Metallic coatings - Measurement of coating thickness - Profilometric method (ISO 4518:2021)

This document specifies a method for the measurement of metal coating thickness by first forming a
step between the surface of the coating and the surface of its substrate and then measuring the step
height using a profile recording instrument. It covers the instrumentation characteristics and the
procedure appropriate to this specific application of profilometric methods.
The method is applicable to the measurement of thicknesses of metal coatings from 0,01 μm to 1 000 μm
on flat surfaces and, if appropriate precautions are taken, on cylindrical surfaces. It is highly suitable
for the measurement of minute thicknesses but, for thicknesses of less than 0,01 μm, surface flatness
and surface smoothness are very critical and, accordingly, the method is not suitable for use down to
the lowest level of measurement usual for electronic stylus instruments. The method is suitable for
measuring coating thicknesses when preparing coating thickness reference standards.

Metallische Überzüge - Messen der Schichtdicke - Profilometrisches Verfahren (ISO 4518:2021)

zunächst eine Stufe zwischen der Oberfläche des Überzugs und der Oberfläche ihres Grundwerkstoffs gebildet und anschließend deren Höhe mit einem Profilaufzeichnungsgerät gemessen wird. Es behandelt die Eigenschaften der Einrichtung sowie die für die spezifische Anwendung der profilometrischen Verfahren geeignete Durchführung.
Das Verfahren ist auf die Schichtdickenmessung von metallischen Überzügen von 0,01 μm bis 1 000 μm auf ebenen Oberflächen und, bei Berücksichtigung geeigneter Maßnahmen, auf zylindrischen Oberflächen anwendbar. Es ist besonders zur Messung kleinster Dicken geeignet, bei Dicken von weniger als 0,01 μm sind die Einflüsse der Ebenheit und Glätte allerdings sehr kritisch. Daher ist es nicht empfehlenswert, das Verfahren im untersten Messbereich anzuwenden, der für elektronische Tastschnittgeräte üblich ist. Das Verfahren ist zur Schichtdickenmessung geeignet, die als Schichtdicken-Referenzproben vorbereitet werden.

Revêtements métalliques - Mesurage de l'épaisseur de revêtement - Méthode profilométrique (ISO 4518:2021)

Kovinske prevleke - Merjenje debeline prevleke - Profilometrijska metoda (ISO 4518:2021)

General Information

Status
Published
Public Enquiry End Date
04-Sep-2020
Publication Date
03-Jun-2021
Current Stage
6060 - National Implementation/Publication (Adopted Project)
Start Date
24-May-2021
Due Date
29-Jul-2021
Completion Date
04-Jun-2021

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SLOVENSKI STANDARD
SIST EN ISO 4518:2021
01-julij-2021
Nadomešča:
SIST EN ISO 4518:1999
Kovinske prevleke - Merjenje debeline prevleke - Profilometrijska metoda (ISO
4518:2021)
Metallic coatings - Measurement of coating thickness - Profilometric method (ISO
4518:2021)

Metallische Überzüge - Messen der Schichtdicke - Profilometrisches Verfahren (ISO

4518:2021)
Revêtements métalliques - Mesurage de l'épaisseur de revêtement - Méthode
profilométrique (ISO 4518:2021)
Ta slovenski standard je istoveten z: EN ISO 4518:2021
ICS:
25.220.40 Kovinske prevleke Metallic coatings
SIST EN ISO 4518:2021 en,fr,de

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

---------------------- Page: 1 ----------------------
SIST EN ISO 4518:2021
---------------------- Page: 2 ----------------------
SIST EN ISO 4518:2021
EN ISO 4518
EUROPEAN STANDARD
NORME EUROPÉENNE
April 2021
EUROPÄISCHE NORM
ICS 25.220.40 Supersedes EN ISO 4518:1995
English Version
Metallic coatings - Measurement of coating thickness -
Profilometric method (ISO 4518:2021)

Revêtements métalliques - Mesurage de l'épaisseur de Metallische Überzüge - Messen der Schichtdicke -

revêtement - Méthode profilométrique (ISO Profilometrisches Verfahren (ISO 4518:2021)

