test apparatus .............................................................................................................................................................43

Bibliography .............................................................................................................................................................................................................................51

© ISO 2019 – All rights reserved iii
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www .iso .org/ patents).

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and

expressions related to conformity assessment, as well as information about ISO's adherence to the

World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see www .iso .org/

iso/ foreword .html.

This document was prepared by ISO/TC 209, Cleanrooms and associated controlled environments.

Any feedback or questions on this document should be directed to the user’s national standards body. A

complete listing of these bodies can be found at www .iso .org/ members .html.

This second edition of ISO 14644-3 cancels and replaces the first edition (ISO 14644-3:2005), which has

been technically revised. The main changes compared to the previous edition are as follows:

— Clause B.7 has been simplified and corrected to address concerns over its complexity and noted errors;

— guidance concerning classification of air cleanliness by airborne particle concentration has been

[1]
moved to 14644-1

— the text of the whole document has been revised or clarified to aid in application.

A list of all parts in the ISO 14644 series can be found on the ISO website.

This corrected version of ISO 14644-3:2019 incorporates the following corrections:

— cross-references have been corrected in Table A.1, B.4.4, C.1, C.4.2 and C.4.3;

— the wording has been changed in B.2.1 a), Table B.2;
— old Figure B.2 has been removed.
iv © ISO 2019 – All rights reserved
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
Introduction

Cleanrooms and associated controlled environments provide control of contamination to levels

appropriate for accomplishing contamination-sensitive activities. Products and processes that

benefit from the control of airborne contamination include those in such industries as aerospace,

microelectronics, pharmaceuticals, medical devices, healthcare and food.

This document sets out appropriate test methods for measuring the performance of a cleanroom, a

clean zone or an associated controlled environment, including separative devices and controlled zones,

together with all associated structures, air treatment systems, services and utilities.

NOTE Not all cleanroom parameter test procedures are shown in this document. The procedure and

apparatus for the test carried out for the air cleanliness classes by particle concentration and for macroparticles

[1]

are provided in ISO 14644-1, and specifications for monitoring air cleanliness by nanoscale particle

[8]

concentrations are provided in ISO 14644-12. The procedures and apparatus to characterize other parameters,

of concern in cleanrooms and clean zones used for specific products or processes, are discussed elsewhere

in other documents prepared by ISO/TC 209 [for example, procedures for control and measurement of viable

[3]

materials (ISO 14698 series), testing cleanroom functionality (ISO 14644-4 ), and testing of separative devices

[4]

(ISO 14644-7 )]. In addition, other standards can be considered to be applicable. Other cleanliness attribute

[5] [6]

levels can be determined using ISO 14644-8 (levels of air cleanliness by chemicals), ISO 14644-9 (levels

[7]

of surface cleanliness by particle concentration) and ISO 14644-10 (levels of surface cleanliness by chemical

concentration).
© ISO 2019 – All rights reserved v
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SIST EN ISO 14644-3:2020
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SIST EN ISO 14644-3:2020
INTERNATIONAL STANDARD ISO 14644-3:2019(E)
Cleanrooms and associated controlled environments —
Part 3:
Test methods
1 Scope

This document provides test methods in support of the operation for cleanrooms and clean zones to

meet air cleanliness classification, other cleanliness attributes and related controlled conditions.

Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional

airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest

and operational.

The test methods, recommended test apparatus and test procedures for determining performance

parameters are provided. Where the test method is affected by the type of cleanroom or clean zone,

alternative procedures are suggested.

For some of the tests, several different methods and apparatus are recommended to accommodate

different end-use considerations. Alternative methods not included in this document can be used by

agreement between customer and supplier. Alternative methods do not necessarily provide equivalent

measurements.

This document is not applicable to the measurement of products or of processes in cleanrooms, clean

zones or separative devices.

NOTE This document does not purport to address safety considerations associated with its use (for example,

when using hazardous materials, operations and equipment). It is the responsibility of the user of this document

to establish appropriate safety and health practices and to determine the applicability of regulatory limitations

prior to use.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.

ISO and IEC maintain terminological databases for use in standardization at the following addresses:

— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at http:// www .electropedia .org/
3.1 General terms
3.1.1
cleanroom

room within which the number concentration of airborne particles (3.2.1) is controlled and classified,

and which is designed, constructed and operated in a manner to control the introduction, generation

and retention of particles inside the room

Note 1 to entry: The class of airborne particle concentration (3.2.4) is specified.

