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ASTM E984-12

(Guide)

Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy

Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy

SIGNIFICANCE AND USE
4.1 Auger electron spectroscopy is often capable of yielding information concerning the chemical and physical environment of atoms in the near-surface region of a solid as well as giving elemental and quantitative information. This information is manifested as changes in the observed Auger electron spectrum for a particular element in the specimen under study compared to the Auger spectrum produced by the same element when it is in some reference form. The differences in the two spectra are said to be due to a chemical effect or a matrix effect. Despite sometimes making elemental identification and quantitative measurements more difficult, these effects in the Auger spectrum are considered valuable tools for characterizing the environment of the near-surface atoms in a solid.
SCOPE
1.1 This guide outlines the types of chemical effects and matrix effects which are observed in Auger electron spectroscopy.  
1.2 Guidelines are given for the reporting of chemical and matrix effects in Auger spectra.  
1.3 Guidelines are given for utilizing Auger chemical effects for identification or characterization.  
1.4 This guide is applicable to both electron excited and X-ray excited Auger electron spectroscopy.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status
Historical
Publication Date
31-Oct-2012
ICS
71.040.50 - Physicochemical methods of analysis
Technical Committee
E42 - Surface Analysis
Drafting Committee
E42.03 - Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy
Current Stage
Ref Project

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ASTM E984-12 - Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron SpectroscopyASTM E984-12 - Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
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Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E984 − 12
Standard Guide for
Identifying Chemical Effects and Matrix Effects in Auger
1
Electron Spectroscopy
This standard is issued under the fixed designation E984; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope termined Relative Sensitivity Factors for the Quantitative
Analysis of Homogenous Materials
1.1 This guide outlines the types of chemical effects and
matrix effects which are observed in Auger electron spectros-
3. Terminology
copy.
3.1 Terms used in Auger electron spectroscopy are defined
1.2 Guidelines are given for the reporting of chemical and
in Terminology E673.
matrix effects in Auger spectra.
4. Significance and Use
1.3 GuidelinesaregivenforutilizingAugerchemicaleffects
for identification or characterization.
4.1 Augerelectronspectroscopyisoftencapableofyielding
informationconcerningthechemicalandphysicalenvironment
1.4 This guide is applicable to both electron excited and
of atoms in the near-surface region of a solid as well as giving
X-ray excited Auger electron spectroscopy.
elemental and quantitative information. This information is
1.5 This standard does not purport to address all of the
manifestedaschangesintheobservedAugerelectronspectrum
safety concerns, if any, associated with its use. It is the
for a particular element in the specimen under study compared
responsibility of the user of this standard to establish appro-
to the Auger spectrum produced by the same element when it
priate safety and health practices and determine the applica-
is in some reference form. The differences in the two spectra
bility of regulatory limitations prior to use.
are said to be due to a chemical effect or a matrix effect.
Despite sometimes making elemental identification and quan-
2. Referenced Documents
titative measurements more difficult, these effects in theAuger
2
2.1 ASTM Standards:
spectrum are considered valuable tools for characterizing the
E673 Terminology Relating to SurfaceAnalysis (Withdrawn
environment of the near-surface atoms in a solid.
3
2012)
E827 Practice for Identifying Elements by the Peaks in
5. Defining Auger Chemical Effects and Matrix Effects
Auger Electron Spectroscopy
5.1 Ingeneral,Augerchemicalandmatrixeffectsmayresult
E983 Guide for Minimizing Unwanted Electron Beam Ef-
in(a)ashiftintheenergyofanAugerpeak,(b)achangeinthe
fects in Auger Electron Spectroscopy
shape of anAuger electron energy distribution, (c) a change in
E996 Practice for Reporting Data in Auger Electron Spec-
the shape of the electron energy loss distribution associated
troscopy and X-ray Photoelectron Spectroscopy
with an Auger peak, or (d) a change in the Auger signal
2.2 Other Documents:
strengths of an Auger transition. The above changes may be
ISO 18118:2004 Surface Chemical Analysis—Auger Elec-
due to the bonding or chemical environment of the element
tron Spectroscopy and X-ray Photoelectron
(chemical effect) or to the distribution of the element or
Spectroscopy—Guide to the Use of Experimentally De-
compound within the specimen (matrix effect).
5.2 The Auger chemical shift is one of the most commonly
1
This guide is under the jurisdiction of ASTM Committee E42 on Surface
observed chemical effects. A comparison can be made to the
Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
more familiar chemical shifts in XPS (X-ray photoelectron
Spectroscopy and X-Ray Photoelectron Spectroscopy.
Current edition approved Nov. 1, 2012. Published December 2012. Originally spectroscopy) photoelectron lines, where energy shifts are
approved in 1984. Last previous edition approved in 2006 as E984 – 06. DOI:
caused by changes in the ionic charge on an atom, the lattice
10.1520/E0984-12.
potential at that atomic site, and the final-state relaxation
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
4
energycontributedbyadjacentatoms (1 and 2). Frequentlyan
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website.
3 4
The last approved version of this historical standard is referenced on The boldface numbers in parentheses refer to the references at the end of this
www.astm.org. standard.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
E984 − 12
FIG. 2 Silicon LVV Auger Spectra for Seven Samples of Differing
Dopant Concentrations and Types (Ref. 4)
FIG. 1 Comparison of X-Ray Excited Cd MNN Auger
...

