SIST EN ISO 25178-604:2013
(Main)Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 604: Merkmale von berührungslos messenden Geräten (der Kohärenz-Scannungs-Interferometrie) (ISO 25178-604:2013)
Die vorliegende Norm beschreibt die metrologischen Merkmale von Systemen der abtastenden Kohärenz-
Interferometrie (coherence scanning interferometry, CSI) für die dreidimensionale Abbildung von Oberflächenhöhen.
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 604: Caractéristiques nominales des instruments sans contact (à interférométrie par balayage à cohérence) (ISO 25178-604:2013)
L'ISO 25178-604:2013 spécifie les caractéristiques métrologiques des systèmes d'interférométrie par balayage à cohérence (CSI) pour la cartographie 3D de la hauteur de surface.
Specifikacija geometrijskih veličin izdelka - Tekstura površine: ploskovna - 604. del: Imenske značilnosti nekontaktnih instrumentov (interferometrija s koherentnim optičnim čitalnikom) (ISO 25178-604:2013)
Ta del standarda ISO 25178 določa meroslovne značilnosti sistemov za interferometrijo s koherentnim optičnim čitalnikom za tridimenzionalno preslikavo višine površine.
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 25178-604:2013
01-oktober-2013
6SHFLILNDFLMDJHRPHWULMVNLKYHOLþLQL]GHOND7HNVWXUDSRYUãLQH SORVNRYQD
GHO ,PHQVNH]QDþLOQRVWLQHNRQWDNWQLKLQVWUXPHQWRY LQWHUIHURPHWULMDV
NRKHUHQWQLPRSWLþQLPþLWDOQLNRP ,62
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal
characteristics of non-contact (coherence scanning interferometry) instruments (ISO
25178-604:2013)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 604: Merkmale von berührungslos messenden Geräten (der Kohärenz-Scannungs-
Interferometrie) (ISO 25178-604:2013)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 604:
Caractéristiques nominales des instruments sans contact (à interférométrie par balayage
à cohérence) (ISO 25178-604:2013)
Ta slovenski standard je istoveten z: EN ISO 25178-604:2013
ICS:
17.040.20 Lastnosti površin Properties of surfaces
SIST EN ISO 25178-604:2013 en,fr
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN ISO 25178-604:2013
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SIST EN ISO 25178-604:2013
EUROPEAN STANDARD
EN ISO 25178-604
NORME EUROPÉENNE
EUROPÄISCHE NORM
August 2013
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 604: Nominal characteristics of non-contact
(coherence scanning interferometry) instruments (ISO 25178-
604:2013)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 604: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 604:
nominales des instruments sans contact (à interférométrie Merkmale von berührungslos messenden Geräten (der
par balayage à cohérence) (ISO 25178-604:2013) Kohärenz-Scannungs-Interferometrie) (ISO 25178-
604:2013)
This European Standard was approved by CEN on 15 May 2013.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United
Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2013 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-604:2013: E
worldwide for CEN national Members.
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SIST EN ISO 25178-604:2013
EN ISO 25178-604:2013 (E)
Contents Page
Foreword .3
2
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SIST EN ISO 25178-604:2013
EN ISO 25178-604:2013 (E)
Foreword
This document (EN ISO 25178-604:2013) has been prepared by Technical Committee ISO/TC 213
“Dimensional and geometrical product specifications and verification” in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by February 2014, and conflicting national standards shall be withdrawn
at the latest by February 2014.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,
Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-604:2013 has been approved by CEN as EN ISO 25178-604:2013 without any
modification.
3
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SIST EN ISO 25178-604:2013
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SIST EN ISO 25178-604:2013
INTERNATIONAL ISO
STANDARD 25178-604
First edition
2013-08-01
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 604:
Nominal characteristics of non-
contact (coherence scanning
interferometry) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 604: Caractéristiques nominales des instruments sans contact
(à interférométrie par balayage à cohérence)
Reference number
ISO 25178-604:2013(E)
©
ISO 2013
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2013
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
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Fax + 41 22 749 09 47
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Web www.iso.org
Published in Switzerland
ii © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Terms and definitions . 1
2.1 Terms and definitions related to all areal surface texture measurement methods . 1
2.2 Terms and definitions related to x- and y-scanning systems . 6
2.3 Terms and definitions related to optical systems . 8
2.4 Terms and definitions related to optical properties of the workpiece .10
2.5 Terms and definitions specific to coherence scanning interferometric microscopy .10
3 Descriptions of the influence quantities .14
3.1 General .14
3.2 Influence quantities .14
Annex A (informative) Overview and components of a coherence scanning interferometry
(CSI) microscope .17
Annex B (informative) Coherence scanning interferometry (CSI) theory of operation .22
Annex C (informative) Spatial resolution .31
Annex D (informative) Example procedure for estimating surface topography repeatability .36
Annex E (informative) Relation to the GPS matrix model.37
Bibliography .39
© ISO 2013 – All rights reserved iii
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directives
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received. www.iso.org/patents
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product
specifications and verification. The document was prepared in collaboration with Technical Committee
CEN/TC 290, Dimensional and geometrical product specifications and verification.
