SIST EN ISO 25178-70:2014
(Main)Geometrical product specification (GPS) - Surface texture: Areal - Part 70: Material measures (ISO 25178-70:2014)
Geometrical product specification (GPS) - Surface texture: Areal - Part 70: Material measures (ISO 25178-70:2014)
EN ISO 25178-70 specifies the characteristics of physical measurement standards used for the periodic verification and adjustment of areal surface texture measurement instruments.
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 70: Maßverkörperungen (ISO 25178-70:2014)
Dieses Dokument legt die Merkmale von Maßverkörperungen fest, die für eine wiederkehrende Bestätigung
und Einstellung von Messgeräten zur Messung der Oberflächentextur verwendet werden können.
Spécification géométrique des produits (GPS) - État de surface: surfacique - Partie 70: Mesures matérialisées (ISO 25178-70:2014)
L'ISO 25178-70:2014 spécifie les caractéristiques des mesures matérialisées utilisées pour la vérification périodique et le réglage des instruments de mesure de l'état de surface surfacique.
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna - 70. del: Meritve materiala (ISO 25178-70:2014)
EN ISO 25178-70 navaja lastnosti standardov fizičnih meritev, uporabljenih za redno preverjanje in prilagajanje instrumentov ploskovne teksture površine.
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 25178-70:2014
01-julij-2014
6SHFLILNDFLMDJHRPHWULMVNLKYHOLþLQL]GHOND *36 7HNVWXUDSRYUãLQH SORVNRYQD
GHO 0HULWYHPDWHULDOD ,62
Geometrical product specification (GPS) - Surface texture: Areal - Part 70: Material
measures (ISO 25178-70:2014)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 70: Maßverkörperungen (ISO 25178-70:2014)
Spécification géométrique des produits (GPS) - État de surface: surfacique - Partie 70:
Mesures matérialisées (ISO 25178-70:2014)
Ta slovenski standard je istoveten z: EN ISO 25178-70:2014
ICS:
17.040.20 Lastnosti površin Properties of surfaces
SIST EN ISO 25178-70:2014 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN ISO 25178-70:2014
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SIST EN ISO 25178-70:2014
EUROPEAN STANDARD
EN ISO 25178-70
NORME EUROPÉENNE
EUROPÄISCHE NORM
February 2014
ICS 17.040.20
English Version
Geometrical product specification (GPS) - Surface texture: Areal
- Part 70: Material measures (ISO 25178-70:2014)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: surfacique - Partie 70: Mesures matérialisées (ISO Oberflächenbeschaffenheit: Flächenhaft - Teil 70:
25178-70:2014) Maßverkörperungen (ISO 25178-70:2014)
This European Standard was approved by CEN on 27 December 2013.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United
Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2014 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-70:2014 E
worldwide for CEN national Members.
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SIST EN ISO 25178-70:2014
EN ISO 25178-70:2014 (E)
Contents Page
Foreword .3
2
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SIST EN ISO 25178-70:2014
EN ISO 25178-70:2014 (E)
Foreword
This document (EN ISO 25178-70:2014) has been prepared by Technical Committee ISO/TC 213
“Dimensional and geometrical product specifications and verification” in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by August 2014, and conflicting national standards shall be withdrawn at
the latest by August 2014.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,
Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-70:2014 has been approved by CEN as EN ISO 25178-70:2014 without any
modification.
