ASTM E1078-14

Standard Guide for Specimen Preparation and Mounting in Surface Analysis

SIGNIFICANCE AND USE
4.1 Proper preparation and mounting of specimens is particularly critical for surface analysis. Improper preparation of specimens can result in alteration of the surface composition and unreliable data. Specimens should be handled carefully so as to avoid the introduction of spurious contaminants in the preparation and mounting process. The goal must be to preserve the state of the surface so that the analysis remains representative of the original.  
4.2 AES, XPS or ESCA, and SIMS are sensitive to surface layers that are typically a few nanometres thick. Such thin layers can be subject to severe perturbations caused by specimen handling (1)4 or surface treatments that may be necessary prior to introduction into the analytical chamber. In addition, specimen mounting techniques have the potential to affect the intended analysis.  
4.3 This guide describes methods that the surface analyst may need to minimize the effects of specimen preparation when using any surface-sensitive analytical technique. Also described are methods to mount specimens so as to ensure that the desired information is not compromised.  
4.4 Guide E1829 describes the handling of surface sensitive specimens and, as such, complements this guide.
SCOPE
1.1 This guide covers specimen preparation and mounting prior to, during, and following surface analysis and applies to the following surface analysis disciplines:  
1.1.1 Auger electron spectroscopy (AES),  
1.1.2 X-ray photoelectron spectroscopy (XPS and ESCA), and  
1.1.3 Secondary ion mass spectrometry (SIMS).  
1.1.4 Although primarily written for AES, XPS, and SIMS, these methods will also apply to many surface sensitive analysis methods, such as ion scattering spectrometry, low energy electron diffraction, and electron energy loss spectroscopy, where specimen handling can influence surface sensitive measurements.  
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 30-Sep-2014
• ICS: 71.040.50 - Physicochemical methods of analysis
• Technical Committee: E42 - Surface Analysis
• Drafting Committee: E42.03 - Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E1078 − 14
Standard Guide for
1
Specimen Preparation and Mounting in Surface Analysis
This standard is issued under the fixed designation E1078; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
3
1. Scope 2.2 ISO Standards:
ISO 18115–1 Surface chemical analysis—Vocabulary—Part
1.1 This guide covers specimen preparation and mounting
1: General terms and terms used in spectroscopy
prior to, during, and following surface analysis and applies to
ISO 18115–2 Surface chemical analysis—Vocabulary—Part
the following surface analysis disciplines:
2: Terms used in scanning-probe microscopy
1.1.1 Auger electron spectroscopy (AES),
1.1.2 X-ray photoelectron spectroscopy (XPS and ESCA),
3. Terminology
and
3.1 Definitions—For definitions of surface analysis terms
1.1.3 Secondary ion mass spectrometry (SIMS).
used in this guide, see ISO 18115-1 and ISO 18115-2.
1.1.4 Although primarily written forAES, XPS, and SIMS,
these methods will also apply to many surface sensitive
4. Significance and Use
analysis methods, such as ion scattering spectrometry, low
4.1 Proper preparation and mounting of specimens is par-
energy electron diffraction, and electron energy loss
ticularly critical for surface analysis. Improper preparation of
spectroscopy, where specimen handling can influence surface
specimens can result in alteration of the surface composition
sensitive measurements.
and unreliable data. Specimens should be handled carefully so
1.2 The values stated in SI units are to be regarded as
as to avoid the introduction of spurious contaminants in the
standard. No other units of measurement are included in this
preparation and mounting process. The goal must be to
standard.
preserve the state of the surface so that the analysis remains
1.3 This standard does not purport to address all of the
representative of the original.
safety concerns, if any, associated with its use. It is the
4.2 AES, XPS or ESCA, and SIMS are sensitive to surface
responsibility of the user of this standard to establish appro-
layers that are typically a few nanometres thick. Such thin
priate safety and health practices and determine the applica-
layers can be subject to severe perturbations caused by
bility of regulatory limitations prior to use.
4
specimen handling (1) or surface treatments that may be
necessary prior to introduction into the analytical chamber. In
2. Referenced Documents
addition, specimen mounting techniques have the potential to
2
2.1 ASTM Standards:
affect the intended analysis.
E983 Guide for Minimizing Unwanted Electron Beam Ef-
4.3 This guide describes methods that the surface analyst
fects in Auger Electron Spectroscopy
may need to minimize the effects of specimen preparation
E1127 Guide for Depth Profiling in Auger Electron Spec-
when using any surface-sensitive analytical technique. Also
troscopy
described are methods to mount specimens so as to ensure that
E1523 Guide to Charge Control and Charge Referencing
the desired information is not compromised.
Techniques in X-Ray Photoelectron Spectroscopy
E1829 Guide for Handling Specimens Prior to Surface 4.4 Guide E1829 describes the handling of surface sensitive
Analysis
specimens and, as such, complements this guide.
5. General Requirements
1
This guide is under the jurisdiction of ASTM Committee E42 on Surface
5.1 Although the handling techniques for AES, XPS, and
Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
SIMS are basically similar, there are some differences. In
Spectroscopy and X-Ray Photoelectron Spectroscopy.
general, preparation of specimens for AES and SIMS requires
Current edition approved Oct. 1, 2014. Published November 2014. Originally
approved in 1990. Last previous edition approved in 2009 as E1078 – 09. DOI:
10.1520/E1078-14.
2 3
For referenced ASTM standards, visit the ASTM website, www.astm.org, or Available from International Organization for Standardization (ISO), 1, ch. de
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM la Voie-Creuse, CP 56, CH-1211 Geneva 20, Switzerland, http://www.iso.org.
4
Standards volume information, refer to the standard’s Document Summary page on The boldface numbers in parentheses refer to a list of references at the end of
the ASTM website. this standard.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