ISO 25178 consists of the following parts, under the general title Geometrical product specifications
(GPS) — Surface texture: Areal:
— Part 1: Indication of surface texture
— Part 2: Terms, definitions and surface texture parameters
— Part 3: Specification operators
— Part 6: Classification of methods for measuring surface texture
— Part 70: Physical measurement standards
— Part 71: Software measurement standards
— Part 601: Nominal characteristics of contact (stylus) instruments
— Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
— Part 603: Nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments
— Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
— Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments
— Part 606: Nominal characteristics of non-contact (focus variation) instruments
— Part 701: Calibration and measurement standards for contact (stylus) instruments
The following part is under preparation:
— Part 72: XML file format x3p
iv © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Introduction
This part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as
a general GPS standard (see ISO/TR 14638). It influences chain link 5 of the chains of standards on
roughness profile, waviness profile, primary profile and areal surface texture.
The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this
document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information on the relation of this part of ISO 25178 to other standards and to the GPS
matrix model, see Annex E.
This part of ISO 25178 describes the metrological characteristics of coherence scanning interferometric
microscopes, designed for the measurement of surface topography maps. For more detailed information
on the coherence scanning technique, see Annex A and Annex B.
NOTE Portions of this document, particularly the informative texts, may describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of coherence
scanning interferometry. This document is not intended to establish priority for any intellectual property, nor
does it imply a license to any proprietary technologies that may be described herein.
© ISO 2013 – All rights reserved v
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SIST EN ISO 25178-604:2013
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SIST EN ISO 25178-604:2013
INTERNATIONAL STANDARD ISO 25178-604:2013(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 604:
Nominal characteristics of non-contact (coherence
scanning interferometry) instruments
1 Scope
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry
(CSI) systems for 3D mapping of surface height.
2 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
2.1 Terms and definitions related to all areal surface texture measurement methods
2.1.1
areal reference
component of the instrument that generates a reference surface with respect to which the surface
topography is measured
2.1.2
coordinate system of the instrument
right hand orthonormal system of axes (x, y, z) defined as:
— (x, y) is the plane established by the areal reference of the instrument (note that there are optical
instruments that do not possess a physical areal guide)
— z-axis is mounted parallel to the optical axis and is perpendicular to the (x, y) plane for an optical
instrument; the z-axis is in the plane of the stylus trajectory and is perpendicular to the (x, y) plane
for a stylus instrument (see Figure 1)
© ISO 2013 – All rights reserved 1
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Key
1 coordinate system of the instrument
2 measurement loop
Figure 1 — Coordinate system and measurement loop of the instrument
Note 1 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis. (This note is valid for
instruments that scan in the horizontal plane.)
Note 2 to entry: See also “specification coordinate system” [ISO 25178-2:2012, 3.1.2] and “measurement coordinate
system” [ISO 25178-6:2010, 3.1.1].
2.1.3
measurement loop
closed chain which comprises all components connecting the workpiece and the probe, e.g. the means of
positioning, the work holding fixture, the measuring stand, the drive unit, the probing system
Note 1 to entry: The measurement loop will be subjected to external and internal disturbances that influence the
measurement uncertainty.
SEE: Figure 1.
2.1.4
real surface of a workpiece
set of features which physically exist and separate the entire workpiece from the surrounding medium
Note 1 to entry: The real surface is a mathematical representation of the surface that is independent of the
measurement process.
Note 2 to entry: See also “mechanical surface” [ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1] and
“electromagnetic surface” [ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2].
Note 3 to entry: The electro-magnetic surface considered for one type of optical instrument may be different from
the electro-magnetic surface for other types of optical instruments.
2 © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
2.1.5
surface probe
device that converts the surface height into a signal during measurement
Note 1 to entry: In earlier standards, this was termed “transducer”.
2.1.6
measuring volume
range of the instrument stated in terms of the limits on all three coordinates measured by the instrument
Note 1 to entry: For areal surface texture measuring instruments, the measuring volume is defined by the
measuring range of the x- and y- drive units, and the measuring range of the z-probing system.
[SOURCE: ISO 25178-601:2010, 3.4.1]
2.1.7
response curve
F , F , F
x y z
graphical representation of the function that describes the relation between the actual quantity and the
measured quantity
Note 1 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity x
M
(respectively y or z ).
M M
Note 2 to entry: The response curve can be used for adjustments and error corrections.
[SOURCE: ISO 25178-601:2010, 3.4.2]
2.1.8
amplification coefficient
α , α , α
x y z
slope of the linear regression curve obtained from the response curve (2.1.7)
Note 1 to entry: There will be amplification coefficients applicable to the x, y and z quantities.
