ASTM E2042/E2042M-09(2016)

Standard Practice for Cleaning and Maintaining Controlled Areas and Clean Rooms

SIGNIFICANCE AND USE
4.1 This practice identifies methods for cleaning and maintaining controlled areas and clean rooms as defined by ISO 14644-1 and ISO 14644-2. Cleaning procedures are described, and cleaning frequency for different classes of facility are given. Compliance with this practice will make it easier and more likely that the required level of facility cleanliness will be maintained. A cleaner facility also will help to protect flight hardware from contamination and should reduce the frequency for cleaning flight hardware. This practice does not discuss operation and operational procedures for cleanrooms and controlled areas. Other documents such as IEST-RP-CC026 and Practice E2352 provide recommended practices for operating cleanrooms and controlled areas.
SCOPE
1.1 This practice covers the procedures to be followed for the initial cleaning and normal maintenance of cleanrooms and controlled areas. This practice is applicable to aerospace clean areas where both particles and molecular films (NVR) must be controlled.  
1.2 Units—The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 30-Sep-2016
• ICS: 13.040.35 - Cleanrooms and associated controlled environments
• Technical Committee: E21 - Space Simulation and Applications of Space Technology
• Drafting Committee: E21.05 - Contamination

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E2042/E2042M − 09 (Reapproved 2016)
Standard Practice for
Cleaning and Maintaining Controlled Areas and Clean
Rooms
ThisstandardisissuedunderthefixeddesignationE2042/E2042M;thenumberimmediatelyfollowingthedesignationindicatestheyear
of original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope E2352 Practice for Aerospace Cleanrooms and Associated
Controlled Environments—Cleanroom Operations
1.1 This practice covers the procedures to be followed for
F24 Test Method for Measuring and Counting Particulate
the initial cleaning and normal maintenance of cleanrooms and
Contamination on Surfaces
controlled areas. This practice is applicable to aerospace clean
F25 Test Method for Sizing and Counting Airborne Particu-
areas where both particles and molecular films (NVR) must be
late Contamination in Cleanrooms and Other Dust-
controlled.
Controlled Areas
1.2 Units—The values stated in either SI units or inch-
F50 Practice for Continuous Sizing and Counting of Air-
pound units are to be regarded separately as standard. The
borne Particles in Dust-Controlled Areas and Clean
values stated in each system may not be exact equivalents;
Rooms Using Instruments Capable of Detecting Single
therefore,eachsystemshallbeusedindependentlyoftheother.
Sub-Micrometre and Larger Particles
Combining values from the two systems may result in non-
conformance with the standard.
2.2 IEST Standards:
1.3 This standard does not purport to address all of the IEST-RP-CC007 Testing ULPA Filters
safety concerns, if any, associated with its use. It is the
IEST-RP-CC016 The Rate of Deposition of Nonvolatile
responsibility of the user of this standard to establish appro-
Residue in Cleanrooms
priate safety and health practices and determine the applica-
IEST-RP-CC0018 Cleanroom Housekeeping and Monitor-
bility of regulatory limitations prior to use.
ing Procedures
IEST-RP-CC003 Garment System Considerations for Clean-
2. Referenced Documents
rooms and Other Controlled Environments
2.1 ASTM Standards:
IEST-RP-CC026 Cleanroom Operations
D1193 Specification for Reagent Water
IEST-STD-CC1246D Product Cleanliness Levels and Con-
E1234 Practice for Handling, Transporting, and Installing
tamination Control Program
Nonvolatile Residue (NVR) Sample Plates Used in Envi-
2.3 US Federal Standards:
ronmentally Controlled Areas for Spacecraft
FED-STD-209E Airborne Particulate Cleanliness Classes in
E1235 Test Method for Gravimetric Determination of Non-
Cleanrooms and Clean Zones
volatile Residue (NVR) in Environmentally Controlled
TT-I-735 Isopropyl Alcohol
Areas for Spacecraft
O-A-51 Acetone
E1549 Specification for ESD Controlled Garments Required
in Cleanrooms and Controlled Environments for Space-
2.4 US Department of Defense Standards:
craft for Non-Hazardous and Hazardous Operations
MIL-D-16791 Detergents, General Purpose (Liquid, Non-
E1560 Test Method for Gravimetric Determination of Non-
Ionic)
volatile Residue From Cleanroom Wipers
1 3
This practice is under the jurisdiction of ASTM Committee E21 on Space Available from Institute of Environmental Science and Technology (IEST),
Simulation andApplications of Space Technology and is the direct responsibility of 5005 Newport Dr., Suite 506, Rolling Meadows, IL 60008-3841.