4518:2021)
This European Standard was approved by CEN on 25 March 2021.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this

European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references

concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN

member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by

translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management

Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,

Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,

Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and

United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels

© 2021 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 4518:2021 E

worldwide for CEN national Members.
---------------------- Page: 3 ----------------------
SIST EN ISO 4518:2021
EN ISO 4518:2021 (E)
Contents Page

European foreword ....................................................................................................................................................... 3

---------------------- Page: 4 ----------------------
SIST EN ISO 4518:2021
EN ISO 4518:2021 (E)
European foreword

This document (EN ISO 4518:2021) has been prepared by Technical Committee ISO/TC 107 "Metallic

and other inorganic coatings" in collaboration with Technical Committee CEN/TC 262 “Metallic and

other inorganic coatings, including for corrosion protection and corrosion testing of metals and alloys”

the secretariat of which is held by BSI.

This European Standard shall be given the status of a national standard, either by publication of an

identical text or by endorsement, at the latest by October 2021, and conflicting national standards shall

be withdrawn at the latest by October 2021.

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. CEN shall not be held responsible for identifying any or all such patent rights.

This document supersedes EN ISO 4518:1995.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the

following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,

Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,

Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of

North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the

United Kingdom.
Endorsement notice

The text of ISO 4518:2021 has been approved by CEN as EN ISO 4518:2021 without any modification.

---------------------- Page: 5 ----------------------
SIST EN ISO 4518:2021
---------------------- Page: 6 ----------------------
SIST EN ISO 4518:2021
INTERNATIONAL ISO
STANDARD 4518
Second edition
2021-04
Metallic coatings — Measurement of
coating thickness — Profilometric
method
Revêtements métalliques — Mesurage de l'épaisseur de revêtement —
Méthode profilométrique
Reference number
ISO 4518:2021(E)
ISO 2021
---------------------- Page: 7 ----------------------
SIST EN ISO 4518:2021
ISO 4518:2021(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2021

All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may

be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting

on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address

below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2021 – All rights reserved
---------------------- Page: 8 ----------------------
SIST EN ISO 4518:2021
ISO 4518:2021(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ...................................................................................................................................................................................... 1

3 Terms and definitions ..................................................................................................................................................................................... 1

4 Principle ........................................................................................................................................................................................................................ 1

5 Instrumentation — Operational parameters and measurement characteristics .............................1

5.1 Types of profile recording instruments ............................................................................................................................. 1

5.2 Stylus instruments ............................................................................................................................................................................... 2

5.3 Inductive measuring probes or displacement sensors ........................................................................................ 2

5.4 Optical profilometers ........................................................................................................................................................................ 3

6 Factors relating to accuracy ...................................................................................................................................................................... 4

6.1 Profile record ............................................................................................................................................................................................ 4

6.2 Vertical magnification (only for instruments with chart recorders) ........................................................ 4

6.3 Graphical measurements ............................................................................................................................................................... 4

6.4 Applied force (only for profilometers with stylus) .................................................................................................. 4

6.5 Stylus diameter and surface roughness ............................................................................................................................. 4

6.6 Surface roughness ................................................................................................................................................................................ 4

6.7 Vibrations .................................................................................................................................................................................................... 5

6.8 Surface curvature .................................................................................................................................................................................. 5

6.9 Cleanliness .................................................................................................................................................................................................. 5

6.10 Temperature .............................................................................................................................................................................................. 5

6.11 Step configuration ................................................................................................................................................................................ 5

6.12 Datum reference (only for profilometers with stylus) ......................................................................................... 5

6.13 Calibration .................................................................................................................................................................................................. 5

7 Calibration .................................................................................................................................................................................................................. 5

8 Measuring procedure ...................................................................................................................................................................................... 6

8.1 Preparation of step .............................................................................................................................................................................. 6

8.2 Recording of profiles .......................................................................................................................................................................... 7

8.3 Measurement of thickness ............................................................................................................................................................ 7

8.4 Measurement accuracy .................................................................................................................................................................... 7

9 Test report ................................................................................................................................................................................................................... 7

Bibliography ................................................................................................................................................................................................................................ 8

© ISO 2021 – All rights reserved iii
---------------------- Page: 9 ----------------------
SIST EN ISO 4518:2021
ISO 4518:2021(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www .iso .org/ patents).