© ISO 2019 – All rights reserved 1
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)

Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the

air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be

specified and controlled.

Note 3 to entry: Other relevant physical parameters might also be controlled as required, e.g. temperature,

humidity, pressure, vibration and electrostatic.
[SOURCE: ISO 14644-1:2015, 3.1.1]
3.1.2
clean zone

defined space within which the number concentration of airborne particles (3.2.1) is controlled and

classified, and which is constructed and operated in a manner to control the introduction, generation

and retention of contaminants inside the space

Note 1 to entry: The class of airborne particle concentration (3.2.4) is specified.

Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the

air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be

specified and controlled.

Note 3 to entry: A clean zone(s) can be a defined space within a cleanroom (3.1.1) or might be achieved by a

separative device. Such a device can be located inside or outside a cleanroom.

Note 4 to entry: Other relevant physical parameters might also be controlled as required, e.g. temperature,

humidity, pressure, vibration and electrostatic.
[SOURCE: ISO 14644-1:2015, 3.1.2]
3.1.3
installation

cleanroom (3.1.1) or one or more clean zones (3.1.2), together with all associated structures, air-

treatment systems, services and utilities
[SOURCE: ISO 14644-1:2015, 3.1.3]
3.1.4
separative device

equipment utilizing constructional and dynamic means to create assured levels of separation between

the inside and outside of a defined volume

Note 1 to entry: Some industry-specific examples of separative devices are clean air hoods, containment

enclosures, glove boxes, isolators and mini-environments.
[SOURCE: ISO 14644-7:2004, 3.17]
3.1.5
resolution

smallest change in a quantity being measured that causes a perceptible change in the corresponding

indication

Note 1 to entry: Resolution can depend on, for example, noise (internal or external) or friction. It may also depend

on the value of a quantity being measured.
[SOURCE: ISO 14644-1:2015, 3.4.1]
3.1.6
sensitivity

quotient of the change in an indication of a measuring system and the corresponding change in a value

of the quantity being measured
2 © ISO 2019 – All rights reserved
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
3.2 Terms related to airborne particles
3.2.1
airborne particle

solid or liquid object suspended in air, viable or non-viable, sized between 1 nm and 100 µm

Note 1 to entry: For classification purposes, refer to ISO 14644-1:2015, 3.2.1.
3.2.2
count median particle diameter
median particle diameter based on the number of particles

Note 1 to entry: For the count median, one half of the particle number is contributed by the particles with a size

smaller than the count median size, and one half by particles larger than the count median size.

3.2.3
mass median particle diameter
median particle diameter based on the particle mass

Note 1 to entry: For the mass median, one half of mass of all particles is contributed by particles with a size

smaller than the mass median size, and one half by particles larger than the mass median size.

3.2.4
particle concentration
number of individual particles per unit volume of air
[SOURCE: ISO 14644-1:2015, 3.2.3]
3.2.5
particle size

diameter of a sphere that produces a response, by a given particle-sizing instrument, that is equivalent

to the response produced by the particle being measured

Note 1 to entry: For light-scattering airborne-particle instruments, the equivalent optical diameter is used.

[SOURCE: ISO 14644-1:2015, 3.2.2]
3.2.6
particle size distribution

cumulative distribution of particle concentration (3.2.4) as a function of particle size (3.2.5)

[SOURCE: ISO 14644-1:2015, 3.2.4]
3.2.7
test aerosol

gaseous suspension of solid and/or liquid particles with known and controlled size distribution and

concentration
3.3 Terms related to air filters and systems
3.3.1
aerosol challenge

challenging of a filter or an installed filter system (3.3.6) by test aerosol (3.2.7)

3.3.2
designated leak

maximum allowable penetration, which is determined by agreement between customer and supplier,

through a leak (3.3.8), detectable during scanning (3.3.9) of a filter installation (3.1.3) with light-

scattering airborne-particle counters (LSAPC) or aerosol photometers (3.6.2)
© ISO 2019 – All rights reserved 3
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
3.3.3
dilution system

system wherein aerosol is mixed with particle-free dilution air in a known volumetric ratio to reduce

concentration
3.3.4
filter system
assembly composed of filter, frame and other support mechanism or other housing
3.3.5
final filter

filter in a final position before the air enters the cleanroom (3.1.1) or clean zone (3.1.2)