Note 2 to entry: The ideal response is a straight line with a slope equal to 1, which means that the values of the
measurand are equal to the values of the input quantities.
[1]
Note 3 to entry: See also “sensitivity of a measuring system” (ISO/IEC Guide 99:2007, 4.12)
[SOURCE: ISO 25178-601:2010, 3.4.3, modified —Note 3 to entry has been added.]
2.1.9
instrument noise
N
i
internal noise added to the output signal caused by the instrument if ideally placed in a noise-free environment
Note 1 to entry: Internal noise can be due to electronic noise, as e.g. amplifiers, or optical noise, as e.g. stray light.
Note 2 to entry: This noise typically has high frequencies and it limits the ability of the instrument to detect small
spatial wavelengths of the surface texture.
Note 3 to entry: The S-filter according ISO 25178-3 may reduce this noise.
Note 4 to entry: For some instruments, instrument noise cannot be estimated because the instrument only takes
data while moving.
2.1.10
measurement noise
N
M
noise added to the output signal occurring during the normal use of the instrument
Note 1 to entry: Notes 2 and 3 of 2.1.9 apply as well to this definition.
© ISO 2013 – All rights reserved 3
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Note 2 to entry: Measurement noise includes instrument noise (2.1.9).
2.1.11
surface topography repeatability
repeatability of topography map in successive measurements of the same surface under the same
conditions of measurement
Note 1 to entry: Surface topography repeatability provides a measure of the likely agreement between repeated
measurements normally expressed as a standard deviation.
[1]
Note 2 to entry: See ISO/IEC Guide 99:2007, 2.15 and 2.21, for a general discussion of repeatability and
related concepts.
Note 3 to entry: Evaluation of surface topography repeatability is a common method for determining the
measurement noise.
2.1.12
sampling interval in x
D
x
distance between two adjacent measured points along the x-axis
Note 1 to entry: In many microscopy systems, the sampling interval is determined by the distance between
sensor elements in a camera, called pixels. For such systems, the terms pixel pitch and pixel spacing are often
used interchangeably with the term sampling interval. Another term, pixel width, indicates a length associated
with one side (x or y) of the sensitive area of a single pixel and is always smaller than the pixel spacing. Yet another
term, sampling zone, may be used to indicate the length or region over which a height sample is determined. This
quantity could either be larger or smaller than the sampling interval.
2.1.13
sampling interval in y
D
y
distance between two adjacent measured points along the y-axis
Note 1 to entry: In many microscopy systems, the sampling interval is determined by the distance between
sensor elements in a camera, called pixels. For such systems, the terms pixel pitch and pixel spacing are often
used interchangeably with the term sampling interval. Another term, pixel width, indicates a length associated
with one side (x or y) of the sensitive area of a single pixel and is always smaller than the pixel spacing. Yet another
term, sampling zone, may be used to indicate the length or region over which a height sample is determined. This
quantity could either be larger or smaller than the sampling interval.
2.1.14
digitization step in z
D
z
smallest height variation along the z-axis between two ordinates of the extracted surface
2.1.15
lateral resolution
R
l
smallest distance between two features which can be detected
[SOURCE: ISO 25178-601:2010, 3.4.10, modified —The word “separation” has been removed before
“distance”.]
2.1.16
width limit for full height transmission
W
l
width of the narrowest rectangular groove whose measured height remains unchanged by the measurement
Note 1 to entry: Instrument properties (such as the sampling interval in x and y, the digitization step in z, and the
short wavelength cutoff filter) should be chosen so that they do not influence the lateral resolution and the width
limit for full height transmission.
4 © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Note 2 to entry: When determining this parameter by measurement, the depth of the rectangular groove should
be close to that of the surface to be measured.
[SOURCE: ISO 25178-601:2010, 3.4.11, modified —The notes have been changed.]
2.1.17
lateral period limit
D
LIM
spatial period of a sinusoidal profile at which the height response of an instrument falls to 50 %
Note 1 to entry: The lateral period limit is one metric for describing spatial or lateral resolution of a surface
topography measuring instrument and its ability to distinguish and measure closely spaced surface features. Its
value depends on the heights of surface features and on the method used to probe the surface. Maximum values
for this parameter are listed in ISO 25178-3:2012, Table 3, in comparison with recommended values for short
wavelength (s-)filters and sampling intervals.
Note 2 to entry: Spatial period is the same concept as spatial wavelength and is the inverse of spatial frequency.
Note 3 to entry: One factor related to the value of D for optical tools is the Rayleigh criterion (2.3.7). Another is
LIM
the degree of focus of the objective on the surface.
Note 4 to entry: One factor related to the value of D for contact tools is the stylus tip radius, r (see
LIM TIP
ISO 25178-601).
