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ASTM E984-06

(Guide)

Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy

Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy

SIGNIFICANCE AND USE
Auger electron spectroscopy is often capable of yielding information concerning the chemical and physical environment of atoms in the near-surface region of a solid as well as giving elemental and quantitative information. This information is manifested as changes in the observed Auger electron spectrum for a particular element in the specimen under study compared to the Auger spectrum produced by the same element when it is in some reference form. The differences in the two spectra are said to be due to a chemical effect or a matrix effect. Despite sometimes making elemental identification and quantitative measurements more difficult, these effects in the Auger spectrum are considered valuable tools for characterizing the environment of the near-surface atoms in a solid.
SCOPE
1.1 This guide outlines the types of chemical effects and matrix effects which are observed in Auger electron spectroscopy.
1.2 Guidelines are given for the reporting of chemical and matrix effects in Auger spectra.
1.3 Guidelines are given for utilizing Auger chemical effects for identification or characterization.
1.4 This guide is applicable to both electron excited and X-ray excited Auger electron spectroscopy.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status
Historical
Publication Date
31-Oct-2006
ICS
71.040.50 - Physicochemical methods of analysis
Technical Committee
E42 - Surface Analysis
Drafting Committee
E42.03 - Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy
Current Stage
Ref Project

Relations

Replaces
ASTM E984-95(2001) - Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
Effective Date
01-Nov-2006

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ASTM E984-06 - Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron SpectroscopyASTM E984-06 - Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
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ASTM E984-06 - Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E984 − 06
StandardGuide for
Identifying Chemical Effects and Matrix Effects in Auger
1
Electron Spectroscopy
This standard is issued under the fixed designation E984; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope termined Relative Sensitivity Factors for the Quantitative
Analysis of Homogenous Materials
1.1 This guide outlines the types of chemical effects and
matrix effects which are observed in Auger electron spectros-
3. Terminology
copy.
3.1 Terms used in Auger electron spectroscopy are defined
1.2 Guidelines are given for the reporting of chemical and
in Terminology E673.
matrix effects in Auger spectra.
4. Significance and Use
1.3 GuidelinesaregivenforutilizingAugerchemicaleffects
for identification or characterization.
4.1 Augerelectronspectroscopyisoftencapableofyielding
informationconcerningthechemicalandphysicalenvironment
1.4 This guide is applicable to both electron excited and
of atoms in the near-surface region of a solid as well as giving
X-ray excited Auger electron spectroscopy.
elemental and quantitative information. This information is
1.5 This standard does not purport to address all of the
manifestedaschangesintheobservedAugerelectronspectrum
safety concerns, if any, associated with its use. It is the
for a particular element in the specimen under study compared
responsibility of the user of this standard to establish appro-
to the Auger spectrum produced by the same element when it
priate safety and health practices and determine the applica-
is in some reference form. The differences in the two spectra
bility of regulatory limitations prior to use.
are said to be due to a chemical effect or a matrix effect.
Despite sometimes making elemental identification and quan-
2. Referenced Documents
titative measurements more difficult, these effects in theAuger
2
2.1 ASTM Standards:
spectrum are considered valuable tools for characterizing the
E673 Terminology Relating to SurfaceAnalysis (Withdrawn
environment of the near-surface atoms in a solid.
3
2012)
E827 Practice for Identifying Elements by the Peaks in
5. Defining Auger Chemical Effects and Matrix Effects
Auger Electron Spectroscopy
5.1 Ingeneral,Augerchemicalandmatrixeffectsmayresult
E983 Guide for Minimizing Unwanted Electron Beam Ef-
in(a)ashiftintheenergyofanAugerpeak,(b)achangeinthe
fects in Auger Electron Spectroscopy
shape of anAuger electron energy distribution, (c) a change in
E996 Practice for Reporting Data in Auger Electron Spec-
the shape of the electron energy loss distribution associated
troscopy and X-ray Photoelectron Spectroscopy
with an Auger peak, or (d) a change in the Auger signal
2.2 Other Documents:
strengths of an Auger transition. The above changes may be
ISO 18118:2004 Surface Chemical Analysis—Auger Elec-
due to the bonding or chemical environment of the element
tron Spectroscopy and X-ray Photoelectron
(chemical effect) or to the distribution of the element or
Spectroscopy—Guide to the Use of Experimentally De-
compound within the specimen (matrix effect).
5.2 The Auger chemical shift is one of the most commonly
1
This guide is under the jurisdiction of ASTM Committee E42 on Surface
observed chemical effects. A comparison can be made to the
Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
more familiar chemical shifts in XPS (X-ray photoelectron
Spectroscopy and X-Ray Photoelectron Spectroscopy.
Current edition approved Nov. 1, 2006. Published November 2006. Originally spectroscopy) photoelectron lines, where energy shifts are
approved in 1984. Last previous edition approved in 2001 as E984 – 95 (2001).
caused by changes in the ionic charge on an atom, the lattice
DOI: 10.1520/E0984-06.
potential at that atomic site, and the final-state relaxation
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
4
energy contributed by adjacent atoms (1 and 2). Coverage by
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website.
3 4
The last approved version of this historical standard is referenced on The boldface numbers in parentheses refer to the references at the end of this
www.astm.org. standard.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
E984 − 06
FIG. 1 Comparison of X-ray Excited Cd MNN Auger and 3d Pho-
toelectron Energy Shifts for Cd Metal, CdO, and CdF (Ref 13)
2
FIG. 2 Carbon KLL Aug
...

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5.1 Electron multipliers are commonly used in pulse-counting mode to detect ions from magnetic sector mass spectrometers. The electronics used to amplify, detect and count pulses from the electron multipliers always have a characteristic time interval after the detection of a pulse, during which no other pulses can be counted. This characteristic time interval is known as the “dead time.” The dead time has the effect of reducing the measured count rate compared with the “true” count rate.  
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