3.3.6
installed filter system
filter system (3.3.4) mounted in the ceiling, wall, apparatus or duct
3.3.7
installed filter system leakage test

test performed to confirm that the filters are properly installed by verifying that there is absence of

bypass leakage of the filter installation (3.1.3), and that the filters and the grid system are free of defects

and leaks (3.3.8)
3.3.8
leak

penetration of contaminants that exceed an expected value of downstream

concentration through lack of integrity or defects
3.3.9
scanning

method for disclosing leaks (3.3.8) in filters and parts of units, whereby the probe inlet of an aerosol

photometer (3.6.2) or a light-scattering airborne-particle counter is moved in overlapping strokes

across the defined test area
3.4 Terms related to airflow and other physical states
3.4.1
air change rate
air exchange rate

rate expressing number of air changes per unit of time and calculated by dividing the volume of air

delivered in the unit of time by the volume of the cleanroom (3.1.1) or clean zone (3.1.2)

3.4.2
measuring plane

cross-sectional area for testing or measuring a performance parameter such as the airflow velocity

3.4.3
non-unidirectional airflow

air distribution where the supply air entering the cleanroom (3.1.1) or clean zone (3.1.2) mixes with the

internal air by means of induction
[SOURCE: ISO 14644-1:2015, 3.2.8]
3.4.4
supply air volume flow rate

air volume per unit of time supplied into a cleanroom (3.1.1) or clean zone (3.1.2) from final filters (3.3.5)

or air ducts
4 © ISO 2019 – All rights reserved
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
3.4.5
total air volume flow rate

air volume per unit of time that passes through a section of a cleanroom (3.1.1) or clean zone (3.1.2)

3.4.6
unidirectional airflow

controlled airflow through the entire cross-section of a cleanroom (3.1.1) or a clean zone (3.1.2) with a

steady velocity and airstreams that are considered to be parallel
[SOURCE: ISO 14644-1:2015, 3.2.7]
3.4.7
uniformity of velocity

unidirectional airflow (3.4.6) pattern in which the point-to-point readings of velocity (speed and

direction of airflow) are within a defined percentage of the average airflow velocity

3.5 Terms related to electrostatic measurement
3.5.1
discharge time

time required to reduce the voltage to the level, positive or negative, to which an isolated conductive

monitoring plate was originally charged
3.5.2
offset voltage

voltage that accumulates on an initially uncharged isolated conductive plate when that plate is exposed

to an ionized air environment
3.5.3
static-dissipative property

capability for reducing electrostatic charge on work or product surface, as a result of conduction or

other mechanism to a specific value or nominal zero charge level
3.5.4
surface voltage level

positive or negative voltage level of electrostatic charging on work or product surface, as indicated by

use of suitable apparatus
3.6 Terms related to measuring apparatus and measuring conditions
3.6.1
aerosol generator

apparatus capable of generating particulate matter having appropriate size range (e.g. 0,05 µm to

2 µm) at a constant concentration, which can be produced by thermal, hydraulic, pneumatic, acoustic or

electrostatic means
3.6.2
aerosol photometer

light-scattering airborne particle (3.2.1) mass concentration measuring apparatus, which uses a

forward-scattered-light optical chamber to make measurements
3.6.3
airflow capture hood with measuring device

device with apparatus to completely cover the filter or air diffuser, and collect the air to directly

measure the air volume flow rate
© ISO 2019 – All rights reserved 5
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
3.6.4
LSAPC
light scattering airborne particle counter

apparatus capable of counting and sizing single airborne particles (3.2.1) and reporting size data in

terms of equivalent optical diameter

Note 1 to entry: The specifications for a particle counter are given in ISO 21501-4.

[SOURCE: ISO 14644-1:2015, 3.5.1, modified — The term "light scattering discrete airborne particle

counter" has been removed. Note 1 to entry has been reworded.]
3.6.5
witness plate
material of defined surface area used in lieu of direct eval
...