Note 5 to entry: Other terms related to lateral period limit are structural resolution and topographic spatial resolution.
2.1.18
maximum local slope
greatest local slope of a surface feature that can be assessed by the probing system
Note 1 to entry: The term “local slope” is defined in ISO 4287:1997, 3.2.9.
2.1.19
instrument transfer function
ITF
f
ITF
function of spatial frequency describing how a surface topography measuring instrument responds to
an object surface topography having a specific spatial frequency
Note 1 to entry: Ideally, the ITF tells us what the measured amplitude of a sinusoidal grating of a specified spatial
frequency ν would be relative to the true amplitude of the grating.
Note 2 to entry: For several types of optical instruments, the ITF may be a nonlinear function of height except for
heights much smaller than the optical wavelength.
2.1.20
hysteresis
x , y , z
HYS HYS HYS
property of measuring equipment, or characteristic whereby the indication of the equipment or value of
the characteristic depends on the orientation of the preceding stimuli
Note 1 to entry: Hysteresis can also depend, for example, on the distance travelled after the orientation of
stimuli has changed.
Note 2 to entry: For lateral scanning systems, the hysteresis is mainly a repositioning error.
[SOURCE: ISO 14978:2006, 3.24, modified —Note 2 to entry and the symbols have been added.]
© ISO 2013 – All rights reserved 5
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
2.1.21
metrological characteristic
metrological characteristic of a measuring instrument
characteristic of measuring equipment, which may influence the results of
measurement
Note 1 to entry: Calibration of metrological characteristics may be necessary.
Note 2 to entry: The metrological characteristics have an immediate contribution to measurement uncertainty.
Note 3 to entry: Metrological characteristics for areal surface texture measuring instruments are given in Table 1.
Table 1 — List of metrological characteristics for surface texture measurement methods
Metrological characteristic Symbol Definition Main poten-
tial error
along
Amplification coefficient α , α , α 2.1.8 x, y, z
x y z
Linearity deviation l , l , l Maximum local difference between x, y, z
x y z
the line from which the amplifica-
tion coefficient is derived and the
response curve.
Residual flatness z Flatness of the areal reference z
FLT
Measurement noise N 2.1.10 z
M
Lateral period limit D 2.1.17. z
LIM
Perpendicularity Δ Deviation from 90° of the angle x, y
PERxy
between the x- and y-axes
[SOURCE: ISO 14978:2006, 3.12, modified — The notes are different and the table has been added.]
2.2 Terms and definitions related to x- and y-scanning systems
2.2.1
areal reference guide
component(s) of the instrument that generate(s) the reference surface, in which the probing system
moves relative to the surface being measured according to a theoretically exact trajectory
Note 1 to entry: In the case of x- and y-scanning areal surface texture measuring instruments, the areal reference
guide establishes a reference surface [ISO 25178-2:2012, 3.1.8]. It can be achieved through the use of two linear
and perpendicular reference guides [ISO 3274:1996, 3.3.2] or one reference surface guide.
2.2.2
lateral scanning system
system that performs the scanning of the surface to be measured in the (x, y) plane
Note 1 to entry: There are essentially four aspects to a surface texture scanning instrument system: the x-axis
drive, the y-axis drive, the z-measurement probe and the surface to be measured. There are different ways in
which these may be configured and thus there will be a difference between different configurations as explained
in Table 2.
Note 2 to entry: When a measurement consists of a single field of view of a microscope, x- and y-scanning is not
used. However, when several fields of view are linked together by stitching methods, see Reference [2] the system
is considered to be a scanning system.
6 © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Table 2 — Possible different configurations for reference guides (x and y)
Drive unit
a
Two reference guides (x and y) One areal reference guide
Px o Cy Px o Py Cx o Cy Pxy Cxy
A: without arcuate
Px o Cy-A Px o Py-A Cx o Cy-A Pxy-A Cxy-A
error correction
Probing
S: without arcu-
System
ate error or with
Px ο Cy-S Px o Py-S Cx o Cy-S Pxy-S Cxy-S
arcuate error cor-
rected
a For two given functions f and g, f ο g is the combination of these functions
Px = probing systems moving along the x-axis
Py = probing systems moving along the y-axis
Cx = component moving along the x-axis
Cy = component moving along the y-axis
2.2.3
drive unit x
component of the instrument that moves the probing system or the surface being measured along the
reference guide on the x-axis and returns the horizontal position of the measured point in terms of the
lateral x coordinate of the profile
2.2.4
drive unit y
component of the instrument that moves
...
