ASTM E827-07

Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy

SCOPE
1.1 This practice outlines the necessary steps for the identification of elements in a given Auger spectrum obtained using conventional electron spectrometers. Spectra displayed as either the electron energy distribution (direct spectrum) or the first derivative of the electron energy distribution are considered.
1.2 This practice applies to Auger spectra generated by electron or X-ray bombardment of the specimen surface and can be extended to spectra generated by other methods such as ion bombardment.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 30-Sep-2007
• ICS: 71.040.50 - Physicochemical methods of analysis
• Technical Committee: E42 - Surface Analysis
• Drafting Committee: E42.03 - Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy

Relations

• Replaces: ASTM E827-02 - Standard Practice for Indentifying Elements by the Peaks in Auger Electron Spectroscopy
• Effective Date: 01-Oct-2007
• Replaced By: ASTM E827-08 - Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy (Withdrawn 2017)
• Effective Date: 01-Oct-2008
• Referred By: ASTM E1127-08(2015) - Standard Guide for Depth Profiling in Auger Electron Spectroscopy
• Effective Date: 01-Oct-2007
• Referred By: ASTM E984-12(2020) - Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
• Effective Date: 01-Oct-2007

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:E827–07
Standard Practice for
Identifying Elements by the Peaks in Auger Electron
1
Spectroscopy
This standard is issued under the fixed designation E827; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope 4. Summary of Practice
1.1 This practice outlines the necessary steps for the iden- 4.1 TheAugerspectrumisobtainedwithappropriateinstru-
tificationofelementsinagivenAugerspectrumobtainedusing mental parameters from a low kinetic energy limit of approxi-
conventional electron spectrometers. Spectra displayed as ei- mately30eVtoanupperkineticenergylimitofapproximately
ther the electron energy distribution (direct spectrum) or the 2000 to 3000 eV or higher to include all the principal Auger
first derivative of the electron energy distribution are consid- electron energies of all elements (except H and He which do
ered. not have Auger transitions).
1.2 This practice applies to Auger spectra generated by 4.2 This practice assumes the existence of appropriate
electron or X-ray bombardment of the specimen surface and reference spectra from pure element or stoichiometric com-
canbe extended to spectrageneratedbyothermethodssuchas pound standards, or both, with which an unknown spectrum
3
ion bombardment. canbecompared (1, 2). Itmaybeusefultonotethatalthough
1.3 The values stated in SI units are to be regarded as Auger energies in some data bases are referenced to the Fermi
standard. No other units of measurement are included in this level, other data collections have been referenced to the
standard. vacuum level. Auger kinetic energies referenced to the Fermi
1.4 This standard does not purport to address all of the level would be approximately 5 eV larger than values refer-
safety concerns, if any, associated with its use. It is the enced to the vacuum level.
responsibility of the user of this standard to establish appro- 4.3 An element in an Auger spectrum is considered posi-
priate safety and health practices and determine the applica- tively identified if the peak shapes, the peak energies, and the
bility of regulatory limitations prior to use. relative signal strengths of peaks from the unknown coincide
with those from a standard reference spectrum of the element
2. Referenced Documents
or compound.
2
2.1 ASTM Standards:
5. Significance and Use
E673 Terminology Relating to Surface Analysis
E983 Guide for Minimizing Unwanted Electron Beam 5.1 Auger analysis is used to determine the elemental
Effects in Auger Electron Spectroscopy composition of the first several atomic layers, typically 1 to 5
E984 Guide for Identifying Chemical Effects and Matrix nm thick, of a specimen surface. In conjunction with inert gas
Effects in Auger Electron Spectroscopy ion sputtering, it is used to determine the sputter depth profile
E1523 Guide to Charge Control and Charge Referencing to a depth of a few micrometres.
Techniques in X-Ray Photoelectron Spectroscopy 5.2 The specimen is normally a solid conductor, semicon-
ductor, or insulator. For insulators, provisions may be required
3. Terminology
for control of charge accumulation at the surface (see Guide
3.1 Terms used in Auger electron spectroscopy are defined E1523). Typical applications include the analysis of surface
in Terminology E673.
contaminants, thin film deposits or segregated overlayers on
metallic or alloy substrates. The specimen topography may
1 vary from a smooth, polished specimen to a rough fracture
This practice is under the jurisdiction of ASTM Committee E42 on Surface
surface.
AnalysisandisthedirectresponsibilityofSubcommitteeE42.03onAugerElectron
Spectroscopy and X-Ray Photoelectron Spectroscopy.
5.3 Auger analysis of specimens with volatile species that
Current edition approved Oct. 1, 2007. Published December 2007. Originally
evaporate in the ultra-high vacuum environment of the Auger
approved in 1981. Last previous edition approved in 2002 as E827–02.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
3
Standards volume information, refer to the standard’s Document Summary page on Theboldfacenumbersinparenthesesrefertothelistofreferencesattheendof
the ASTM website. this standard.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
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E827–07
chamber and substances which are susceptible to electron or detected, an element present at a small concentration may
X-ray beam damage, such as organic compounds, may require registe
...

