Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)

This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 604: Merkmale von berührungslos messenden Geräten (der Kohärenz-Scannungs-Interferometrie) (ISO 25178-604:2013)

Die vorliegende Norm beschreibt die metrologischen Merkmale von Systemen der abtastenden Kohärenz-
Interferometrie (coherence scanning interferometry, CSI) für die dreidimensionale Abbildung von Oberflächenhöhen.

Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 604: Caractéristiques nominales des instruments sans contact (à interférométrie par balayage à cohérence) (ISO 25178-604:2013)

L'ISO 25178-604:2013 spécifie les caractéristiques métrologiques des systèmes d'interférométrie par balayage à cohérence (CSI) pour la cartographie 3D de la hauteur de surface.

Specifikacija geometrijskih veličin izdelka - Tekstura površine: ploskovna - 604. del: Imenske značilnosti nekontaktnih instrumentov (interferometrija s koherentnim optičnim čitalnikom) (ISO 25178-604:2013)

Ta del standarda ISO 25178 določa meroslovne značilnosti sistemov za interferometrijo s koherentnim optičnim čitalnikom za tridimenzionalno preslikavo višine površine.

General Information

Status
Published
Public Enquiry End Date
24-Sep-2010
Publication Date
11-Sep-2013
Technical Committee
Current Stage
6060 - National Implementation/Publication (Adopted Project)
Start Date
04-Sep-2013
Due Date
09-Nov-2013
Completion Date
12-Sep-2013

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SLOVENSKI STANDARD
SIST EN ISO 25178-604:2013
01-oktober-2013

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GHO,PHQVNH]QDþLOQRVWLQHNRQWDNWQLKLQVWUXPHQWRY LQWHUIHURPHWULMDV
NRKHUHQWQLPRSWLþQLPþLWDOQLNRP  ,62

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal

characteristics of non-contact (coherence scanning interferometry) instruments (ISO

25178-604:2013)

Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -

Teil 604: Merkmale von berührungslos messenden Geräten (der Kohärenz-Scannungs-
Interferometrie) (ISO 25178-604:2013)

Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 604:

Caractéristiques nominales des instruments sans contact (à interférométrie par balayage

à cohérence) (ISO 25178-604:2013)
Ta slovenski standard je istoveten z: EN ISO 25178-604:2013
ICS:
17.040.20 Lastnosti površin Properties of surfaces
SIST EN ISO 25178-604:2013 en,fr

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 25178-604:2013
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SIST EN ISO 25178-604:2013
EUROPEAN STANDARD
EN ISO 25178-604
NORME EUROPÉENNE
EUROPÄISCHE NORM
August 2013
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 604: Nominal characteristics of non-contact
(coherence scanning interferometry) instruments (ISO 25178-
604:2013)

Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -

surface: Surfacique - Partie 604: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 604:

nominales des instruments sans contact (à interférométrie Merkmale von berührungslos messenden Geräten (der

par balayage à cohérence) (ISO 25178-604:2013) Kohärenz-Scannungs-Interferometrie) (ISO 25178-

604:2013)
This European Standard was approved by CEN on 15 May 2013.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European

Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national

standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation

under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same

status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,

Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,

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Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels

© 2013 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-604:2013: E

worldwide for CEN national Members.
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SIST EN ISO 25178-604:2013
EN ISO 25178-604:2013 (E)
Contents Page

Foreword ..............................................................................................................................................................3

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SIST EN ISO 25178-604:2013
EN ISO 25178-604:2013 (E)
Foreword

This document (EN ISO 25178-604:2013) has been prepared by Technical Committee ISO/TC 213

“Dimensional and geometrical product specifications and verification” in collaboration with Technical

Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of

which is held by AFNOR.

This European Standard shall be given the status of a national standard, either by publication of an identical

text or by endorsement, at the latest by February 2014, and conflicting national standards shall be withdrawn

at the latest by February 2014.

Attention is drawn to the possibility that some of the elements of this document may be the subject of patent

rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following

countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech

Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,

Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,

Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.