SLOVENSKI STANDARD
SIST EN ISO 14644-3:2020
01-januar-2020
Nadomešča:
SIST EN ISO 14644-3:2006
Čiste sobe in podobna nadzorovana okolja - 3. del: Preskusne metode (ISO 14644-
3:2019)

Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-

3:2019)
Reinräume und zugehörige Reinraumbereiche - Teil 3: Prüfverfahren (ISO 14644-
3:2019)

Salles propres et environnements maîtrisés apparentés - Partie 3: Méthodes d'essai

(ISO 14644-3:2019)
Ta slovenski standard je istoveten z: EN ISO 14644-3:2019
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
SIST EN ISO 14644-3:2020 en,fr,de

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 14644-3:2020
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SIST EN ISO 14644-3:2020
EN ISO 14644-3
EUROPEAN STANDARD
NORME EUROPÉENNE
October 2019
EUROPÄISCHE NORM
ICS 13.040.35 Supersedes EN ISO 14644-3:2005
English Version
Cleanrooms and associated controlled environments - Part
3: Test methods (ISO 14644-3:2019)

Salles propres et environnements maîtrisés apparentés Reinräume und zugehörige Reinraumbereiche - Teil 3:

- Partie 3: Méthodes d'essai (ISO 14644-3:2019) Prüfverfahren (ISO 14644-3:2019)
This European Standard was approved by CEN on 24 July 2019.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this

European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references

concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN

member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by

translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management

Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,

Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,

Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and

United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels

© 2019 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-3:2019 E

worldwide for CEN national Members.
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SIST EN ISO 14644-3:2020
EN ISO 14644-3:2019 (E)
Contents Page

European foreword ....................................................................................................................................................... 3

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SIST EN ISO 14644-3:2020
EN ISO 14644-3:2019 (E)
European foreword

This document (EN ISO 14644-3:2019) has been prepared by Technical Committee ISO/TC 209

"Cleanrooms and associated controlled environments" in collaboration with Technical Committee

CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI.

This European Standard shall be given the status of a national standard, either by publication of an

identical text or by endorsement, at the latest by April 2020, and conflicting national standards shall be

withdrawn at the latest by April 2020.

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. CEN shall not be held responsible for identifying any or all such patent rights.

This document supersedes EN ISO 14644-3:2005.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the

following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,

Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,

Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of

North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the

United Kingdom.
Endorsement notice

The text of ISO 14644-3:2019 has been approved by CEN as EN ISO 14644-3:2019 without any

modification.
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SIST EN ISO 14644-3:2020
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SIST EN ISO 14644-3:2020
INTERNATIONAL ISO
STANDARD 14644-3
Second edition
2019-08
Cleanrooms and associated controlled
environments —
Part 3:
Test methods
Salles propres et environnements maîtrisés apparentés —
Partie 3: Méthodes d'essai
Reference number
ISO 14644-3:2019(E)
ISO 2019
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2019

All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may

be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting

on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address

below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2019 – All rights reserved
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

Introduction ..................................................................................................................................................................................................................................v

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ...................................................................................................................................................................................... 1

3 Terms and definitions ..................................................................................................................................................................................... 1

3.1 General terms ........................................................................................................................................................................................... 1

3.2 Terms related to airborne particles ...................................................................................................................................... 3

3.3 Terms related to air filters and systems ............................................................................................................................ 3

3.4 Terms related to airflow and other physical states ................................................................................................. 4

3.5 Terms related to electrostatic measurement ................................................................................................................ 5

3.6 Terms related to measuring apparatus and measuring conditions .......................................................... 5

3.7 Terms related to occupancy states ......................................................................................................................................... 6

4 Test procedures ..................................................................................................................................................................................................... 6

4.1 Cleanroom tests ...................................................................................................................................................................................... 6

4.1.1 General...................................................................................................................................................................................... 6

4.1.2 Supporting tests ............................................................................................................................................................... 7

4.2 Principle ........................................................................................................................................................................................................ 7

4.2.1 Air pressure difference test .................................................................................................................................... 7

4.2.2 Airflow test ........................................................................................................................................................................... 7

4.2.3 Airflow direction test and visualization ...................................................................................................... 8

4.2.4 Recovery test ....................................................................................................................................................................... 8

4.2.5 Temperature test ............................................................................................................................................................. 8

4.2.6 Humidity test ...................................................................................................................................................................... 8

4.2.7 Installed filter system leakage tests ................................................................................................................ 8

4.2.8 Containment leak test ........................................................................................................................................... ....... 8

4.2.9 Electrostatic and ion generator tests ............................................................................................................. 8

4.2.10 Particle deposition test ........................................................................................................................................... .... 8

4.2.11 Segregation test ................................................................................................................................................................ 9

5 Test reports ................................................................................................................................................................................................................ 9

Annex A (informative) Choice of supporting tests and checklist .........................................................................................10

Annex B (informative) Supporting test methods ..................................................................................................................................14

Annex C (informative) Test apparatus .............................................................................................................................................................44

Bibliography .............................................................................................................................................................................................................................52

© ISO 2019 – All rights reserved iii
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/directives).