This document is not anASTM standard and is intended only to provide the user of anASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately,ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation:E827–02 Designation: E 827 – 07
Standard Practice for
Indentifying Elements by the Peaks in Auger Electron
1
Spectroscopy
This standard is issued under the fixed designation E827; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1 This practice outlines the necessary steps for the identification of elements in a given Auger spectrum obtained using
conventional electron spectrometers. Spectra displayed as either the electron energy distribution (direct spectrum) or the first
derivative of the electron energy distribution are considered.
1.2 This practice applies to Auger spectra generated by electron or X-ray bombardment of the specimen surface and can be
extended to spectra generated by other methods such as ion bombardment.
1.3
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
2
2.1 ASTM Standards:
E673 Terminology Relating to Surface Analysis
E983 Guide for Minimizing Unwanted Electron Beam Effects Inin Auger Electron Spectroscopy
E984 Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
E1523 Guide to Charge Control and Charge Referencing Techniques in X-Ray Photoelectron Spectroscopy
3. Terminology
3.1 Terms used in Auger electron spectroscopy are defined in Terminology E673.
4. Summary of Practice
4.1 TheAugerspectrumisobtainedwithappropriateinstrumentalparametersfromalowkineticenergylimitofapproximately
30 eV to an upper kinetic energy limit of approximately 2000 to 3000 eV or higher to include all the principal Auger electron
energies of all elements (except H and He which do not have Auger transitions).
4.2 This practice assumes the existence of appropriate reference spectra from pure element or stoichiometric compound
3
standards,orboth,withwhichanunknownspectrumcanbecompared(1,2). ItmaybeusefultonotethatalthoughAugerenergies
insomedatabasesarereferencedtotheFermilevel,otherdatacollectionshavebeenreferencedtothevacuumlevel.Augerkinetic
energies referenced to the Fermi level would be approximately 5 eV larger than values referenced to the vacuum level.
4.3 An element in anAuger spectrum is considered positively identified if the peak shapes, the peak energies, and the relative
signal strengths of peaks from the unknown coincide with those from a standard reference spectrum of the element or compound.
5. Significance and Use
5.1 Auger analysis is used to determine the elemental composition of the first fewseveral atomic layers, typically 0.51 to 2.05
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
Spectroscopy and XPS.
Current edition approved April 10, 2002. Published April 2002. Originally published as E827–81. Last previous edition E827–95.
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
Spectroscopy and X-Ray Photoelectron Spectroscopy.
Current edition approved Oct. 1, 2007. Published December 2007. Originally approved in 1981. Last previous edition approved in 2002 as E827–02.
2
ForreferencedASTMstandards,visittheASTMwebsite,www.astm.org,[e-mail] Annual Book ofASTM Standards
, Vol 03.06.volume information, refer to the standard’s Document Summary page on the ASTM website.
3
The boldface numbers in parentheses refer to the list of references at the end of this standard.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1

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E827–07
nm thick, of a specimen surface. In conjunction with inert gas ion sputtering, it is used to determine the sputter depth profile to
a depth of a few micrometres.
5.2 The specimen is normally a solid conductor, semiconductor, or insulator. For insulators, provisions may be required for
c
...