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and

expressions related to conformity assessment, as well as information about ISO's adherence to the

World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/

iso/ foreword .html.

This document was prepared by Technical Committee ISO/TC 107, Metallic and other inorganic coatings,

in collaboration with the European Committee for Standardization (CEN) Technical Committee CEN/

TC 262, Metallic and other inorganic coatings, including for corrosion protection and corrosion testing of

metals and alloys, in accordance with the Agreement on technical cooperation between ISO and CEN

(Vienna Agreement).

This second edition cancels and replaces the first edition (ISO 4518:1980), which has been technically

revised. The main changes compared with the previous edition are as follows:

— optical profilometers such as confocal microscopes or interference microscopes have been added as

alternatives to stylus instruments for the measurement of the step height;
— a description of more modern stylus profilometers has been added.

Any feedback or questions on this document should be directed to the user’s national standards body. A

complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2021 – All rights reserved
---------------------- Page: 10 ----------------------
SIST EN ISO 4518:2021
INTERNATIONAL STANDARD ISO 4518:2021(E)
Metallic coatings — Measurement of coating thickness —
Profilometric method
1 Scope

This document specifies a method for the measurement of metal coating thickness by first forming a

step between the surface of the coating and the surface of its substrate and then measuring the step

height using a profile recording instrument. It covers the instrumentation characteristics and the

procedure appropriate to this specific application of profilometric methods.

The method is applicable to the measurement of thicknesses of metal coatings from 0,01 µm to 1 000 µm

on flat surfaces and, if appropriate precautions are taken, on cylindrical surfaces. It is highly suitable

for the measurement of minute thicknesses but, for thicknesses of less than 0,01 µm, surface flatness

and surface smoothness are very critical and, accordingly, the method is not suitable for use down to

the lowest level of measurement usual for electronic stylus instruments. The method is suitable for

measuring coating thicknesses when preparing coating thickness reference standards.

2 Normative references

The following documents are referred to in the text in such a way that some or all of their content

constitutes requirements of this document. For dated references, only the edition cited applies. For

undated references, the latest edition of the referenced document (including any amendments) applies.

ISO 2177, Metallic coatings — Measurement of coating thickness — Coulometric method by anodic

dissolution
3 Terms and definitions
No terms and definitions are listed in this document.

ISO and IEC maintain terminological databases for use in standardization at the following addresses:

— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at http:// www .electropedia .org/
4 Principle

Formation of a step either by dissolving part of the coating (acceptance testing) or by masking a portion

of the substrate prior to coating (production inspection). Measurement of the height of the step using a

profile recording instrument.
5 Instrumentation — Operational parameters and measurement characteristics
5.1 Types of prof
...

SLOVENSKI STANDARD
oSIST prEN ISO 4518:2020
01-september-2020

Kovinske prevleke - Merjenje debeline prevleke - Profilometrijska metoda (ISO/DIS

4518:2020)

Metallic coatings - Measurement of coating thickness - Profilometric method (ISO/DIS

4518:2020)

Metallische Überzüge - Messen der Schichtdicke - Profilometrisches Verfahren (ISO/DIS

4518:2020)

Revêtements métalliques - Mesurage de l'épaisseur - Méthode profilométrique (ISO/DIS

4518:2020)
Ta slovenski standard je istoveten z: prEN ISO 4518
ICS:
25.220.40 Kovinske prevleke Metallic coatings
oSIST prEN ISO 4518:2020 en,fr,de