3
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SIST EN ISO 25178-70:2014
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SIST EN ISO 25178-70:2014
INTERNATIONAL ISO
STANDARD 25178-70
First edition
2014-02-15
Geometrical product specification
(GPS) — Surface texture: Areal —
Part 70:
Material measures
Spécification géométrique des produits (GPS) — État de surface:
surfacique —
Partie 70: Mesures matérialisées
Reference number
ISO 25178-70:2014(E)
©
ISO 2014
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SIST EN ISO 25178-70:2014
ISO 25178-70:2014(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2014
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
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Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
Web www.iso.org
Published in Switzerland
ii © ISO 2014 – All rights reserved
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SIST EN ISO 25178-70:2014
ISO 25178-70:2014(E)
Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 General . 2
5 Requirements for the material measures . 2
6 Types of material measures . 3
7 Profile material measures . 4
7.1 Type PPS: Periodic sinusoidal shape . 4
7.2 Type PPT: Periodic triangular shape . 5
7.3 Type PPR: Periodic rectangular shape . 6
7.4 Type PPA: Periodic arcuate shape . 6
7.5 Type PGR: Groove, rectangular . 7
7.6 Type PGC: Groove, circular . 8
7.7 Type PRO: Irregular profile . 9
7.8 Type PCR: Circular irregular profile .10
7.9 Type PRI: Prism .11
7.10 Type PRB: Razor blade .11
7.11 Type PAS: Approximated sinusoidal shape .12
7.12 Type PCS: Contour standard .13
7.13 Type PDG: Double groove .14
8 Areal material measures .15
8.1 Type AGP: Grooves, perpendicular .15
8.2 Type AGC: Grooves, circular . .15
8.3 Type ASP: Hemisphere .16
8.4 Type APS: Plane-sphere .17
8.5 Type ACG: Cross grating .18
8.6 Type ACS: Cross sinusoidal .19
8.7 Type ARS: Radial sinusoidal .19
8.8 Type ASG: Star-shape grooves .20
8.9 Type AIR: Irregular .21
8.10 Type AFL: Flat plane .22
8.11 Type APC: Photochromic pattern . .22
9 Material measure certificate .23
Annex A (normative) Requirements for measurements.24
Annex B (informative) Equivalence table for material measure names .25
Annex C (informative) Evaluation of a spacing measurand on an areal instrument .26
Annex D (informative) Irregular measurement standards .28
Annex E (informative) Relationship to the GPS matrix model .31
Bibliography .33
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SIST EN ISO 25178-70:2014
ISO 25178-70:2014(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity
assessment, as well as information about ISO’s adherence to the WTO principles in the Technical Barriers
to Trade (TBT) see the following URL: Foreword - Supplementary information
The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product
specifications and verification.
ISO 25178 consists of the following parts, under the general title Geometrical product specification
(GPS) — Surface texture: Areal:
— Part 1: Areal – Indication of surface texture
— Part 2: Areal – Terms, definitions and surface texture parameters
— Part 3: Areal – Specification operators
— Part 6: Classification of methods for measuring surface texture
— Part 70: Material measures
— Part 71: Software measurement standards
— Part 601: Nominal characteristics of contact (stylus) instruments
— Part 602: Nominal characteristics of non- contact (confocal chromatic probe) instruments
— Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy)
instruments
— Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
— Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments
— Part 606: Nominal characteristics of non-contact (focus variation) instruments
— Part 701: Calibration and measurement standards for contact (stylus) instruments
The following part is under preparation:
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SIST EN ISO 25178-70:2014
ISO 25178-70:2014(E)
— Part 72: XML file format x3p
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SIST EN ISO 25178-70:2014
ISO 25178-70:2014(E)
Introduction
This part of ISO 25178 is a geometrical product specification standard and is to be regarded as a General
GPS standard (see ISO/TR 14638). It influences the chain link 6 of the chains of standards on areal
surface texture, roughness profile, waviness profile and primary profile.
The ISO GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO GPS system of which
this document is a part. The fundamental rules of ISO GPS given in ISO 8015 apply to this document.
The default decision rules given in ISO 14253-1 apply to specifications made in accordance with this
document, unless otherwise stated.
For more detailed information of the relation of this standard to the GPS matrix model, see Annex E.
This part of ISO 25178 introduces material measures that can be used for periodic verification and
adjustment of areal surface texture instruments.
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SIST EN ISO 25178-70:2014
INTERNATIONAL STANDARD ISO 25178-70:2014(E)
Geometrical product specification (GPS) — Surface texture:
Areal —
Part 70:
Material measures
1 Scope
This part of ISO 25178 specifies the characteristics of material measures used for the periodic verification
and adjustment of areal surface texture measurement instruments.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and are
indispensable for its application. For dated references, only the edition cited applies. For undated
references, the latest edition of the referenced document (including any amendments) applies.
ISO 3274:1996, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal
characteristics of contact (stylus) instruments
ISO 10012, Measurement management systems — Requirements for measurement processes and measuring
equipment
ISO/IEC 17025, General requirements for the competence of testing and calibration laboratories
ISO 25178-2, Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions
and surface texture parameters
ISO 25178-601, Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal
characteristics of contact (stylus) instruments
ISO/IEC Guide 99:2007, International vocabulary of metrology — Basic and general concepts and associated
terms (VIM)
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 3274, ISO 25178-2,
ISO 25178-601, ISO/IEC Guide 99 and the following apply.
3.1
material measure
dedicated manufactured workpiece intended to reproduce or supply, in a permanent
manner during its use quantities of one or more given kinds, each with an assigned quantity value
Note 1 to entry: The indication of a material measure is its assigned quantity value.