Endorsement notice

The text of ISO 25178-604:2013 has been approved by CEN as EN ISO 25178-604:2013 without any

modification.
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SIST EN ISO 25178-604:2013
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SIST EN ISO 25178-604:2013
INTERNATIONAL ISO
STANDARD 25178-604
First edition
2013-08-01
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 604:
Nominal characteristics of non-
contact (coherence scanning
interferometry) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 604: Caractéristiques nominales des instruments sans contact
(à interférométrie par balayage à cohérence)
Reference number
ISO 25178-604:2013(E)
ISO 2013
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2013

All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form

or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior

written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of

the requester.
ISO copyright office
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Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
Web www.iso.org
Published in Switzerland
ii © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

Introduction ..................................................................................................................................................................................................................................v

1 Scope ................................................................................................................................................................................................................................. 1

2 Terms and definitions ..................................................................................................................................................................................... 1

2.1 Terms and definitions related to all areal surface texture measurement methods ..................... 1

2.2 Terms and definitions related to x- and y-scanning systems .......................................................................... 6

2.3 Terms and definitions related to optical systems ..................................................................................................... 8

2.4 Terms and definitions related to optical properties of the workpiece ................................................10

2.5 Terms and definitions specific to coherence scanning interferometric microscopy ...............10

3 Descriptions of the influence quantities ..................................................................................................................................14

3.1 General ........................................................................................................................................................................................................14

3.2 Influence quantities .........................................................................................................................................................................14

Annex A (informative) Overview and components of a coherence scanning interferometry

(CSI) microscope ................................................................................................................................................................................................17

Annex B (informative) Coherence scanning interferometry (CSI) theory of operation ...............................22

Annex C (informative) Spatial resolution .....................................................................................................................................................31

Annex D (informative) Example procedure for estimating surface topography repeatability .............36

Annex E (informative) Relation to the GPS matrix model............................................................................................................37

Bibliography .............................................................................................................................................................................................................................39

© ISO 2013 – All rights reserved iii
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directives

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received. www.iso.org/patents

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product

specifications and verification. The document was prepared in collaboration with Technical Committee

CEN/TC 290, Dimensional and geometrical product specifications and verification.

ISO 25178 consists of the following parts, under the general title Geometrical product specifications

(GPS) — Surface texture: Areal:
— Part 1: Indication of surface texture
— Part 2: Terms, definitions and surface texture parameters
— Part 3: Specification operators
— Part 6: Classification of methods for measuring surface texture
— Part 70: Physical measurement standards
— Part 71: Software measurement standards
— Part 601: Nominal characteristics of contact (stylus) instruments

— Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments

— Part 603: Nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments

— Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

— Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments

— Part 606: Nominal characteristics of non-contact (focus variation) instruments

— Part 701: Calibration and measurement standards for contact (stylus) instruments

The following part is under preparation:
— Part 72: XML file format x3p
iv © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Introduction

This part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as

a general GPS standard (see ISO/TR 14638). It influences chain link 5 of the chains of standards on

roughness profile, waviness profile, primary profile and areal surface texture.

The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this

document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and

the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this

document, unless otherwise indicated.

For more detailed information on the relation of this part of ISO 25178 to other standards and to the GPS

matrix model, see Annex E.

This part of ISO 25178 describes the metrological characteristics of coherence scanning interferometric

microscopes, designed for the measurement of surface topography maps. For more detailed information

on the coherence scanning technique, see Annex A and Annex B.

NOTE Portions of this document, particularly the informative texts, may describe patented systems and

methods. This information is provided only to assist users in understanding the operating principles of coherence

scanning interferometry. This document is not intended to establish priority for any intellectual property, nor

does it imply a license to any proprietary technologies that may be described herein.

© ISO 2013 – All rights reserved v
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SIST EN ISO 25178-604:2013
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SIST EN ISO 25178-604:2013
INTERNATIONAL STANDARD ISO 25178-604:2013(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 604:
Nominal characteristics of non-contact (coherence
scanning interferometry) instruments
1 Scope

This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry

(CSI) systems for 3D mapping of surface height.
2 Terms and definitions
For the purposes of this document, the following terms and definitions apply.