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www .iso .org/patents).

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and

expressions related to conformity assessment, as well as information about ISO's adherence to the

World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see www .iso

.org/iso/foreword .html.

This document was prepared by ISO/TC 209, Cleanrooms and associated controlled environments.

Any feedback or questions on this document should be directed to the user’s national standards body. A

complete listing of these bodies can be found at www .iso .org/members .html.

This second edition of ISO 14644-3 cancels and replaces the first edition (ISO 14644-3:2005), which has

been technically revised. The main changes compared to the previous edition are as follows:

— Clause B.7 has been simplified and corrected to address concerns over its complexity and noted errors;

— guidance concerning classification of air cleanliness by airborne particle concentration has been

[1]
moved to 14644-1

— the text of the whole document has been revised or clarified to aid in application.

A list of all parts in the ISO 14644 series can be found on the ISO website.
iv © ISO 2019 – All rights reserved
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
Introduction

Cleanrooms and associated controlled environments provide control of contamination to levels

appropriate for accomplishing contamination-sensitive activities. Products and processes that

benefit from the control of airborne contamination include those in such industries as aerospace,

microelectronics, pharmaceuticals, medical devices, healthcare and food.

This document sets out appropriate test methods for measuring the performance of a cleanroom, a

clean zone or an associated controlled environment, including separative devices and controlled zones,

together with all associated structures, air treatment systems, services and utilities.

NOTE Not all cleanroom parameter test procedures are shown in this document. The procedure and

apparatus for the test carried out for the air cleanliness classes by particle concentration and for macroparticles

[1]

are provided in ISO 14644-1, and specifications for monitoring air cleanliness by nanoscale particle

[8]

concentrations are provided in ISO 14644-12. The procedures and apparatus to characterize other parameters,

of concern in cleanrooms and clean zones used for specific products or processes, are discussed elsewhere

in other documents prepared by ISO/TC 209 [for example, procedures for control and measurement of viable

[3]

materials (ISO 14698 series), testing cleanroom functionality (ISO 14644-4 ), and testing of separative devices

[4]

(ISO 14644-7 )]. In addition, other standards can be considered to be applicable. Other cleanliness attribute

[5] [6]

levels can be determined using ISO 14644-8 (levels of air cleanliness by chemicals), ISO 14644-9 (levels

[7]

of surface cleanliness by particle concentration) and ISO 14644-10 (levels of surface cleanliness by chemical

concentration).
© ISO 2019 – All rights reserved v
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SIST EN ISO 14644-3:2020
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SIST EN ISO 14644-3:2020
INTERNATIONAL STANDARD ISO 14644-3:2019(E)
Cleanrooms and associated controlled environments —
Part 3:
Test methods
1 Scope

This document provides test methods in support of the operation for cleanrooms and clean zones to

meet air cleanliness classification, other cleanliness attributes and related controlled conditions.

Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional

airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest

and operational.

The test methods, recommended test apparatus and test procedures for determining performance

parameters are provided. Where the test method is affected by the type of cleanroom or clean zone,

alternative procedures are suggested.

For some of the tests, several different methods and apparatus are recommended to accommodate

different end-use considerations. Alternative methods not included in this document can be used by

agreement between customer and supplier. Alternative methods do not necessarily provide equivalent

measurements.

This document is not applicable to the measurement of products or of processes in cleanrooms, clean

zones or separative devices.

NOTE This document does not purport to address safety considerations associated with its use (for example,

when using hazardous materials, operations and equipment). It is the responsibility of the user of this document

to establish appropriate safety and health practices and to determine the applicability of regulatory limitations

prior to use.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.

ISO and IEC maintain terminological databases for use in standardization at the following addresses:

— ISO Online browsing platform: available at https: //www .iso .org/obp
— IEC Electropedia: available at http: //www .electropedia .org/
3.1 General terms
3.1.1
cleanroom

room within which the number concentration of airborne particles (3.2.1) is controlled and classified,

and which is designed, constructed and operated in a manner to control the introduction, generation

and retention of particles inside the room

Note 1 to entry: The class of airborne particle concentration (3.2.4) is specified.

© ISO 2019 – All rights reserved 1
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)

Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the

air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be

specified and controlled.