Subcommittee E21.05 on Contamination. IEST-STD-CC1246D replaced MIL-STD-1246.
Current edition approved Oct. 1, 2016. Published October 2016. Originally Available from Superintendent of Documents, US Government Printing Office,
approved in 1999. Last previous edition approved in 2009 as E2042 – 09. DOI: Washington, DC 20402.
10.1520/E2042_E2042M-09R16. Cancelled Nov. 29, 2001 and replaced with ISO 14644-1 and 14644-2.
For referenced ASTM standards, visit the ASTM website, www.astm.org, or FED-STD-209E may be used by mutual agreement between buyer and seller.
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM Available from U.S. Government Printing Office, Superintendent of Documents,
Standards volume information, refer to the standard’s Document Summary page on 732 N. Capitol St., NW, Mail Stop: SDE, Washington, DC 20401. FS209E
the ASTM website. cleanroom classes are given for reference in parentheses after the ISO classes.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
E2042/E2042M − 09 (2016)
2.5 International Standards: 3.1.5 cleanroom, operational, n—a cleanroom in normal
ISO 14644-1 Cleanrooms and Associated Controlled operation, with all services functioning and with equipment
Environments—Part 1: Classification of Air Cleanliness and personnel, if applicable, present and performing their
ISO 14644-2 Cleanrooms and Associated Controlled normal work functions in the room.
Environments—Part 2: Specifications for Testing and
3.1.6 clean facility, n—the total real property required to
Monitoring to Prove Continued Compliance with ISO
accomplish the cleanroom functions.
14644-1
3.1.6.1 Discussion—In addition to the cleanroom and asso-
ciated clean areas, this includes utility rooms, storage areas,
3. Terminology
offices, lockers, wash-rooms, and other areas that do not
3.1 Definitions of Terms Specific to This Standard:
necessarily require precise environmental control.
3.1.1 clean zone, n—a defined space in which the concen-
3.1.7 controlled area, n—an environmentally controlled
tration of airborne particles is controlled to specified limits.
area, operated as a cleanroom, but without the final stage of
3.1.2 cleanroom, n—a room in which the air filtration, air
HEPA filters. Controlled areas would meet ISO Class 8.5
distribution, utilities, materials of construction, equipment, and
(FED-STD-209E equivalent to Class 300 000) per Table 1.
operating procedures are specified and regulated to control
3.1.7.1 Discussion—Only rough filters (50 to 60 % effi-
airborne particle concentrations to meet appropriate airborne
ciency) and medium efficiency filters (80 to 85 % efficiency)
particulate cleanliness classifications, as defined by ISO
are required for a controlled area. The maximum allowable
14644-1.
airborne particle concentrations in a controlled area are
11 100 000⁄m per ISO Class 8.5 for particles ≥0.5 µm and 92
3.1.3 cleanroom, as-built, n—a cleanroom that is complete
3 3 3
500/m (2620 particles/ft per Class 300 000/ft (FED-STD-
and ready for operation, with all services connected and
209E) for particles ≥5.0 µm.
functional,butwithoutequipmentoroperatingpersonnelinthe
room.
3.1.8 DI water, n—deionized water (see Specification
D1193).