SLOVENSKI STANDARD
oSIST prEN ISO 25178-604:2010
01-september-2010
6SHFLILNDFLMDJHRPHWULMVNLKYHOLþLQL]GHOND7HNVWXUDSRYUãLQH SORVNRYQD
GHO ,PHQVNH]QDþLOQRVWLQHNRQWDNWQLKLQVWUXPHQWRY LQWHUIHURPHWULMDV
NRKHUHQWQLPRSWLþQLPþLWDOQLNRP ,62',6
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal
characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS
25178-604:2010)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 604: Merkmale von berührungslos messenden Geräten (der Kohärenz-Scannungs-
Interferometrie) (ISO/DIS 25178-604:2010)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 604:
Caractéristiques nominales des instruments sans contact (à interférométrie par balayage
à cohérence) (ISO/DIS 25178-604:2010)
Ta slovenski standard je istoveten z: prEN ISO 25178-604
ICS:
17.040.20 Lastnosti površin Properties of surfaces
oSIST prEN ISO 25178-604:2010 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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oSIST prEN ISO 25178-604:2010
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oSIST prEN ISO 25178-604:2010
EUROPEAN STANDARD
DRAFT
prEN ISO 25178-604
NORME EUROPÉENNE
EUROPÄISCHE NORM
June 2010
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 604: Nominal characteristics of non-contact
(coherence scanning interferometry) instruments (ISO/DIS
25178-604:2010)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 604: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 604:
nominales des instruments sans contact (à interférométrie Merkmale von berührungslos messenden Geräten (der
par balayage à cohérence) (ISO/DIS 25178-604:2010) Kohärenz-Scannungs-Interferometrie) (ISO/DIS 25178-
604:2010)
This draft European Standard is submitted to CEN members for parallel enquiry. It has been drawn up by the Technical Committee
CEN/TC 290.
If this draft becomes a European Standard, CEN members are bound to comply with the CEN/CENELEC Internal Regulations which
stipulate the conditions for giving this European Standard the status of a national standard without any alteration.
This draft European Standard was established by CEN in three official versions (English, French, German). A version in any other language
made by translation under the responsibility of a CEN member into its own language and notified to the CEN Management Centre has the
same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland,
Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.
Recipients of this draft are invited to submit, with their comments, notification of any relevant patent rights of which they are aware and to
provide supporting documentation.
Warning : This document is not a European Standard. It is distributed for review and comments. It is subject to change without notice and
shall not be referred to as a European Standard.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2010 CEN All rights of exploitation in any form and by any means reserved Ref. No. prEN ISO 25178-604:2010: E
worldwide for CEN national Members.
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oSIST prEN ISO 25178-604:2010
prEN ISO 25178-604:2010 (E)
Contents Page
Foreword .3
2
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oSIST prEN ISO 25178-604:2010
prEN ISO 25178-604:2010 (E)
Foreword
This document (prEN ISO 25178-604:2010) has been prepared by Technical Committee ISO/TC 213
“Dimensional and geometrical product specifications and verification” in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR.
This document is currently submitted to the parallel Enquiry.
Endorsement notice
The text of ISO/DIS 25178-604:2010 has been approved by CEN as a prEN ISO 25178-604:2010 without any
modification.
3
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oSIST prEN ISO 25178-604:2010
DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-604
ISO/TC 213 Secretariat: DS
Voting begins on: Voting terminates on:
2010-06-24 2010-11-24
INTERNATIONAL ORGANIZATION FOR STANDARDIZATION • МЕЖДУНАРОДНАЯ ОРГАНИЗАЦИЯ ПО СТАНДАРТИЗАЦИИ • ORGANISATION INTERNATIONALE DE NORMALISATION
Geometrical product specifications (GPS) — Surface texture:
Areal —
Part 604:
Nominal characteristics of non-contact (coherence scanning
interferometry) instruments
Spécification géométrique des produits (GPS) — État de surface: Surfacique —
Partie 604: Caractéristiques nominales des instruments sans contact (à interférométrie par balayage à
cohérence)
ICS 17.040.20
ISO/CEN PARALLEL PROCESSING
This draft has been developed within the International Organization for Standardization (ISO), and
processed under the ISO-lead mode of collaboration as defined in the Vienna Agreement.
This draft is hereby submitted to the ISO member bodies and to the CEN member bodies for a parallel
five-month enquiry.
Should this draft be accepted, a final draft, established on the basis of comments received, will be
submitted to a parallel two-month approval vote in ISO and formal vote in CEN.
To expedite distribution, this document is circulated as received from the committee secretariat.
ISO Central Secretariat work of editing and text composition will be undertaken at publication
stage.
Pour accélérer la distribution, le présent document est distribué tel qu'il est parvenu du
secrétariat du comité. Le travail de rédaction et de composition de texte sera effectué au
Secrétariat central de l'ISO au stade de publication.
THIS DOCUMENT IS A DRAFT CIRCULATED FOR COMMENT AND APPROVAL. IT IS THEREFORE SUBJECT TO CHANGE AND MAY NOT BE
REFERRED TO AS AN INTERNATIONAL STANDARD UNTIL PUBLISHED AS SUCH.