Note 2 to entry: A material measure can be a measurement standard.
Note 3 to entry: A material measure is sometimes called calibration sample, calibration specimen, calibration
standard, standard artefact, physical measurement standard or physical standard.
[SOURCE: ISO/IEC Guide 99:2007, 3.6, modified — A domain has been added and the definition modified.
The examples are not reproduced.]
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SIST EN ISO 25178-70:2014
ISO 25178-70:2014(E)
4 General
A material measure can be used for two different purposes:
— calibration of the metrological characteristics, followed by assessment of the measurement
uncertainty;
— user adjustment of the instrument, which establishes corrections of the measured quantities.
Both purposes depend on the metrological characteristics of the material measures (see the
ISO 25178-700 series).
The material measures presented in this part of ISO 25178 are suitable for both purposes; nevertheless,
they have been especially designed for the assessment and correction of systematic errors. This is due
to the fact that the characteristics of those material measures permit the calibration of coordinates such
as x, y and z through the assessment and verification of adjustment coefficients C , C and C (see the
x y z
ISO 25178-600 series).
These material measures are not intended to separate the errors introduced by the instrument from
those due to the filtering and computation algorithms. The algorithms can be tested using software
measurement standards (see ISO 5436-2, ISO 25178-71 and ISO 25178-72).
Most of the material measures presented below permit the verification and the correction of the
squareness between X and Y drive units on areal instruments.
The measurement method and the characteristics of the material measure shall be supplied by the
manufacturer of the material measure.
In ISO 25178-2, each term is followed by its parameter (abbreviated term), then its symbol. Whereas
abbreviated terms can contain multiple letters, symbols consist only of a single letter with subscripts
as needed. For these terms, symbols are used in the equations shown in this document. The reason for
this differentiation is to avoid misinterpretation of compound letters as an indication of multiplication
between quantities in equations. The parameters (abbreviated terms) are used everywhere else in this
document as well as in product documentation, drawings and data sheets.
5 Requirements for the material measures
The design characteristics of material measures shall be compatible with the considered application.
See also Annex A.
The material characteristics of the material measure shall not significantly affect the measurement
carried out on it.
The real integral surface of a standard shall have a scale limitation specified and features outside this
limitation shall be considered not to affect the measurement.
Examples of such features are:
— flatness deviation of the real integral surface of the standard;
— form deviation of the groove(s) (i.e. for PGR, PGC, PDG, AGP, AGC, etc.);
— groove bottom radius (i.e. for PGC, PCS, PDG, AGP, AGC, etc.);
— form deviation of the flanks of the triangles (i.e. for PPT, PCS, PDG, AGP, etc.);
— parallelism errors between grooves (i.e. for PDG, AGP, etc.);
— squareness between grooves (i.e. for AGP, etc.);
— local slope at any point (when using an optical instrument);
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SIST EN ISO 25178-70:2014
ISO 25178-70:2014(E)
— bisector of the groove(s) or the triangles (line, plane or cylinder), which shall be nominally
perpendicular to the reference plane of the standard;
— reflectivity of the surface (when using an optical instrument);
— hardness of the material (when using a stylus instruments);
— refractive index of the material;
— colour of the material.
The measurement standards should be uniquely identified. Serial number, type and nominal values of
the measurands are recommended to be engraved on the standard and/or standard’s casing.
6 Types of material measures
The different types of material measures covered by this part of ISO 25178 are given in Table 1 and
Table 2.
NOTE 1 The prefix P is used for the profile material measures type.
NOTE 2 The prefix A is used for the areal material measures type.
Annex B gives the equivalence between names defined in other standards (e.g. ISO 5436-1 and
ISO 25178-701).
Table 1 — Types of profile material measures
Type Name
PPS Periodic sinusoidal shape
PPT Periodic triangular shape
PPR Periodic rectangular shape
PPA Periodic arcuate shape
PGR Groove, rectangular
PGC Groove, circular
PRO Irregular profile
PCR Circular irregular profile
PRI Prism
PRB Razor blade
PAS Approximated sinusoidal shape
PCS Contour standard
PDG Double groove
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SIST EN ISO 25178-70:2014
ISO 25178-70:2014(E)
Table 2 — Types of areal material measures
Type Name
AGP Grooves, perpendicular
AGC Groove, circular
ASP Hemisphere
APS Plane – sphere
ACG Cross grating
ACS Cross sinusoidal
ARS Radial, sinusoidal
ASG Star-shape grooves
AIR Irregular
AFL Flat plane
APC Photochromic pattern
7 Profile material measures
7.1 Type PPS: Periodic sinusoidal shape
7.1.1 Design characteristics
This material measure reproduces a sinusoidal shape along one direction. The shape is defined by the
period p and the amplitude d (see Figure 1).
