ASTM E1635-06(2011)

Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)

SIGNIFICANCE AND USE
This practice is to be used for reporting the experimental and data reduction procedures to be described with the publication of the data.
SCOPE
1.1 This practice lists the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting images generated by secondary ion mass spectrometry (SIMS).
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 31-Oct-2011
• ICS: 71.040.50 - Physicochemical methods of analysis
• Technical Committee: E42 - Surface Analysis
• Drafting Committee: E42.06 - SIMS

Relations

• Replaces: ASTM E1635-06 - Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)
• Effective Date: 01-Nov-2011
• Replaced By: ASTM E1635-06(2019) - Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)
• Effective Date: 01-Nov-2019
• Referred By: ASTM F2847-17 - Standard Practice for Reporting and Assessment of Residues on Single-Use Implants and Single-Use Sterile Instruments
• Effective Date: 01-Nov-2011

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E1635 − 06 (Reapproved 2011)
Standard Practice for
Reporting Imaging Data in Secondary Ion Mass
Spectrometry (SIMS)
This standard is issued under the fixed designation E1635; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 5. Significance and Use
1.1 This practice lists the minimum information necessary 5.1 Thispracticeistobeusedforreportingtheexperimental
to describe the instrumental, experimental, and data reduction and data reduction procedures to be described with the publi-
procedures used in acquiring and reporting images generated cation of the data.
by secondary ion mass spectrometry (SIMS).
6. Information to be Reported
1.2 The values stated in SI units are to be regarded as
6.1 Standard information to be reported may be found in
standard. No other units of measurement are included in this
Practice E1504. This information pertains to the type of SIMS
standard.
instrumentation used, the mounting of the specimen, and the
1.3 This standard does not purport to address all of the
experimental conditions. For imaging SIMS analysis, addi-
safety concerns, if any, associated with its use. It is the
tional information is required on the acquisition and display
responsibility of the user of this standard to establish appro-
parameters for each image. The information reported will
priate safety and health practices and determine the applica-
depend primarily on the type of SIMS instrumentation used.
bility of regulatory limitations prior to use.
Two distinct instrumental configurations are used for ion
imaging: the ion microscope and the ion microprobe.
2. Referenced Documents
2 6.2 Experimental Conditions for Acquisition of Ion Micro-
2.1 ASTM Standards:
scope Images—For stigmatic ion imaging, the mass spectrom-
E673 Terminology Relating to SurfaceAnalysis (Withdrawn
eter ion optics project a mass resolved secondary ion image
2012)
that preserves the lateral relationship between ions sputtered
E1504 Practice for Reporting Mass Spectral Data in Second-
from the sample onto the plane of an imaging detector.
ary Ion Mass Spectrometry (SIMS)
Whenever stigmatic ion images are recorded the configuration
of the secondary ion optics should be reported, including the
3. Terminology
use and settings of contrast apertures, energy resolving slits,
3.1 Definitions—For definitions of terms used in this guide,
mass resolution, and so forth. All information regarding the
refer to Terminology E673.
condition of the mass spectrometer that influences the spatial
resolution of the image should be reported.
4. Summary of Practice
6.2.1 Camera Based Systems—Camera-based systems im-
4.1 Experimental conditions and reporting procedures that
age photons that are produced from the impact of ions onto an
affect SIMS imaging data are presented in order to standardize appropriate conversion device. In many cases, the secondary
the reporting of such data and to facilitate comparisons with
ion image is visualized via ion-to-electron conversion at a
other laboratories and analytical techniques. micro-channel plate placed in front of a fluorescent screen.
The image resolution (typically 0.5 to 1 µm) depends on the
configuration of the ion optics and the energy and angular
distribution of the sputtered ions. The ion image is recorded
This practice is under the jurisdiction of ASTM Committee E42 on Surface
Analysis and is the direct responsibility of Subcommittee E42.06 on SIMS.
from the fluorescent screen by a variety of camera systems,
Current edition approved Nov. 1, 2011. Published December 2011. Originally
including but not limited to vidicon cameras, intensified
approved in 1994. Last previous edition approved in 2006 as E1635 – 06. DOI:
cameras such as the SITcamera, charge-coupled device (CCD)
10.1520/E1635-06R11.
cameras and slow-scan scientific grade CCD cameras. The
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
design of the micro-channel plate assembly and camera system
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website.
The last approved version of this historical standard is referenced on
www.astm.org. Lapareur, M., Rev. Tech. Thomson-CSF, Vol 12, No. 1, 1980, p. 225.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
E1635 − 06 (2011)
used will define the sensitivity and dynamic range of the basedsystems.Inaddition,theapproximateprimarybeamsize,
acquired images. Minimum parameters to be specified in the method by which it was determined, the scan frequency (or
addition to that stated in Practice E1504 should include the dwell time per pixel), the intrapixel sequence of the scan
integration time for each mass, number of pixels in the image, (interlaced, random, flyback, and so forth), the type of second-
field-of-view,andthenumberofbitsusedtodigitizetheimage. ary ion detector, and the degree of electronic gating used shall
A description of the micro-channel plate assembly (or other also be reported. For time-of-flight (TOF) analysis, details of
ion-to-photonconversiondevice)usedshouldbestated(thatis, the pulsing should be described (that is, pulse width, repetition
for micro-channel plates: single, double, curved, and so forth, rate, extent of beam bunching, and so forth). In addition, any
and for photon conversion: phosphor plate, scintillator, and so special alignment or tuning of the primary c
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