3.1.4 cleanroom, at-rest, n—a cleanroom that is complete,
with all services functioning and with equipment installed and 3.1.9 discrete-particle counter (DPC), n— an instrument,
operable or operating, as specified, but without operating such as an optical particle counter or condensation nucleus
personnel in the room. counter, capable of resolving responses from individual par-
ticles.
3.1.10 HEPA filter, n—(high-efficiency particulate air filter)
Available from International Organization for Standardization (ISO), 1 rue de
a throwaway, extended-medium, dry-type filter in a rigid
Varembé, Case postale 56, CH-1211, Geneva 20, Switzerland.
TABLE 1 Comparison of ISO 14644-1 and FED-STD-209E Cleanliness Classes
Particle Concentrations
ISO Class N
Maximum Number of Particles per Cubic Meter / Cubic Foot
Nominal FS209E
of Air for Particle Sizes Equal to or Greater than the Stated Size
Class
A
0.1 µm 0.2 µm 0.3 µm 0.5 µm 1 µm 5µm
ISO Class 1 10 2 — — — —
ISO Class 2 100 24 10 4 — —
FS209E Class 0.1 3 1 — — — —
ISO Class 3 1000 237 102 35 8 —
FS209E Class 1 35 7 3 1 — —
ISO Class 4 10 000 2370 1020 352 83 —
FS209E Class 10 350 75 30 10 2 —
ISO Class 5 100 000 23 700 10 200 3520 832 29
B
FS209E Class 100 3500 750 300 100 24 —
ISO Class 6 1 000 000 237 000 102 000 35 200 8320 293
B B B
FS209E Class 1000 35 000 7500 3000 1000 236 7
C
ISO Class 6.7 — — — 176 000 41 700 1470
B
FS209E Class 5000 — — — 5000 1180 42
ISO Class 7 — — — 352 000 83 200 2930
FS209E Class 10 000 — — — 10 000 2360 70
ISO Class 8 — — — 3 520 000 832 000 29 300
FS209E Class — — — 100 000 23 600 700
100 000
C
ISO Class 8.5 — — — 11 100 000 2 630 000 92 500
FS209E Class — — — 300 000 74 500 2620
D
300 000
ISO Class 9 — — — 35 200 000 8 320 000 293 000
FS209E Class — — — 1 000 000 236 000 8280
D
1 000 000
A
No 1 µm designation is listed in FS209E Table 1 for particulate classes. The values shown are equivalents of the ISO values.
B
These values were not directly listed in FS209E. Allowances are made in FS209E for intermediate classes and associated calculations have been shown. If used, a
notation should be made indicating that they have been derived.
C
ISO 14644-1 does not include Class 6.7 or 8.5. The values shown are equivalent to those derived for FED-STD-209E Class 5000 and 300 000.
D
FS209E does not include Class 300 000 and 1 000 000. The values shown are equivalents of the ISO values for ISO Class 8.5 and 9.
E2042/E2042M − 09 (2016)
frame, having a minimum particle-collection efficiency of
Airflow Air Filtration Typical Airborne
Particle
99.97 % (that is, a maximum particle penetration of 0.03 %)
Concentration
for 0.3-µm particles of thermally generated DOP of specified
Limits Under
Operational
alternative aerosol.
Conditions
In Accordance
3.1.11 HVAC, n—heating, ventilating, and air conditioning.
With
ISO 14644-1
3.1.12 nonvolatile residue (NVR), n—matter remaining after
solvent containing such matter has been evaporated or cleaned.
Type I Unidirectional, formerly HEPA or ULPA Classes less than 7
known as 9laminar filtered with (Classes less
3.1.13 ULPA filter, n—(ultra-low-penetration air filter) a
flow9 prefilters than 10 000 per
throwaway, extended-medium, dry-type filter in a rigid frame,
FED-STD-209E)
having a minimum particle-collection efficiency of 99.999 %
Type II Nonunidirectional, HEPA filtered with Classes 7 to 8.5
(that is, a maximum particle penetration of 0.001 %) for
formerly known as prefilters (Classes 10 000 to
“turbulent” flow 300 000 per FED-
particles in the size range of 0.1 to 0.2 µm, when tested in
STD-209E)
accordance with the methods of IES-RP-CC007.1.