2.1 Terms and definitions related to all areal surface texture measurement methods

2.1.1
areal reference

component of the instrument that generates a reference surface with respect to which the surface

topography is measured
2.1.2
coordinate system of the instrument
right hand orthonormal system of axes (x, y, z) defined as:

— (x, y) is the plane established by the areal reference of the instrument (note that there are optical

instruments that do not possess a physical areal guide)

— z-axis is mounted parallel to the optical axis and is perpendicular to the (x, y) plane for an optical

instrument; the z-axis is in the plane of the stylus trajectory and is perpendicular to the (x, y) plane

for a stylus instrument (see Figure 1)
© ISO 2013 – All rights reserved 1
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Key
1 coordinate system of the instrument
2 measurement loop
Figure 1 — Coordinate system and measurement loop of the instrument

Note 1 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis. (This note is valid for

instruments that scan in the horizontal plane.)

Note 2 to entry: See also “specification coordinate system” [ISO 25178-2:2012, 3.1.2] and “measurement coordinate

system” [ISO 25178-6:2010, 3.1.1].
2.1.3
measurement loop

closed chain which comprises all components connecting the workpiece and the probe, e.g. the means of

positioning, the work holding fixture, the measuring stand, the drive unit, the probing system

Note 1 to entry: The measurement loop will be subjected to external and internal disturbances that influence the

measurement uncertainty.
SEE: Figure 1.
2.1.4
real surface of a workpiece

set of features which physically exist and separate the entire workpiece from the surrounding medium

Note 1 to entry: The real surface is a mathematical representation of the surface that is independent of the

measurement process.

Note 2 to entry: See also “mechanical surface” [ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1] and

“electromagnetic surface” [ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2].

Note 3 to entry: The electro-magnetic surface considered for one type of optical instrument may be different from

the electro-magnetic surface for other types of optical instruments.
2 © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
2.1.5
surface probe
device that converts the surface height into a signal during measurement
Note 1 to entry: In earlier standards, this was termed “transducer”.
2.1.6
measuring volume

range of the instrument stated in terms of the limits on all three coordinates measured by the instrument

Note 1 to entry: For areal surface texture measuring instruments, the measuring volume is defined by the

measuring range of the x- and y- drive units, and the measuring range of the z-probing system.

[SOURCE: ISO 25178-601:2010, 3.4.1]
2.1.7
response curve
F , F , F
x y z

graphical representation of the function that describes the relation between the actual quantity and the

measured quantity

Note 1 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity x

(respectively y or z ).
M M

Note 2 to entry: The response curve can be used for adjustments and error corrections.

[SOURCE: ISO 25178-601:2010, 3.4.2]
2.1.8
amplification coefficient
α , α , α
x y z
slope of the linear regression curve obtained from the response curve (2.1.7)

Note 1 to entry: There will be amplification coefficients applicable to the x, y and z quantities.

Note 2 to entry: The ideal response is a straight line with a slope equal to 1, which means that the values of the

measurand are equal to the values of the input quantities.
[1]

Note 3 to entry: See also “sensitivity of a measuring system” (ISO/IEC Guide 99:2007, 4.12)

[SOURCE: ISO 25178-601:2010, 3.4.3, modified —Note 3 to entry has been added.]
2.1.9
instrument noise

internal noise added to the output signal caused by the instrument if ideally placed in a noise-free environment

Note 1 to entry: Internal noise can be due to electronic noise, as e.g. amplifiers, or optical noise, as e.g. stray light.

Note 2 to entry: This noise typically has high frequencies and it limits the ability of the instrument to detect small

spatial wavelengths of the surface texture.
Note 3 to entry: The S-filter according ISO 25178-3 may reduce this noise.