IN ADDITION TO THEIR EVALUATION AS BEING ACCEPTABLE FOR INDUSTRIAL, TECHNOLOGICAL, COMMERCIAL AND USER PURPOSES, DRAFT
INTERNATIONAL STANDARDS MAY ON OCCASION HAVE TO BE CONSIDERED IN THE LIGHT OF THEIR POTENTIAL TO BECOME STANDARDS TO
WHICH REFERENCE MAY BE MADE IN NATIONAL REGULATIONS.
RECIPIENTS OF THIS DRAFT ARE INVITED TO SUBMIT, WITH THEIR COMMENTS, NOTIFICATION OF ANY RELEVANT PATENT RIGHTS OF WHICH
THEY ARE AWARE AND TO PROVIDE SUPPORTING DOCUMENTATION.
©
International Organization for Standardization, 2010
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ISO/DIS 25178-604
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Contents Page
Foreword .iv
Introduction.v
1 Scope.1
2 Normative references.1
3 Terms and Definitions.1
3.1 General terms .1
3.2 Metrological characteristics of the instrument .4
4 Descriptions of the metrological characteristics.7
4.1 General .7
4.2 Overview.7
4.3 Metrological characteristics.7
Annex A (informative) Components of a coherence scanning interferometry (CSI) microscope.9
Annex B (informative) Coherence scanning interferometry (CSI) theory of operation .12
Annex C (informative) Lateral resolution.25
Annex D (informative) Example procedure for estimating surface topography repeatability .29
Annex E Relation to the GPS matrix model (informative).30
Bibliography.31
© ISO 2010 – All rights reserved iii
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ISO/DIS 25178-604
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 25178-604 was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification and by Technical Committee CEN/TC 290, Dimensional and geometrical
product specification and verification in collaboration.
ISO 25178 consists of the following parts, under the general title Geometric product specification (GPS) —
Surface texture: Areal:
⎯ Part 1: Areal Surface Texture Drawing Indication
⎯ Part 2: Terms, definitions and surface texture parameters
⎯ Part 3: Specification operators
⎯ Part 4: Comparison rules
⎯ Part 5: Verification operators
⎯ Part 6: Classification of methods for measuring surface texture
⎯ Part 7: Software measurement standards
⎯ Part 601: Nominal characteristics of contact (stylus) instruments
⎯ Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
⎯ Part 603: Nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments
⎯ Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
⎯ Part 701: Calibration and measurement standards for contact (stylus) instruments
⎯ Part 702: Calibration of non-contact (confocal chromatic probe) instruments
⎯ Part 703: Calibration and measurement standards for non-contact (interferometric) instruments
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Introduction
This part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a general
GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on areal surface
texture.
This part of ISO 25178 describes the metrological characteristics of coherence scanning interferometers,
designed for the measurement of surface topography maps.
For more detailed information on the coherence scanning technique, see Annex A and Annex B.
NOTE Portions of this document, particularly the informative clauses, describe patented systems and methods. This
information is provided only to assist users in understanding the operating principles of coherence scanning interferometry.
This document is not intended to establish priority for any intellectual property, nor does it imply a license to proprietary
technologies described herein.
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DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-604
Geometrical product specifications (GPS) — Surface texture:
Areal —
Part 604:
Nominal characteristics of non-contact (coherence scanning
interferometry) instruments
1 Scope
The present standard describes the metrological characteristics of coherence scanning interferometry (CSI)
systems for 3D mapping of surface height.
2 Normative references
The following referenced document is indispensable for the application of this document. For dated references,
only the edition cited applies. For undated references, the latest edition of the referenced document (including
any amendments) applies.
ISO 25178-6:2010, Geometrical Product Specifications (GPS) — Surface texture: Areal — Part 6:
Classification of methods for measuring surface texture
3 Terms and Definitions
For the purposes of this document, the following terms and definitions apply.
3.1 General terms
3.1.1
coherence scanning interferometry
CSI
measurement method wherein the localization of interference fringes during a scan of optical path length
provides a means to determine a surface topography map
[ISO 25178-6:2010]
NOTE 1 CSI encompasses but is not limited to instruments that use spectrally broadband, visible sources (white light)
to achieve interference fringe localization.
NOTE 2 CSI uses either fringe localization alone or in combination with interference fringe phase, depending on the
surface type, desired surface topography repeatability and software capabilities.
NOTE 3 Table 1 compiles alternative terms that conform at least in part to the above definition.
