ISO 18516:2019
(Main)Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are — the straight edge method; — the narrow line method; — the grating method. This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.
Analyse chimique des surfaces — Détermination de la résolution latérale et de la netteté par des méthodes à base de faisceau utilisant une gamme allant des nanomètres aux micromètres
General Information
Relations
Buy Standard
Standards Content (Sample)
INTERNATIONAL ISO
STANDARD 18516
Second edition
2019-01
Surface chemical analysis —
Determination of lateral resolution
and sharpness in beam based methods
with a range from nanometres to
micrometres
Analyse chimique des surfaces — Détermination de la résolution
latérale et de la netteté par des méthodes à base de faisceau utilisant
une gamme allant des nanomètres aux micromètres
Reference number
©
ISO 2019
© ISO 2019
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2019 – All rights reserved
Contents Page
Foreword .v
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 3
5 General information . 4
5.1 Background . 4
5.2 Survey on principal methods to characterize lateral resolution in imaging surface
chemical analysis . 5
5.3 Measurement of lateral resolution in imaging surface chemical analysis . 6
5.4 Dependence of lateral resolution on scan direction . 6
5.5 Reporting results . 7
6 Measurement of lateral resolution using the straight edge method .8
6.1 Introduction . 8
6.2 Model functions and sharpness parameters . 8
6.3 Requirements for a test sample . 9
6.4 Cleaning the straight-edge specimen .10
6.5 Mounting the straight-edge specimen .10
6.6 Operating the instrument .10
6.7 Data acquisition requirements .10
6.8 Determination of D .11
12−88
6.9 Determination of line spread function .11
6.10 Reporting .11
7 Measurement of lateral resolution using the narrow line method .13
7.1 Introduction .13
7.2 Requirements for a test sample .13
7.3 Cleaning the narrow stripe specimen .13
7.4 Mounting the narrow stripe specimen .14
7.5 Operating the instrument .14
7.6 Data acquisition requirements .14
7.7 Determination of w .14
LSF
7.8 Reporting .15
8 Measurement of lateral resolution using the grating method .17
8.1 Introduction .17
8.2 Requirements for a test sample .17
8.3 Cleaning the grating specimen .19
8.4 Mounting the grating specimen.19
8.5 Operating the instrument .20
8.6 Data acquisition .20
8.7 Estimation of effective lateral resolution r by visual inspection of an image or a
e
line scan .20
8.8 Determination of effective lateral resolution r by numerical analysis of a line profile .23
e
8.8.1 General.23
8.8.2 Consideration of noise and determination of reduced noise σ .23
Nr
8.8.3 Determination of dip D .24
8.8.4 Resolution criterion .25
8.9 Determination of the effective lateral resolution r using graded gratings .26
e
8.9.1 Estimation of effective lateral resolution r by using the resolution
e
criterion in Formula (17).26
8.9.2 Determination of effective lateral resolution r by using Formula (17) and
e
an interpolation–extrapolation method .27
8.10 Reporting .29
Annex A (informative) The relation between sharpness parameters and effective lateral
resolution .31
Annex B (informative) Straight edge method: systematic underestimation of D caused
12−88
by insufficient plateau length L .33
pl
Annex C (informative) Straight edge method: required length ranges for L .35
ESF
Annex D (informative) Straight edge method: the uncertainty of D .36
12−88
Annex E (informative) Narrow stripe method: systematic overestimation of w caused by
LSF
inappropriately large widths w of the imaged stripe .37
s
Annex F (informative) Narrow line method: the uncertainty of w .39
LSF
Annex G (informative) Imaging of square gratings: reduction of image period for three-
stripe gratings .40
Annex H (informative) Imaging of square gratings: relation between signal-to-noise ratio
and effective lateral resolution .43
Annex I (informative) Imaging of square gratings: minimum number of sampling points per
period .46
Annex J (informative) Imaging of square gratings: uncertainty of r determined by visual
e
inspection of an image or line scan over a series of gratings .47
Annex K (informative) Imaging of square gratings: Uncertainty of r determined by
e
interpolation–extrapolation .48
Annex L (informative) Determination of lateral resolution by imaging of square wave
gratings — practical example for SIMS .50
Bibliography .53
iv © ISO 2019 – All rights reserved
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/directives).