Note 4 to entry: For some instruments, instrument noise cannot be estimated because the instrument only takes

data while moving.
2.1.10
measurement noise

noise added to the output signal occurring during the normal use of the instrument

Note 1 to entry: Notes 2 and 3 of 2.1.9 apply as well to this definition.
© ISO 2013 – All rights reserved 3
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Note 2 to entry: Measurement noise includes instrument noise (2.1.9).
2.1.11
surface topography repeatability

repeatability of topography map in successive measurements of the same surface under the same

conditions of measurement

Note 1 to entry: Surface topography repeatability provides a measure of the likely agreement between repeated

measurements normally expressed as a standard deviation.
[1]

Note 2 to entry: See ISO/IEC Guide 99:2007, 2.15 and 2.21, for a general discussion of repeatability and

related concepts.

Note 3 to entry: Evaluation of surface topography repeatability is a common method for determining the

measurement noise.
2.1.12
sampling interval in x
distance between two adjacent measured points along the x-axis

Note 1 to entry: In many microscopy systems, the sampling interval is determined by the distance between

sensor elements in a camera, called pixels. For such systems, the terms pixel pitch and pixel spacing are often

used interchangeably with the term sampling interval. Another term, pixel width, indicates a length associated

with one side (x or y) of the sensitive area of a single pixel and is always smaller than the pixel spacing. Yet another

term, sampling zone, may be used to indicate the length or region over which a height sample is determined. This

quantity could either be larger or smaller than the sampling interval.
2.1.13
sampling interval in y
distance between two adjacent measured points along the y-axis

Note 1 to entry: In many microscopy systems, the sampling interval is determined by the distance between

sensor elements in a camera, called pixels. For such systems, the terms pixel pitch and pixel spacing are often

used interchangeably with the term sampling interval. Another term, pixel width, indicates a length associated

with one side (x or y) of the sensitive area of a single pixel and is always smaller than the pixel spacing. Yet another

term, sampling zone, may be used to indicate the length or region over which a height sample is determined. This

quantity could either be larger or smaller than the sampling interval.
2.1.14
digitization step in z

smallest height variation along the z-axis between two ordinates of the extracted surface

2.1.15
lateral resolution
smallest distance between two features which can be detected

[SOURCE: ISO 25178-601:2010, 3.4.10, modified —The word “separation” has been removed before

“distance”.]
2.1.16
width limit for full height transmission

width of the narrowest rectangular groove whose measured height remains unchanged by the measurement

Note 1 to entry: Instrument properties (such as the sampling interval in x and y, the digitization step in z, and the

short wavelength cutoff filter) should be chosen so that they do not influence the lateral resolution and the width

limit for full height transmission.
4 © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)

Note 2 to entry: When determining this parameter by measurement, the depth of the rectangular groove should

be close to that of the surface to be measured.
[SOURCE: ISO 25178-601:2010, 3.4.11, modified —The notes have been changed.]
2.1.17
lateral period limit
LIM

spatial period of a sinusoidal profile at which the height response of an instrument falls to 50 %

Note 1 to entry: The lateral period limit is one metric for describing spatial or lateral resolution of a surface

topography measuring instrument and its ability to distinguish and measure closely spaced surface features. Its

value depends on the heights of surface features and on the method used to probe the surface. Maximum values

for this parameter are listed in ISO 25178-3:2012, Table 3, in comparison with recommended values for short

wavelength (s-)filters and sampling intervals.

Note 2 to entry: Spatial period is the same concept as spatial wavelength and is the inverse of spatial frequency.

Note 3 to entry: One factor related to the value of D for optical tools is the Rayleigh criterion (2.3.7). Another is

LIM
the degree of focus of the objective on the surface.

Note 4 to entry: One factor related to the value of D for contact tools is the stylus tip radius, r (see

LIM TIP
ISO 25178-601).

Note 5 to entry: Other terms related to lateral period limit are structural resolution and topographic spatial resolution.

2.1.18
maximum local slope

greatest local slope of a surface feature that can be assessed by the probing system

Note 1 to entry: The term “local slope” is defined in ISO 4287:1997, 3.2.9.
2.1.19
instrument transfer function
ITF
ITF

function of spatial frequency describing how a surface topography measuring instrument responds to

an object surface topography having a specific spatial frequency

Note 1 to entry: Ideally, the ITF tells us what the measured amplitude of a sinusoidal grating of a specified spatial

frequency ν would be relative to the true amplitude of the grating.