Note 3 to entry: Other relevant physical parameters might also be controlled as required, e.g. temperature,

humidity, pressure, vibration and electrostatic.
[SOURCE: ISO 14644-1:2015, 3.1.1]
3.1.2
clean zone

defined space within which the number concentration of airborne particles (3.2.1) is controlled and

classified, and which is constructed and operated in a manner to control the introduction, generation

and retention of contaminants inside the space

Note 1 to entry: The class of airborne particle concentration (3.2.4) is specified.

Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the

air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be

specified and controlled.

Note 3 to entry: A clean zone(s) can be a defined space within a cleanroom (3.1.1) or might be achieved by a

separative device. Such a device can be located inside or outside a cleanroom.

Note 4 to entry: Other relevant physical parameters might also be controlled as required, e.g. temperature,

humidity, pressure, vibration and electrostatic.
[SOURCE: ISO 14644-1:2015, 3.1.2]
3.1.3
installation

cleanroom (3.1.1) or one or more clean zones (3.1.2), together with all associated structures, air-

treatment systems, services and utilities
[SOURCE: ISO 14644-1:2015, 3.1.3]
3.1.4
separative device

equipment utilizing constructional and dynamic means to create assured levels of separation between

the inside and outside of a defined volume

Note 1 to entry: Some industry-specific examples of separative devices are clean air hoods, containment

enclosures, glove boxes, isolators and mini-environments.
[SOURCE: ISO 14644-7:2004, 3.17]
3.1.5
resolution

smallest change in a quantity being measured that causes a perceptible change in the corresponding

indication

Note 1 to entry: Resolution can depend on, for example, noise (internal or external) or friction. It may also depend

on the value of a quantity being measured.
[SOURCE: ISO 14644-1:2015, 3.4.1]
3.1.6
sensitivity

quotient of the change in an indication of a measuring system and the corresponding change in a value

of the quantity being measured
2 © ISO 2019 – All rights reserved
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
3.2 Terms related to airborne particles
3.2.1
airborne particle

solid or liquid object suspended in air, viable or non-viable, sized between 1 nm and 100 µm

Note 1 to entry: For classification purposes, refer to ISO 14644-1:2015, 3.2.1.
3.2.2
count median particle diameter
median particle diameter based on the number of particles

Note 1 to entry: For the count median, one half of the particle number is contributed by the particles with a size

smaller than the count median size, and one half by particles larger than the count median size.

3.2.3
mass median particle diameter
median particle diameter based on the particle mass

Note 1 to entry: For the mass median, one half of mass of all particles is contributed by particles with a size

smaller than the mass median size, and one half by particles larger than the mass median size.

3.2.4
particle concentration
number of individual particles per unit volume of air
[SOURCE: ISO 14644-1:2015, 3.2.3]
3.2.5
particle size

diameter of a sphere that produces a response, by a given particle-sizing instrument, that is equivalent

to the response produced by the particle being measured

Note 1 to entry: For light-scattering airborne-particle instruments, the equivalent optical diameter is used.

[SOURCE: ISO 14644-1:2015, 3.2.2]
3.2.6
particle size distribution

cumulative distribution of particle concentration (3.2.4) as a function of particle size (3.2.5)

[SOURCE: ISO 14644-1:2015, 3.2.4]
3.2.7
test aerosol

gaseous suspension of solid and/or liquid particles with known and controlled size distribution and

concentration
3.3 Terms related to air filters and systems
3.3.1
aerosol challenge

challenging of a filter or an installed filter system (3.3.6) by test aerosol (3.2.7)

3.3.2
designated leak

maximum allowable penetration, which is determined by agreement between customer and supplier,

through a leak (3.3.8), detectable during scanning (3.3.9) of a filter installation (3.1.3) with light-

scattering airborne-particle counters (LSAPC) or aerosol photometers (3.6.2)
© ISO 2019 – All rights reserved 3
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
3.3.3
dilution system

system wherein aerosol is mixed with particle-free dilution air in a known volumetric ratio to reduce

concentration
3.3.4
filter system
assembly composed of filter, frame and other support mechanism or other housing
3.3.5
final filter

filter in a final position before the air enters the cleanroom (3.1.1) or clean zone (3.1.2)

