Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments

SIGNIFICANCE AND USE
This practice provides a standard approach to measuring particle deposition, or fallout, in cleanrooms and other controlled environments. It is based on the use of a witness surface to collect particles that deposit from the surrounding environment and subsequently sizing and counting the particles by conventional methods. Several options are introduced, with limitations and guidelines for selecting the best choice for the intended application.
This practice is applicable across numerous industries including aerospace, microelectronics, and pharmaceuticals.
SCOPE
1.1 This practice is intended to assist in the selection, preparation, exposure, and analysis of witness surfaces for the purpose of characterizing particle deposition rates in cleanrooms and associated controlled environments, particularly for aerospace applications.
1.2 Requirements may be defined in terms of particle size distribution and count, percent area coverage, or product performance criteria such as optical transmission or scatter. Several choices for witness surfaces are provided.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status
Historical
Publication Date
31-Aug-2011
Current Stage
Ref Project

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ASTM E2088-06(2011) - Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E2088 − 06(Reapproved 2011)
Standard Practice for
Selecting, Preparing, Exposing, and Analyzing Witness
Surfaces for Measuring Particle Deposition in Cleanrooms
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and Associated Controlled Environments
This standard is issued under the fixed designation E2088; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 2.2 ISO Standard:
ISO 14644-1 Cleanrooms and Associated Controlled
1.1 This practice is intended to assist in the selection,
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Environments—Part 1: Classification of Air Cleanliness
preparation, exposure, and analysis of witness surfaces for the
2.3 Government Standards:
purpose of characterizing particle deposition rates in clean-
Fed-Std-209 Airborne Particulate Cleanliness Classes in
rooms and associated controlled environments, particularly for
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Cleanrooms and Clean Zones
aerospace applications.
IEST-STD-CC1246 Product Cleanliness Levels and Con-
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1.2 Requirements may be defined in terms of particle size
tamination Control Program
distribution and count, percent area coverage, or product
NOTE 1—The Institute of Environmental Sciences and Technology has
performance criteria such as optical transmission or scatter.
several Recommended Practices which may also be useful.
Several choices for witness surfaces are provided.
3. Terminology
1.3 The values stated in SI units are to be regarded as
3.1 Definitions:
standard. No other units of measurement are included in this
3.1.1 bidirectional reflectance distribution function
standard.
(BRDF)—the scattering properties of light reflected off
1.4 This standard does not purport to address all of the
surfaces, expressed as the ratio of differential outputs of
safety concerns, if any, associated with its use. It is the
radiance divided by differential inputs of radiance. Surface
responsibility of the user of this standard to establish appro-
contaminants scatter the incident radiation in all directions and
priate safety and health practices and determine the applica-
withvariableintensities.TheBRDFisamethodtoquantifythe
bility of regulatory limitations prior to use.
spatial distribution of the scattered energy.
3.1.2 cleanliness level—an established maximum allowable
2. Referenced Documents (Note 1)
amount of contamination in a given area or volume, or on a
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2.1 ASTM Standards:
component.
E1216 Practice for Sampling for Particulate Contamination
3.1.3 cleanroom—an environmentally conditioned area in
by Tape Lift
which temperature, humidity, and airborne contaminants are
F24 Test Method for Measuring and Counting Particulate
controlled by design and operation. High-efficiency particulate
Contamination on Surfaces
air (HEPA) filters or better are usually required to achieve the
F312 Test Methods for Microscopical Sizing and Counting
air cleanliness level. Air particulate cleanliness is classified in
Particles from Aerospace Fluids on Membrane Filters
accordance with Fed-Std-209 or ISO 14644-1.
3.1.4 contaminant—unwanted molecular and particulate
matter that could affect or degrade the performance of the
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This practice is under the jurisdiction of ASTM Committee E21 on Space
components upon which they reside.
Simulation andApplications of Space Technology and is the direct responsibility of
Subcommittee E21.05 on Contamination.
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Current edition approved Sept. 1, 2011. Published February 2012. Originally Available fromAmerican National Standards Institute (ANSI), 25 W. 43rd St.,
approved in 2000. Last previous edition approved in 2006 as E2088 – 06. DOI: 4th Floor, New York, NY 10036, http://www.ansi.org.
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10.1520/E2088-06(2011). Although Fed-Std-209 has been cancelled, it still may be used and designations
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or in Fed-Std-209 may be used in addition to the ISO designations.
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contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM Available from Institute of Environmental Sciences and Technology (IEST),
Standards volume information, refer to the standard’s Document Summary page on Arlington Place One, 2340 South Arlington Heights Road, Suite 100, Arlington
the ASTM website. Heights, IL 60005-4516, http://www.iest.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
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E2088 − 06 (2011)
3.1.5 contamination—a process of contaminating. instrument as the particle being measured; (3) the diameter of
a circle having the same area as the projected area of a particle,
3.1.6 contamination control—organized action to control
intheplaneofo
...

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