ASTM E1635-95(2000)

Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)

SCOPE
1.1 This practice lists the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting images generated by secondary ion mass spectrometry (SIMS).
1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 31-Dec-1999
• ICS: 71.040.50 - Physicochemical methods of analysis
• Technical Committee: E42 - Surface Analysis
• Drafting Committee: E42.06 - SIMS

Relations

• Replaced By: ASTM E1635-06 - Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)
• Effective Date: 01-Nov-2006
• Referred By: ASTM F2847-17 - Standard Practice for Reporting and Assessment of Residues on Single-Use Implants and Single-Use Sterile Instruments
• Effective Date: 01-Jan-2000

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:E1635–95 (Reapproved 2000)
Standard Practice for
Reporting Imaging Data in Secondary Ion Mass
Spectrometry (SIMS)
This standard is issued under the fixed designation E 1635; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope tional information is required on the acquisition and display
parameters for each image. The information reported will
1.1 This practice lists the minimum information necessary
depend primarily on the type of SIMS instrumentation used.
to describe the instrumental, experimental, and data reduction
Two distinct instrumental configurations are used for ion
procedures used in acquiring and reporting images generated
imaging: the ion microscope and the ion microprobe.
by secondary ion mass spectrometry (SIMS).
6.2 Experimental Conditions for Acquisition of Ion Micro-
1.2 This standard does not purport to address all of the
scope Images:
safety concerns, if any, associated with its use. It is the
6.2.1 Camera Based Systems—In the ion microscope, the
responsibility of the user of this standard to establish appro-
secondary ion optics project a mass resolved secondary ion
priate safety and health practices and determine the applica-
image onto the plane of an imaging detector. In the simplest
bility of regulatory limitations prior to use.
case, the secondary ion image is visualized via ion-to-electron
2. Referenced Documents conversion at a channel plate array placed in front of a
fluorescent screen. The image resolution depends on the setup
2.1 ASTM Standards:
of the ion optics and the energy and angular distribution of the
E 673 Terminology Relating to Surface Analysis
sputtered ion flux and is typically 0.5 to 1 µm. The ion image
E 1504 Practice for Reporting Mass Spectral Data in Sec-
isvisualizedonthefluorescentscreenusingavarietyofcamera
ondary Ion Mass Spectrometry (SIMS)
systems, including but not limited to vidicon cameras, inten-
3. Terminology
sified cameras such as the SIT camera, charge-coupled device
(CCD) cameras and slow-scan scientific grade CCD cameras.
3.1 Definitions—For definitions of terms used in this guide,
The type of camera system used will define the sensitivity and
refer to Terminology E 673.
dynamicrangeoftheacquiredimages.Minimumparametersto
4. Summary of Practice
be specified should include the integration time for each mass,
number of pixels in the image, field-of-view, and the level of
4.1 Experimental conditions and reporting procedures that
digitization (one byte or two). Also, the type of channel plate
affect SIMS imaging data are presented in order to standardize
used for ion-to-electron conversion should be stated (single,
the reporting of such data and to facilitate comparisons with
double, curved, or high-output-technology (HOT) plates). The
other laboratories and analytical techniques.
setup of the secondary ion optics should be reported, including
5. Significance and Use
the use and settings of contrast apertures, energy resolving
slits, and high mass resolution. Any information pertinent to
5.1 Thispracticeistobeusedforreportingtheexperimental
the specific operation of a given type of camera or image
and data reduction procedures to be described with the publi-
acquisition system should also be included. This could include
cation of the data.
manufacturer and model number and the use of any accessory
6. Information to be Reported
or auxiliary equipment that would affect the acquisition or
6.1 Standard information to be reported may be found in display of an image. If long integration times are used, a
dark-current image (or detail about the maximum intensity/
Practice E 1504. This information pertains to the type of SIMS
instrumentation used, the mounting of the specimen, and the pixel in dark-current mode) should be included.Any nonstand-
ard modifications made to the equipment should be described
experimental conditions. For imaging SIMS analysis, addi-
in detail.
6.2.2 Resistive Anode Encoder Systems— The resistive
anode encoder (RAE) is a position-sensitive, pulse-counting
This practice is under the jurisdiction of ASTM Committee E-42 on Surface
Analysis and is the direct responsibility of Subcommittee E42.06 on SIMS.
Current edition approved Sept. 10, 1995. Published November 1995. Originally
published as E 1635 – 94. Last previous edition E 1635 – 94.
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