3.3.6
installed filter system
filter system (3.3.4) mounted in the ceiling, wall, apparatus or duct
3.3.7
installed filter system leakage test

test performed to confirm that the filters are properly installed by verifying that there is absence of

bypass leakage of the filter installation (3.1.3), and that the filters and the grid system are free of defects

and leaks (3.3.8)
3.3.8
leak

penetration of contaminants that exceed an expected value of downstream

concentration through lack of integrity or defects
3.3.9
scanning

method for disclosing leaks (3.3.8) in filters and parts of units, whereby the probe inlet of an aerosol

photometer (3.6.2) or a light-scattering airborne-particle counter is moved in overlapping strokes

across the defined test area
3.4 Terms related to airflow and other physical states
3.4.1
air change rate
air exchange rate

rate expressing number of air changes per unit of time and calculated by dividing the volume of air

delivered in the unit of time by the volume of the cleanroom (3.1.1) or clean zone (3.1.2)

3.4.2
measuring plane

cross-sectional area for testing or measuring a performance parameter such as the airflow velocity

3.4.3
non-unidirectional airflow

air distribution where the supply air entering the cleanroom (3.1.1) or clean zone (3.1.2) mixes with the

internal air by means of induction
[SOURCE: ISO 14644-1:2015, 3.2.8]
3.4.4
supply air volume flow rate

air volume per unit of time supplied into a cleanroom (3.1.1) or clean zone (3.1.2) from final filters (3.3.5)

or air ducts
4 © ISO 2019 – All rights reserved
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
3.4.5
total air volume flow rate

air volume per unit of time that passes through a section of a cleanroom (3.1.1) or clean zone (3.1.2)

3.4.6
unidirectional airflow

controlled airflow through the entire cross-section of a cleanroom (3.1.1) or a clean zone (3.1.2) with a

steady velocity and airstreams that are considered to be parallel
[SOURCE: ISO 14644-1:2015, 3.2.7]
3.4.7
uniformity of velocity

unidirectional airflow (3.4.6) pattern in which the point-to-point readings of velocity (speed and

direction of airflow) are within a defined percentage of the average airflow velocity

3.5 Terms related to electrostatic measurement
3.5.1
discharge time

time required to reduce the voltage to the level, positive or negative, to which an isolated conductive

monitoring plate was originally charged
3.5.2
offset voltage

voltage that accumulates on an initially uncharged isolated conductive plate when that plate is exposed

to an ionized air environment
3.5.3
static-dissipative property

capability for reducing electrostatic charge on work or product surface, as a result of conduction or

other mechanism to a specific value or nominal zero charge level
3.5.4
surface voltage level

positive or negative voltage level of electrostatic charging on work or product surface, as indicated by

use of suitable apparatus
3.6 Terms related to measuring apparatus and measuring conditions
3.6.1
aerosol generator

apparatus capable of generating particulate matter having appropriate size range (e.g. 0,05 µm to

2 µm) at a constant concentration, which can be produced by thermal, hydraulic, pneumatic, acoustic or

electrostatic means
3.6.2
aerosol photometer

light-scattering airborne particle (3.2.1) mass concentration measuring apparatus, which uses a

forward-scattered-light optical chamber to make measurements
3.6.3
airflow capture hood with measuring device

device with apparatus to completely cover the filter or air diffuser, and collect the air to directly

measure the air volume flow rate
© ISO 2019 – All rights reserved 5
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SIST EN ISO 14644-3:2020
ISO 14644-3:2019(E)
3.6.4
LSAPC
light scattering airborne particle counter

apparatus capable of counting and sizing single airborne particles (3.2.1) and reporting size data in

terms of equivalent optical diameter

Note 1 to entry: The specifications for a particle counter are given in ISO 21501-4.

[SOURCE: ISO 14644-1:2015, 3.5.1, modified — The term "light scattering discrete airborne particle

counter" has been removed. Note 1 to entry has been reworded.]
3.6.5
witness plate

material of defined surface area used in lieu of direct evaluation of a specific surface that is either

inaccessible or too sensitive to be handled
3.7 Terms related to occupancy states
3.7.1
as-built

condition where the cleanroom (3.1.1) or clean zone (3.1.2) is complete with all services connected and

functioning but with no equipment, furniture, materials or personnel present
[SOURCE: ISO 14644-1:2015, 3.3.1]
3.7.2
at-rest

condition where the cleanroom (3.1.1) or clean zone (3.1.2) is complete with equipment installed and

operating in a manner agreed upon, but with no personnel present
[SOURCE: ISO 14644-1:2015, 3.3.2]
3.7.3
operational
agreed condition where the cleanroom (3.1.1
...

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