This document is not an ASTM standard and is intended only to provide the user of an ASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation: E984 − 06 E984 − 12
Standard Guide for
Identifying Chemical Effects and Matrix Effects in Auger
1
Electron Spectroscopy
This standard is issued under the fixed designation E984; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1 This guide outlines the types of chemical effects and matrix effects which are observed in Auger electron spectroscopy.
1.2 Guidelines are given for the reporting of chemical and matrix effects in Auger spectra.
1.3 Guidelines are given for utilizing Auger chemical effects for identification or characterization.
1.4 This guide is applicable to both electron excited and X-ray excited Auger electron spectroscopy.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
2
2.1 ASTM Standards:
3
E673 Terminology Relating to Surface Analysis (Withdrawn 2012)
E827 Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy
E983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
E996 Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
2.2 Other Documents:
ISO 18118:2004 Surface Chemical Analysis—Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy—Guide to
the Use of Experimentally Determined Relative Sensitivity Factors for the Quantitative Analysis of Homogenous Materials
3. Terminology
3.1 Terms used in Auger electron spectroscopy are defined in Terminology E673.
4. Significance and Use
4.1 Auger electron spectroscopy is often capable of yielding information concerning the chemical and physical environment of
atoms in the near-surface region of a solid as well as giving elemental and quantitative information. This information is manifested
as changes in the observed Auger electron spectrum for a particular element in the specimen under study compared to the Auger
spectrum produced by the same element when it is in some reference form. The differences in the two spectra are said to be due
to a chemical effect or a matrix effect. Despite sometimes making elemental identification and quantitative measurements more
difficult, these effects in the Auger spectrum are considered valuable tools for characterizing the environment of the near-surface
atoms in a solid.
5. Defining Auger Chemical Effects and Matrix Effects
5.1 In general, Auger chemical and matrix effects may result in (a) a shift in the energy of an Auger peak, (b) a change in the
shape of an Auger electron energy distribution, (c) a change in the shape of the electron energy loss distribution associated with
1
This guide is under the jurisdiction of ASTM Committee E42 on Surface Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
Spectroscopy and X-Ray Photoelectron Spectroscopy.
Current edition approved Nov. 1, 2006Nov. 1, 2012. Published November 2006December 2012. Originally approved in 1984. Last previous edition approved in 20012006
as E984 – 95 (2001).E984 – 06. DOI: 10.1520/E0984-06.10.1520/E0984-12.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM Standards
volume information, refer to the standard’s Document Summary page on the ASTM website.
3
The last approved version of this historical standard is referenced on www.astm.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
E984 − 12
FIG. 1 Comparison of X-rayX-Ray Excited Cd MNN Auger and 3d Photoelectron Energy Shifts for Cd Metal, CdO, and CdF (Ref(Ref.
2
1316)
an Auger peak, or (d) a change in the Auger signal strengths of an Auger transition. The above changes may be due to the bonding
or chemical environment of the element (chemical effect) or to the distribution of the element or compound within the specimen
(matrix effect).
5.2 The Auger chemical shift is one of the most commonly observed chemical effects. A comparison can be made to the more
familiar chemic
...

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SIGNIFICANCE AND USE
5.1 Electron multipliers are commonly used in pulse-counting mode to detect ions from magnetic sector mass spectrometers. The electronics used to amplify, detect and count pulses from the electron multipliers always have a characteristic time interval after the detection of a pulse, during which no other pulses can be counted. This characteristic time interval is known as the “dead time.” The dead time has the effect of reducing the measured count rate compared with the “true” count rate.  
5.2 In order to measure count rates accurately over the entire dynamic range of a pulse counting detector, such as an electron multiplier, the dead time of the entire pulse counting system must be well known. Accurate count rate measurement forms the basis of isotopic ratio measurements as well as elemental abundance determinations.  
5.3 The procedure described herein has been successfully used to determine the dead time of counting systems on SIMS instruments.6 The accurate determination of the dead time by this method has been a key component of precision isotopic ratio measurements made by SIMS.
SCOPE
1.1 This practice provides the Secondary Ion Mass Spectrometry (SIMS) analyst with a method for determining the dead time of the pulse-counting detection systems on the instrument. This practice also allows the analyst to determine whether the apparent dead time is independent of count rate.  
1.2 This practice is applicable to most types of mass spectrometers that have pulse-counting detectors.  
1.3 This practice does not describe methods for precise or accurate isotopic ratio measurements.  
1.4 This practice does not describe methods for the proper operation of pulse counting systems and detectors for mass spectrometry.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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