Type III Nonunidirectional without HEPA or Classes 8 to 8.5
ULPA filters but (Classes 100 000
4. Significance and Use
with prefilters to 300 000 per
FED-STD-209E)
4.1 This practice identifies methods for cleaning and main-
taining controlled areas and clean rooms as defined by ISO 5.2 NVR Concentrations—There are two categories for
14644-1 and ISO 14644-2. Cleaning procedures are described, NVR requirements in clean areas:
and cleaning frequency for different classes of facility are
5.2.1 Category I—Critical clean areas that require specific
given. Compliance with this practice will make it easier and
control and removal of molecular contaminants because of
morelikelythattherequiredleveloffacilitycleanlinesswillbe
products that either are very sensitive to NVR or can not be
maintained. A cleaner facility also will help to protect flight
cleaned. Quantitative NVR measurements may be required as
hardware from contamination and should reduce the frequency
defined in IEST-STD-CC1246D and IES-RP-CC016. NVR
for cleaning flight hardware. This practice does not discuss
deposition criteria are defined in Tables 2 and 3.
operation and operational procedures for cleanrooms and
5.2.2 Category II—Standard clean areas that do not require
controlled areas. Other documents such as IEST-RP-CC026
quantitative measurements of NVR. All aerospace clean
and Practice E2352 provide recommended practices for oper-
facilities, including support shops for the fabrication of com-
ating cleanrooms and controlled areas.
ponents for aerospace hardware, must limit the deposition of
nonvolatileresidue(NVR),alsoknownasmolecularfilms.The
5. Cleanrooms and Clean Zones
cleaningsuppliesrecommendedinthispracticeareselectedfor
the minimal production of NVR.
5.1 Airborne Particle Concentrations—The types of clean-
rooms and clean zones used in this practice are based on
5.2.2.1 Some clean areas require very low levels of NVR to
airflow, air filtration, and airborne particle concentration limits. be compatible with product cleanliness requirements. These
The classification of airborne particle concentration limits in areas require cleaning methods that will remove NVR. The
cleanrooms, clean zones, and controlled areas are defined in userwillstatewhenCategoryIisrequiredandallowablelevels
Table 1 which is based on ISO 14644-1 and ISO 14644-2. of NVR on surfaces, that is, NVR level in accordance with
E2042/E2042M − 09 (2016)
TABLE 2 Product Cleanliness Levels for NVR Based on TABLE 3 NVR Rate Levels from IEST-RP-CC016.2
IEST-STD-CC1246D
Maximum Average Deposition Rate Levels
A
NVR Limit
Average
NVR
NVR
Rate of
Surface Volume -2 -1
Rate
Level mg·0.1 m ·mo or
-2 -1B
A pg·m ·s Thickness
mg/0.1 m mg/L
-2 -1C
Level
µg·cm ·mo
Increase
AA5 0.00001
-1D
nm·s
AA4.7 0.00002
0 1.0 E+00 2.4 E-04 1.0 E-09
AA4.3 0.00005
0.6 4.0 E+00 9.7 E-04 4.0 E-09
AA4 0.0001
1 1.0 E+01 2.4 E-03 1.0 E-08
AA3.7 0.0002
1.6 4.0 E+01 9.7 E-03 4.0 E-08
AA3.3 0.0105
2 1.0 E+02 2.4 E-02 1.0 E-07
AA3 0.001
2.6 4.0 E+02 9.7 E-02 4.0 E-07
AA2.7 0.002
3 1.0 E+03 2.4 E-01 1.0 E-06
AA2.3 0.005
3.6 4.0 E+03 9.7 E-01 4.0 E-06
A/100 0.01 0.1
4 1.0 E+04 2.4 E+00 1.0 E-05
A/50 0.02 0.2
4.6 4.0 E+04 9.7 E+00 4.0 E-05
A/20 0.05 0.5
5 1.0 E+05 2.4 E+01 1.0 E-04
A/10 0.1 1.0
5.6 4.0 E+05 9.7 E+01 4.0 E-04
A/5 0.2 2.0
6 1.0 E+06 2.4 E+02 1.0 E-03
A/2 0.5 5.0
6.6 4.0 E+06 9.7 E+02 4.0 E-03
A1.0 10
7 1.0 E+07 2.4 E+03 1.0 E-02
B2.0 20
7.6 4.0 E+07 9.7 E+03 4.0 E-02
C3.0 30
8 1.0 E+08 2.4 E+04 1.0 E-01