Attention is drawn to the po
...
INTERNATIONAL ISO
STANDARD 18516
Second edition
2019-01
Surface chemical analysis —
Determination of lateral resolution
and sharpness in beam based methods
with a range from nanometres to
micrometres
Analyse chimique des surfaces — Détermination de la résolution
latérale et de la netteté par des méthodes à base de faisceau utilisant
une gamme allant des nanomètres aux micromètres
Reference number
©
ISO 2019
© ISO 2019
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2019 – All rights reserved
Contents Page
Foreword .v
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 3
5 General information . 4
5.1 Background . 4
5.2 Survey on principal methods to characterize lateral resolution in imaging surface
chemical analysis . 5
5.3 Measurement of lateral resolution in imaging surface chemical analysis . 6
5.4 Dependence of lateral resolution on scan direction . 6
5.5 Reporting results . 7
6 Measurement of lateral resolution using the straight edge method .8
6.1 Introduction . 8
6.2 Model functions and sharpness parameters . 8
6.3 Requirements for a test sample . 9
6.4 Cleaning the straight-edge specimen .10
6.5 Mounting the straight-edge specimen .10
6.6 Operating the instrument .10
6.7 Data acquisition requirements .10
6.8 Determination of D .11
12−88
6.9 Determination of line spread function .11
6.10 Reporting .11
7 Measurement of lateral resolution using the narrow line method .13
7.1 Introduction .13
7.2 Requirements for a test sample .13
7.3 Cleaning the narrow stripe specimen .13
7.4 Mounting the narrow stripe specimen .14
7.5 Operating the instrument .14
7.6 Data acquisition requirements .14
7.7 Determination of w .14
LSF
7.8 Reporting .15
8 Measurement of lateral resolution using the grating method .17
8.1 Introduction .17
8.2 Requirements for a test sample .17
8.3 Cleaning the grating specimen .19
8.4 Mounting the grating specimen.19
8.5 Operating the instrument .20
8.6 Data acquisition .20
8.7 Estimation of effective lateral resolution r by visual inspection of an image or a
e
line scan .20
8.8 Determination of effective lateral resolution r by numerical analysis of a line profile .23
e
8.8.1 General.23
8.8.2 Consideration of noise and determination of reduced noise σ .23
Nr
8.8.3 Determination of dip D .24
8.8.4 Resolution criterion .25
8.9 Determination of the effective lateral resolution r using graded gratings .26
e
8.9.1 Estimation of effective lateral resolution r by using the resolution
e
criterion in Formula (17).26
8.9.2 Determination of effective lateral resolution r by using Formula (17) and
e
an interpolation–extrapolation method .27
8.10 Reporting .29
Annex A (informative) The relation between sharpness parameters and effective lateral
resolution .31
Annex B (informative) Straight edge method: systematic underestimation of D caused
12−88
by insufficient plateau length L .33
pl
Annex C (informative) Straight edge method: required length ranges for L .35
ESF
Annex D (informative) Straight edge method: the uncertainty of D .36
12−88
Annex E (informative) Narrow stripe method: systematic overestimation of w caused by
LSF
inappropriately large widths w of the imaged stripe .37
s
Annex F (informative) Narrow line method: the uncertainty of w .39
LSF
Annex G (informative) Imaging of square gratings: reduction of image period for three-
stripe gratings .40
Annex H (informative) Imaging of square gratings: relation between signal-to-noise ratio
and effective lateral resolution .43
Annex I (informative) Imaging of square gratings: minimum number of sampling points per
period .46
Annex J (informative) Imaging of square gratings: uncertainty of r determined by visual
e
inspection of an image or line scan over a series of gratings .47
Annex K (informative) Imaging of square gratings: Uncertainty of r determined by
e
interpolation–extrapolation .48
Annex L (informative) Determination of lateral resolution by imaging of square wave
gratings — practical example for SIMS .50
Bibliography .53
iv © ISO 2019 – All rights reserved
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/directives).
Attention is drawn to the po
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.