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

---------------------- Page: 1 ----------------------
oSIST prEN ISO 4518:2020
---------------------- Page: 2 ----------------------
oSIST prEN ISO 4518:2020
DRAFT INTERNATIONAL STANDARD
ISO/DIS 4518
ISO/TC 107 Secretariat: KATS
Voting begins on: Voting terminates on:
2020-05-15 2020-08-07
Metallic coatings — Measurement of coating thickness —
Profilometric method
Revêtements métalliques — Mesurage de l'épaisseur — Méthode profilométrique
ICS: 25.220.40
THIS DOCUMENT IS A DRAFT CIRCULATED
This document is circulated as received from the committee secretariat.
FOR COMMENT AND APPROVAL. IT IS
THEREFORE SUBJECT TO CHANGE AND MAY
NOT BE REFERRED TO AS AN INTERNATIONAL
STANDARD UNTIL PUBLISHED AS SUCH.
IN ADDITION TO THEIR EVALUATION AS
ISO/CEN PARALLEL PROCESSING
BEING ACCEPTABLE FOR INDUSTRIAL,
TECHNOLOGICAL, COMMERCIAL AND
USER PURPOSES, DRAFT INTERNATIONAL
STANDARDS MAY ON OCCASION HAVE TO
BE CONSIDERED IN THE LIGHT OF THEIR
POTENTIAL TO BECOME STANDARDS TO
WHICH REFERENCE MAY BE MADE IN
Reference number
NATIONAL REGULATIONS.
ISO/DIS 4518:2020(E)
RECIPIENTS OF THIS DRAFT ARE INVITED
TO SUBMIT, WITH THEIR COMMENTS,
NOTIFICATION OF ANY RELEVANT PATENT
RIGHTS OF WHICH THEY ARE AWARE AND TO
PROVIDE SUPPORTING DOCUMENTATION. ISO 2020
---------------------- Page: 3 ----------------------
oSIST prEN ISO 4518:2020
ISO/DIS 4518:2020(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2020

All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may

be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting

on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address

below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2020 – All rights reserved
---------------------- Page: 4 ----------------------
oSIST prEN ISO 4518:2020
ISO/DIS 4518:2020(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ...................................................................................................................................................................................... 1

3 Terms and definitions ..................................................................................................................................................................................... 1

4 Principle ........................................................................................................................................................................................................................ 1

5 Instrumentation: Operational parameters and measurement characteristics ..................................2

5.1 Types of profile recording instruments ............................................................................................................................. 2

5.2 Stylus instruments ............................................................................................................................................................................... 2

5.3 Inductive measuring probes or displacement sensors ........................................................................................ 3

5.4 Optical profilometers ........................................................................................................................................................................ 3

6 Factors relating to accuracy ...................................................................................................................................................................... 4

6.1 Profile record ............................................................................................................................................................................................ 4

6.2 Vertical magnification (only for instruments with chart recorders) ........................................................ 4

6.3 Graphical measurements ............................................................................................................................................................... 4

6.4 Applied force (only for profilometers with stylus) .................................................................................................. 4

6.5 Stylus diameter and surface roughness ............................................................................................................................. 4

6.6 Surface roughness ................................................................................................................................................................................ 4

6.7 Vibrations .................................................................................................................................................................................................... 5

6.8 Surface curvature .................................................................................................................................................................................. 5

6.9 Cleanliness .................................................................................................................................................................................................. 5

6.10 Temperature .............................................................................................................................................................................................. 5

6.11 Step configuration ................................................................................................................................................................................ 5

6.12 Datum reference (only for profilometers with stylus) ......................................................................................... 5

6.13 Calibration .................................................................................................................................................................................................. 5

7 Calibration .................................................................................................................................................................................................................. 5

8 Measuring procedure ...................................................................................................................................................................................... 6

8.1 Preparation of step .............................................................................................................................................................................. 6

8.2 Recording of profiles .......................................................................................................................................................................... 6

8.3 Measurement of thickness ............................................................................................................................................................ 7

8.4 Measurement accuracy .................................................................................................................................................................... 7

9 Test report ................................................................................................................................................................................................................... 7

Bibliography ................................................................................................................................................................................................................................ 8

© ISO 2020 – All rights reserved iii
---------------------- Page: 5 ----------------------
oSIST prEN ISO 4518:2020
ISO/DIS 4518:2020(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www .iso .org/ patents).