D4.0 40
8.6 4.0 E+08 9.7 E+04 4.0 E-01
E5.0 50
9 1.0 E+09 2.4 E+05 1.0 E+00
F7.0 70
9.6 4.0 E+09 9.7 E+05 4.0 E+00
G 10.0 100
10 1.0 E+10 2.4 E+06 1.0 E+01
H 15.0 150
10.6 4.0 E+10 9.7 E+06 4.0 E+01
J 25.0 250
A
A 2 2 2 3
The NVR deposition rate level is the log of the NVR deposition rate in
1 mg/0.1 m = 1 µg/cm = 0.929 mg/ft = 10-nm-thick uniform film (ρ=1g/cm ).
-2 -1
pg·m ·s . It is permissible to interpolate within the table or extrapolate to larger
rate levels. The precisions and accuracies of measurements and number of
significant figures shall be considered when specifying rate levels and reporting
data.
2 2 B -2 -1
The deposition rate in pg·m ·s is the baseline deposition rate. All other
IEST-STD-CC1246D (µg/cm or mg/0.1 m ). Category II is
deposition rates are derived from this.
assumed unless Category I is expressly specified.
C
This assumes a month to be four
...

This document is not an ASTM standard and is intended only to provide the user of an ASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation: E2042/E2042M − 09 E2042/E2042M − 09 (Reapproved 2016)
Standard Practice for
Cleaning and Maintaining Controlled Areas and Clean
Rooms
This standard is issued under the fixed designation E2042/E2042M; the number immediately following the designation indicates the year
of original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1 This practice covers the procedures to be followed for the initial cleaning and normal maintenance of cleanrooms and
controlled areas. This practice is applicable to aerospace clean areas where both particles and molecular films (NVR) must be
controlled.
1.2 Units—The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated
in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values
from the two systems may result in non-conformance with the standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
2.1 ASTM Standards:
D1193 Specification for Reagent Water
E1234 Practice for Handling, Transporting, and Installing Nonvolatile Residue (NVR) Sample Plates Used in Environmentally
Controlled Areas for Spacecraft
E1235 Test Method for Gravimetric Determination of Nonvolatile Residue (NVR) in Environmentally Controlled Areas for
Spacecraft
E1549 Specification for ESD Controlled Garments Required in Cleanrooms and Controlled Environments for Spacecraft for
Non-Hazardous and Hazardous Operations
E1560 Test Method for Gravimetric Determination of Nonvolatile Residue From Cleanroom Wipers
E2352 Practice for Aerospace Cleanrooms and Associated Controlled Environments—Cleanroom Operations
F24 Test Method for Measuring and Counting Particulate Contamination on Surfaces
F25 Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas
F50 Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Controlled Areas and Clean Rooms Using
Instruments Capable of Detecting Single Sub-Micrometre and Larger Particles
2.2 IEST Standards:
IEST-RP-CC007 Testing ULPA Filters
IEST-RP-CC016 The Rate of Deposition of Nonvolatile Residue in Cleanrooms
IEST-RP-CC0018 Cleanroom Housekeeping and Monitoring Procedures
IEST-RP-CC003 Garment System Considerations for Cleanrooms and Other Controlled Environments
IEST-RP-CC026 Cleanroom Operations
IEST-STD-CC1246D Product Cleanliness Levels and Contamination Control Program
This practice is under the jurisdiction of ASTM Committee E21 on Space Simulation and Applications of Space Technology and is the direct responsibility of
Subcommittee E21.05 on Contamination.