Note 2 to entry: For several types of optical instruments, the ITF may be a nonlinear function of height except for

heights much smaller than the optical wavelength.
2.1.20
hysteresis
x , y , z
HYS HYS HYS

property of measuring equipment, or characteristic whereby the indication of the equipment or value of

the characteristic depends on the orientation of the preceding stimuli

Note 1 to entry: Hysteresis can also depend, for example, on the distance travelled after the orientation of

stimuli has changed.

Note 2 to entry: For lateral scanning systems, the hysteresis is mainly a repositioning error.

[SOURCE: ISO 14978:2006, 3.24, modified —Note 2 to entry and the symbols have been added.]

© ISO 2013 – All rights reserved 5
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
2.1.21
metrological characteristic
metrological characteristic of a measuring instrument

characteristic of measuring equipment, which may influence the results of

measurement
Note 1 to entry: Calibration of metrological characteristics may be necessary.

Note 2 to entry: The metrological characteristics have an immediate contribution to measurement uncertainty.

Note 3 to entry: Metrological characteristics for areal surface texture measuring instruments are given in Table 1.

Table 1 — List of metrological characteristics for surface texture measurement methods

Metrological characteristic Symbol Definition Main poten-
tial error
along
Amplification coefficient α , α , α 2.1.8 x, y, z
x y z
Linearity deviation l , l , l Maximum local difference between x, y, z
x y z
the line from which the amplifica-
tion coefficient is derived and the
response curve.
Residual flatness z Flatness of the areal reference z
FLT
Measurement noise N 2.1.10 z
Lateral period limit D 2.1.17. z
LIM
Perpendicularity Δ Deviation from 90° of the angle x, y
PERxy
between the x- and y-axes

[SOURCE: ISO 14978:2006, 3.12, modified — The notes are different and the table has been added.]

2.2 Terms and definitions related to x- and y-scanning systems
2.2.1
areal reference guide

component(s) of the instrument that generate(s) the reference surface, in which the probing system

moves relative to the surface being measured according to a theoretically exact trajectory

Note 1 to entry: In the case of x- and y-scanning areal surface texture measuring instruments, the areal reference

guide establishes a reference surface [ISO 25178-2:2012, 3.1.8]. It can be achieved through the use of two linear

and perpendicular reference guides [ISO 3274:1996, 3.3.2] or one reference surface guide.

2.2.2
lateral scanning system

system that performs the scanning of the surface to be measured in the (x, y) plane

Note 1 to entry: There are essentially four aspects to a surface texture scanning instrument system: the x-axis

drive, the y-axis drive, the z-measurement probe and the surface to be measured. There are different ways in

which these may be configured and thus there will be a difference between different configurations as explained

in Table 2.

Note 2 to entry: When a measurement consists of a single field of view of a microscope, x- and y-scanning is not

used. However, when several fields of view are linked together by stitching methods, see Reference [2] the system

is considered to be a scanning system.
6 © ISO 2013 – All rights reserved
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SIST EN ISO 25178-604:2013
ISO 25178-604:2013(E)
Table 2 — Possible different configurations for reference guides (x and y)
Drive unit
Two reference guides (x and y) One areal reference guide
Px o Cy Px o Py Cx o Cy Pxy Cxy
A: without arcuate
Px o Cy-A Px o Py-A Cx o Cy-A Pxy-A Cxy-A
error correction
Probing
S: without arcu-
System
ate error or with
Px ο Cy-S Px o Py-S Cx o Cy-S Pxy-S Cxy-S
arcuate error cor-
rected
a For two given functions f and g, f ο g is the combination of these functions
Px = probing systems moving along the x-axis
Py = probing systems moving along the y-axis
Cx = component moving along the x-axis
Cy = component moving along the y-axis
2.2.3
drive unit x

component of the instrument that moves the probing system or the surface being measured along the

reference guide on the x-axis and returns the horizontal position of the measured point in terms of the

lateral x coordinate of the profile
2.2.4
drive unit y
component of the instrument that moves
...

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