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E1078 − 14
more attention because of potential problems with electron or sputtered away in the analytical chamber. Furthermore
...

This document is not an ASTM standard and is intended only to provide the user of an ASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation: E1078 − 09 E1078 − 14
Standard Guide for
1
Specimen Preparation and Mounting in Surface Analysis
This standard is issued under the fixed designation E1078; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1 This guide covers specimen preparation and mounting prior to, during, and following surface analysis and applies to the
following surface analysis disciplines:
1.1.1 Auger electron spectroscopy (AES),
1.1.2 X-ray photoelectron spectroscopy (XPS and ESCA), and
1.1.3 Secondary ion mass spectrometry (SIMS).
1.1.4 Although primarily written for AES, XPS, and SIMS, these methods will also apply to many surface sensitive analysis
methods, such as ion scattering spectrometry, low energy electron diffraction, and electron energy loss spectroscopy, where
specimen handling can influence surface sensitive measurements.
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
2
2.1 ASTM Standards:
3
E673 Terminology Relating to Surface Analysis (Withdrawn 2012)
E983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
E1127 Guide for Depth Profiling in Auger Electron Spectroscopy
E1523 Guide to Charge Control and Charge Referencing Techniques in X-Ray Photoelectron Spectroscopy
E1829 Guide for Handling Specimens Prior to Surface Analysis
3
2.2 ISO Standards:
ISO 18115–1 Surface chemical analysis—Vocabulary—Part 1: General terms and terms used in spectroscopy
ISO 18115–2 Surface chemical analysis—Vocabulary—Part 2: Terms used in scanning-probe microscopy
3. Terminology
3.1 Definitions—For definitions of surface analysis terms used in this guide, see TerminologyISO E673. 18115-1 and ISO
18115-2.
4. Significance and Use
4.1 Proper preparation and mounting of specimens is particularly critical for surface analysis. Improper preparation of
specimens can result in alteration of the surface composition and unreliable data. Specimens should be handled carefully so as to
avoid the introduction of spurious contaminants in the preparation and mounting process. The goal must be to preserve the state
of the surface so that the analysis remains representative of the original.
1
This guide is under the jurisdiction of ASTM Committee E42 on Surface Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
Spectroscopy and X-Ray Photoelectron Spectroscopy.
Current edition approved May 1, 2009Oct. 1, 2014. Published May 2009November 2014. Originally approved in 1990. Last previous edition approved in 20022009 as
E1078 – 02.E1078 – 09. DOI: 10.1520/E1078-09.10.1520/E1078-14.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM Standards
volume information, refer to the standard’s Document Summary page on the ASTM website.
3
The last approved version of this historical standard is referenced on www.astm.org.Available from International Organization for Standardization (ISO), 1, ch. de la
Voie-Creuse, CP 56, CH-1211 Geneva 20, Switzerland, http://www.iso.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
E1078 − 14
4.2 AES, XPS or ESCA, and SIMS are sensitive to surface layers that are typically a few nanometres thick. Such thin layers
4
can be subject to severe perturbations caused by specimen handling (1) or surface treatments that may be necessary prior to
introduction into the analytical chamber. In addition, specimen mounting techniques have the potential to affect the intended
analysis.
4.3 This guide describes methods that the surface analyst may need to minimize the effects of specimen preparation when using
any surface-sensitive analytical technique. Also described are methods to mount specimens so as to ensure that the desired
information is not compromised.
4.4 Guide E1829 desc
...