Current edition approved April 1, 2009Oct. 1, 2016. Published April 2009October 2016. Originally approved in 1999. Last previous edition approved in 20042009 as
E2042 – 04.E2042 – 09. DOI: 10.1520/E2042_E2042M-09.10.1520/E2042_E2042M-09R16.
For referenced ASTM standards, visit the ASTM website, www.astm.org, or contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM Standards
volume information, refer to the standard’s Document Summary page on the ASTM website.
Available from Institute of Environmental Science and Technology (IEST), 5005 Newport Dr., Suite 506, Rolling Meadows, IL 60008-3841.
IEST-STD-CC1246D replaced MIL-STD-1246.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
E2042/E2042M − 09 (2016)
2.3 US Federal Standards:
FED-STD-209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones
TT-I-735 Isopropyl Alcohol
O-A-51 Acetone
2.4 US Department of Defense Standards:
MIL-D-16791 Detergents, General Purpose (Liquid, Non-Ionic)
2.5 International Standards:
ISO 14644-1 Cleanrooms and Associated Controlled Environments—Part 1: Classification of Air Cleanliness
ISO 14644-2 Cleanrooms and Associated Controlled Environments—Part 2: Specifications for Testing and Monitoring to Prove
Continued Compliance with ISO 14644-1
3. Terminology
3.1 Definitions of Terms Specific to This Standard:
3.1.1 clean zone, n—a defined space in which the concentration of airborne particles is controlled to specified limits.
3.1.2 cleanroom, n—a room in which the air filtration, air distribution, utilities, materials of construction, equipment, and
operating procedures are specified and regulated to control airborne particle concentrations to meet appropriate airborne particulate
cleanliness classifications, as defined by ISO 14644-1.
3.1.3 cleanroom, as-built, n—a cleanroom that is complete and ready for operation, with all services connected and functional,
but without equipment or operating personnel in the room.
3.1.4 cleanroom, at-rest, n—a cleanroom that is complete, with all services functioning and with equipment installed and
operable or operating, as specified, but without operating personnel in the room.
3.1.5 cleanroom, operational, n—a cleanroom in normal operation, with all services functioning and with equipment and
personnel, if applicable, present and performing their normal work functions in the room.
3.1.6 clean facility, n—the total real property required to accomplish the cleanroom functions.
Available from Superintendent of Documents, US Government Printing Office, Washington, DC 20402.
Cancelled Nov. 29, 2001 and replaced with ISO 14644-1 and 14644-2. FED-STD-209E may be used by mutual agreement between buyer and seller. Available from U.S.
Government Printing Office, Superintendent of Documents, 732 N. Capitol St., NW, Mail Stop: SDE, Washington, DC 20401. FS209E cleanroom classes are given for
reference in parentheses after the ISO classes.
Available from International Organization for Standardization (ISO), 1 rue de Varembé, Case postale 56, CH-1211, Geneva 20, Switzerland.
3.1.6.1 Discussion—
In addition to the cleanroom and associated clean areas, this includes utility rooms, storage areas, offices, lockers, wash-rooms, and
other areas that do not necessarily require precise environmental control.
3.1.7 controlled area, n—an environmentally controlled area, operated as a cleanroom, but without the final stage of HEPA
filters. Controlled areas would meet ISO Class 8.5 (FED-STD-209E equivalent to Class 300 000) per Table 1.
3.1.7.1 Discussion—
Only rough filters (50 to 60 % efficiency) and medium efficiency filters (80 to 85 % efficiency) are required for a controlled area.