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Table 1 — Summary of recognized terms for CSI
Acronym Term Reference
CSI Coherence scanning interferometry [1]
CPM Coherence probe microscope [2]
CSM Coherence scanning microscope [3]
CR Coherence radar [4]
CCI Coherence correlation interferometry [5]
MCM Mirau Correlation Microscope [6]
WLI White light interferometry [7]
WLSI White light scanning interferometry [8]
SWLI Scanning White Light Interferometry [9]
WLPSI White light phase shifting interferometry [10]
VSI Vertical scanning interferometry [10]
EVSI Enhanced VSI [10]
HDVSI High-definition Vertical Scanning Interferometry —
RSP Rough surface profiler [11]
RST Rough Surface Tester [12]
HSI Height scanning interferometer [13]
IRS IR Scanning [14]
3.1.2
optical path length
physical distance a light beam travels multiplied by the index of refraction of the traversed medium
NOTE The optical path difference in a two-beam interferometer is the difference in optical path length between the
reference and measurement paths.
3.1.3
CSI signal
intensity data recorded for an individual image point or camera pixel as a function of scan position (see
Figure 1)
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Figure 1 — Typical CSI signal
3.1.4
interference fringes
rapidly-modulating portion of the CSI signal, related to the interference effect and generated by the variation of
optical path length during the CSI scan (Figure 1)
NOTE 1 The interference fringes are approximately sinusoidal as a function of scan position.
NOTE 2 The distance between interference-fringe peaks corresponds to scan position differences that are
approximately one-half the effective mean wavelength of the light source (see 0)
3.1.5
interference phase
argument of the sine function used to approximate the form of interference fringes.
NOTE A complete fringe oscillation or period is equal to a 2π change in phase.
3.1.6
signal strength
max-to-min or equivalent measure of the excursion of the CSI signal (see Figure 1)
NOTE Signal strength depends mainly on strength of the source, camera sensitivity, and reflectivities of object and
reference mirror.
3.1.7
modulation envelope
overall variation in signal strength of a CSI signal as a function of scan position (see Figure 1)
NOTE 1 The modulation envelope is not necessarily a rigorously-defined aspect of the signal. The quantitative shape
of the envelope is related closely to the means by which it is calculated.
NOTE 2 The modulation envelope is most closely associated with the idea of fringe localization, which is a basic
characteristic of CSI signals.
NOTE 3 The modulation envelope is a consequence of limited optical coherence, which follows from using a spectrally-
broadband light source (white light), a spatially extended light source, or both.
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3.2 Metrological characteristics of the instrument
3.2.1
metrological characteristic
MC
〈measuring〉 equipment characteristic of measuring equipment, which may influence the results of
measurement
[ISO 14978:2006]
NOTE 1 Calibration of metrological characteristics may be necessary.
NOTE 2 The metrological characteristics have an immediate contribution to measurement uncertainty.
3.2.2
analysis mode
signal processing option
determines, among other parameters, whether the software makes use of the modulation envelope alone to
measure surface heights or both the envelope and the interference fringe phase to achieve improved surface
topography repeatability
3.2.3
modulation threshold
minimum modulation
lowest signal strength deemed usable by the software for further evaluation of surface height
NOTE The minimum modulation level typically provides a filter for valid data points. Those points falling below this
level are deleted.
3.2.4
CSI scan
mechanical or optical scan which varies the optical length of either the reference or measurement paths to
generate a signal that exhibits interference fringes
NOTE In CSI microscopes, the most common (but not exclusive) scanning means is a physical translation of an
interference objective, which maintains coincidence of the peak CSI signal strength and the position of best focus.
3.2.5
scan length
total range of physical path length traversed by the CSI scan
NOTE The scan length is usually synonymous with the total displacement of an interference objective mechanically
translated along its optical axis during data acquisition.
3.2.6
scan increment
distance travelled by the CSI scan between individual camera frames or data acquisition points
NOTE The scan increment is most commonly equivalent to 4 frames per interference fringe, but can be any number
of frames.
3.2.7
scan rate
velocity of the CSI scan, expressed e.g. in micrometers per second
3.2.8
environmental vibration
mechanical motions that disturb the CSI scan in an unpredictable and unwanted way, leading to measurement
errors, see Annex B
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NOTE Environmental vibration may be caused by various sources (e.g. seismic, sonic and external electro-magnetic
disturbances)
3.2.9
instrument noise
internal noise added to the output signal caused by the instrument if ideally placed in a noise-free environment
NOTE 1 Internal noise can be due to electronic noise, as e.g. amplifiers, or optical noise, as e.g. stray light.
NOTE 2 The instrument noise typically has high frequencies which limit the ability of the instrument to detect small
scale surface texture.
NOTE 3 The S-filter according to ISO/DIS 25178-3 may reduce the instrument noise.
3.2.10
numerical aperture
A
N
sine of the half aperture angle α multiplied by the refractive index n of the surrounding medium
NOTE 1 The term NA is also commonly used to designate numerical aperture [15].
A = nsinα (1)
N
NOTE 2 in air, n approximately equals 1 and can be omitted from the equation.
NOTE 3 See Annex A, Figure A 2.