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and

expressions related to conformity assessment, as well as information about ISO's adherence to the

World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/

iso/ foreword .html.

This document was prepared by Technical Committee ISO/TC 107, Metallic and other inorganic coatings.

This second edition cancels and replaces the first edition (ISO 4518:1980), which has been technically

revised.
The main changes compared to the previous edition are as follows:

— optical profilometers like confocal microscopes or interference microscopes added as alternatives

to stylus instruments for the measurement of the step height;
— description of more modern stylus profilometers added;
— editorial changes.

Any feedback or questions on this document should be directed to the user’s national standards body. A

complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2020 – All rights reserved
---------------------- Page: 6 ----------------------
oSIST prEN ISO 4518:2020
DRAFT INTERNATIONAL STANDARD ISO/DIS 4518:2020(E)
Metallic coatings — Measurement of coating thickness —
Profilometric method
1 Scope

This document specifies a method for the measurement of metal coating thickness by first forming a

step between the surface of the coating and the surface of its substrate and then measuring the step

height using a profile recording instrument. It covers the instrumentation characteristics and the

procedure appropriate to this specific application of profilometric methods.

The method is applicable to the measurement of thicknesses of metal coatings from 0,01 µm to 1 000 µm

on flat surfaces and, if appropriate precautions are taken, on cylindrical surfaces. It is highly suitable

for the measurement of minute thicknesses but, for thicknesses of less than 0,01 µm, surface flatness

and surface smoothness are very critical and accordingly, the method is not recommended for use down

to the lowest level of measurement usual for electronic stylus instruments. The method is suitable for

measuring coating thicknesses when preparing coating thickness reference standards.

2 Normative references

The following documents are referred to in the text in such a way that some or all of their content

constitutes requirements of this document. For dated references, only the edition cited applies. For

undated references, the latest edition of the referenced document (including any amendments) applies.

ISO 2064, Metallic and other inorganic coatings — Definitions and conventions concerning the measurement

of thickness

ISO 2177, Metallic coatings — Measurement of coating thickness — Coulometric method by anodic

dissolution
3 Terms and definitions
No terms and definitions are listed in this document.

ISO and IEC maintain terminological databases for use in standardization at the following addresses:

— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at http:// www .electropedia .org/
4 Principle

Formation of a step either by dissolving part of the coating (acceptance testing) or by masking a portion

of the substrate prior to coating (production inspection). Measurement of the height of the step using a

profile recording instrument.
© ISO 2020 – All rights reserved 1
---------------------- Page: 7 ----------------------
oSIST prEN ISO 4518:2020
ISO/DIS 4518:2020(E)
5 Instrumentation: Operational parameters and measurement characteristics
5.1 Types of profile recording instruments
Either of three types may be used:

a) contact stylus instruments, known as surface analysers and surface profile recorders, generally

used to measure surface roughness but which, for the purposes of this document, are used to

record the profile of a step;

b) inductive measuring probe or displacement sensor (incremental oder absolute) capable of recording

the profile of a step.

c) optical profilometers, i. e. white-light interference microscopes or confocal microscopes (ordinary,

laser scanning, or chromatic), which are generally used to measure surface topographic information

and 3D surface roughness but which, for the purposes of this document, are used to record and

evaluate the profile of a step.

Stylus instruments may have a greater utility, being suitable for roughness and form measurements,

while measuring probes or displacement sensors may be simpler in construction. Stylus instruments

designed only for roughness generally cover a ranges of coating thickness from 0,005 µm to 250 µm, the

other contact instruments up to some 1 000 µm.
5.2 Stylus instruments

These instruments are used to record the profile of a surface and have the following components.

5.2.1 A pick-up with a conical or pyramidal stylus having an included angle of 1,05 rad (60°) or 1,57

rad (90°) and a nominal tip radius, in the di
...

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