The maximum allowable airborne particle concentrations in a controlled area are 11 100 000 ⁄m per ISO Class 8.5 for particles
3 3 3
≥0.5 μm and 92 500/m (2620 particles/ft per Class 300 000/ft (FED-STD-209E) for particles ≥5.0 μm.
3.1.8 DI water, n—deionized water (see Specification D1193).
3.1.9 discrete-particle counter (DPC), n— an instrument, such as an optical particle counter or condensation nucleus counter,
capable of resolving responses from individual particles.
3.1.10 HEPA filter, n—(high-efficiency particulate air filter) a throwaway, extended-medium, dry-type filter in a rigid frame,
having a minimum particle-collection efficiency of 99.97 % (that is, a maximum particle penetration of 0.03 %) for 0.3-μm
particles of thermally generated DOP of specified alternative aerosol.
3.1.11 HVAC, n—heating, ventilating, and air conditioning.
3.1.12 nonvolatile residue (NVR), n—matter remaining after solvent containing such matter has been evaporated or cleaned.
3.1.13 ULPA filter, n—(ultra-low-penetration air filter) a throwaway, extended-medium, dry-type filter in a rigid frame, having
a minimum particle-collection efficiency of 99.999 % (that is, a maximum particle penetration of 0.001 %) for particles in the size
range of 0.1 to 0.2 μm, when tested in accordance with the methods of IES-RP-CC007.1.
E2042/E2042M − 09 (2016)
TABLE 1 Comparison of ISO 14644-1 and FED-STD-209E Cleanliness Classes
Particle Concentrations
ISO Class N
Maximum Number of Particles per Cubic Meter / Cubic Foot
Nominal FS209E
of Air for Particle Sizes Equal to or Greater than the Stated Size
Class
A
0.1 μm 0.2 μm 0.3 μm 0.5 μm 1 μm 5 μm
ISO Class 1 10 2 — — — —
ISO Class 2 100 24 10 4 — —
FS209E Class 0.1 3 1 — — — —
ISO Class 3 1000 237 102 35 8 —
FS209E Class 1 35 7 3 1 — —
ISO Class 4 10 000 2370 1020 352 83 —
FS209E Class 10 350 75 30 10 2 —
ISO Class 5 100 000 23 700 10 200 3520 832 29
B
FS209E Class 100 3500 750 300 100 24 —
ISO Class 6 1 000 000 237 000 102 000 35 200 8320 293
B B B
FS209E Class 1000 35 000 7500 3000 1000 236 7
C
ISO Class 6.7 — — — 176 000 41 700 1470
B
FS209E Class 5000 — — — 5000 1180 42
ISO Class 7 — — — 352 000 83 200 2930
FS209E Class 10 000 — — — 10 000 2360 70
ISO Class 8 — — — 3 520 000 832 000 29 300
FS209E Class — — — 100 000 23 600 700
100 000
C
ISO Class 8.5 — — — 11 100 000 2 630 000 92 500
FS209E Class — — — 300 000 74 500 2620
D
300 000
ISO Class 9 — — — 35 200 000 8 320 000 293 000
FS209E Class — — — 1 000 000 236 000 8280
D
1 000 000
A
No 1 μm designation is listed in FS209E Table 1 for particulate classes. The values shown are equivalents of the ISO values.
B
These values were not directly listed in FS209E. Allowances are made in FS209E for intermediate classes and associated calculations have been shown. If used, a
notation should be made indicating that they have been derived.
C
ISO 14644-1 does not include Class 6.7 or 8.5. The values shown are equivalent to those derived for FED-STD-209E Class 5000 and 300 000.
D
FS209E does not include Class 300 000 and 1 000 000. The values shown are equivalents of the ISO values for ISO Class 8.5 and 9.
4. Significance and Use
4.1 This practice identifies methods for cleaning and maintaining controlled areas and clean rooms as defined by ISO 14644-1
and ISO 14644-2. Cleaning procedures are described, and cleaning frequency for different classes of facility are given. Compliance
with this practice will make it easier and more likely that the required level of facility cleanliness will be maintained. A cleaner
facility also will help to protect flight hardware from contamination and should reduce the frequency for cleaning flight hardware.