3.2.11
effective mean wavelength
twice the period of the interference fringe closest to the modulation envelope peak
NOTE 1 The period of an interference fringe is the scan distance separating two neighbouring peaks in the CSI signal.
NOTE 2 The effective value of the wavelength used to measure a surface is affected by items such as the light source
spectrum, spectral transmission of the optical components, tip/tilt of the part, the spectral reflectivity of the reference and
object surfaces and spectral response of the image sensor array [16].
3.2.12
spectral bandwidth
spread in wavelengths of the light used to measure a surface
NOTE 1 Instruments may be constructed having light sources (e.g. LED) with a limited spectral bandwidth and/or with
additional filter elements to further limit the spectral bandwidth.
3.2.13
optically dissimilar materials
regions on the object with different optical properties which may result in measured phase differences across
the field of view erroneously interpreted as different surface heights
3.2.14
films
semi-transparent films covering a reflecting layer on the surface of an object
NOTE 1 The films could be e.g. a multilayer to make a high-reflecting coating or an antireflecting coating on the surface
of a glass lens, beam splitter, or band-pass filter.
NOTE 2 The films may cause an error in the measured relative heights of features on the object if they are not
accounted for in the data processing.
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NOTE 3 Most modern CSI tools offer some form of thin-film analysis, which distinguishes between the interfaces of the
film structure, provided that the film layer is not too thin. Thin-film analysis often can provide height maps of underlying
surfaces, or 3D film thickness maps. See Annex B.
3.2.15
lateral resolution
〈 CSI〉 one-half the spatial period of a sinusoidal profile for which the instrument response (measured
feature height to actual feature height) falls to 50%
NOTE 1 This quantity is also equal to one-half the wavelength of 50 % depth modulation, a term used in other
standards.
NOTE 2 For CSI lateral resolution is optimally determined for small surface heights, i.e. less than one-eighth the
effective optical wavelength. However, the definition above can be applied to other optical surface measurement
techniques and to surface features with larger heights.
NOTE 3 The 50% instrument response may be found by direct measurement of the instrument transfer function (ITF),
as detailed for example in Annex C.
NOTE 4 For a theoretically perfect optical system with a filled objective pupil, the optical lateral resolution is
theoretically given by the Rayleigh criterion, equal to 0,61 times the mean wavelength of the light source divided by the
numerical aperture ( A ) of the objective (see Note 5 and Annex C).
N
NOTE 5 The Sparrow criterion may also be cited. The Sparrow criterion is the spatial period for which the theoretical
instrument response falls to zero. For a filled objective pupil, the Sparrow criterion is 0,82 times the lateral resolution as
determined by the 50% instrument response (see Annex C).
NOTE 6 The lateral resolution of the instrument depends on both the optical lateral resolution and on the spatial
sampling provided by the camera. The camera sampling generally degrades the lateral resolution with respect to the
optical lateral resolution value.
3.2.16
fringe-order error
mistake in the identification of the correct fringe when calculating relative heights using interference phase for
surface topography calculations
NOTE 1 Fringe order errors in CSI can be the result of errors in the analysis of the modulation envelope.
NOTE 2 Fringe order errors are equivalent to integer multiples of one-half the equivalent wavelength in height.
NOTE 3 Fringe order errors are sometimes termed 2π errors.
3.2.15
repeatability
ability of the CSI instrument to provide closely similar indications for repeated evaluation of the same
measurand under the same conditions of measurement [17]
NOTE CSI instruments report various measurands such as peak-to-valley, rms roughness, step height and so on, all
of which are derived from a map of surface heights. For instrument benchmarking and performance validation, surface
topography repeatability shall be used, and shall be performed on an optically smooth surface.
3.2.16
surface topography repeatability
repeatability of topography map in successive measurements of the same surface under the same conditions
of measurement
NOTE 1 Surface topography repeatability provides the likely agreement between repeated measurements.
NOTE 2 Annex D provides an example procedure for estimating the surface topography repeatability.
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4 Descriptions of the metrological characteristics
4.1 General
CSI instruments provide a measurement of lateral (xy, ) and height ( z ) values from which surface shape and
texture parameters are calculated.
4.2 Overview
CSI instruments use the following measurement process:
The instrument is focused on the surface as indicated by the appearance of interference fringes.
⎯ For measurement of randomly rough surfaces, the sample tilt relative to the optical axis of the system is
adjusted to minimize the number of fringes across the field of view. For measurement of surfaces having
step features, the sample tilt is adjusted to provide 3 to 5 fringes perpendicular to the step.
⎯ The instrument executes a data acquisition during a CSI scan.
⎯ Data analysis using either the modulation envelope, the interference fringes, or both, results in a surface
topography map
Deviations of shape from a flat surface such as a residual tilt, curvature and cylinder are numerically removed
from the areal measurement producing a surface topography map. Further filtering may be applied to the
surface topography map as required.
4.3 Metrolog
...
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