Figure 1 — Sinusoidal shape
NOTE 1 According to ISO 5436-1, this material measure is a type B2 or C1 depending on the period (see
Annex B).
NOTE 2 Particular cases of PPS material measures, commonly called chirps, have increasing or decreasing
periods. They make possible the assessment of instrument bandwidth or lateral resolution.
7.1.2 Measurands
See Table 3.
Table 3 — Measurand of material measures — Type PPS
Profile Areal
Z axis Ra or Rq Sa or Sq
X axis (and Y axis) RSm averaged PSm
NOTE 1 RSm is equal to the period of the sinusoid.
NOTE 2 Ra and Rq can be calculated using the Formulae (1) and (2), assuming the effect of the λc and λs filters
is negligible:
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SIST EN ISO 25178-70:2014
ISO 25178-70:2014(E)
d
R = (1)
a
π
and
d
R = (2)
q
22
πd
NOTE 3 The maximum slope on this material measure is given by the ratio .
p
NOTE 4 For the definition of “averaged PSm”, see Annex C.
7.2 Type PPT: Periodic triangular shape
7.2.1 Design characteristics
This material measure reproduces a triangular shape along one direction. The shape is defined by the
period p and the depth d, or by the depth d and the angle α between opposing flanks (see Figure 2).
Figure 2 — Triangular shape
NOTE According to ISO 5436-1, Figure 2 illustrates a material measure of type B2 or C2 depending on the
period (see Annex B).
7.2.2 Measurands
See Table 4.
Table 4 — Measurand of material measures — Type PPT
Profile Areal
Z axis Ra or Rq Sa or Sq
X axis (and Y axis) RSm averaged PSm
NOTE 1 RSm is equal to the period p of the triangular motif.
NOTE 2 Ra and Rq can be calculated using the Formulae (3) and (4) assuming the effect of λc and λs filters is
negligible:
d
R = (3)
a
4
and
d
R = (4)
q
23
NOTE 3 For the definition of “averaged PSm”, see Annex C.
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SIST EN ISO 25178-70:2014
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7.3 Type PPR: Periodic rectangular shape
7.3.1 Design characteristics
This material measure repeats rectangular grooves along one direction. The shape is defined by the
groove width w, the shape period p, and the groove depth d (see Figure 3).
Figure 3 — Rectangular shape
7.3.2 Measurands
See Table 5.
Table 5 — Measurand of material measures — Type PPR
Profile Areal
Z axis Ra or Rq Sa or Sq
X axis (and Y axis) RSm average PSm
NOTE 1 RSm is equal to the period p of the rectangular motif.
NOTE 2 Ra and Rq can be calculated using the Formulae (5) and (6) assuming the effect of λc and λs filters is
negligible:
dw× w
R =×21×− (5)
a
p p
and
dw× p
R = ×−1 (6)
q
p w
NOTE 3 For the definition of “averaged PSm”, see Annex C.
7.4 Type PPA: Periodic arcuate shape
7.4.1 Design characteristics
This material measure reproduces an arcuate shape along one direction. The shape is defined by the
period p and the radius r of arcs or by the period p and the depth d (see Figure 4).
Figure 4 — Arcuate shape
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SIST EN ISO 25178-70:2014
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NOTE According to ISO 5436-1, Figure 4 illustrates a material measure of type B2 or C4 depending on the
period (see Annex B).
7.4.2 Measurands
See Table 6.
Table 6 — Measurand of material measures – Type PPA
Profile Areal
Z axis Ra or Rq Sa or Sq
X axis (and Y axis) RSm averaged PSm
NOTE 1 RSm is equal to the period p of the arcuate shape.
NOTE 2 For the definition of “averaged PSm”, see Annex C.
7.5 Type PGR: Groove, rectangular
7.5.1 Design characteristics
These material measures have a wide groove with a flat bottom or a number of separated grooves of
equal or increasing depth, each groove being wide enough to be insensitive to the lateral resolution
limitations of the instrument (for example the stylus tip).
Each groove is characterized by its width w and its depth d (see Figure 5).
Figure 5 — Rectangular groove
NOTE According to ISO 5436-1, Figure 5 illustrates a material measure of type A1 (see Annex B).
7.5.2 Meas
...
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