This practice does not discuss operation and operational procedures for cleanrooms and controlled areas. Other documents such
as IEST-RP-CC026 and Practice E2352 provide recommended practices for operating cleanrooms and controlled areas.
5. Cleanrooms and Clean Zones
5.1 Airborne Particle Concentrations—The types of cleanrooms and clean zones used in this practice are based on airflow, air
filtration, and airborne particle concentration limits. The classification of airborne particle concentration limits in cleanrooms, clean
zones, and controlled areas are defined in Table 1 which is based on ISO 14644-1 and ISO 14644-2.
Airflow Air Filtration Typical Airborne
Particle
Concentration
Limits Under
Operational
Conditions
In Accordance
With
ISO 14644-1
Type I Unidirectional, formerly HEPA or ULPA Classes less than 7
known as 9laminar filtered with (Classes less
flow9 prefilters than 10 000 per
FED-STD-209E)
Type II Nonunidirectional, HEPA filtered with Classes 7 to 8.5
formerly known as prefilters (Classes 10 000 to
“turbulent” flow 300 000 per FED-
STD-209E)
Type III Nonunidirectional without HEPA or Classes 8 to 8.5
ULPA filters but (Classes 100 000
with prefilters to 300 000 per
FED-STD-209E)
E2042/E2042M − 09 (2016)
5.2 NVR Concentrations—There are two categories for NVR requirements in clean areas:
5.2.1 Category I—Critical clean areas that require specific control and removal of molecular contaminants because of products
that either are very sensitive to NVR or can not be cleaned. Quantitative NVR measurements may be required as defined in
IEST-STD-CC1246D and IES-RP-CC016. NVR deposition criteria are defined in Tables 2 and 3.
5.2.2 Category II—Standard clean areas that do not require quantitative measurements of NVR. All aerospace clean facilities,
including support shops for the fabrication of components for aerospace hardware, must limit the deposition of nonvolatile residue
(NVR), also known as molecular films. The cleaning supplies recommended in this practice are selected for the minimal production
of NVR.
5.2.2.1 Some clean areas require very low levels of NVR to be compatible with product cleanliness requirements. These areas
require cleaning methods that will remove NVR. The user will state when Category I is required and alowableallowable levels of
2 2
NVR on surfaces, that is, NVR level in accordance with IEST-STD-CC1246D (μg/cm or mg/0.1 m ). Category II is assumed
unless Category I is expressly specified.
5.2.3 NVR Verification—Measurement of NVR in clean facilities may be done in accordance with Practice E1234 and Test
Method E1235 or other methods that are compatible with the product requirements and types of NVR. Typical NVR compounds
that are found in cleanrooms include hydrocarbons, esters, and silicones.
6. Materials Used
6.1 Wipers, Cleanroom, polyester or cellulose, low NVR and low particle generation.
6.2 Gloves, Cleanroom, polyurethane, nitrile or latex.
6.3 Gloves, Cleanroom, lint and powder free, latex.
6.4 Coveralls, Hoods, Shoe Covers., see Note 1 and Note 2.
NOTE 1—Any available source not packaged in pink poly or other material that can transfer molecular contaminants.
NOTE 2—Garments worn for maintenance should be the same type and quality as those worn by workers in the cleanroom during normal operations.
(See Test Method E1549 and IEST-RP-CC003.)
The sole sources of supply of the product known to the committee at this time are Miracle Wipe 4000, ITWTexwipe Alpha Wipe, ITWTexwipe Alpha 10,
ITWTexwipe/ICP TX 4012, Anticon 100, Allter Al Sorb. If you are aware of alternative suppliers, please provide this information to ASTM International Headquarters. Your
comments will receive careful consideration at a meeting of the responsible technical committee, which you may attend.
The sole sources of supply of the products known to the committee at this time are Pioneer Trionic
...